Abstract: Proposed are an electrostatic chuck mechanism and a charged particle beam apparatus including a first plane that is a plane of a side in which a sample is adsorbed, a first electrode to which a voltage for generating an adsorptive power between the first plane and the sample is applied, and a second electrode that is arranged in a position relatively separated from the sample toward the first plane and through which a virtual line that is perpendicular to the first plane and contacts an edge of the sample passes, wherein the first plane is formed so that a size in a plane direction of the first plane is smaller than that of the sample.

Abstract: During temperature tuning, first, the temperature of a third harmonic generating element is swept to determine the optimal temperature Ttp of the third harmonic generating element in a state where the temperature of a second harmonic generating element has been set to a temperature shifted away from the vicinity of the optimal temperature. Next, the temperature of second harmonic generating element is swept to determine the optimal temperature Tsp of the second harmonic generating element in a state where the temperature of the third harmonic generating element has been set to a temperature shifted away from the vicinity of the optimal temperature.

Abstract: To improve an apparatus reliability by applying a voltage suitable to a situation, a charged-particle-beam apparatus 1 of the present invention includes: a sample stage 25; an electrostatic chuck 30; and an electrostatic-chuck controlling unit 13, and generates an image of a sample 24 by irradiating the sample 24 held on the sample stage 25 by the electrostatic chuck 30 with an electron beam 16. The electrostatic-chuck controlling unit 13, when the electrostatic chuck 30 holds the sample 24, applies a preset initial voltage to a chuck electrode of the electrostatic chuck 30; determines whether or not the sample 24 is normally clamped to the electrostatic chuck 30; and increases the voltage applied to the chuck electrode until determining that the sample 24 is clamped normally to the electrostatic chuck 30 if determining that the sample 24 is not clamped normally to the electrostatic chuck 30.

Abstract: A control circuit measures fluctuations in the energy of a pulse laser with respect to the power of an RF signal by varying the power of the RF signal, determines the minimum power of the RF signal which yields a permissible level of fluctuation, and sets the power of the RF signal based on the minimum power of the RF signal. Heat generation in the RF signal generation circuit can be suppressed, and the overall power consumption can also be reduced. It is also possible to reduce the time from when the RF signal is turned on until the RF signal is turned off. As a result, it is possible to generate a stable pulse laser.

Abstract: A control circuit measures fluctuations in the energy of a pulse laser with respect to the power of an RF signal by varying the power of the RF signal, determines the minimum power of the RF signal which yields a permissible level of fluctuation, and sets the power of the RF signal based on the minimum power of the RF signal. Heat generation in the RF signal generation circuit can be suppressed, and the overall power consumption can also be reduced. It is also possible to reduce the time from when the RF signal is turned on until the RF signal is turned off. As a result, it is possible to generate a stable pulse laser.

Abstract: To improve an apparatus reliability by applying a voltage suitable to a situation, a charged-particle-beam apparatus 1 of the present invention includes: a sample stage 25; an electrostatic chuck 30; and an electrostatic-chuck controlling unit 13, and generates an image of a sample 24 by irradiating the sample 24 held on the sample stage 25 by the electrostatic chuck 30 with an electron beam 16. The electrostatic-chuck controlling unit 13, when the electrostatic chuck 30 holds the sample 24, applies a preset initial voltage to a chuck electrode of the electrostatic chuck 30; determines whether or not the sample 24 is normally clamped to the electrostatic chuck 30; and increases the voltage applied to the chuck electrode until determining that the sample 24 is clamped normally to the electrostatic chuck 30 if determining that the sample 24 is not clamped normally to the electrostatic chuck 30.

Abstract: To make it possible to use a type I nonlinear optical crystal or a quasi phase matching element as a third harmonic generation crystal there is provided a semiconductor laser, a solid state laser medium that outputs a fundamental wave, a second harmonic generation crystal that outputs a second harmonic wave from the fundamental wave, and a third harmonic generation crystal that outputs a third harmonic wave from the fundamental wave and the second harmonic wave. A quasi phase matching elements is utilized as the second harmonic generation crystal. It is possible to use a type I nonlinear optical crystal or a quasi phase matching element as the third harmonic generation crystal.

Abstract: A solid laser apparatus has either a combination of a lowpass filter (9c) and a highpass filter (9d) or a bandpass filter 9f provided in its output control circuit (8, 9, 10) for increasing the gain and adjusting the phase of a signal in the vicinity of the relaxation oscillating frequency. Also, a solid laser apparatus has the phase shift circuit (9g) provided in its output control circuit (8,9,10) for advancing the phase of a signal in the vicinity of the relaxation oscillating frequency thereof. Moreover, a solid laser apparatus has a pseudo notch filter (9h), which is arranged for the gain to have a local minimum at the relaxation oscillating frequency of the solid laser apparatus, provided in the output control circuit (8,9,10) so that the peak of the gain transmission characteristic of the nonlinear optical device (4) or of a combination of the nonlinear optical device (4) and the microchip laser crystal (3) is offset.

Abstract: A solid laser apparatus has either a combination of a lowpass filter and a highpass filter or a bandpass filter provided in its output control circuit for increasing the gain and adjusting the phase of a signal in the vicinity of the relaxation oscillating frequency. Also, a solid laser apparatus has the phase shift circuit provided in its output control circuit for advancing the phase of a signal in the vicinity of the relaxation oscillating frequency thereof. Moreover, a solid laser apparatus has a pseudo notch filter, which is arranged for the gain to have a local minimum at the relaxation oscillating frequency of the solid laser apparatus, provided in the output control circuit so that the peak of the gain transmission characteristic of the nonlinear optical device or of a combination of the nonlinear optical device and the microchip laser crystal is offset.

Abstract: A solid laser apparatus has either a combination of a lowpass filter (9c) and a highpass filter (9d) or a bandpass filter 9f provided in its output control circuit (8, 9, 10) for increasing the gain and adjusting the phase of a signal in the vicinity of the relaxation oscillating frequency. Also, a solid laser apparatus has the phase shift circuit (9g) provided in its output control circuit (8,9,10) for advancing the phase of a signal in the vicinity of the relaxation oscillating frequency thereof. Moreover, a solid laser apparatus has a pseudo notch filter (9h), which is arranged for the gain to have a local minimum at the relaxation oscillating frequency of the solid laser apparatus, provided in the output control circuit (8,9,10) so that the peak of the gain transmission characteristic of the nonlinear optical device (4) or of a combination of the nonlinear optical device (4) and the microchip laser crystal (3) is offset.

Abstract: A solid laser apparatus has either a combination of a lowpass filter and a highpass filter or a bandpass filter provided in its output control circuit for increasing the gain and adjusting the phase of a signal in the vicinity of the relaxation oscillating frequency. Also, a solid laser apparatus has the phase shift circuit provided in its output control circuit for advancing the phase of a signal in the vicinity of the relaxation oscillating frequency thereof. Moreover, a solid laser apparatus has a pseudo notch filter, which is arranged for the gain to have a local minimum at the relaxation oscillating frequency of the solid laser apparatus, provided in the output control circuit so that the peak of the gain transmission characteristic of the nonlinear optical device or of a combination of the nonlinear optical device and the microchip laser crystal is offset.