Abstract: The present invention comprises: a light-emitting element group configured from columns of serially connected light-emitting elements, one of the ends from each of the columns of the light-emitting elements being collectively connected to a power source; current control elements, provided to correspond to the columns, and being connected to each of the columns of the light-emitting elements at the other end thereof, for controlling the current flowing through the light-emitting elements; a forward voltage monitoring circuit for monitoring, for each of the columns, the total forward voltage across the light-emitting elements; and a control circuit for controlling the current control elements, on the basis of the total forward voltage across the light-emitting elements from each of the columns detected by the forward voltage monitoring circuit, in such a manner that the variations in the total forward voltage across the columns of the light-emitting elements reach a threshold value or lower.

Abstract: The present invention comprises: a light-emitting element group configured from columns of serially connected light-emitting elements, one of the ends from each of the columns of the light-emitting elements being collectively connected to a power source; current control elements, provided to correspond to the columns, and being connected to each of the columns of the light-emitting elements at the other end thereof, for controlling the current flowing through the light-emitting elements; a forward voltage monitoring circuit for monitoring, for each of the columns, the total forward voltage across the light-emitting elements; and a control circuit for controlling the current control elements, on the basis of the total forward voltage across the light-emitting elements from each of the columns detected by the forward voltage monitoring circuit, in such a manner that the variations in the total forward voltage across the columns of the light-emitting elements reach a threshold value or lower.

Abstract: An optical coupling module reduces a number of optical elements, and includes a collimate lens 2a that collimates a light from the first semiconductor laser 1a and then outputs the first collimate light, a collimate lens 2b that collimates a light from the semiconductor laser 1b in a location at which an emission plane is approximately orthogonal to an emission plane of the semiconductor laser 1a and outputs the second collimate light. The collimate lens 2c collimates light from semiconductor laser 1c in-place in the location at which the emission plane faces the emission plane of the semiconductor laser 1b and outputs a third collimate light. A prism mirror 3 has a rectangular prism with a first reflection plane that reflects the second collimate light to a parallel direction to the first collimate light and a second reflection plane orthogonal to the first reflection plane and reflects the third collimate light to the parallel direction to the first collimate light.

Abstract: An optical coupling module reduces a number of optical elements, and includes a collimate lens 2a that collimates a light from the first semiconductor laser 1a and then outputs the first collimate light, a collimate lens 2b that collimates a light from the semiconductor laser 1b in a location at which an emission plane is approximately orthogonal to an emission plane of the semiconductor laser 1a and outputs the second collimate light. The collimate lens 2c collimates light from semiconductor laser 1c in-place in the location at which the emission plane faces the emission plane of the semiconductor laser 1b and outputs a third collimate light. A prism mirror 3 has a rectangular prism with a first reflection plane that reflects the second collimate light to a parallel direction to the first collimate light and a second reflection plane orthogonal to the first reflection plane and reflects the third collimate light to the parallel direction to the first collimate light.

Abstract: A passive Q-switch laser has an excitation source 1 for outputting excitation light; a laser medium 3 between a pair of reflective mirrors 5a, 5b that constitute part of an optical resonator, the laser medium emitting laser light upon being excited by the excitation light from the excitation source: a saturable absorber 4 disposed between the pair of reflective mirrors, the saturable absorber being configured such that the transmittance thereof increases as the laser light beam the laser medium is absorbed, a matrix table 22 in which the excitation-source output and the optimal value of the pulse width are stored in association with the repetition frequency; and a control unit 21 for referring to the matrix table, reading out the excitation-source output and the optimal value of the pulse width that correspond to an inputted repetition frequency, and controlling the excitation source such that the read-out excitation-source output and optimal value of the pulse width are attained.

Abstract: A wavelength conversion device having an excitation source 1, a laser medium 3 between an input mirror 5a and an output mirror 5b, consisting of an optic resonator. A laser beam is excited by the excitation light from the excitation source; a saturable absorber 4 is between the input mirror and the output mirror and increases a transmittance along with an absorption of the laser beam from the laser medium. A wavelength conversion element converts a fundamental wave of the laser light from the output mirror to a higher harmonic. A control element generates a phase-matched signal to adjust the phase-matching between the fundamental wave and the higher harmonic based on the output from the wavelength conversion element and the laser output setting value, and controls the laser output by outputting the phase-matched signal to the wavelength conversion element.

Abstract: A laser machining device machines a machining target subject by irradiating the converged laser beam output from each laser diode of a plurality of laser diodes connected in series to each other. A machining laser beam output-power driving circuit Q1 outputs a machining laser beam by driving the plurality of laser diodes 11a-11 d, 13. A guide light output-power driving circuit Q2 outputs a guide light by driving a partial laser diode 13 of the plurality of laser diodes. A selection means SW1, SW2 selects the guide light output-power driving circuit on determining the position and selects the machining laser output-power driving circuit on a laser machining. A setup value comparison circuit 16 controls the electric current flowing through the part of laser diodes to be below the electric current setup value to output the guide light having electric current not higher than the predetermined value.

Abstract: A wavelength conversion device having an excitation source 1, a laser medium 3 between an input mirror 5a and an output mirror 5b, consisting of an optic resonator. A laser beam is excited by the excitation light from the excitation source; a saturable absorber 4 is between the input mirror and the output mirror and increases a transmittance along with an absorption of the laser beam from the laser medium. A wavelength conversion element converts a fundamental wave of the laser light from the output mirror to a higher harmonic. A control element generates a phase-matched signal to adjust the phase-matching between the fundamental wave and the higher harmonic based on the output from the wavelength conversion element and the laser output setting value, and controls the laser output by outputting the phase-matched signal to the wavelength conversion element.

Abstract: A passive Q-switch laser has an excitation source 1 for outputting excitation light; a laser medium 3 between a pair of reflective mirrors 5a, 5b that constitute part of an optical resonator, the laser medium emitting laser light upon being excited by the excitation light from the excitation source: a saturable absorber 4 disposed between the pair of reflective mirrors, the saturable absorber being configured such that the transmittance thereof increases as the laser light beam the laser medium is absorbed, a matrix table 22 in which the excitation-source output and the optimal value of the pulse width are stored in association with the repetition frequency; and a control unit 21 for referring to the matrix table, reading out the excitation-source output and the optimal value of the pulse width that correspond to an inputted repetition frequency, and controlling the excitation source such that the read-out excitation-source output and optimal value of the pulse width are attained.

Abstract: A laser device has a plurality of laser diodes; a plurality of optical elements installed corresponding to the plurality of the laser diodes; a plurality of units formed by fixing the laser diodes and the optical elements per each laser diode and installed corresponding to the plurality of the laser diodes; a converging element that converges laser beams emitted from the plurality of the laser diodes to a fiber; a housing element houses the plurality of the units and the converging element; and a thermal transfer plate performs heat dissipation of the plurality of the units. The heat resistance reducing element having a heat resistance value that is smaller than a predetermined value is installed between the thermal transfer plate and each unit or the processing for reducing the heat resistance is performed.

Abstract: The light-synthesizing laser device includes a plurality of collimating lenses that are arranged in a one-to-one relationship with a plurality of laser light sources which exhibit anisotropy in a laser light emission angle, and that convert laser light beams emitted from the laser light sources into parallel light; a condensing lens that condenses the laser light that has been converted into parallel light by the plurality of collimating lenses; and an optical fiber (5) having a square waveguide core (SC) which has a square shape, the fiber receiving and synthesizing the laser light condensed by the condensing lens. A longitudinal axis of a condensed beam condensed by the condensing lens is aligned with a diagonal axis of the square waveguide core.

Abstract: A laser device has a plurality of semiconductor lasers, a driving device that supplies a driving electric current to the semiconductor laser, a trigger generation circuit that sends a trigger signal to the driving device in order to output the driving electric current, and a wave-combining device that wave-combines laser light emitted from the semiconductor lasers at the combined-wave end, and at least any one of a signal transmitting time, an electric current transmitting time and a light transmitting time is adjusted so as to be the time set respectively for transmitting paths; wherein the signal transmitting time in which the trigger signal transmits over the signal path, the electric current transmitting time in which the laser light transmits over the electric current path, a light transmitting time in which the laser light transmits over the optical path.

Abstract: A laser device has a plurality of semiconductor lasers, a driving device that supplies a driving electric current to the semiconductor laser, a trigger generation circuit that sends a trigger signal to the driving device in order to output the driving electric current, and a wave-combining device that wave-combines laser light emitted from the semiconductor lasers at the combined-wave end, and at least any one of a signal transmitting time, an electric current transmitting time and a light transmitting time is adjusted so as to be the time set respectively for transmitting paths; wherein the signal transmitting time in which the trigger signal transmits over the signal path, the electric current transmitting time in which the laser light transmits over the electric current path, a light transmitting time in which the laser light transmits over the optical path.

Abstract: The light-synthesizing laser device includes a plurality of collimating lenses that are arranged in a one-to-one relationship with a plurality of laser light sources which exhibit anisotropy in a laser light emission angle, and that convert laser light beams emitted from the laser light sources into parallel light; a condensing lens that condenses the laser light that has been converted into parallel light by the plurality of collimating lenses; and an optical fiber (5) having a square waveguide core (SC) which has a square shape, the fiber receiving and synthesizing the laser light condensed by the condensing lens. A longitudinal axis of a condensed beam condensed by the condensing lens is aligned with a diagonal axis of the square waveguide core.

Abstract: The present invention provides a high-throughput scanning electron microscope in which a wafer (9) is held by an electrostatic chuck (10), an image is obtained using an electron beam, and the wafer surface is measured, wherein even in a case where the temperature of the wafer (9) is changed due to the environmental temperature the electron scanning microscope is capable of preventing any loss in resolution or the deterioration of the measurement reproducibility caused by thermal shrinkage accompanied by temperature change of the wafer (9). A drill hole is provided on the rear surface of the electrostatic chuck (10), and a thermometer (34) is secured in place so that the front end is brought into elastic contact with the bottom surface of the drill hole.

Abstract: A laser machining device machines a machining target subject by irradiating the converged laser beam output from each laser diode of a plurality of laser diodes connected in series to each other. A machining laser beam output-power driving circuit Q1 outputs a machining laser beam by driving the plurality of laser diodes 11a-11 d, 13. A guide light output-power driving circuit Q2 outputs a guide light by driving a partial laser diode 13 of the plurality of laser diodes. A selection means SW1, SW2 selects the guide light output-power driving circuit on determining the position and selects the machining laser output-power driving circuit on a laser machining. A setup value comparison circuit 16 controls the electric current flowing through the part of laser diodes to be below the electric current setup value to output the guide light having electric current not higher than the predetermined value.

Abstract: The present invention explains a charged-particle beam device for the purpose of highly accurately measuring electrostatic charge of a sample in a held state by an electrostatic chuck (105). In order to attain the object, according to the present invention, there is proposed a charged-particle beam device including an electrostatic chuck (105) for holding a sample on which a charged particle beam is irradiated and a sample chamber (102) in which the electrostatic chuck (105) is set. The charged-particle beam device includes a potential measuring device that measures potential on a side of an attraction surface for the sample of the electrostatic chuck (105) and a control device that performs potential measurement by the potential measuring device in a state in which the sample is attracted by the electrostatic chuck (105).

Abstract: Proposed are an electrostatic chuck mechanism and a charged particle beam apparatus including a first plane that is a plane of a side in which a sample is adsorbed, a first electrode to which a voltage for generating an adsorptive power between the first plane and the sample is applied, and a second electrode that is arranged in a position relatively separated from the sample toward the first plane and through which a virtual line that is perpendicular to the first plane and contacts an edge of the sample passes, wherein the first plane is formed so that a size in a plane direction of the first plane is smaller than that of the sample.

Abstract: The present invention provides a high-throughput scanning electron microscope in which a wafer (9) is held by an electrostatic chuck (10), an image is obtained using an electron beam, and the wafer surface is measured, wherein even in a case where the temperature of the wafer (9) is changed due to the environmental temperature the electron scanning microscope is capable of preventing any loss in resolution or the deterioration of the measurement reproducibility caused by thermal shrinkage accompanied by temperature change of the wafer (9). A drill hole is provided on the rear surface of the electrostatic chuck (10), and a thermometer (34) is secured in place so that the front end is brought into elastic contact with the bottom surface of the drill hole.

Abstract: The present invention explains a charged-particle beam device for the purpose of highly accurately measuring electrostatic charge of a sample in a held state by an electrostatic chuck (105). In order to attain the object, according to the present invention, there is proposed a charged-particle beam device including an electrostatic chuck (105) for holding a sample on which a charged particle beam is irradiated and a sample chamber (102) in which the electrostatic chuck (105) is set. The charged-particle beam device includes a potential measuring device that measures potential on a side of an attraction surface for the sample of the electrostatic chuck (105) and a control device that performs potential measurement by the potential measuring device in a state in which the sample is attracted by the electrostatic chuck (105).