Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

Abstract: A laser radar system can include laser tracking functions based on laser flux portions returned from a target and intercepted at annular segmented detectors, or at optical mounting hardware such as spider arms. In some examples, a folding or return mirror is partially transmissive, and directs a portion of the return flux to one or more photodetectors. The return beam portions used for tracking can be detected without significant attenuation or obstruction or a laser radar beam path, so that laser radar and laser tracking can be combined.

Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

Abstract: Focus arrangements for laser radar and other applications provide compensation of orientation-dependent gravitational forces. A linear stage can be preloaded and provided with balanced linear encoders so that gravitational force induced pitch, yaw, and roll can be reduced, detected, or compensated. Alternatively, movable focus elements can be secured to actuator driven spring assemblies that are controlled to compensate orientation-dependent gravitational forces.

Abstract: A mover (344) moving a stage (238) includes a magnetic component (354), a conductor component (356), and a control system (324). Further, the conductor component (356) interacts with the magnetic component (354) when current is directed to the conductor component (356) to generate a controllable force along a first axis, a controllable force along a second axis, and a controllable force along a third axis. The conductor component (356) can include a split coil design, having a first conductor array (356A) and a second conductor array (356B) that is positioned substantially adjacent to the first conductor array (356A). The control system (324) independently directs current to each of the conductor arrays (356A, 356B).

Abstract: Provided is an accessory which is capable of communicating with a camera, including an illumination light emitting section that emits illumination light, a nonvolatile memory that stores light-emittable time information indicating the longest time for which the illumination light emitting section is capable of continuously emitting the illumination light, and an accessory control section that transmits the light-emittable time information stored in the nonvolatile memory to the camera.

Abstract: A lens system having, in order from an object, at least a first lens group G1 having positive refractive power, and second to fourth lens groups G2 to G4, wherein the first lens group G1 includes a front portion lens group G1a, and a rear portion lens group G1b which is disposed to an image side of the front portion lens group G1a with an air distance therebetween, and performs focusing by shifting the rear portion lens group G1b in the optical axis direction, and the fourth lens group G4 includes, in order from the object, a negative lens and a positive lens (cemented negative lens L41), a negative lens L42, and an aperture stop S, and is fixed in the optical axis direction with respect to an image plane I upon zooming from a wide angle end state to a telephoto end state.

Abstract: There is provided a form measuring apparatus including: a light generator configured to generate a light; a projector configured to scan the measuring object with the light by changing an irradiation direction of the light generated by the light generator; a controller configured to control the light generator to periodically change an intensity of the light generated by the light generator, and to change an amplitude of the intensity change of the generated light according to the irradiation direction; an imager configured to take an image of the measuring object; and a measuring portion configured to calculate the three-dimensional form of the measuring object based on the image of the measuring object.

Abstract: A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.

Abstract: There is provided a form measuring apparatus which is configured to perform measurement of a surface form of a surface of an object to be inspected having a three-dimensional shape, the form measuring apparatus including: a detecting section which performs detection of the surface form of the surface of the object having the three-dimensional form; and an area-setting section which sets, as a measurement area, an adjacent area adjacent to a designated area, based on form information of a form of the designated area.

Abstract: An embodiment is a projection optical assembly capable of controlling aberration variation due to irradiation with light at a low level. The projection optical assembly for forming an image of a first surface on a second surface, using light of a predetermined wavelength is provided with a correction member to generate an aberration in a tendency opposite to a tendency of the aberration generated in the projection optical assembly by irradiation with the light of the predetermined wavelength. The correction member is a light transmissive member having an absorption loss of not less than 2% for the light of the predetermined wavelength. For example, at least one of a base material of the correction member and a thin film on the base material has the absorption loss of not less than 2% for the light of the predetermined wavelength.

Abstract: An electronic element includes a fixed portion, and a movable portion which is movable with respect to the fixed portion and which is provided to generate a spring force to make restoration to a predetermined position. The fixed portion is provided with a first driving electrode and a first signal electrode. The movable portion is provided with a second driving electrode and a second signal electrode. An electrostatic force is generated between the first driving electrode and the second driving electrode by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.

Abstract: An imaging device comprising a light transmissive member 18 having light transmissive character, a vibration member 20 causing bending vibration for the light transmissive member, a driving portion 56 for driving the vibration member 20, wherein the driving portion 56 causes bending vibration of the light transmissive member 18 at a first frequency along with a first direction and causes bending vibration of the light transmissive member 18 at a second frequency along with a second direction which is different from said first frequency.

Abstract: A ta-C thin film (1A) is formed by laminating a first unit structure (11) and a second unit structure (12) in this order on a base material (10). The first unit structure (11) has mutually different amounts of sp3 bonding in a first layer (11a) and a second layer (11b), and has mutually different amounts of sp3 bonding in the second layer (11b) and a third layer (11c). The second unit structure (12) has mutually different amounts of sp3 bonding in a first layer (12a) and a second layer (12b), and has mutually different amounts of sp3 bonding in the second layer (12b) and a third layer (12c).

Abstract: A stacking apparatus that stacks chip assemblies each having a plurality of chips disposed continuously with circuit patterns and electrodes, includes: a plurality of stages each allowed to move arbitrarily, on which the chip assemblies are placed; a storage unit that stores an estimated extent of change in a position of an electrode at each chip, expected to occur as heat is applied to the chip assemblies placed on the plurality of stages during a stacking process; and a control unit that sets positions of the plurality of stages to be assumed relative to each other during the stacking process based upon the estimated extent of change in the position of the electrode at each chip provided from the storage unit and position information indicating positions of individual chips formed at the chip assemblies and controls at least one of the plurality of stages.

Abstract: A manufacturing apparatus of display element which forms highly reliable drive circuits or thin-film transistors on a flexible substrate, a manufacturing method, and a highly reliable display element are provided. A display element (50) includes a flexible substrate (FB), a first partition wall and second partition wall (BA) formed by pressing the flexible substrate, a lyophobic surface (PJ) formed on surfaces of the first partition wall and the second partition wall, and electrodes (S, P) formed by applying droplets onto a groove portion formed between the first partition wall and second partition wall. It is also possible for a lyophilic surface to be formed on the surface of the groove portion (GR) between the first partition wall and second partition wall (BA).

Abstract: A camera includes: a battery unit on which a battery is mounted, that can be detachably loaded into the camera and supplies power to the camera; and a function unit that executes camera functions, wherein: as a function of the camera is executed, the function unit transmits information related to the executed function to the battery pack; and the battery unit has a storage unit in which the information related to the camera function is stored.

Abstract: An exposure apparatus and method exposes a substrate via a projection optical system and liquid. A liquid immersion member having a lower surface and a recovery port at its lower surface side supplies liquid to form a liquid immersion region below the projection optical system and recovers the liquid via the recovery port. First and second tables, on which a substrate is mountable, are positionable opposite to the lower surface of the liquid immersion member. A drive system moves the first and second tables below the projection optical system relative to the liquid immersion member to replace one of the tables positioned opposite to the lower surface of the liquid immersion member with the other of the tables, whereby the liquid immersion region is transferred from the one to the other of the tables while the liquid immersion region is maintained below and in contact with the projection optical system.

Abstract: At least a part of a heat radiation member (9) connected to a DRAM (11) for radiating heat of the DRAM (11) is exposed from a protection member (4) arranged to surround the DRAM and the heat radiation member (9) so as to protect the DRAM (11). Thus, it is possible to provide a semiconductor device having a preferable heat radiation performance.