Abstract: A power usage supply unit-that supplies power usage to a stage which moves on a movement surface has a first axis section, first support sections, a second axis section, and a second support section. The first axis section is movably supported by the first support section in a direction of the first axis and around the first axis, and the second axis section is movably supported by the second support section in a direction of the second axis and around the second axis. And, by employing a mechanism in which the power usage supply unit has at least four degrees of freedom, the power usage supply unit does not interfere with the movement of a stage even when the stage moves in the first and second axis directions and in the rotational direction of each axis, therefore, decrease in position controllability of the stage caused by dragging a tube can be completely avoided.

Abstract: The perspective in the captured image is enhanced. Provided is an image processing apparatus including: a detecting section that detects a subject distance in each region of a captured image; and an image processing section that changes a distance perspective of an image of the region depending on the subject distance detected for each region of the captured image. In an example, the image processing section may increase the blue component ratio of a region whose detected subject distance is larger than a reference value. In an example, the image processing section may blur an image of a region whose detected subject distance is larger than a reference value.

Abstract: A new and useful illumination device, e.g. for a lithographic optical imaging system, is provided, and comprises a mirror array located between a radiation source and an illumination pupil. Each mirror element of the mirror array is individually steerable (controllable), and the polarization state of light from each mirror element of the mirror array can be selectively controlled, so that the illumination pupil can be filled with a distribution of light that is selectively controlled.

Abstract: An exposure apparatus that can prevent disadvantages due to a leaked liquid is provided. The exposure apparatus includes a substrate holder that includes a peripheral wall portion and supporting portions located on an inside of the peripheral wall portion and that supports a substrate with the supporting portions by negatively pressurizing a space surrounded by the peripheral wall portion, and a recovery mechanism that includes a collection inlets provided on the inside of the peripheral wall portion and a vacuum system connected to the collection inlets, in which a liquid penetrated from an outer periphery of the substrate is sucked and recovered, in the state with an upper surface of the peripheral wall portion and a back surface of the substrate being spaced at a first distance.

Abstract: A microscope objective lens includes, in order from an object side, a first lens group having positive refractive power, a second lens group having positive refractive power, and a third lens group having negative refractive power, and is configured such that the first lens group includes, on the most object side, a positive meniscus lens whose concave surface is directed to the object side, such that the second lens group includes a diffractive optical element having positive refractive power, and such that the diffractive optical element is arranged at a position closer to the image than a portion at which the diameter of a light flux passing through the first lens group and the second lens group is the largest.

Abstract: A lithographic projection apparatus includes a projection optical assembly having a final optical element, a stage assembly including a substrate table on which a substrate is supported, the substrate supported by the substrate table being exposed with an exposure beam from the final optical element of the projection optical assembly through an immersion liquid, a confinement member which encircles a portion of a path of the exposure beam, and a movable member which is movable in a space between the confinement member and the substrate, the substrate table, or both, the space being divided by the movable member into a first portion between the confinement member and the movable member and a second portion between the movable member and the substrate, the substrate table, or both. The movable member has a recovery outlet from which the immersion liquid in the second portion is removed.

Abstract: A stage assembly includes (i) a stage; (ii) a base assembly; (iii) a stage mover, and (iv) a temperature controller. The stage mover includes a magnet array and a conductor array. The conductor array can be grouped into one or more zones. The temperature controller selectively directs a circulation fluid at a first temperature, and at a second temperature to each zone. Feedforward signals based on the expected heat dissipation of the conductor array can be used to improve the response time of the temperature controller. The temperature controller can include a phase change material and a housing assembly that retains the phase change material in an enclosed chamber near the conductor array.

Abstract: An encoder includes: a first scale which has a first index portion; a second scale which has a second index portion; a first detection unit which outputs a first signal based on the first index portion, regarding first relative rotation between a fixing member and a first rotating member; a second detection unit which outputs a second signal based on the second index portion, regarding second relative rotation between the fixing member and a second rotating member; and a signal-processing unit which calculates information regarding the first relative rotation on the basis of the first signal and which calculates information regarding the second relative rotation on the basis of the second signal.

Abstract: An exposure apparatus exposes a substrate by projecting a pattern image onto the substrate through a liquid. The exposure apparatus includes a projection optical system by which the pattern image is projected onto the substrate, and a movable member which is movable relative to the projection optical system. A liquid-repellent member, at least a part of a surface of which is liquid-repellent, is provided detachably on the movable member, the liquid-repellent member being different from the substrate.

Abstract: This imaging device comprises: a storage unit that sequentially stores a plurality of frame images based on an imaging signal from an imaging sensor for capturing images of a subject light and also stores a still image corresponding to any of the plurality of frame images; a movie image generation unit that generates slow-motion movie images to be played back at a second frame rate lower than a first frame rate indicative of the number of frame images stored in the storage unit in a unit of time, on the basis of the plurality of frame images stored in the storage unit; and an image stabilization amount calculation unit that uses, as a reference, the frame image corresponding to the still image from among the plurality of frame images, to calculate an image stabilization amount for the slow-motion movie images.

Abstract: There is provided a form measuring apparatus including; an imager configured to take an image of a object, an irradiator configured to irradiate a measurement light from a projection direction different from the direction along which the imager performs imaging to form a predetermined light amount distribution on the object, a reference light generator configured to generate a reference light to irradiate the object, and a detector configured to detect a target area for form measurement of the object based on a pickup image taken by the imager as the reference light is irradiated on the object.

Abstract: An exposure apparatus exposes a substrate by projecting a pattern image onto the substrate through a liquid. The exposure apparatus includes a projection optical system by which the pattern image is projected onto the substrate, and a movable member which is movable relative to the projection optical system. A liquid-repellent member, at least a part of a surface of which is liquid-repellent, is provided detachably on the movable member, the liquid-repellent member being different from the substrate.

Abstract: When a shutter release operation is performed at an electronic still camera, an MPU records image data output from an image capturing element into a CF card. The MPU also stores the image data in a transfer buffer memory of an interface circuit. The image data stored in the transfer buffer memory are transferred to a transfer buffer memory provided at an interface circuit of a personal computer connected via an IEEE-1394 cable. The MPU of the personal computer reads out the image data having been taken into the personal computer from the transfer buffer memory and records them in a specific recording area in a recording device.

Abstract: An infection spread prevention support system includes an examination terminal and an infection spread prevention support server. The examination terminal includes an examination information acquisition unit that acquires examination information to examine the infection of an infectious disease in subjects and a transmission and reception unit that transmits the examination information to the infection spread prevention support server.

Abstract: A mover assembly (46) for moving a stage (14) includes an actuator (30) that is coupled to the stage (14). The actuator (30) includes (i) a C-Core (52) having a generally “C” shape and including a first transverse leg (260), a second transverse leg (262) that is spaced apart from the first transverse leg (260), and a connector region (264) that connects the transverse legs (260), (262); (ii) a coil (270) that is wrapped around the first transverse leg (260); and (ii) an I core (250) that is spaced apart a gap (254) from the C-Core (252).

Abstract: Provided is a microscope objective lens that sufficiently corrects on-axis and off-axis chromatic aberrations and that has a long working distance. A microscope objective lens OL includes, in order from an object side, a first lens group G1 with positive refractive power and a second lens group G2 with negative refractive power. The first lens group G1 of the microscope objective lens OL includes a diffractive optical element GD including a diffractive optical surface D, and the diffractive optical element GD is arranged at a position closer to the image than a section where a diameter of a light flux passing through the first lens group G1 is the largest.

Abstract: There is provided a profile measuring apparatus, including an irradiation section configured to irradiate a measurement light to a measurement area of the object; an imaging section configured to obtain an image of the measurement area; a table configured to place the object thereon; a coordinate calculation section configured to calculate a position of the measurement area based on an image detected by a detection section; and a positioning mechanism configured to drive and control a relative position of the imaging section and the table. The positioning mechanism calculates a relative position of the imaging section to the table, based on an information with respect to an edge line direction of a convex portion or an extending direction of a concave portion in the measurement area of the object having a repetitive concave-convex shape, to move at least one of the table and the imaging section.

Abstract: An optical member and a microscope that allow acquiring brighter and sharper images when fluorescent observation is performed while stimulating a sample with light. Illumination light from a laser unit is split into stimulation light and excitation light by a dichroic mirror. In other words, half of the illumination light is transmitted through the dichroic mirror and becomes the stimulation light, and half of the illumination light is reflected by the dichroic mirror and becomes the excitation light. Half of the excitation light is reflected by a dichroic mirror and is irradiated onto a sample, and half of the stimulation light transmits through the dichroic mirror and is irradiated onto the sample. Fluorescence generated from the sample is totally reflected by the dichroic mirror and the dichroic mirror, and is received by a photodetector.

Abstract: A liquid immersion exposure apparatus includes a movable member having a substrate holder and a surface disposed adjacent to the substrate holder, the surface capable of positioning under a projection optical system. A liquid immersion system has a supply path and a recovery path. The liquid immersion system supplies the liquid to a space between the projection optical system and the surface via the supply path and recovers the supplied liquid of a liquid immersion area formed under the projection optical system via the recovery path. A controller stops a supply of the liquid to the space under the projection optical system by the liquid immersion system on receipt of a signal indicating the occurrence of an abnormality. The abnormality causes a possibility of leakage due to at least a part of the supplied liquid not being recovered via the recovery path and outflowing from the liquid immersion area.

Abstract: A liquid immersion exposure apparatus that exposes a substrate via a projection optical system and liquid includes a movable member having an upper surface, a part of which holds the substrate. A liquid immersion system that has a supply port and a recovery port supplies the liquid to a space between the projection optical system and the upper surface via the supply port of a supply path and recovers the liquid of a liquid immersion region formed in the space via the recovery port of a recovery path. A flow path is connected to the supply path between the supply port and a source of the liquid, the flow path permitting flow therethrough to remove liquid that remains in the supply path, the liquid that remains in the supply path having been supplied from the source of the liquid without being discharged from the supply port.