Abstract: A solid-state imaging device includes a second image sensor having an organic photoelectric conversion film transmitting a specific light, and a first image sensor which is stacked in layers on a same semiconductor substrate as that of the second image sensor and which receives the specific light having transmitted the second image sensor, in which a pixel for focus detection is provided in the second image sensor or the first image sensor. Therefore, an AF method can be realized independently of a pixel for imaging.

Abstract: While data that indicate a relationship between a dressing position P defined by a distance between a rotating shaft 11 of a polishing pad 13 and a rotating shaft 31 of a dresser 30 and shape change of the polishing pad 13 based on input of a target shape of the polishing pad 13 and alternating repetition of dressing the polishing pad 13 by the dresser 30 and measurement of shape of the polishing pad 13 by a pad shape measurement instrument 20 is acquired at a stage prior to commencement of a series of polishing steps for continuously polishing a plurality of polishing target objects (semiconductor wafer W) by a polishing tool 10, the polishing pad 13 is machined to the target shape 13 while the dressing position P is controlled, whereby the dressing position P is set during the polishing steps on the basis of a processing result of this data.

Abstract: An exposure apparatus is provided which can supply and collect a liquid in a prescribed state, and that can suppress degradation of a pattern image projected onto a substrate. The exposure apparatus is provided with a nozzle member having a supply outlet that supplies a liquid and a collection inlet that collects a liquid, and a vibration isolating mechanism that supports the nozzle member and vibrationally isolates the nozzle member from a lower side step part of a main column .

Abstract: An exposure apparatus is equipped with a table which holds a wafer and is movable along an XY plane and has a grating provided on its rear surface, an encoder which irradiates a first measurement beam on the grating from below, receives a return light, and measures a first position information of the table when the table moves in a predetermined range, and another encoder which has a head section provided in a frame and irradiates a second measurement beam on a different grating on the table from the head section, receives a return light, and can measure a second position information of the table, concurrently with measurement of the first position information by the encoder when the table moves in predetermined range. A controller drives the table, based on position information having a higher reliability of the first and the second position information.

Abstract: The present invention relates to a scanning microscope, which can acquire an undistorted image of a desired area of a sample using a simple configuration. When a sample is observed, a galvano-scanner rotates a scanning mirror based on a supplied driving signal, so as to scan the sample with illumination light. A sampling circuit samples an electric signal acquired by performing photoelectric conversion on observation light from the sample, in synchronization with a sampling clock. If the scanning mirror is driven so that the rotation angle thereof non-linearly changes with respect to time, the sampling circuit appropriately suppresses sampling based on the sampling clock, so that sampling is executed only when the scanning mirror is at a predetermined position. The present invention can be applied to a scanning microscope.

Abstract: A carrier system equipped with a fine movement stage holding a mounted wafer and can move along a predetermined plane, a chuck main section which holds the wafer above a predetermined position and can move vertically, and vertical movement pins supporting the wafer held by the chuck main section on the fine movement stage from below when the fine movement stage is positioned at the predetermined position and are vertically movable. A controller drives the chuck main section and the vertical movement pins downward until a lower surface of the wafer comes into contact with the fine movement stage while maintaining a hold state by the chuck main section to the wafer and a support state by the vertical movement pins to the wafer, and when the lower surface of the wafer comes into contact with the fine movement stage, the hold state and the support state are released.

Abstract: An optical device comprising: an elastic body provided between a first frame and a second frame; a position determining portion provided to sandwich, with the elastic body, the first frame, and can determine a position of the first frame towards the elastic body; a fixing portion provided to sandwich, with the position determining portion, the first frame, and can fix the first frame to the position determining portion; and an energizing member energizing the first frame in a direction crossing a position determining direction of the first frame and a fixing direction of the first frame.

Abstract: An image-capturing device including an image-capturing element, a data extraction device, a recording device, a reproduction device, and a display control device is provided. The image-capturing element captures an image of a photographic subject and outputs image data. The data extraction device extracts data corresponding to a region designated in advance within the image data outputted from the image-capturing element. The recording device records the extracted data and the image data into a recording medium individually. The reproduction device reads out the extracted data from the recording medium. The display control device outputs an image signal to a display device, so as to display an image according to the extracted data read out by the reproduction device.

Abstract: An exposure apparatus that exposes a substrate with exposure light through a first liquid. The exposure apparatus includes: an optical member that has an emission surface which emits the exposure light; a first member that forms a first liquid immersion space of the first liquid in at least a part of a first space under the first lower surface and an optical path space including an optical path of the exposure light from the emission surface; and a second member that forms a second liquid immersion space of a second liquid, the second member being capable of moving in a state where the second liquid immersion space is formed separated from the first liquid immersion space.

Abstract: A camera having communication ability can switch a mode between a communication mode and a shooting mode. The camera combines features of a communication device and a digital camera. The camera comprises a communication device, an imaging device, and a switching device. The switching device switched the communication mode to the shooting mode responsive to completion of communication.

Abstract: When operational clocks are output to a plurality of connecting sections, magnetic waves caused by the rising and falling of each clock have a large effect on the surrounding area. Therefore, provided is an electronic device comprising a plurality of connecting sections that are respectively connected to a plurality of external devices having the same frequencies for operational clocks used to communicate signals; and a clock output section that outputs, respectively to the connecting sections, operational clocks that are phase-shifted relative to each other. The clock output section outputs operational clocks with inverse phases to two of the connecting sections.

Abstract: Provided is a microscope optical system in which the occurrence of flare due to unnecessary-order diffracted light exited from a diffractive optical element is suppressed. A microscope objective lens MS is configured by including an objective lens OL which has a diffractive optical element GD and converts light from an object into a substantially parallel light flux, and a second objective lens IL which forms an image of the object by focusing the substantially parallel light flux from the objective lens OL, and is configured such that, in case where an m-th order of diffracted light from the diffractive optical element GD is used for the image formation, the following expression is satisfied: |?|>tan?1(0.06/0) when the light of a maximum NA emitted from the object located on an optical axis enters the diffractive optical element.

Abstract: There is provided an exposure apparatus capable of forming a desirable device pattern by removing unnecessary liquid when performing exposure by projecting a pattern onto the substrate via a projection optical system and the liquid. The exposure device projects an image of the pattern onto the substrate via the projection optical system and the liquid so as to expose the substrate. The exposure device includes a liquid removing mechanism which removes the liquid remaining on a part arranged in the vicinity of the image plane of the projection optical system.

Abstract: An image processing method for removing a noise component contained in an original image, includes: separating an original image into a temporary noise-free image and a temporary noise component; extracting an edge component in the temporary noise-free image by executing edge detection on the temporary noise-free image; determining a fine edge component in the original image contained in the temporary noise component based upon a level of the extracted edge component; extracting an actual noise component by excluding the fine edge component from the temporary noise component; and removing noise from the original image based upon the extracted actual noise component.

Abstract: A height-measuring device (100) in which the focal position of an image-forming optical system (20) is moved in relative fashion in the direction of an optical axis with respect to an object (10) to be measured; scanning is performed; images of the object (10) to be measured, which are formed by the image-forming optical system (20), are obtained in order; and the focal position for individual pixels of the images is found, thereby yielding a relative height value of the object to be measured (10) at positions corresponding to the pixels; wherein a second function (g) is defined on the basis of a first function (f) fitted to a numerical value sequence comprising a coordinate value on the optical axis and a light intensity value for the pixels of a plurality of the images obtained by the scanning, or the coordinate value and a numerical value obtained by processing the light intensity value; and positions on the optical axis at which a correlation value between the numerical value sequence and the second funct

Abstract: An imaging apparatus includes a first imaging unit, a second imaging unit, a light measurement calculator, a holding unit, a detection unit, a recognition unit, a selection unit, and a focus adjustment controller. The second imaging unit is configured to acquire first image information, second image information, and third image information. The selection unit is configured to select the at least one of focus detection areas using a recognition result of the recognition unit. The focus adjustment controller is connected to the selection unit and is configured to perform a focus adjustment control using a focus adjustment state in a focus detection area selected by the selection unit. The changing unit is connected to the recognition unit and is configured to change the predetermined range based on the first determination and the second determination.

Abstract: A horizontal driving control unit of an imaging device supplies dummy pulse signals to a horizontal driving unit at least at a part of period during a period from a start time point of each horizontal blanking period to a last signal sampling time point defined by a sampling control signal.

Abstract: Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens 86, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror and comes into deflection means as 2-dimensional deflection means after light of unnecessary wavelength is removed by a filter. The deflection means is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens.

Abstract: An interchangeable lens to be removably attached to a camera body, includes: a receiving device that receives predetermined control data from the camera body through a first transmission path; a control device that executes predetermined control processing based upon the control data upon reception of the control data by the receiving device; a generation device that executes at predetermined intervals generation processing for generating predetermined lens data which indicates an operating state of the interchangeable lens; a transmission device that transmits the lens data to the camera body through a second transmission path, which is different from the first transmission path, upon generation of the lens data by the generation device; and a prioritizing device that gives priority to the generation processing by the generation device over the control processing by the control device.

Abstract: An image display device includes: an image display unit that displays a list of images each including information related to a position of photography; a selection unit that selects at least one image from among the images; a photography position information acquisition unit that acquires information related to the position of photography; a specification unit that specifies a map server based on the information related to the position of photography; a requesting unit that transmits to the specified map server the information related to the position of photography, and that requests the map server to transmit map data for a range that includes the position of photography; a reception unit that receives the map data transmitted from the map server; and a display control unit that displays a map based on the received map data, and displays information specifying the position of photography upon the map.