Abstract: An object of the present invention is to improve the inter-layer adhesiveness of the diffusion barrier film while maintaining the lower dielectric constant of the diffusion barrier film. A diffusion barrier film for a copper interconnect comprises an insulating material containing silicon, carbon, hydrogen and nitrogen as constituent elements, and also containing Si—H bond, Si—C bond and methylene bond (—CH2—). The insulating material involves I2/I1 of not lower than 0.067 and I3/I1 of not higher than 0.0067 appeared in an infrared absorption spectrum; where I1 is defined as an absorption area of the infrared absorption band having a peak near 810 cm−1, I2 is defined as an absorption area of the infrared absorption band having a peak near 2,120 cm−1 and I3 is defined as an absorption area of the infrared absorption band having a peak near 1,250 cm−1.

Abstract: A Fourier transform apparatus whose pipeline width is independent of transform point number of individual pipeline FFT circuits in each stage and composed of a preceding stage and a succeeding stage. Each of the stages includes M(power of 2)-point radix 2 pipeline FFT circuits each having two-parallel inputs/outputs in a number of a (divisor of M) which are equal in respect to the transform point number and data permutating means for data supply to the transform means of each stage so that the pipeline width of the Fourier transform apparatus is made independent of the transform point numbers of the individual pipeline FFT circuits in each stage.

Abstract: A manufacturing method of a semiconductor device including a step of forming a via hole in an insulation layer including an organic low dielectric film, such as MSQ, SiC, and SiCN, and then embedding a wiring material in the via hole through a barrier metal. According to this method, a plasma treatment is performed after the via hole is formed and before the barrier metal is deposited, using a He/H2 gas capable of replacing groups (methyl groups) made of organic constituents and covering the surface of the exposed organic low dielectric film (MSQ) with hydrogen, or a He gas capable decomposing the groups (methyl groups) without removing organic low dielectric molecules. As a result, the surface of the low dielectric film (MSQ) is reformed to be hydrophilic and adhesion to the barrier metal is hence improved, thereby making it possible to prevent the occurrence of separation of the barrier metal and scratches.

Abstract: The present invention provides an access control device and a testing method that can simplify the software operations in an access control operation such as a JTAG control operation, and enable the hardware to perform a high-speed control operation. The access control device conducts a test or diagnosis on an object by accessing a serial interface based on a command and data that specify a testing or diagnosing route. Under the control of a processor, a control circuit in the access control device executes an access sequence in accordance with a command string and an input data string stored in a memory, and stores the data outputted from the object to be tested or diagnosed in the memory as an output data string. The control circuit sets a state transition route for each objective state in advance, so that a transition route can be readily determined for an objective state specified by the command string.

Abstract: A method for the manufacture of a precious metal product is disclosed which consists essentially of the steps of forming in a desired shape a clayish composition essentially consisting of a precious metal powder, an organic binder, and water, solidifying the formed clayish composition to obtain a solid formed mass, attaching an accessory member fast to the solid formed mass with a portion of the clayish composition serving as an adhesive agent, and firing the resultant composite having the accessory member fastened to the solid formed mass.

Abstract: A system for detecting a voltage and/or current of a single phase and/or polyphase alternating current includes a sample-hold circuit that detects and holds instantaneous values of a plurality of sampling points over a fixed time period of the alternating current as sampled values. A first calculation circuit calculates the real part and the imaginary part of the Fourier coefficient with respect to a fundamental wave and/or a component of the positive-phase sequence of the alternating current detected from the plurality of sampled values thus held and outputs respective calculated values thereof. A second calculation circuit performs a predetermined calculation to the calculated values of the real and imaginary parts and thereby calculates and outputs the amplitude of the fundamental wave and/or component of positive-phase sequence of the alternating current.

Abstract: An industrial expert system for use in designing a plant system or device thereof and in fault detection, includes a knowledge base having a rules-section for describing deductive inference rules. Also included is an expression-section for describing a calculation formula of equality with either a right side or left side being a simple term having a value and the other side being polynomial including known functions. Also included is an attributes-section for declaring the nature and value of each of the attributes cited in calculation and inference and for declaring parameters for controlling communication between a process of deductive inference and a calculation process according to calculation formulas. A deductive inference engine performs deductive inferencing on the basis of the rules, calculation formulae and the attributes stored in the knowledge base.

Abstract: A gold alloy for black coloring comprising gold and at least one coloring metallic element selected from the group consisting of Cu, Fe, Co, and Ti, a gold alloy for black coloring having the composition described above and further comprising at least one alloying element selected from the group consisting of Pt, Pd, Rh, Ir, Ru, Os, Ag, and Ni; a method for the production of a processed article of gold alloy possessing a black surface layer by the steps of shaping the gold alloy mentioned above, heat-treating the shaped gold alloy, and cooling; and processed article of gold alloy obtained by the method.

Abstract: A method for forming a ceramic coating on a substrate comprises immersing the substrate such as stainless steel in an aqueous solution containing a silicic acid compound such as sodium silicate and/or a metal salt of oxygen acid such as an aluminate, and irradiating the substrate with a laser beam. By this method, a dense and fine ceramic coating can be uniformly formed on the substrate without using an apparatus of large scale required in the gas phase method and without heating the system to a high temperature.

Abstract: A commutation compensation device for a DC machine of the type in which in addition to an interpole coil for the armature current flow, an interpole is provided with an auxiliary interpole coil and in response to a reference exciting current calculated based on the rate-of-change of the armature current, the exciting current for accomplishing the commutation compensation is caused to flow through a controlled DC power source to the auxiliary interpole coil. In order to further improve a degree of commutation compensation, when the commutation is degraded, the armature current adversely affecting the commutation, the rate-of-change of the armature current and so on are automatically calculated and evaluated by commutation degradation rate calculator, whereby a commutation compensating rate is automatically obtained and in response to the commutation compensating rate the corrected exciting current is delivered to the auxiliary interpole coil.