Patents by Inventor Nobuyuki Soyama

Nobuyuki Soyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150104637
    Abstract: A method for producing a ferroelectric thin film comprising: coating a composition for forming a ferroelectric thin film on a base electrode of a substrate having a substrate body and the base electrode that has crystal daces oriented in the (111) direction, calcining the coated composition, and subsequently performing firing the coated composition to crystallize the coated composition, and thereby forming a ferroelectric thin film on the base electrode, wherein the method includes formation of an orientation controlling layer by coating the composition on the base electrode, calcining the coated composition, and firing the coated composition, where an amount of the composition coated on the base electrode is controlled such that a thickness of the orientation controlling layer after crystallization is in a range of 5 nm to 30 nm, and thereby controlling the preferential crystal orientation of the orientation controlling layer to be in the (110) plane.
    Type: Application
    Filed: December 19, 2014
    Publication date: April 16, 2015
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Toshiaki Watanabe, Hideaki Sakurai, Nobuyuki Soyama, Toshihiro Doi
  • Patent number: 9005358
    Abstract: Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (PbxLay)(ZrzTi(1-z))O3 [wherein 0.9 <×<1.3, 0?y<0.1, and 0?z<0.9 are satisfied] with a composite oxide (B) or a carboxylic acid (B) represented by general formula (2): CnH2n+1COOH [wherein 3?n?7 is satisfied]. The composite oxide (B) contains one or at least two elements selected from the group consisting of P (phosphorus), Si, Ce, and Bi and one or at least two elements selected from the group consisting of Sn, Sm, Nd, and Y (yttrium).
    Type: Grant
    Filed: May 21, 2013
    Date of Patent: April 14, 2015
    Assignee: Mitsubishi Materials Corporation
    Inventors: Jun Fujii, Hideaki Sakurai, Takashi Noguchi, Nobuyuki Soyama
  • Patent number: 8956689
    Abstract: A method for producing a ferroelectric thin film comprising: coating a composition for forming a ferroelectric thin film on a base electrode of a substrate having a substrate body and the base electrode that has crystal faces oriented in the (111) direction, calcining the coated composition, and subsequently performing firing the coated composition to crystallize the coated composition, and thereby forming a ferroelectric thin film on the base electrode, wherein the method includes formation of an orientation controlling layer by coating the composition on the base electrode, calcining the coated composition, and firing the coated composition, where an amount of the composition coated on the base electrode is controlled such that a thickness of the orientation controlling layer after crystallization is in a range of 35 nm to 150 nm, and thereby controlling the preferential crystal orientation of the orientation controlling layer in the (100) plane.
    Type: Grant
    Filed: May 15, 2012
    Date of Patent: February 17, 2015
    Assignee: Mitsubishi Materials Corporation
    Inventors: Toshiaki Watanabe, Hideaki Sakurai, Nobuyuki Soyama, Toshihiro Doi
  • Patent number: 8951603
    Abstract: A method for producing a ferroelectric thin film comprising: coating a composition for forming a ferroelectric thin film on a base electrode of a substrate having a substrate body and the base electrode that has crystal daces oriented in the (111) direction, calcining the coated composition, and subsequently performing firing the coated composition to crystallize the coated composition, and thereby forming a ferroelectric thin film on the base electrode, wherein the method includes formation of an orientation controlling layer by coating the composition on the base electrode, calcining the coated composition, and firing the coated composition, where an amount of the composition coated on the base electrode is controlled such that a thickness of the orientation controlling layer after crystallization is in a range of 5 nm to 30 nm, and thereby controlling the preferential crystal orientation of the orientation controlling layer to be in the (110) plane.
    Type: Grant
    Filed: May 15, 2012
    Date of Patent: February 10, 2015
    Assignee: Mitsubishi Materials Corporation
    Inventors: Toshiaki Watanabe, Hideaki Sakurai, Nobuyuki Soyama, Toshihiro Doi
  • Publication number: 20140349139
    Abstract: Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (PbxLay)(ZrzTi(1-z))O3 [wherein 0.9<x<1.3, 0?y<0.1, and 0?z<0.9 are satisfied] with a composite oxide (B) or a carboxylic acid (B) represented by general formula (2): CnH2n+1COOH [wherein 3?n?7 is satisfied]. The composite oxide (B) contains one or at least two elements selected from the group consisting of P (phosphorus), Si, Ce, and Bi and one or at least two elements selected from the group consisting of Sn, Sm, Nd, and Y (yttrium).
    Type: Application
    Filed: July 31, 2014
    Publication date: November 27, 2014
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Jun Fujii, Hideaki Sakurai, Takashi Noguchi, Nobuyuki Soyama
  • Publication number: 20140349834
    Abstract: Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (PbxLay)(ZrzTi(1-z))O3 [wherein 0.9<x<1.3, 0?y<0.1, and 0?z<0.9 are satisfied] with a composite oxide (B) or a carboxylic acid (B) represented by general formula (2): CnH2n+1COOH [wherein 3?n?7 is satisfied]. The composite oxide (B) contains one or at least two elements selected from the group consisting of P (phosphorus), Si, Ce, and Bi and one or at least two elements selected from the group consisting of Sn, Sm, Nd, and Y (yttrium).
    Type: Application
    Filed: July 31, 2014
    Publication date: November 27, 2014
    Inventors: Jun Fujii, Hideaki Sakurai, Takashi Noguchi, Nobuyuki Soyama
  • Patent number: 8891227
    Abstract: In this process of forming a dielectric thin film, when a dielectric thin film represented by Ba1?xSrxTiyO3 (0.2<x<0.6 and 0.9<y<1.1) is formed by a sol-gel method, the process from coating to baking is carried out 2 to 9 times, the thickness of the thin film formed after the initial baking is 20 nm to 80 nm, the thickness of each thin film formed after the second baking and beyond is 20 nm to less than 200 nm, each baking from the first time to the second to ninth times is carried out by heating to a prescribed temperature within the range of 500° C. to 800° C. at a heating rate of 1° C. to 50° C./minute in an atmosphere at atmospheric pressure, and the total thickness of the dielectric thin film is 100 nm to 600 nm.
    Type: Grant
    Filed: September 2, 2010
    Date of Patent: November 18, 2014
    Assignee: Mitsubishi Materials Corporation
    Inventors: Hideaki Sakurai, Toshiaki Watanabe, Nobuyuki Soyama
  • Patent number: 8859051
    Abstract: Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (PbxLay)(ZrzTi(1-z))O3 [wherein 0.9<x<1.3, 0?y<0.1, and 0?z<0.9 are satisfied] with a composite oxide (B) or a carboxylic acid (B) represented by general formula (2): CnH2n+1COOH [wherein 3?n?7 is satisfied]. The composite oxide (B) contains one or at least two elements selected from the group consisting of P (phosphorus), Si, Ce, and Bi and one or at least two elements selected from the group consisting of Sn, Sm, Nd, and Y (yttrium).
    Type: Grant
    Filed: May 28, 2009
    Date of Patent: October 14, 2014
    Assignee: Mitsubishi Materials Corporation
    Inventors: Jun Fujii, Hideaki Sakurai, Takashi Noguchi, Nobuyuki Soyama
  • Publication number: 20140295172
    Abstract: A method includes: coating a composition for forming a PZT ferroelectric film not containing Nb on a lower electrode 11 formed on a substrate 10, prebaking the composition, and baking the composition to be crystallized and to thereby form a crystallization promoting layer 12 having a thickness 45 to 90 nm thereon; coating a composition for forming a PNbZT-based ferroelectric film, containing 4 to 10 at % of Nb in 100 at % of all the perovskite B site atoms (Zr, Ti) contained in the composition, on the formed crystallization promoting layer 12 to form a coating film 13a of PNbZT thereon; and pre-baking the coating film 13a and then baking the coating film 13a to be crystallized and to thereby form a PNbZT ferroelectric thin film on the lower electrode 11.
    Type: Application
    Filed: February 14, 2014
    Publication date: October 2, 2014
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Toshihiro Doi, Hideaki Sakurai, Nobuyuki Soyama
  • Publication number: 20140295197
    Abstract: In a PZT-based ferroelectric thin film-forming composition, a ratio of a PZT precursor to 100 wt % of the composition is 17 to 35 wt % in terms of oxides, a ratio of a diol to 100 wt % of the composition is 16 to 56 wt %, a ratio of a polyvinyl pyrrolidone or a polyethylene glycol to 1 mol of the PZT precursor is 0.01 to 0.25 mol in terms of monomers, a ratio of the water to 1 mol of the PZT precursor is 0.5 to 3 mol, and the composition does not further contain a linear monoalcohol having 6 to 12 carbon chains which has a ratio of 0.6 to 10 wt % with respect to 100 wt % of the composition.
    Type: Application
    Filed: February 16, 2014
    Publication date: October 2, 2014
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Toshihiro Doi, Hideaki Sakurai, Nobuyuki Soyama
  • Publication number: 20140293505
    Abstract: A PZT-based ferroelectric thin film is formed by coating a PZT-based ferroelectric thin film-forming composition on a lower electrode of a substrate one or two or more times, pre-baking the composition, and baking the composition to be crystallized, and this thin film includes PZT-based particles having an average particle size in a range of 500 nm to 3000 nm when measured on a surface of the thin film, in which heterogeneous fine particles having an average particle size of 20 nm or less, which are different from the PZT-based particles, are precipitated on a part or all of the grain boundaries on the surface of the thin film.
    Type: Application
    Filed: February 18, 2014
    Publication date: October 2, 2014
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Toshihiro Doi, Hideaki Sakurai, Nobuyuki Soyama, Takashi Noguchi
  • Publication number: 20140294720
    Abstract: A LiCoO2 film-forming precursor solution is a precursor solution used to form a LiCoO2 film which is used as a positive electrode material of a thin film lithium secondary battery. In this LiCoO2 film-forming precursor solution, an organic lithium compound and an organic cobalt compound are dissolved in an organic solvent. In addition, the organic lithium compound is a lithium salt of a carboxylic acid represented by a formula CnH2n+1COOH (wherein, 2?n?8).
    Type: Application
    Filed: February 20, 2014
    Publication date: October 2, 2014
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Takashi Noguchi, Toshiaki Watanabe, Hideaki Sakurai, Nobuyuki Soyama
  • Publication number: 20140284515
    Abstract: This ferrite thin film-forming composition is a composition for forming a thin film of NiZn ferrite, CuZn ferrite, or NiCuZn ferrite using a sol-gel method, and the composition includes: metal raw materials; and a solvent containing N-methyl pyrrolidone, wherein a ratio of an amount of N-methyl pyrrolidone to 100 mass % of the total amount of the composition is in a range of 30 to 60 mass %.
    Type: Application
    Filed: February 14, 2014
    Publication date: September 25, 2014
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Toshihiro Doi, Hideaki Sakurai, Nobuyuki Soyama, Kenzo Nakamura, Kazunori Igarashi
  • Publication number: 20140288219
    Abstract: This ferroelectric thin film-forming sol-gel solution contains: a PZT-based compound; a high-molecular compound used to adjust the viscosity containing polyvinyl pyrrolidone; and an organic dopant containing N-methyl pyrrolidone, in which the amount of the PZT-based compound is greater than or equal to 17 mass % in terms of oxides, the molar ratio (PZT-based compound:polyvinyl pyrrolidone) of the polyvinyl pyrrolidone to the PZT-based compound is 1:0.1 to 1:0.5 in terms of monomers, and the amount of the organic dopant containing N-methyl pyrrolidone in the sol-gel solution is 3 mass % to 13 mass %.
    Type: Application
    Filed: February 14, 2014
    Publication date: September 25, 2014
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Toshihiro Doi, Hideaki Sakurai, Nobuyuki Soyama
  • Publication number: 20140287136
    Abstract: This LaNiO3 thin film-forming composition includes: LaNiO3 precursors; and acetic acid, wherein a ratio of an amount of the LaNiO3 precursors to 100 mass % of an amount of the LaNiO3 thin film-forming composition is in a range of 1 mass % to 20 mass % in terms of oxides, and the composition further includes a stabilizer containing N-methyl formamide in an amount of more than 0 mol to 10 mol or less per 1 mol of the total amount of the LaNiO3 precursors in the composition.
    Type: Application
    Filed: February 19, 2014
    Publication date: September 25, 2014
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Jun Fujii, Hideaki Sakurai, Nobuyuki Soyama
  • Publication number: 20140287251
    Abstract: This PZT-based ferroelectric thin film-forming composition comprises: a PZT precursor; a diol; one of polyvinyl pyrrolidones and a polyethylene glycol; water, and a linear monoalcohol having 6 to 12 carbon chains. In this composition, a concentration of the PZT precursor in 100 wt % of the composition is 17 wt % to 35 wt % in terms of oxides, the ratio of the diol to 100 wt % of the composition is 16 wt % to 56 wt %, the ratio of the one of the polyvinyl pyrrolidones and the polyethylene glycol to 1 mol of the PZT precursor is 0.01 mol to 0.25 mol, the ratio of the water to 1 mol of the PZT precursor is 0.5 mol to 3 mol, and the ratio of the linear monoalcohol to 100 wt % of the composition is 0.6 wt % to 10 wt %.
    Type: Application
    Filed: February 19, 2014
    Publication date: September 25, 2014
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Toshihiro Doi, Hideaki Sakurai, Nobuyuki Soyama
  • Publication number: 20140288233
    Abstract: A method of preparing a ferroelectric thin film-forming composition, specifically, a method of preparing a PZT thin film-forming composition includes: a step of allowing composition precursor raw materials, which contain PZT precursor substances at a concentration of 23 to 38 mass % in terms of oxides in 100 mass % of the composition precursor raw materials, and a high-molecular compound to react with each other to obtain a PZT thin film-forming composition precursor; and a step of aging the PZT thin film-forming composition precursor at a temperature of 0 to 10° C. for at least 30 days.
    Type: Application
    Filed: February 16, 2014
    Publication date: September 25, 2014
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Toshihiro Doi, Hideaki Sakurai, Nobuyuki Soyama
  • Publication number: 20140227433
    Abstract: A LaNiO3 thin film having extremely few voids is uniformly formed. Provided is a LaNiO3 thin film-forming composition for forming a LaNiO3 thin film. It includes: a LaNiO3 precursor; a first organic solvent; a stabilizer; and a second organic solvent. The first organic solvent includes carboxylic acids, alcohols, esters, ketones, ethers, cycloalkanes, aromatic compounds, or tetrahydrofuran. The stabilizer includes ?-diketones, ?-ketones, ?-keto esters, oxyacids, diols, triols, carboxylic acids, alkanolamines, or polyvalent amines. The second organic solvent has a boiling point of 150° C. to 300° C. and a surface tension of 20 to 50 dyn/cm. The LaNiO3 precursor content is 1 to 20 mass % with respect to 100 mass % of the composition. The stabilizer content is 0 to 10 mol with respect to 1 mol of a total amount of the LaNiO3 precursors. The second organic solvent content is 5 to 20 mass % with respect to the composition.
    Type: Application
    Filed: February 5, 2014
    Publication date: August 14, 2014
    Applicant: Mitsubishi Materials Corporation
    Inventors: Jun Fujii, Hideaki Sakurai, Nobuyuki Soyama
  • Publication number: 20140212576
    Abstract: In a thin film capacitor or the like, a dielectric thin film-forming composition capable of improving leakage current characteristics; and a method of forming a dielectric thin film using this composition are provided. Regarding a dielectric thin film-forming composition for forming a dielectric thin film, the dielectric thin film is formed of a barium strontium titanate (BST)-based complex perovskite film, and the composition is doped with aluminum (Al). In addition, a doping amount of the aluminum (Al) is in a range of 0.1 at % to 15 at % with respect to 100 at % of perovskite A site atoms contained in the composition.
    Type: Application
    Filed: January 23, 2014
    Publication date: July 31, 2014
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Jun Fujii, Toshiaki Watanabe, Hideaki Sakurai, Nobuyuki Soyama
  • Patent number: 8790538
    Abstract: Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (PbxLay)(ZrzTi(1?z))O3 [wherein 0.9<x<1.3, 0?y?0.1, and 0?z?0.9 are satisfied] with a composite oxide (B) or a carboxylic acid (B) represented by general formula (2): CnH2n+1COOH [wherein 3?n?7 is satisfied]. The composite oxide (B) contains one or at least two elements selected from the group consisting of P (phosphorus), Si, Ce, and Bi and one or at least two elements selected from the group consisting of Sn, Sm, Nd, and Y (yttrium).
    Type: Grant
    Filed: December 27, 2010
    Date of Patent: July 29, 2014
    Assignees: Mitsubishi Materials Corporation, STMicroelectronics (Tours) SAS
    Inventors: Jun Fujii, Hideaki Sakurai, Takashi Noguchi, Nobuyuki Soyama