Abstract: This invention relates to a configurable diffractive optical element comprising an array of diffractive sub-elements having a reflective surface, wherein each sub-element has a controllable position with a chosen range, and in which a number of sub-elements are provided with a reflective grating with a number of predetermined spectral characteristics.

Abstract: A method for fabricating an optical device and micromechanical device, wherein both devices are monolithically-integrated with a substrate. The optical surfaces and micromechanical devices are each formed in an etch step that is well-suited for forming that device. In addition, the embodiments of the present invention enable the optical surface and micromechanical device to be fabricated irrespective of severe topography on the surface of the substrate.

Abstract: An acoustic sensor includes at least one photonic crystal structure having at least one optical resonance with a resonance frequency and a resonance lineshape. The acoustic sensor further includes a housing substantially surrounding the at least one photonic crystal structure and mechanically coupled to the at least one photonic crystal structure. At least one of the resonance frequency and the resonance lineshape is responsive to acoustic waves incident upon the housing.

Abstract: The invention relates an optical displacement sensor element comprising two essentially flat surfaces (1,2) being separated by a cavity defined by a spacer (5) and the surfaces (1,2), the distance between the surfaces being variable, wherein a first of said surfaces (1) is positioned on an at least partially transparent carrier (3) and being provided with a reflective pattern, the pattern constituting a pattern being shaped as a diffractive lens, and said second surface (2) being a reflective surface.

Abstract: We introduce a mechanically tunable photonic crystal structure consisting of coupled photonic crystal slabs. Using both analytic theory, and first-principles finite-difference time-domain simulations, we demonstrate that the transmission and reflection coefficients for light normally incident upon such structures can be highly sensitive to nano-scale variations in the spacing between the slabs. Moreover, by specifically configuring the photonic crystal structures, the high sensitivity can be preserved in spite of significant fabrication-related disorders. We expect such a structure to play important roles in micro-mechanically tunable optical sensors and filters.

Abstract: We introduce a mechanically tunable photonic crystal structure consisting of coupled photonic crystal slabs. Using both analytic theory, and first-principles finite-difference time-domain simulations, we demonstrate that the transmission and reflection coefficients for light normally incident upon such structures can be highly sensitive to nano-scale variations in the spacing between the slabs. Moreover, by specifically configuring the photonic crystal structures, the high sensitivity can be preserved in spite of significant fabrication-related disorders. We expect such a structure to play important roles in micro-mechanically tunable optical sensors and filters.

Abstract: We theoretically introduce a new type of optical all-pass filter based on guided resonance in coupled photonic crystal slabs. The filter exhibits near-complete transmission for both on- and off-resonant frequencies and yet generates large resonant group delay. We further show that such a filter can be mechanically switched into a flat-top band rejection filter. We also show that a single photonic crystal slab can also function either as optical all-pass transmission or flattop reflection filter for normally incident light. Both filter functions are synthesized by designing the spectral properties of guided resonance in the slab. The structure is extremely compact along the vertical direction.

Abstract: A method for fabricating an optical device and micromechanical device, wherein both devices are monolithically-integrated with a substrate. The optical surfaces and micromechanical devices are each formed in an etch step that is well-suited for forming that device. In addition, the embodiments of the present invention enable the optical surface and micromechanical device to be fabricated irrespective of severe topography on the surface of the substrate.

Abstract: A method for measuring high frequency force of interaction between a tip of a cantilever and a sample includes providing a cantilever having a cantilever arm and a probe tip formed on a free end of the cantilever arm where the cantilever arm has a first shape and an axis of torsion associated with the first shape and the probe tip is positioned in an offset displacement from the axis of torsion, vibrating the cantilever at or near the fundamental flexural resonance frequency with a predetermined oscillation amplitude, bringing the cantilever to the vicinity of the sample, tapping the surface of the sample repeatedly using the probe tip, and detecting changes in the amplitude or the phase of a high frequency vibration harmonic of the cantilever as the cantilever is deflected in response to features on the surface of the sample.

Abstract: A new design and fabrication process of an elastomer spatial light modulator (eSLM). The present invention resolves many known challenges and enables the eSLM to operate as programmable masks for the EUV lithography systems. Bottom electrodes are deposited and patterned on an insulation layer. A sacrificial layer is then deposited, patterned and polished on top of the bottom electrodes. A nitride shell forms a protection layer that prevents out-gassing and degradations of elastomer during operations. The sacrificial layer is removed, forming a cavity. An elastomer is injected at one end of the cavity and pulled into it by capillary forces. In an embodiment, the eSLM comprises a 2-D array of elastomer pillars, each containing a capacitive actuator with an elastomer as the supporting and dielectric structure. A stack of Mo/Si multilayer mirror is deposited on the surface to achieve a high reflectivity about 70% or more in EUV.

Abstract: A cantilever for the use in atomic force microscopy includes a cantilever arm having a fixed end being attached to a base member and a free end where the cantilever arm has a first shape and an axis of torsion associated with the first shape, and a probe tip projecting from the cantilever arm near the free end where the probe tip is positioned in an offset displacement from the axis of torsion. Alternately, the cantilever arm has a first shape selected to tune a torsional resonance frequency of a selected torsional mode or the fundamental flexural resonance frequency of the fundamental mode so that the torsional resonance frequency and the fundamental flexural resonance frequency has an integer ratio. In this manner, the torsional motion of the torsional harmonic cantilever at that harmonic frequency will be largely enhanced by the corresponding torsional resonance.

Abstract: A diffractive optical filter having a fractional level density s[j] and a transfer function C[m] that is an approximation to a desired Hermitian, passive transfer function B[m] is provided. The fractional level density s[j] is obtained by Fourier (or inverse Fourier) transforming B[m] to obtain t[j], calculating u[j]=t[j]?min(t[j]), calculating v[j]=u[j]/D where D is the sum of u[j] over j, and setting s[j] substantially equal to v[j]. A 2-D tiltable mirror array can be used to provide a 1024 tap optical filter having 10-bit tap resolution. Applications of the invention include laser tuning elements, spectroscopy and wavelength-division multiplexing, switching, and/or filtering.

Abstract: A tunable laser comprises multiple reflectors defining a resonant cavity, and an optical gain medium positioned within the resonant cavity. One of the reflectors is a programmable micromirror array that acts as a tunable blazed diffraction grating providing continuous tuning of a single resonant mode over a wavelength gain region of the gain medium. The continuous tuning is provided by altering the micromirror array to shift, in synchrony, a resonant mode wavelength of the resonant cavity and a reflection filtering peak of the array. The array comprises a plurality of micromirror elements that can be controlled to independently move in a direction perpendicular to the plane of the array. In one embodiment, each element has a V-shaped movable mirror. In another embodiment, each element has a flat or slightly-tilted horizontal mirror and a vertical or nearly-vertical mirror orthogonal to the horizontal mirror producing a corner-cube-like reflection.

Abstract: A diffractive optical filter having a fractional level density s[j] and a transfer function C[m] that is an approximation to a desired Hermitian, passive transfer function B[m] is provided. The fractional level density s[j] is obtained by Fourier (or inverse Fourier) transforming B[m] to obtain t[j], calculating u[j]=t[j]?min(t[j]), calculating v[j]=u[j]/D where D is the sum of u[j] over j, and setting s[j] substantially equal to v[j]. A 2-D tiltable mirror array can be used to provide a 1024 tap optical filter having 10-bit tap resolution. Applications of the invention include laser tuning elements, spectroscopy and wavelength-division multiplexing, switching, and/or filtering.

Abstract: We theoretically introduce a new type of optical all-pass filter based on guided resonance in coupled photonic crystal slabs. The filter exhibits near-complete transmission for both on- and off-resonant frequencies and yet generates large resonant group delay. We further show that such a filter can be mechanically switched into a flat-top band rejection filter. We also show that a single photonic crystal slab can also function either as optical all-pass transmission or flattop reflection filter for normally incident light. Both filter functions are synthesized by designing the spectral properties of guided resonance in the slab. The structure is extremely compact along the vertical direction.

Abstract: A cantilever for the use in atomic force microscopy includes a cantilever arm having a fixed end being attached to a base member and a free end where the cantilever arm has a first shape and an axis of torsion associated with the first shape, and a probe tip projecting from the cantilever arm near the free end where the probe tip is positioned in an offset displacement from the axis of torsion. Alternately, the cantilever arm has a first shape selected to tune a torsional resonance frequency of a selected torsional mode or the fundamental flexural resonance frequency of the fundamental mode so that the torsional resonance frequency and the fundamental flexural resonance frequency has an integer ratio. In this manner, the torsional motion of the torsional harmonic cantilever at that harmonic frequency will be largely enhanced by the corresponding torsional resonance.

Abstract: A harmonic cantilever for use in a tapping-mode atomic force microscope includes a cantilever arm and a probe tip. The cantilever arm has a shape selected to tune the fundamental resonance frequency or a resonance frequency of a selected higher order mode so that the fundamental and higher-order resonance frequencies have an integer ratio or near integer ratio. In one embodiment, the cantilever arm can be shaped to tune the fundamental resonance frequency. Alternately, the cantilever arm can include a geometric feature for tuning the resonance frequency of the fundamental mode or the selected higher order mode. An imaging method using the harmonic cantilever is disclosed whereby signals at the higher harmonics are measured to determine the material properties of a sample. In other embodiment, a cantilever includes a probe tip positioned at a location of minimum displacement of unwanted harmonics for suppressing signals associated with the unwanted harmonics.

Abstract: A cross-connect switch for fiber-optic communication networks employing a wavelength dispersive element, such as a grating, and a stack of regular (non-wavelength selective) cross bar switches using two-dimensional arrays of micromachined, electrically actuated, individually-tiltable, controlled deflection micro-mirrors for providing multiport switching capability for a plurality of wavelengths. Using a one-dimensional micromirror array, a fiber-optic based MEMS switched spectrometer that does not require mechanical motion of bulk components or large diode arrays can be constructed with readout capability for WDM network diagnosis or for general purpose spectroscopic applications.

Abstract: A new design and fabrication process of an elastomer spatial light modulator (eSLM). The present invention resolves many known challenges and enables the eSLM to operate as programmable masks for the EUV lithography systems. Bottom electrodes are deposited and patterned on an insulation layer. A sacrificial layer is then deposited, patterned and polished on top of the bottom electrodes. A nitride shell forms a protection layer that prevents out-gassing and degradations of elastomer during operations. The sacrificial layer is removed, forming a cavity. An elastomer is injected at one end of the cavity and pulled into it by capillary forces. In an embodiment, the eSLM comprises a 2-D array of elastomer pillars, each containing a capacitive actuator with an elastomer as the supporting and dielectric structure. A stack of Mo/Si multilayer mirror is deposited on the surface to achieve a high reflectivity about 70% or more in EUV.

Abstract: A cross-connect switch for fiber-optic communication networks employing a wavelength dispersive element, such as a grating, and a stack of regular (non-wavelength selective) cross bar switches using two-dimensional arrays of micromachined, electrically actuated, individually-tiltable, controlled deflection micromirrors for providing multiport switching capability for a plurality of wavelengths. Using a one-dimensional micromirror array, a fiber-optic based MEMS switched spectrometer that does not require mechanical motion of bulk components or large diode arrays can be constructed with readout capability for WDM network diagnosis or for general purpose spectroscopic applications.