Patents by Inventor Osamu Kuroda

Osamu Kuroda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210118704
    Abstract: A substrate processing apparatus includes a processing tub, a storage, a liquid recovery unit, a storage drain line and a liquid recovery unit drain line. The processing tub is allowed to accommodate therein multiple substrates, and configured to store therein a processing liquid. The storage is connected to the processing tub, and configured to store therein the processing liquid drained from the processing tub. The liquid recovery unit is configured to receive the processing liquid overflown from the processing tub. The storage drain line is configured to drain a liquid stored in the storage. The liquid recovery unit drain line is configured to drain a liquid received from the liquid recovery unit to an external drain line provided at an outside.
    Type: Application
    Filed: October 16, 2020
    Publication date: April 22, 2021
    Inventors: Hidemasa Aratake, Osamu Kuroda, Kouzou Kanagawa
  • Publication number: 20210114057
    Abstract: A substrate processing apparatus includes a processing tub, a liquid recovery unit, a liquid recovery unit drain line, a storage, a first and a second liquid supply lines, a discharge line, a first and a second liquid flow rate controllers. The liquid recovery unit receives a processing liquid overflown from the processing tub. The liquid recovery unit drain line drains the processing liquid from the liquid recovery unit. The first and the second liquid supply lines supply a first and a second liquids, respectively. The cleaning liquid contains the first liquid and the second liquid, and removes a precipitate from the processing liquid. The discharge line discharges the cleaning liquid, the first liquid or the second liquid toward the liquid recovery unit. The first and the second liquid flow rate controllers are provided at the first and the second liquid supply lines, and adjust flow rates thereof, respectively.
    Type: Application
    Filed: October 13, 2020
    Publication date: April 22, 2021
    Inventors: Hidemasa Aratake, Osamu Kuroda, Kouzou Kanagawa
  • Publication number: 20200194280
    Abstract: There is provided a substrate processing apparatus including: a processing part configured to process a substrate with a processing liquid; and a processing liquid generation part configured to generate the processing liquid supplied to the processing part. The processing liquid generation part includes: a reservoir configured to store the processing liquid; a circulation line through which the processing liquid stored in the reservoir is circulated; a heater configured to heat the processing liquid; and a nozzle provided at a downstream side of the circulation line and has at least one ejection port formed to eject the processing liquid heated by the heater from above a liquid level of the processing liquid stored in the reservoir.
    Type: Application
    Filed: December 12, 2019
    Publication date: June 18, 2020
    Inventors: Teruaki KONISHI, Kouzou KANAGAWA, Osamu KURODA, Koji TANAKA, Kotaro TSURUSAKI, Hidemasa ARATAKE, Kouji OGURA, Keita HIRASE
  • Patent number: 10622953
    Abstract: An amplification device includes a plurality of amplifiers arranged in parallel, a plurality of directional couplers coupled to the plurality of amplifiers, respectively, and configured to receive output signals of the plurality of amplifiers, respectively, a phase shifter coupled to a first directional coupler of the plurality of directional couplers, and configured to generate a first signal to which a phase of an output signal of the first directional coupler is inverted, a combining circuit coupled to the phase shifter and a second directional coupler of the plurality of directional couplers, and configured to combine an output signal of the phase shifter and an output signal of the second directional coupler, and a processor configured to control at least one of the plurality of amplifiers so that a level of an output signal of the combining circuit is minimized.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: April 14, 2020
    Assignee: FUJITSU LIMITED
    Inventors: Osamu Kuroda, Takumi Takayashiki, Yuuji Osada, Daiki Kasugai
  • Publication number: 20200106402
    Abstract: An amplification device includes a plurality of amplifiers arranged in parallel, a plurality of directional couplers coupled to the plurality of amplifiers, respectively, and configured to receive output signals of the plurality of amplifiers, respectively, a phase shifter coupled to a first directional coupler of the plurality of directional couplers, and configured to generate a first signal to which a phase of an output signal of the first directional coupler is inverted, a combining circuit coupled to the phase shifter and a second directional coupler of the plurality of directional couplers, and configured to combine an output signal of the phase shifter and an output signal of the second directional coupler, and a processor configured to control at least one of the plurality of amplifiers so that a level of an output signal of the combining circuit is minimized.
    Type: Application
    Filed: September 6, 2019
    Publication date: April 2, 2020
    Applicant: FUJITSU LIMITED
    Inventors: Osamu KURODA, Takumi TAKAYASHIKI, Yuuji OSADA, Daiki KASUGAI
  • Publication number: 20190080938
    Abstract: A substrate liquid processing apparatus A1 includes a processing liquid storage unit 38 configured to store a processing liquid therein; a processing liquid drain unit 41 configured to drain the processing liquid from the processing liquid storage unit 38; and a control unit 7. The control unit 7 performs a first control in a constant concentration mode in which a concentration of the processing liquid in the processing liquid storage unit 38 is regulated to a predetermined set concentration and a second control in a concentration changing mode in which the concentration of the processing liquid is changed. In the second control, a set concentration after concentration change is compared with a set concentration before the concentration change, and when the set concentration after the concentration change is lower, the control unit controls the processing liquid drain unit 41 to start draining of the processing liquid.
    Type: Application
    Filed: September 10, 2018
    Publication date: March 14, 2019
    Inventors: Takahiro Kawazu, Takafumi Tsuchiya, Hideaki Sato, Hidemasa Aratake, Osamu Kuroda, Takashi Nagai, Jiro Harada
  • Publication number: 20160365965
    Abstract: An apparatus includes antenna-systems each configured to include: an antenna, a splitter to split a reflection-signal obtained by reflecting a transmission-signal from the antenna into first and second reflection-signals and output the first reflection-signal to another antenna-system, and a selection section to select the second reflection-signal, the first reflection-signal output by the splitter in the another antenna-system, or a feedback-signal of the transmission-signal and output the selected signal via a common path; a distortion compensator to compensate distortion of the transmission-signal by using the feedback-signal selected by the selection section in the antenna-system; a standing-wave-ratio calculator to calculate a standing-wave-ratio by using the first reflection-signal or the second reflection-signal that is selected by the selection section in the antenna-system; and a controller to control the selection section in the another antenna-system so as to calculate the standing-wave-ratio by us
    Type: Application
    Filed: May 20, 2016
    Publication date: December 15, 2016
    Inventors: Osamu KURODA, Yasuhiro SHIBUYA
  • Patent number: 9432540
    Abstract: Disclosed are an image defect detection device, method and an imaging unit capable of reliably detecting image defect, such as stripe unevenness or scratches, even if a comparatively inexpensive and low resolution imaging unit is used. An image reading unit has a plurality of read pixels arranged in a second direction intersecting a first direction and reads an image recorded on a recording medium by a single-pass recording head, which is relatively moved in the first direction. A birefringent plate shifts and duplexes the image at least in the second direction by performing birefringence of image light of the image. The birefringent plate makes the width of image defect in the second direction on the read pixels greater than the pitch of the read pixels. A detection unit which detects image defect included in the image and extended in the first direction based on the reading result of the image.
    Type: Grant
    Filed: May 20, 2015
    Date of Patent: August 30, 2016
    Assignee: FUJIFILM Corporation
    Inventors: Katsuto Sumi, Osamu Kuroda
  • Publication number: 20150347059
    Abstract: Disclosed are an image defect detection device, method and an imaging unit capable of reliably detecting image defect, such as stripe unevenness or scratches, even if a comparatively inexpensive and low resolution imaging unit is used. An image reading unit has a plurality of read pixels arranged in a second direction intersecting a first direction and reads an image recorded on a recording medium by a single-pass recording head, which is relatively moved in the first direction. A birefringent plate shifts and duplexes the image at least in the second direction by performing birefringence of image light of the image. The birefringent plate makes the width of image defect in the second direction on the read pixels greater than the pitch of the read pixels. A detection unit which detects image defect included in the image and extended in the first direction based on the reading result of the image.
    Type: Application
    Filed: May 20, 2015
    Publication date: December 3, 2015
    Applicant: FUJIFILM Corporation
    Inventors: Katsuto SUMI, Osamu KURODA
  • Patent number: 8978670
    Abstract: Provided is a substrate processing apparatus wherein, even if a trouble occurs, it is bound to continue a process for the substrate without stopping the substrate processing apparatus entirely. The substrate processing apparatus according to the present disclosure includes first and second substrate conveying devices configured to convey wafers, and first and second processing blocks provided on the right and left sides of the substrate conveying device and having processing unit arrays each configured to perform the same process. Processing unit arrays on one side and processing unit arrays on the other side are respectively connected to a processing liquid supply system commonly provided with them. And, when any one of substrate conveying devices, processing liquid supply systems has a problem, the process for the wafer can be performed in the processing unit array to which the substrate conveying device and the processing liquid supply system under normal operation belong.
    Type: Grant
    Filed: October 4, 2010
    Date of Patent: March 17, 2015
    Assignee: Tokyo Electron Limited
    Inventors: Junya Minamida, Issei Ueda, Yasuhiro Chouno, Osamu Kuroda, Kazuyoshi Eshima, Masahiro Yoshida, Satoshi Morita
  • Publication number: 20150065798
    Abstract: Provided are an imaging module for an endoscope that favorably blocks incidence of flare light to an imaging element and an electronic endoscope device including the same. The imaging module for an endoscope includes an objective lens optical system; a transparent optical member 56; an imaging element 58 that is of a microlens non-mounting type; an adhesive layer; and a light shielding mask 121 for a measure against flare that is interposed between a light emission surface 56a and a light incidence surface, is formed with an opening 121a, which matches an image circle that passes through the objective lens optical system and the transparent optical member 56 and is formed on the light incidence surface of the imaging element 58 and has a smaller diameter than the image circle, and is provided immediately before the light incidence surface of the imaging element 58.
    Type: Application
    Filed: November 4, 2014
    Publication date: March 5, 2015
    Applicant: FUJIFILM Corporation
    Inventor: Osamu KURODA
  • Patent number: 8845262
    Abstract: A substrate processing apparatus includes a substrate transit table configured to mount thereon a plurality of substrates; a substrate processing chamber configured to process the substrate one by one; a substrate transfer device capable of loading the substrate into the substrate processing chamber from the substrate transit table and unloading the substrate from the substrate processing chamber to the substrate transit table; and N number of (N is an integer equal to or larger than 3) substrate holding devices provided at the substrate transfer device and configured to hold the substrates one by one. Here, a multiplicity of (2 to N?1 number of) substrates are concurrently held by 2 to N?1 number of substrate holding devices among the N number of substrate holding devices and one substrate is loaded into the substrate processing chamber.
    Type: Grant
    Filed: June 14, 2011
    Date of Patent: September 30, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Akira Murata, Issei Ueda, Osamu Kuroda, Kouji Kimoto, Masahiro Yoshida
  • Patent number: 8764644
    Abstract: An endoscope light source unit comprising: a first light source section emitting a first illumination light composed of white light; a second light source section emitting a second illumination light orthogonally to a direction in which the first illumination light travels; a light combining member transmitting the first illumination light through a transmission section and, at the same time, reflecting the second illumination light by means of a reflection section to form a combined light so that a beam of the second illumination light may be located in a central part of a beam of the first illumination light; a shaping lens for modifying the beam of the second illumination light emitted; and a condenser lens for converging the combined light.
    Type: Grant
    Filed: September 29, 2011
    Date of Patent: July 1, 2014
    Assignee: FUJIFILM Corporation
    Inventor: Osamu Kuroda
  • Publication number: 20140120264
    Abstract: A plating apparatus 20 has a substrate holding/rotating device 110 configured to hold and rotate a substrate 2 and a plating liquid supplying device 30 configured to supply a plating liquid 35 onto the substrate 2. The plating liquid supplying device 30 has a supply tank 31 configured to store therein the plating liquid 35 to be supplied onto the substrate 2, a discharge nozzle 32 configured to discharge the plating liquid 35 onto the substrate 2 and a plating liquid supplying line 33 through which the plating liquid 35 within the supply tank 31 is supplied into the discharge nozzle 32. Further, an ammonia gas storage unit 170 is connected to the supply tank 31, and a concentration of an ammonia component within the plating liquid 35 stored in the supply tank 31 can be maintained within a preset target range.
    Type: Application
    Filed: June 7, 2012
    Publication date: May 1, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Yuichiro Inatomi, Takashi Tanaka, Osamu Kuroda, Mitsuaki Iwashita, Yusuke Saito
  • Patent number: 8517929
    Abstract: An endoscope system is able to stably obtain an image free from speckle interference. A captured image including a first basic color component B on which a speckle noise of a laser beam is superimposed and a second basic color component G not including the speckle noise. A speckle noise component Bs is extracted based on difference information between the first basic color component B and the second basic color component G Based on the extracted speckle noise component Bs, the speckle noise component Bs is removed from the first basic color component B, so as to obtain a good observation image free from the speckle noise.
    Type: Grant
    Filed: June 22, 2011
    Date of Patent: August 27, 2013
    Assignee: Fujifilm Corporation
    Inventors: Osamu Kuroda, Takayuki Iida
  • Publication number: 20130040585
    Abstract: A first output device has a first port, a second port, and a third port, and outputs from the second port a transmission signal supplied to the first port. A second output device has the same ports as those of the first output device, outputs from the second port the transmission signal supplied to the first port from the first output device, and outputs from the third port a reflected wave supplied to the second port from an antenna. A phase shifter inverts a phase of a signal output from the third port of the first output device. An adder adds a signal output from the third port of the second output device and a signal output from the phase shifter.
    Type: Application
    Filed: September 7, 2012
    Publication date: February 14, 2013
    Applicant: FUJITSU LIMITED
    Inventors: Shigeru OKAWA, Osamu KURODA
  • Patent number: 8210190
    Abstract: An apparatus for accurately determining if a substrate is properly retained by a substrate-retaining mechanism. The apparatus includes a substrate-retaining mechanism to retain a wafer, a treatment liquid supply mechanism to supply a treatment liquid to the wafer, and a rotatable cup adapted to rotate as an integral unit with the substrate-retaining mechanism while covering the outer peripheral portion of the wafer. The substrate-retaining mechanism has a retaining member with two ends. If the first end retains a wafer, the second end is in an upper position. If the first end retains no wafer, the second end is in a lower position. A touch sensor is arranged below the second end of the retaining member so that, when the second end is in the lower position, the second end makes contact with the touch sensor.
    Type: Grant
    Filed: September 4, 2008
    Date of Patent: July 3, 2012
    Assignee: Tokyo Electron Limited
    Inventors: Norihiro Ito, Osamu Kuroda
  • Publication number: 20120083656
    Abstract: An endoscope light source unit comprising: a first light source section emitting a first illumination light composed of white light; a second light source section emitting a second illumination light orthogonally to a direction in which the first illumination light travels; a light combining member transmitting the first illumination light through a transmission section and, at the same time, reflecting the second illumination light by means of a reflection section to form a combined light so that a beam of the second illumination light may be located in a central part of a beam of the first illumination light; a shaping lens for modifying the beam of the second illumination light emitted; and a condenser lens for converging the combined light.
    Type: Application
    Filed: September 29, 2011
    Publication date: April 5, 2012
    Applicant: FUJIFILM CORPORATION
    Inventor: Osamu KURODA
  • Publication number: 20110319712
    Abstract: An endoscope system is able to stably obtain an image free from speckle interference. A captured image including a first basic color component B on which a speckle noise of a laser beam is superimposed and a second basic color component G not including the speckle noise. A speckle noise component Bs is extracted based on difference information between the first basic color component B and the second basic color component G Based on the extracted speckle noise component Bs, the speckle noise component Bs is removed from the first basic color component B, so as to obtain a good observation image free from the speckle noise.
    Type: Application
    Filed: June 22, 2011
    Publication date: December 29, 2011
    Applicant: FUJIFILM CORPORATION
    Inventors: Osamu KURODA, Takayuki IIDA
  • Publication number: 20110311340
    Abstract: A substrate processing apparatus includes a substrate transit table configured to mount thereon a plurality of substrates; a substrate processing chamber configured to process the substrate one by one; a substrate transfer device capable of loading the substrate into the substrate processing chamber from the substrate transit table and unloading the substrate from the substrate processing chamber to the substrate transit table; and N number of (N is an integer equal to or larger than 3) substrate holding devices provided at the substrate transfer device and configured to hold the substrates one by one. Here, a multiplicity of (2 to N?1 number of) substrates are concurrently held by 2 to N?1 number of substrate holding devices among the N number of substrate holding devices and one substrate is loaded into the substrate processing chamber.
    Type: Application
    Filed: June 14, 2011
    Publication date: December 22, 2011
    Applicant: TOKYO ELECTRON LIMTED
    Inventors: Akira Murata, Issei Ueda, Osamu Kuroda, Kouji Kimoto, Masahiro Yoshida