Abstract: A MEMS switch has fixed support, a plate-shaped flexible beam having at least one end immovably supported by the fixed support and having an extending movable surface, a movable electric contact disposed on the movable surface of the flexible beam, a fixed electric contact facing the movable electric contact and disposed at a fixed position relative to the fixed support, first piezoelectric driver disposed above the movable surface of the flexible beam, extending from a portion above the fixed support towards the movable electric contact, and capable of displacing the movable electric contact towards the fixed electric contact by voltage driving, and second piezoelectric driver disposed at least on the movable surface of the flexible beam and capable of so driving a movable part of the flexible beam by voltage driving that the movable electric contact is separated from the fixed electric contact.

Abstract: An electric device includes a dielectric substrate, a high frequency signal line formed on the surface of the dielectric substrate, a ground conductor facing the high frequency signal line through at least part of the thickness of the dielectric substrate, an upper electrode of capacitor disposed above the surface of the dielectric substrate and faces the high frequency signal line, and a liquid crystal material filled in a space defined between the high frequency signal line and the upper electrode of capacitor.

Abstract: A variable filter device has: a first series arm which is serially connected to a signal line, includes a variable capacitance and an inductance, and constitutes a series resonator; first and second parallel arms, which are connected between the signal line and the ground on both sides of the first series arm, each of which includes a variable capacitance and an inductance, and constitutes a grounded series resonator. The first series arm defines the center frequency of the pass band, and the first and second parallel arms define attenuation poles sandwiching the pass band.

Abstract: A filter includes a substrate; a signal line formed on the substrate and including an input terminal and an output terminal at either end of the signal line; and a first pair of resonant lines connected between the signal line and a ground portion, wherein the first pair of resonant lines are connected to the signal line at the same point.

Abstract: A variable distributed constant line includes a substrate, a signal line that is provided on the substrate, and includes a first line portion and a second line portion facing each other, a movable electrode that is provided above the substrate, and straddles both the first line portion and the second line portion in a manner to face the first line portion and the second line portion, and a driving electrode that is provided on the substrate in a manner to face the movable electrode, attracts the movable electrode by an action of a voltage applied between the driving electrode and the movable electrode, and changes a distance between the signal line and the movable electrode.

Abstract: An electronic device includes a substrate, an electrode formed on the substrate, and a movable portion provided above the electrode, the movable portion being elastically deformable, in which the movable potion includes a shape memory alloy film.

Abstract: A driving method for driving an electrostatic actuator including a fixed electrode and a movable electrode opposing each other with a dielectric layer interposed therebetween, includes applying a first voltage, between the fixed electrode and the movable electrode, to bring the movable electrode into contact with the dielectric layer, and applying a second voltage, between the fixed electrode and the movable electrode, after application of the first voltage is stopped and before the movable electrode moves away from the dielectric layer. Here, the second voltage has a polarity opposite to a polarity of the first voltage and an absolute value smaller than an absolute value of the first voltage.

Abstract: An electronic device having a variable capacitance element, includes a support substrate providing physical support, a pair of anchors formed on the support substrate, and having support portions in a direction perpendicular to a surface of the substrate, a movable electrode supported by the support portions of the pair of anchors, having opposing first and second side surfaces constituting electrode surfaces, and at least partially capable of elastic deformation, a first fixed electrode supported above the support substrate, and having a first electrode surface opposing to the first side surface of the movable electrode, and a second fixed electrode supported above the support substrate, and having a second electrode surface opposing to the second side surface of the movable electrode.

Abstract: An electronic device includes: a base member; a conductive film including a first end portion and a second end portion fixed to the base member, the conductive film being movable in a lateral direction of the base member between the first end portion and the second end portion; a first driving electrode, which is provided in the base member at a position opposed to a first main surface of the conductive film, and to which a first driving voltage is applied; a second driving electrode, which is provided in the base member at a position opposed to a second main surface of the conductive film, and to which a second driving voltage is applied; and a terminal provided in the base member at a position where the terminal enables to come into contact with the second main surface of the conductive film.

Abstract: A MEMS device includes a substrate, a fixed electrode that is provided on the substrate and allows a signal to pass therethrough, a movable electrode that is provided above the substrate in a manner to face the fixed electrode and allows a signal to pass therethrough, a driving line that is provided inside the substrate and used to apply a driving voltage to displace the movable electrode, and a resistance that is provided in a first via hole formed inside the substrate and used to cutoff a signal. The fixed electrode or the movable electrode is connected to the driving line through the first resistance.

Abstract: A variable filter includes, on a dielectric substrate including ground conductor, first resonator including a transmission line connected to input terminal, second resonator including a transmission line connected to output terminal, and coupling portion including a transmission line having one end connected to the first and second resonators and another end being an open end, or structure having one end connected to the first and second resonators, including a serial connection of a transmission line and a variable capacitor, another end of the variable capacitor connected to the ground conductor, and adjusting means capable of changing electric length, in the first and second resonators and the coupling portion, wherein pass band width can be changed by changing ratio of electric transmission length of the coupling portion to electric transmission lengths of transmission line including the coupling portion, and the first and second resonators.

Abstract: A variable distributed constant line includes a substrate, a signal line that is provided on the substrate, and includes a first line portion and a second line portion facing each other, a movable electrode that is provided above the substrate, and straddles both the first line portion and the second line portion in a manner to face the first line portion and the second line portion, and a driving electrode that is provided on the substrate in a manner to face the movable electrode, attracts the movable electrode by an action of a voltage applied between the driving electrode and the movable electrode, and changes a distance between the signal line and the movable electrode.

Abstract: A driving method for driving an electrostatic actuator including a fixed electrode and a movable electrode opposing each other with a dielectric layer interposed therebetween, includes applying a first voltage, between the fixed electrode and the movable electrode, to bring the movable electrode into contact with the dielectric layer, and applying a second voltage, between the fixed electrode and the movable electrode, after application of the first voltage is stopped and before the movable electrode moves away from the dielectric layer. Here, the second voltage has a polarity opposite to a polarity of the first voltage and an absolute value smaller than an absolute value of the first voltage.

Abstract: A MEMS device includes a substrate, a fixed electrode that is provided on the substrate and allows a signal to pass therethrough, a movable electrode that is provided above the substrate in a manner to face the fixed electrode and allows a signal to pass therethrough, a driving line that is provided inside the substrate and used to apply a driving voltage to displace the movable electrode, and a resistance that is provided in a first via hole formed inside the substrate and used to cutoff a signal. The fixed electrode or the movable electrode is connected to the driving line through the first resistance.

Abstract: There is provided a method for fabricating a device, preferably for a micro electro electro mechanical system. The method includes forming a first electrode on a substrate, where the first electrode has a first sloped end at least at one end thereof; forming a sacrificial layer on the first electrode, where the sacrificial layer has a first sloped edge, the first sloped edge and the first sloped end are overlapped each other so that a thickness of the first sloped edge decreases as a thickness of the first sloped end increases; forming a first spacer on the first electrode, where the first spacer has contact with the first sloped edge; forming a beam electrode on the sacrificial layer and the first spacer; and removing the sacrificial layer after the forming the beam electrode.

Abstract: In a conventional method of driving a plasma display panel, for example, an auxiliary discharge is executed between an A electrode and a Y electrode to improve light-emission efficiency of a display discharge. However, since a phosphor layer is present between the A electrode and the Y electrode, the phosphor layer is exposed to a discharge, whereby there is a problem that its characteristic deteriorates. A method of driving a plasma display panel having a structure, in which at least three display electrodes X, Y, and Z used for a display discharge are provided to a display cell and no phosphor layer is formed between said display electrodes and a discharge space, the method comprising the steps of: varying a potential of at least one display electrode Z of said display electrodes during said display discharge; and making a potential of said at least one display electrode Z at a time of starting said display discharge different from that at a time of ending said display discharge.

Abstract: A filter includes a first resonance line and a second resonance line which extend from an input point where a high frequency signal is input, wherein an electrical propagation length L1 of the first resonance line is set at L1=[?1/4]×n and an electrical propagation length L2 of the second resonance line is set at L2=[?2/4]×n, wherein ?1 and ?2 are wavelengths of specified high frequency signals and n is positive odd number.

Abstract: A plasma display panel in which projections are formed in grooves between partitions and phosphor layers are provided on the projections so as to increase the area where phosphor adheres and thereby to increase the luminance. A couple of substrates are opposed to each other to form a discharge space. Band-like partitions partitioning the discharge space are arranged on the back or front substrate. Wall-like projections lower than the partitions and high enough to increase the area where phosphor layers are formed are provided in the region where the discharge space is formed in the long grooves between the partitions or around the discharge space. Phosphor layers are formed in the grooves between the partitions including the wall-like projections. A method for producing such a plasma display panel is also disclosed.

Abstract: A partition is formed by the process including a step for providing a sheet-like partition material that covers a display area and outside thereof on the surface of the substrate, a step for providing a mask for patterning that covers the display area and the outside thereof, so that a pattern of the portion arranged outside of the display area of the mask is a grid-like pattern, a step for patterning the partition material covered partially with the mask by a sandblasting process, and a step for baking the partition material after the patterning.

Abstract: A partition is formed by the process including a step for providing a sheet-like partition material that covers a display area and outside thereof on the surface of the substrate, a step for providing a mask for patterning that covers the display area and the outside thereof, so that a pattern of the portion arranged outside of the display area of the mask is a grid-like pattern, a step for patterning the partition material covered partially with the mask by a sandblasting process, and a step for baking the partition material after the patterning.