Patents by Inventor Osamu Tsuboi
Osamu Tsuboi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7459331Abstract: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.Type: GrantFiled: October 30, 2006Date of Patent: December 2, 2008Assignee: Fujitsu LimitedInventors: Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Hisao Okuda, Norinao Kouma, Hiromitsu Soneda, Fumio Yamagishi
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Publication number: 20080285109Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.Type: ApplicationFiled: July 15, 2008Publication date: November 20, 2008Inventors: Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Hisao Okuda
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Publication number: 20080285108Abstract: The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.Type: ApplicationFiled: December 5, 2007Publication date: November 20, 2008Applicant: Fujitsu LimitedInventors: Osamu Tsuboi, Yoshihiro Mizuno, Satoshi Ueda, Ippei Sawaki, Hisao Okuda, Fumio Yamagishi, Hiromitsu Soneda, Norinao Kouma
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Patent number: 7453182Abstract: A micro oscillating element is formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer. This oscillating element includes an oscillation section, an oscillation section supporting frame, and a torsional joining section. The oscillation section includes a movable functional section. The torsional joining section joins the oscillation section and the frame, and also defines an oscillation axis for oscillating action of the oscillation section. The movable functional section is a part formed in the first conductive layer, while the frame is a part formed in the second conductive layer.Type: GrantFiled: December 1, 2005Date of Patent: November 18, 2008Assignee: Fujitsu LimitedInventors: Norinao Kouma, Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda, Ippei Sawaki
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Patent number: 7439184Abstract: A pair of comb-teeth electrodes are made from a material substrate including a first conduction layer, a second conduction layer and an intervening insulation layer. The paired electrodes includes first and second comb-teeth electrodes. The first comb-teeth electrode is composed of a first conductor derived from the first conduction layer, a second conductor derived from the second conduction layer and an insulator derived from the insulation layer. The second comb-teeth electrode is derived from the second conduction layer.Type: GrantFiled: March 9, 2006Date of Patent: October 21, 2008Assignee: Fujitsu LimitedInventors: Norinao Kouma, Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda
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Publication number: 20080239456Abstract: A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.Type: ApplicationFiled: March 31, 2008Publication date: October 2, 2008Applicant: FUJITSU LIMITEDInventors: Osamu TSUBOI, Norinao KOUMA, Hiromitsu SONEDA, Hisao OKUDA, Yoshihiro MIZUNO, Tsuyoshi MATSUMOTO
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Publication number: 20080205021Abstract: A microstructure comprises a laminate structure having a first conductor, a second conductor, and an intervening insulator located between the first and the second conductors. The first conductor includes opposite faces in relation to the second conductor, side faces, and edge parts which form the boundaries of the aforementioned opposite faces and side faces. The second conductor includes an extended face extending beyond the edge parts exceeding the first conductor. The insulation film includes an area covering at least part of an edge part and/or at least part of a side face.Type: ApplicationFiled: February 28, 2008Publication date: August 28, 2008Applicant: FUJITSU LIMITEDInventors: Yoshihiro MIZUNO, Norinao KOUMA, Hisao OKUDA, Hiromitsu SONEDA, Tsuyoshi MATSUMOTO, Osamu TSUBOI
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Patent number: 7411714Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.Type: GrantFiled: October 10, 2006Date of Patent: August 12, 2008Assignee: Fujitsu LimitedInventors: Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Hisao Okuda
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Publication number: 20080165409Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.Type: ApplicationFiled: October 10, 2006Publication date: July 10, 2008Applicant: FUJITSU LIMITEDInventors: Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Hisao Okuda
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Publication number: 20080075924Abstract: A microstructure device is made by processing a material substrate consisting of e.g. a first process layer, a second process layer and a middle layer arranged between the first and the second process layers. The microstructure device includes a first structural part and a second structural part that has a portion facing the first structural part via a gap. The first and the second structural parts are connected to each other by a connecting part extending across the gap. This connecting part is formed in the first process layer to be in contact with the middle layer. The microstructure device also includes a protective part extending from the first structural part toward the second structural part or vice versa. The protective part is formed in the first or second process layer to be in contact with the middle layer.Type: ApplicationFiled: September 18, 2007Publication date: March 27, 2008Applicant: FUJITSU LIMITEDInventors: Norinao Kouma, Yoshihiro Mizuno, Hisao Okuda, Hiromitsu Soneda, Tsuyoshi Matsumoto, Osamu Tsuboi, Ippei Sawaki
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Publication number: 20080054758Abstract: A micro-oscillation element facilitates adjusting the natural frequency relevant to the oscillating motion of the oscillating portion. The micro-oscillation element includes, for example, an oscillating portion, a frame, and a link portion that connects the oscillating portion and the frame. The link portion defines the oscillation axial center of oscillating motion of the oscillating portion with respect to the frame. The oscillating portion includes a main oscillating body, and a weight portion attached to the main oscillating body. The weight portion is movable in a direction intersecting the oscillation axial center.Type: ApplicationFiled: August 16, 2007Publication date: March 6, 2008Applicant: FUJITSU LIMITEDInventors: Osamu Tsuboi, Norinao Kouma, Hiromitsu Soneda, Hisao Okuda
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Patent number: 7324251Abstract: The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.Type: GrantFiled: April 8, 2005Date of Patent: January 29, 2008Assignee: Fujitsu LimitedInventors: Osamu Tsuboi, Yoshihiro Mizuno, Satoshi Ueda, Ippei Sawaki, Hisao Okuda, Fumio Yamagishi, Hiromitsu Soneda, Norinao Kouma
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Publication number: 20070268549Abstract: A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.Type: ApplicationFiled: July 25, 2007Publication date: November 22, 2007Applicants: FUJITSU LIMITED, FUJITSU MEDIA DEVICES LIMITEDInventors: Mi Xiaoyu, Satoshi Ueda, Hisao Okuda, Osamu Tsuboi, Hiromitsu Soneda, Norinao Kouma, Ippei Sawaki, Yoshitaka Nakamura
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Patent number: 7262541Abstract: A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.Type: GrantFiled: March 4, 2004Date of Patent: August 28, 2007Assignee: Fujitsu LimitedInventors: Mi Xiaoyu, Satoshi Ueda, Hisao Okuda, Osamu Tsuboi, Hiromitsu Soneda, Norinao Kouma, Ippei Sawaki, Yoshitaka Nakamura
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Publication number: 20070091415Abstract: A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.Type: ApplicationFiled: July 5, 2006Publication date: April 26, 2007Inventors: Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Fumio Yamagishi
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Publication number: 20070063614Abstract: A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.Type: ApplicationFiled: November 22, 2006Publication date: March 22, 2007Applicant: FUJITSU LIMITEDInventors: Osamu Tsuboi, Norinao Kouma, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda, Ippei Sawaki, Yoshitaka Nakamura
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Patent number: 7192879Abstract: A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.Type: GrantFiled: August 22, 2005Date of Patent: March 20, 2007Assignee: Fujitsu LimitedInventors: Norinao Kouma, Osamu Tsuboi, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda, Ippei Sawaki, Yoshitaka Nakamura
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Publication number: 20070041080Abstract: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.Type: ApplicationFiled: October 30, 2006Publication date: February 22, 2007Applicant: FUJITSU LIMITED, LTD.Inventors: Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Hisao Okuda, Norinao Kouma, Hiromitsu Soneda, Fumio Yamagishi
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Patent number: 7161274Abstract: A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.Type: GrantFiled: March 3, 2004Date of Patent: January 9, 2007Assignee: Fujitsu LimitedInventors: Osamu Tsuboi, Norinao Kouma, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda, Ippei Sawaki, Yoshitaka Nakamura
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Patent number: 7157330Abstract: A semiconductor device comprising: a first insulation film 60 formed above a base substrate 10; a second insulation film 61 formed on the first insulation film and having different etching characteristics from the first insulation film; and a capacitor 79 including a storage electrode 68 formed on the second insulation film, projected therefrom, the storage electrode being formed, extended downward from side surfaces of the second insulation film. The lower ends of the storage electrodes are formed partially below the etching stopper film, whereby the storage electrodes are fixed by the etching stopper film. Accordingly, the storage electrodes are prevented from peeling off in processing, such as wet etching, etc. The semiconductor device can be fabricated at high yields.Type: GrantFiled: March 14, 2005Date of Patent: January 2, 2007Assignee: Fujitsu LimitedInventors: Osamu Tsuboi, Tomohiko Tsutsumi, Kazutaka Yoshizawa