Patents by Inventor Pandi Chelvam Marimuthu
Pandi Chelvam Marimuthu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8263439Abstract: A semiconductor device has a carrier for supporting the semiconductor device. A first semiconductor die is mounted over the carrier. A first dummy die having a first through-silicon via (TSV) is mounted over the carrier. The first semiconductor die and the first dummy die are encapsulated using a wafer molding material. The carrier is removed. A first redistribution layer (RDL) is formed over a first surface of the first semiconductor die and a first surface of the first dummy die to electrically connect the first TSV and a contact pad of the first semiconductor die. An insulation layer is formed over the first RDL. A second RDL is formed over a second surface of the first dummy die opposite the first surface of the first dummy die and electrically connected to the first TSV. A semiconductor package is connected to the second RDL.Type: GrantFiled: October 15, 2010Date of Patent: September 11, 2012Assignee: STATS ChipPAC, Ltd.Inventors: Pandi Chelvam Marimuthu, Nathapong Suthiwongsunthorn, Il Kwon Shim, Kock Liang Heng
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Publication number: 20120205813Abstract: An integrated circuit package system including: providing an integrated circuit die, forming a first layer over the integrated circuit die, forming a bridge on and in the first layer, forming a second layer on the first layer, and forming bump pads on and in the second layer, the bump pads connected to ends of the bridge.Type: ApplicationFiled: April 25, 2012Publication date: August 16, 2012Inventors: Yaojian Lin, Pandi Chelvam Marimuthu
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Patent number: 8241952Abstract: A semiconductor wafer contains semiconductor die. A first conductive layer is formed over the die. A resistive layer is formed over the die and first conductive layer. A first insulating layer is formed over the die and resistive layer. The wafer is singulated to separate the die. The die is mounted to a temporary carrier. An encapsulant is deposited over the die and carrier. The carrier and a portion of the encapsulant and first insulating layer is removed. A second insulating layer is formed over the encapsulant and first insulating layer. A second conductive layer is formed over the first and second insulating layers. A third insulating layer is formed over the second insulating layer and second conductive layer. A third conductive layer is formed over the third insulating layer and second conductive layer. A fourth insulating layer is formed over the third insulating layer and third conductive layer.Type: GrantFiled: February 25, 2010Date of Patent: August 14, 2012Assignee: STATS ChipPAC, Ltd.Inventors: Yaojian Lin, Robert C. Frye, Pandi Chelvam Marimuthu, Kai Liu
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Patent number: 8188590Abstract: An integrated circuit package system including: providing an integrated circuit die, forming a first layer over the integrated circuit die, forming a bridge on and in the first layer, forming a second layer on the first layer, and forming bump pads on and in the second layer, the bump pads connected to ends of the bridge.Type: GrantFiled: August 23, 2007Date of Patent: May 29, 2012Assignee: STATS ChipPAC Ltd.Inventors: Yaojin Lin, Pandi Chelvam Marimuthu
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Publication number: 20120074585Abstract: A semiconductor device has a substrate with first and second opposing surfaces. A plurality of conductive vias is formed partially through the first surface of the substrate. A first conductive layer is formed over the first surface of the substrate electrically connected to the conductive vias. A first semiconductor die is mounted over the first surface of the substrate. The first semiconductor die and substrate are mounted to a carrier. An encapsulant is deposited over the first semiconductor die, substrate, and carrier. A portion of the second surface of the substrate is removed to expose the conductive vias. An interconnect structure is formed over a surface of the substrate opposite the first semiconductor die. A second semiconductor die can be stacked over the first semiconductor die. A second semiconductor die can be mounted over the first surface of the substrate adjacent to the first semiconductor die.Type: ApplicationFiled: July 15, 2011Publication date: March 29, 2012Applicant: STATS ChipPAC, Ltd.Inventors: Jun Mo Koo, Pandi Chelvam Marimuthu, Jae Hun Ku, Seung Wook Yoon
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Patent number: 8125073Abstract: A semiconductor device has a wafer for supporting the device and a conductive layer formed over a top surface of the wafer. A carrier wafer is permanently bonded over the conductive layer. Within the wafer and the carrier wafer, an interconnect structure is formed. The interconnect structure includes a first via formed in the wafer that exposes the conductive layer, a second via formed in the carrier wafer that exposes the conductive layer, a first metal layer deposited over the first via, the first metal layer in electrical contact with the conductive layer, and a second metal layer deposited over the second via, the second metal layer in electrical contact with the conductive layer. First and second insulation layers are deposited over the first and second metal layers respectively. The first or second insulation layer has an etched portion to expose a portion of the first or second metal layer.Type: GrantFiled: January 11, 2011Date of Patent: February 28, 2012Assignee: STATS ChipPAC, Ltd.Inventors: Byung Joon Han, Nathapong Suthiwongsunthorn, Pandi Chelvam Marimuthu, Kock Liang Heng
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Publication number: 20110221054Abstract: A semiconductor device has a semiconductor die mounted over the carrier. An encapsulant is deposited over the carrier and semiconductor die. The carrier is removed. A first interconnect structure is formed over the encapsulant and a first surface of the die. A second interconnect structure is formed over the encapsulant and a second surface of the die. A first protective layer is formed over the first interconnect structure and second protective layer is formed over the second interconnect structure prior to forming the vias. A plurality of vias is formed through the second interconnect structure, encapsulant, and first interconnect structure. A first conductive layer is formed in the vias to electrically connect the first interconnect structure and second interconnect structure. An insulating layer is formed over the first interconnect structure and second interconnect structure and into the vias. A discrete semiconductor component can be mounted to the first interconnect structure.Type: ApplicationFiled: March 15, 2010Publication date: September 15, 2011Applicant: STATS CHIPPAC, LTD.Inventors: Yaojian Lin, Pandi Chelvam Marimuthu
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Publication number: 20110204509Abstract: A semiconductor wafer contains semiconductor die. A first conductive layer is formed over the die. A resistive layer is formed over the die and first conductive layer. A first insulating layer is formed over the die and resistive layer. The wafer is singulated to separate the die. The die is mounted to a temporary carrier. An encapsulant is deposited over the die and carrier. The carrier and a portion of the encapsulant and first insulating layer is removed. A second insulating layer is formed over the encapsulant and first insulating layer. A second conductive layer is formed over the first and second insulating layers. A third insulating layer is formed over the second insulating layer and second conductive layer. A third conductive layer is formed over the third insulating layer and second conductive layer. A fourth insulating layer is formed over the third insulating layer and third conductive layer.Type: ApplicationFiled: February 25, 2010Publication date: August 25, 2011Applicant: STATS CHIPPAC, LTD.Inventors: Yaojian Lin, Robert C. Frye, Pandi Chelvam Marimuthu, Kai Liu
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Publication number: 20110101509Abstract: A semiconductor device has a wafer for supporting the device and a conductive layer formed over a top surface of the wafer. A carrier wafer is permanently bonded over the conductive layer. Within the wafer and the carrier wafer, an interconnect structure is formed. The interconnect structure includes a first via formed in the wafer that exposes the conductive layer, a second via formed in the carrier wafer that exposes the conductive layer, a first metal layer deposited over the first via, the first metal layer in electrical contact with the conductive layer, and a second metal layer deposited over the second via, the second metal layer in electrical contact with the conductive layer. First and second insulation layers are deposited over the first and second metal layers respectively. The first or second insulation layer has an etched portion to expose a portion of the first or second metal layer.Type: ApplicationFiled: January 11, 2011Publication date: May 5, 2011Applicant: STATS CHIPPAC, LTD.Inventors: Byung Joon Han, Nathapong Suthiwongsunthorn, Pandi Chelvam Marimuthu, Kock Liang Heng
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Patent number: 7936055Abstract: An integrated circuit package system is provided including forming a first external interconnect and a die paddle having a slot, forming an inner terminal from a peripheral region of the die paddle, connecting an integrated circuit die and the peripheral region for ground connection, and molding through the slot.Type: GrantFiled: August 23, 2006Date of Patent: May 3, 2011Assignee: Stats Chippac Ltd.Inventors: Antonio B. Dimaano, Jr., Pandi Chelvam Marimuthu
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Publication number: 20110024916Abstract: A semiconductor device has a carrier for supporting the semiconductor device. A first semiconductor die is mounted over the carrier. A first dummy die having a first through-silicon via (TSV) is mounted over the carrier. The first semiconductor die and the first dummy die are encapsulated using a wafer molding material. The carrier is removed. A first redistribution layer (RDL) is formed over a first surface of the first semiconductor die and a first surface of the first dummy die to electrically connect the first TSV and a contact pad of the first semiconductor die. An insulation layer is formed over the first RDL. A second RDL is formed over a second surface of the first dummy die opposite the first surface of the first dummy die and electrically connected to the first TSV. A semiconductor package is connected to the second RDL.Type: ApplicationFiled: October 15, 2010Publication date: February 3, 2011Applicant: STATS CHIPPAC, LTD.Inventors: Pandi Chelvam Marimuthu, Nathapong Suthiwongsunthorn, Il Kwon Shim, Kock Liang Heng
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Patent number: 7880293Abstract: A semiconductor device has a wafer for supporting the device and a conductive layer formed over a top surface of the wafer. A carrier wafer is permanently bonded over the conductive layer. Within the wafer and the carrier wafer, an interconnect structure is formed. The interconnect structure includes a first via formed in the wafer exposing the conductive layer, a second via formed in the carrier wafer exposing the conductive layer, a first metal layer deposited over the first via, the first metal layer in electrical contact with the conductive layer, and a second metal layer deposited over the second via, the second metal layer in electrical contact with the conductive layer. First and second passivation layers are deposited over the first and second metal layers. The first or second passivation layer has an etched portion to expose a portion of the first metal layer or second metal layer.Type: GrantFiled: March 25, 2008Date of Patent: February 1, 2011Assignee: STATS ChipPAC, Ltd.Inventors: Byung Joon Han, Nathapong Suthiwongsunthorn, Pandi Chelvam Marimuthu, Kock Liang Heng
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Patent number: 7863721Abstract: A semiconductor device has first and second wafers having bond pads. The bond pad of the second wafer is connected to the bond pad of the first wafer using a conductive adhesive. A first interconnect structure is formed within the second wafer and includes a first via formed in a back surface of the second wafer to expose the bond pad of the second wafer. A first metal layer is formed conformally over the first via and is in electrical contact with the bond pad of the second wafer. A third wafer is mounted over the second wafer by connecting a bond pad formed over a front surface of the third wafer to the first metal layer. A second interconnect structure is formed over a backside of the third wafer opposite the front surface. The second interconnect structure is electrically connected to the first metal layer.Type: GrantFiled: June 11, 2008Date of Patent: January 4, 2011Assignee: STATS ChipPAC, Ltd.Inventors: Nathapong Suthiwongsunthorn, Pandi Chelvam Marimuthu
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Patent number: 7851257Abstract: An integrated circuit stacking system is provided including fabricating an integrated passive device including: providing a semiconductor substrate, forming an integrated inductor, a resistor block, or an integrated capacitor integrated on the semiconductor substrate, and forming contact pads, on the semiconductor substrate, coupled to the integrated inductor, the resistor block, or the integrated capacitor; positioning an integrated circuit die for maintaining an inductor spacing; mounting the integrated circuit die on the integrated passive device; and encapsulating the integrated circuit die and the integrated passive device.Type: GrantFiled: October 4, 2006Date of Patent: December 14, 2010Assignee: Stats Chippac Ltd.Inventors: Pandi Chelvam Marimuthu, Robert Charles Frye, Yaojian Lin
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Patent number: 7838337Abstract: A semiconductor device is fabricated by providing a carrier for supporting the semiconductor device. A first semiconductor die is mounted to the carrier. The first semiconductor die has a contact pad. A first dummy die is mounted to the carrier. The first dummy die has a through-silicon via (TSV). The first semiconductor die and the first dummy die are encapsulated using a wafer molding material. A first interconnect structure is formed over the first semiconductor die and the first dummy die. The first interconnect structure is connected to the contact pad of the first semiconductor die and the TSV of the first dummy die. The carrier is removed and a second interconnect structure is formed over the first semiconductor die and the first dummy die. The second interconnect structure is connected to the TSV of the first dummy die. A semiconductor package is connected to the second interconnect structure.Type: GrantFiled: December 1, 2008Date of Patent: November 23, 2010Assignee: STATS ChipPAC, Ltd.Inventors: Pandi Chelvam Marimuthu, Nathapong Suthiwongsunthorn, Il Kwon Shim, Kock Liang Heng
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Publication number: 20100244241Abstract: A semiconductor device has a conductive via in a first surface of a substrate. A first interconnect structure is formed over the first surface of the substrate. A first bump is formed over the first interconnect structure. The first bump is formed over or offset from the conductive via. An encapsulant is deposited over the first bump and first interconnect structure. A portion of the encapsulant is removed to expose the first bump. A portion of a second surface of the substrate is removed to expose the conductive via. The encapsulant provides structural support and eliminates the need for a separate carrier wafer when thinning the substrate. A second interconnect structure is formed over the second surface of the substrate. A second bump is formed over the first bump. A plurality of semiconductor devices can be stacked and electrically connected through the conductive via.Type: ApplicationFiled: March 26, 2009Publication date: September 30, 2010Applicant: STATS CHIPPAC, LTD.Inventors: Pandi Chelvam Marimuthu, Shuangwu Huang, Nathapong Suthiwongsunthorn
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Publication number: 20100221873Abstract: A semiconductor device has a first interconnect structure formed over a first side of a substrate. A semiconductor die is mounted to the first interconnect structure. An encapsulant is deposited over the semiconductor die and first interconnect structure for structural support. A portion of a second side of the substrate, opposite the first side of the substrate, is removed to reduce its thickness. The encapsulant maintains substrate robustness during thinning process. A TSV is formed through the second side of the substrate to the first interconnect structure. A second interconnect structure is formed in the TSV. The TSV has a first insulating layer formed over the second side of the substrate and first conductive layer formed over the first insulating layer and into the TSV. The second interconnect structure has a second conductive layer formed over the first conductive layer in an area away from the TSV.Type: ApplicationFiled: May 6, 2010Publication date: September 2, 2010Applicant: STATS CHIPPAC, LTD.Inventors: Pandi Chelvam Marimuthu, Nathapong Suthiwongsunthorn, Kock Liang Heng
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Publication number: 20100213610Abstract: A semiconductor device has a first interconnect structure formed over a first side of a substrate. A semiconductor die is mounted to the first interconnect structure. An encapsulant is deposited over the semiconductor die and first interconnect structure for structural support. A portion of a second side of the substrate, opposite the first side of the substrate, is removed to reduce its thickness. The encapsulant maintains substrate robustness during thinning process. A TSV is formed through the second side of the substrate to the first interconnect structure. A second interconnect structure is formed in the TSV. The TSV has a first insulating layer formed over the second side of the substrate and first conductive layer formed over the first insulating layer and into the TSV. The second interconnect structure has a second conductive layer formed over the first conductive layer in an area away from the TSV.Type: ApplicationFiled: May 6, 2010Publication date: August 26, 2010Applicant: STATS CHIPPAC, LTD.Inventors: Pandi Chelvam Marimuthu, Nathapong Suthiwongsunthorn, Kock Liang Heng
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Publication number: 20100193226Abstract: A solder bump confinement system is provided includes a substrate; a contact material patterned on the substrate; an inner passivation layer deposited over the contact material and the substrate; an under bump material pad over the contact material; an under bump material defining layer, having a bump opening contained therein, directly on the under bump material pad in which the under bump material defining layer has a thickness in the range of 200 Angstrom to 1500 Angstrom; and a system interconnect formed over the contact material and coupled to the under bump material defining layer and the under bump material pad through the bump opening.Type: ApplicationFiled: April 7, 2010Publication date: August 5, 2010Inventors: Yaojian Lin, Pandi Chelvam Marimuthu, Rajendra D. Pendse
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Publication number: 20100140752Abstract: A semiconductor device has a first conductive layer formed over a top surface of a substrate. A first insulating layer is formed over the substrate. A first dielectric layer is formed over the first insulating layer. A second conductive layer is formed over the first conductive layer and first dielectric layer. A second dielectric layer is formed over the second conductive layer. A polymer material is deposited over the second dielectric layer and second conductive layer. A third conductive layer is formed over the polymer material and second conductive layer. The third conductive layer is electrically connected to the second conductive layer. A first solder bump is formed over the third conductive layer. A conductive via is formed through a back surface of the substrate. The conductive via is electrically connected to the first conductive layer. The polymer material has a low coefficient of thermal expansion.Type: ApplicationFiled: December 10, 2008Publication date: June 10, 2010Applicant: STATS ChipPAC, LTD.Inventors: Pandi Chelvam Marimuthu, Shuangwu Huang, Nathapong Suthiwongsunthorn