Abstract: In microelectronic applications, it is often desired to deposit and pattern a permanent dielectric film in order to electrically and mechanically isolate components. Photo-patternable dielectrics are attractive for these uses because of their reduced time and cost requirements. These permanent dielectrics should be high-speed, positive-tone, and aqueous-developable. This type of patternability may be achieved by using a chemically amplified deprotection reaction of tert-butoxycarbonate or tert-butyl acrylate catalyzed by a photo-inducible acid.

Abstract: Embodiments according to the present invention relate generally to PAG bilayer and PAG-doped unilayer structures using sacrificial polymer layers that incorporate a photoacid generator having a concentration gradient therein. Said PAG concentration being higher in a upper portion of such structures than in a lower portion thereof. Embodiments according to the present invention also relate to a method of using such bilayers and unilayers to form microelectronic structures having a three-dimensional space, and methods of decomposition of the sacrificial polymer within the aforementioned layers.

Abstract: A membrane electrode assembly for use in a fuel cell includes an anode electrode, a proton exchange membrane, an anion exchange membrane and a cathode electrode. The anode electrode includes a first catalyst. The first catalyst separates a reducing agent into a plurality of positively charged ions and negative charges. The proton exchange membrane is configured to favor transport of positively charged ions therethrough and is also configured to inhibit transport of negatively charged particles therethrough. The anion exchange membrane is configured to favor transport of negatively charged ions therethrough and is also configured to inhibit transport of positively charged ions therethrough. The cathode electrode includes a second catalyst and is disposed adjacent to a second side of the anion exchange membrane. The second catalyst reacts electrons with the at least one oxidizing agent so as to generate+reduced species.

Abstract: Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a photodefinable polymer having a sacrificial polymer and a photoinitiator.

Abstract: A fuel cell (100) includes a cation exchange membrane (110), a first anion exchange membrane (120) and a second anion exchange membrane (130). The cation exchange membrane (110) has a first side and an opposite second side. The first anion exchange membrane (120) has a first exterior surface and an opposite first interior surface disposed along at least a portion to the first side of the cation exchange membrane (110). A catalyst (140) is embedded along the first exterior surface. The second anion exchange membrane (130) has a second exterior surface and an opposite second interior surface disposed along at least a portion to the second side of the cation exchange membrane (110). A catalyst (142) is embedded along the second exterior surface. A stack of fuel cells (700) include a first fuel cell (710) with an acidic first anode (714) that is electrically coupled to an alkaline second cathode (722) of a second fuel cell (720).

Abstract: A fuel cell (100) includes a cation exchange membrane (110), a first anion exchange membrane (120) and a second anion exchange membrane (130). The cation exchange membrane (110) has a first side and an opposite second side. The first anion exchange membrane (120) has a first exterior surface and an opposite first interior surface disposed along at least a portion to the first side of the cation exchange membrane (110). A catalyst (140) is embedded along the first exterior surface. The second anion exchange membrane (130) has a second exterior surface and an opposite second interior surface disposed along at least a portion to the second side of the cation exchange membrane (110). A catalyst (142) is embedded along the second exterior surface. A stack of fuel cells (700) include a first fuel cell (701) with an acidic first anode (714) that is electrically coupled to an alkaline second cathode (722) of a second fuel cell (720).

Abstract: Embodiments according to the present invention relate generally to PAG bilayer and PAG-doped unilayer structures using sacrificial polymer layers that incorporate a photoacid generator having a concentration gradient therein. Said PAG concentration being higher in a upper portion of such structures than in a lower portion thereof. Embodiments according to the present invention also relate to a method of using such bilayers and unilayers to form microelectronic structures having a three-dimensional space, and methods of decomposition of the sacrificial polymer within the aforementioned layers.

Abstract: This invention discloses and claims a cost-effective, wafer-level package process for microelectromechanical devices (MEMS). Specifically, the movable part of MEMS device is encapsulated and protected while in wafer form so that commodity, lead-frame packaging can be used. An overcoat polymer, such as, epoxycyclohexyl polyhedral oligomeric silsesquioxanes (EPOSS) has been used as a mask material to pattern the sacrificial polymer as well as overcoat the air-cavity. The resulting air-cavities are clean, debris-free, and robust. The cavities have substantial strength to withstand molding pressures during lead-frame packaging of the MEMS devices. A wide range of cavities from 20 ?m×400 ?m to 300 ?m×400 ?m have been fabricated and shown to be mechanically stable. These could potentially house MEMS devices over a wide range of sizes. The strength of the cavities has been investigated using nano-indentation and modeled using analytical and finite element techniques.

Abstract: Embodiments according to the present invention relate generally to PAG bilayer and PAG-doped unilayer structures using sacrificial polymer layers that incorporate a photoacid generator having a concentration gradient therein. Said PAG concentration being higher in a upper portion of such structures than in a lower portion thereof. Embodiments according to the present invention also relate to a method of using such bilayers and unilayers to form microelectronic structures having a three-dimensional space, and methods of decomposition of the sacrificial polymer within the aforementioned layers.

Abstract: Microstructures and methods of fabricating microstructures are disclosed. One exemplary microstructure, among others, includes a substrate, an overcoat layer disposed upon the substrate, an air-region within at least a portion of the overcoat layer, and a framing material layer engaging at least a portion of the air-region on the inside of the framing material layer and engaging the overcoat layer on the outside of the framing material layer.

Abstract: Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a photodefinable polymer having a sacrificial polymer and a photoinitiator.

Abstract: Embodiments of the present disclosure provide systems and methods for producing micro electro-mechanical device packages. Briefly described, in architecture, one embodiment of the system, among others, includes a micro electro-mechanical device formed on a substrate layer; and a thermally decomposable sacrificial structure protecting at least a portion of the micro electro-mechanical device, where the sacrificial structure is formed on the substrate layer and surrounds a gas cavity enclosing an active surface of the micro electro-mechanical device. Other systems and methods are also provided.

Abstract: Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a photodefinable polymer having a sacrificial polymer and a photoinitiator.

Abstract: Embodiments of the present disclosure provide systems and methods for producing micro electro-mechanical device packages. Briefly described, in architecture, one embodiment of the system, among others, includes a micro electro-mechanical device formed on a substrate layer; and a thermally decomposable sacrificial structure protecting at least a portion of the micro electro-mechanical device, where the sacrificial structure is formed on the substrate layer and surrounds a gas cavity enclosing an active surface of the micro electro-mechanical device. Other systems and methods are also provided.

Abstract: Embodiments according to the present invention relate generally to PAG bilayer and PAG-doped unilayer structures using sacrificial polymer layers that incorporate a photoacid generator having a concentration gradient therein. Said PAG concentration being higher in a upper portion of such structures than in a lower portion thereof. Embodiments according to the present invention also relate to a method of using such bilayers and unilayers to form microelectronic structures having a three-dimensional space, and methods of decomposition of the sacrificial polymer within the aforementioned layers.

Abstract: Provided according to some embodiments of the invention are anion exchange polyelectrolytes that include an at least partially fluorinated polyaromatic polymer backbone; and at least one cationic functional group pendant therefrom. Also provided are anion exchange membranes (AEMs) formed from at least one anion exchange polyelectrolyte according to an embodiment of the invention, and fuel cells including such AEMs.

Abstract: Embodiments of the present disclosure include functionalized polyhedral oligomeric silsesquioxane compositions or mixtures, methods of using functionalized polyhedral oligomeric silsesquioxane compositions, structures including functionalized polyhedral oligomeric silsesquioxane, and the like.

Abstract: A fuel cell (100) includes a cation exchange membrane (110), a first anion exchange membrane (120) and a second anion exchange membrane (130). The cation exchange membrane (110) has a first side and an opposite second side. The first anion exchange membrane (120) has a first exterior surface and an opposite first interior surface disposed along at least a portion to the first side of the cation exchange membrane (110). A catalyst (140) is embedded along the first exterior surface. The second anion exchange membrane (130) has a second exterior surface and an opposite second interior surface disposed along at least a portion to the second side of the cation exchange membrane (110). A catalyst (142) is embedded along the second exterior surface. A stack of fuel cells (700) include a first fuel cell (701) with an acidic first anode (714) that is electrically coupled to an alkaline second cathode (722) of a second fuel cell (720).

Abstract: A fuel cell includes a porous frit based composite proton exchange membrane. The pores of the porous frit are filled with a proton-conducting material.

Abstract: Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a photodefinable polymer having a sacrificial polymer and a photoinitiator.