Patents by Inventor Pei Yu Wang
Pei Yu Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12113122Abstract: A method includes forming isolation regions extending into a semiconductor substrate, wherein semiconductor strips are located between the isolation regions, and forming a dielectric dummy strip between the isolation regions, recessing the isolation regions. Some portions of the semiconductor strips protrude higher than top surfaces of the recessed isolation regions to form protruding semiconductor fins, and a portion of the dielectric dummy strip protrudes higher than the top surfaces of the recessed isolation regions to form a dielectric dummy fin. The method further includes etching the dielectric dummy fin so that a top width of the dielectric dummy fin is smaller than a bottom width of the dielectric dummy fin. A gate stack is formed on top surfaces and sidewalls of the protruding semiconductor fins and the dielectric dummy fin.Type: GrantFiled: March 3, 2023Date of Patent: October 8, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Shih-Yao Lin, Pei-Hsiu Wu, Chih Ping Wang, Chih-Han Lin, Jr-Jung Lin, Yun Ting Chou, Chen-Yu Wu
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Publication number: 20240332022Abstract: A semiconductor device includes a first fin protruding upwardly from a substrate, a second fin protruding upwardly from the substrate, a first gate structure having a first portion that at least partially wraps around an upper portion of the first fin and a second portion that at least partially wraps around an upper portion of the second fin, a second gate structure having a portion that at least partially wraps around the upper portion of the first fin, and a dielectric feature having a first portion between the first and second portions of the first gate structure. In a lengthwise direction of the first fin, the dielectric feature has a second portion extending to a sidewall of the second gate structure.Type: ApplicationFiled: May 23, 2024Publication date: October 3, 2024Inventors: Pei-Yu Wang, Zhi-Chang Lin, Ching-Wei Tsai, Kuan-Lun Cheng
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Publication number: 20240332169Abstract: Semiconductor devices and method of forming the same are disclosed herein. A semiconductor device according to the present disclosure includes a first dielectric layer having a first top surface and a contact via extending through the first dielectric layer and rising above the first top surface of the first dielectric layer.Type: ApplicationFiled: June 10, 2024Publication date: October 3, 2024Inventors: Pei-Yu Wang, Cheng-Ting Chung, Wei Ju Lee
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Patent number: 12094973Abstract: Embodiments of the present disclosure provide a method for forming backside metal contacts with reduced Cgd and increased speed. Particularly, source/drain features on the drain side, or source/drain features without backside metal contact, are recessed from the backside to the level of the inner spacer to reduce Cgd. Some embodiments of the present disclosure use a sacrificial liner to protect backside alignment feature during backside processing, thus, preventing shape erosion of metal conducts and improving device performance.Type: GrantFiled: July 27, 2022Date of Patent: September 17, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chun-Yuan Chen, Huan-Chieh Su, Pei-Yu Wang, Chih-Hao Wang
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Patent number: 12057341Abstract: Semiconductor devices and methods of forming the same are provided. A method according to the present disclosure includes providing a workpiece including a frontside and a backside. The workpiece includes a substrate, a first plurality of channel members over a first portion of the substrate, a second plurality of channel members over a second portion of the substrate, an isolation feature sandwiched between the first and second portions of the substrate. The method also includes forming a joint gate structure to wrap around each of the first and second pluralities of channel members, forming a pilot opening in the isolation feature, extending the pilot opening through the join gate structure to form a gate cut opening that separates the joint gate structure into a first gate structure and a second gate structure, and depositing a dielectric material into the gate cut opening to form a gate cut feature.Type: GrantFiled: September 1, 2021Date of Patent: August 6, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chun-Yuan Chen, Pei-Yu Wang, Huan-Chieh Su, Yi-Hsun Chiu, Cheng-Chi Chuang, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang
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Publication number: 20240258237Abstract: In an embodiment, a device includes: a first fin; a gate structure over the first fin; a first source/drain region adjacent the gate structure; an etch stop layer over the first source/drain region; a conductive line over the etch stop layer, the conductive line isolated from the first source/drain region by the etch stop layer, a top surface of the conductive line being coplanar with a top surface of the gate structure; and a power rail contact extending through the first fin, the power rail contact connected to the first source/drain region.Type: ApplicationFiled: April 11, 2024Publication date: August 1, 2024Inventors: Pei-Yu Wang, Yu-Xuan Huang
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Publication number: 20240258397Abstract: The present disclosure relates to a semiconductor device having a backside source/drain contact, and method for forming the device. The semiconductor device includes a source/drain feature having a top surface and a bottom surface, a first silicide layer formed in contact with the top surface of the source/drain feature, a first conductive feature formed on the first silicide layer, and a second conductive feature having a body portion and a first sidewall portion extending from the body portion, wherein the body portion is below the bottom surface of the source/drain feature, and the first sidewall portion is in contact with the first conductive feature.Type: ApplicationFiled: February 28, 2024Publication date: August 1, 2024Inventors: Chun-Yuan CHEN, Pei-Yu WANG, Huan-Chieh SU, Chih-Hao WANG
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Publication number: 20240239562Abstract: An anti-opening container includes a first box and a second box. The first box includes a first body and a first box section. The first body includes a first side wall. The first box section is formed by the extension of the first side wall. The second box includes a second body, a second box section and an extension section. The second body includes a second base and a second side wall. The second box section is formed by the extension of the second side wall. When the first box and the second box are combined, the first box section is stacked on the second box section. The extension section is formed by the extension of the second side wall, and includes a fastener and a gripping section. When the fastener fits into the first fastening groove, the gripping section is located outside the first fastening groove.Type: ApplicationFiled: February 22, 2023Publication date: July 18, 2024Applicant: SOUTH PLASTIC INDUSTRY CO., LTD.Inventors: Tong-Chang WANG, Pei-Yu WANG
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Publication number: 20240239552Abstract: An anti-opening container includes a first box and a second box. The first box includes a first body, a first box section and a first gripping section. The first box section is formed by the extension of the first body. The second box includes a second body, a second box section, a second gripping section, an extension section, and a fastener section. The second box section is formed by the extension of the second body. The fastener section is connected to the extension section via a perforated line. The fastener section is embedded in the first box section. When the first gripping section and the second gripping section are displaced in opposite directions, the perforated line breaks, and the first box section and the fastener section are separated from the second box section together to separate the first box and the second box.Type: ApplicationFiled: February 22, 2023Publication date: July 18, 2024Applicant: SOUTH PLASTIC INDUSTRY CO., LTD.Inventors: Tong-Chang WANG, Pei-Yu WANG
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Publication number: 20240241744Abstract: A virtual machine (VM) operating system (OS) configuration system includes a processor, wherein the processor is arranged to execute a host VM, a hypervisor, a root module, and a guest VM. The host VM is arranged to generate a driving signal for driving a booting of a guest VM. The hypervisor is arranged to generate a first trigger signal according to the driving signal, for triggering verification of a descriptor. The root module is arranged to verify the descriptor according to the first trigger signal to generate a verified descriptor, and store the verified descriptor in a protected memory, wherein an OS of the guest VM is configured according to the verified descriptor.Type: ApplicationFiled: August 29, 2023Publication date: July 18, 2024Applicant: MEDIATEK INC.Inventors: Chih-Hsiang Hsiao, Ze-Yu Wang, Yingshiuan Pan, Pei-Lun Suei
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Publication number: 20240213316Abstract: A method for forming a nanosheet device is provided. The method includes epitaxially growing a conformal semiconductor layer from a first stack of semiconductor layers and a second stack of the semiconductor layers. Each of the first and second stack of semiconductor layers includes a plurality of first semiconductor layers and a plurality of second semiconductor layers alternately stacked on each other. A space between the first and second stacks of semiconductor layers is filled with a dielectric fin. The conformal semiconductor layer and the second semiconductor layers may be removed. A metal gate structure is formed over the first semiconductor layers and filling openings created by removal of the conformal semiconductor layer and the second semiconductor layer. A process may be performed on the metal gate structure to form an isolation between the portions of the metal gate structure being separated by a patterning process.Type: ApplicationFiled: January 24, 2023Publication date: June 27, 2024Inventors: Yi-Ruei JHAN, Pei-Yu WANG, Cheng-Ting CHUNG, Kuan-Ting PAN, Shi Ning JU, Kuo-Cheng CHIANG, Chih-Hao WANG
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Publication number: 20240194762Abstract: The present disclosure provides a method of forming a semiconductor device including an nFET structure and a pFET structure where each of the nFET and pFET structures include a semiconductor substrate and a gate trench. The method includes depositing an interfacial layer in each gate trench, depositing a first ferroelectric layer over the interfacial layer, removing the first ferroelectric layer from the nFET structure, depositing a metal oxide layer in each gate trench, depositing a second ferroelectric layer over the metal oxide layer, removing the second ferroelectric layer from the pFET structure, and depositing a gate electrode in each gate trench.Type: ApplicationFiled: February 26, 2024Publication date: June 13, 2024Inventors: Min Cao, Pei-Yu Wang, Sai-Hooi Yeong, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang
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Publication number: 20240194749Abstract: In an embodiment, a device includes: a first nanostructure over a substrate, the first nanostructure including a channel region and a first lightly doped source/drain region, the first lightly doped source/drain region adjacent the channel region; a first epitaxial source/drain region wrapped around four sides of the first lightly doped source/drain region; an interlayer dielectric over the first epitaxial source/drain region; a source/drain contact extending through the interlayer dielectric, the source/drain contact wrapped around four sides of the first epitaxial source/drain region; and a gate stack adjacent the source/drain contact and the first epitaxial source/drain region, the gate stack wrapped around four sides of the channel region.Type: ApplicationFiled: February 19, 2024Publication date: June 13, 2024Inventors: Sai-Hooi Yeong, Pei-Yu Wang, Chi On Chui
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Patent number: 12009293Abstract: Semiconductor devices and method of forming the same are disclosed herein. A semiconductor device according to the present disclosure includes a first dielectric layer having a first top surface and a contact via extending through the first dielectric layer and rising above the first top surface of the first dielectric layer.Type: GrantFiled: March 14, 2022Date of Patent: June 11, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Pei-Yu Wang, Cheng-Ting Chung, Wei Ju Lee
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Patent number: 11996293Abstract: A semiconductor device includes a substrate, a first semiconductor fin and a second semiconductor fin protruding from the substrate, an isolation feature disposed on the substrate and on sidewalls of the first and second semiconductor fins, a gate structure disposed on the isolation feature. The semiconductor device also includes a dielectric fin disposed on the isolation feature and sandwiched between the first and second semiconductor fins. A middle portion of the dielectric fin separates the gate structure into a first gate structure segment engaging the first semiconductor fin and a second gate structure segment engaging the second semiconductor fin.Type: GrantFiled: August 2, 2021Date of Patent: May 28, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Pei-Yu Wang, Zhi-Chang Lin, Ching-Wei Tsai, Kuan-Lun Cheng
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Patent number: 11984402Abstract: In an embodiment, a device includes: a first fin; a gate structure over the first fin; a first source/drain region adjacent the gate structure; an etch stop layer over the first source/drain region; a conductive line over the etch stop layer, the conductive line isolated from the first source/drain region by the etch stop layer, a top surface of the conductive line being coplanar with a top surface of the gate structure; and a power rail contact extending through the first fin, the power rail contact connected to the first source/drain region.Type: GrantFiled: July 21, 2022Date of Patent: May 14, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Pei-Yu Wang, Yu-Xuan Huang
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Publication number: 20240145319Abstract: A semiconductor device package includes a supporting element, a transparent plate disposed on the supporting element, a semiconductor device disposed under the transparent plate, and a lid surrounding the transparent plate. The supporting element and the transparent plate define a channel.Type: ApplicationFiled: January 2, 2024Publication date: May 2, 2024Applicant: Advanced Semiconductor Engineering, Inc.Inventors: Tsung-Yu LIN, Pei-Yu WANG, Chung-Wei HSU
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Publication number: 20240105794Abstract: An integrated circuit includes a semiconductor nanostructure transistor. The semiconductor nanostructure transistor includes a plurality of semiconductor nanostructures corresponding to channel regions conductor Nanostructure transistor. A gate metal surrounds the semiconductor nanostructures. The gate metal has differing gate length dimension above the semiconductor nanostructures compared to the gate length between the semiconductor nanostructures.Type: ApplicationFiled: February 13, 2023Publication date: March 28, 2024Inventor: Pei-Yu WANG
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Publication number: 20240105847Abstract: A method for forming a semiconductor arrangement comprises forming a fin over a semiconductor layer. A gate structure is formed over a first portion of the fin. A second portion of the fin adjacent to the first portion of the fin and a portion of the semiconductor layer below the second portion of the fin are removed to define a recess. A stress-inducing material is formed in the recess. A first semiconductor material is formed in the recess over the stress-inducing material. The first semiconductor material is different than the stress-inducing material.Type: ApplicationFiled: December 11, 2023Publication date: March 28, 2024Inventors: Pei-Yu WANG, Sai-Hooi YEONG
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Patent number: 11942530Abstract: The present disclosure relates to a semiconductor device having a backside source/drain contact, and method for forming the device. The semiconductor device includes a source/drain feature having a top surface and a bottom surface, a first silicide layer formed in contact with the top surface of the source/drain feature, a first conductive feature formed on the first silicide layer, and a second conductive feature having a body portion and a first sidewall portion extending from the body portion, wherein the body portion is below the bottom surface of the source/drain feature, and the first sidewall portion is in contact with the first conductive feature.Type: GrantFiled: December 6, 2021Date of Patent: March 26, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chun-Yuan Chen, Pei-Yu Wang, Huan-Chieh Su, Chih-Hao Wang