Patents by Inventor Pei Yu Wang

Pei Yu Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210366716
    Abstract: A semiconductor device includes a substrate, a first semiconductor fin and a second semiconductor fin protruding from the substrate, an isolation feature disposed on the substrate and on sidewalls of the first and second semiconductor fins, a gate structure disposed on the isolation feature. The semiconductor device also includes a dielectric fin disposed on the isolation feature and sandwiched between the first and second semiconductor fins. A middle portion of the dielectric fin separates the gate structure into a first gate structure segment engaging the first semiconductor fin and a second gate structure segment engaging the second semiconductor fin.
    Type: Application
    Filed: August 2, 2021
    Publication date: November 25, 2021
    Inventors: Pei-Yu Wang, Zhi-Chang Lin, Ching-Wei Tsai, Kuan-Lun Cheng
  • Publication number: 20210367075
    Abstract: A method for forming a semiconductor arrangement comprises forming a fin over a semiconductor layer. A gate structure is formed over a first portion of the fin. A second portion of the fin adjacent to the first portion of the fin and a portion of the semiconductor layer below the second portion of the fin are removed to define a recess. A stress-inducing material is formed in the recess. A first semiconductor material is formed in the recess over the stress-inducing material. The first semiconductor material is different than the stress-inducing material.
    Type: Application
    Filed: August 9, 2021
    Publication date: November 25, 2021
    Inventors: Pei-Yu WANG, Sai-Hooi YEONG
  • Patent number: 11177344
    Abstract: A semiconductor device includes a substrate, semiconductor wires disposed over the substrate, a gate structure wrapping around each of the semiconductor wires, and an epitaxial source/drain (S/D) feature in contact with the semiconductor wires. A portion of the epitaxial S/D feature is horizontally surrounded by an air gap.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: November 16, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Pei-Yu Wang, Wei Ju Lee
  • Publication number: 20210343639
    Abstract: An integrated circuit (IC) structure includes a gate structure, a source epitaxial structure, a drain epitaxial structure, a front-side interconnection structure, a backside dielectric layer, an epitaxial regrowth layer, and a backside via. The source epitaxial structure and the drain epitaxial structure are respectively on opposite sides of the gate structure. The front-side interconnection structure is over a front-side of the source epitaxial structure and a front-side of the drain epitaxial structure. The backside dielectric layer is over a backside of the source epitaxial structure and a backside of the drain epitaxial structure. The epitaxial regrowth layer is on the backside of a first one of the source epitaxial structure and the drain epitaxial structure. The backside via extends through the backside dielectric layer and overlaps the epitaxial regrowth layer.
    Type: Application
    Filed: January 26, 2021
    Publication date: November 4, 2021
    Inventors: Pei-Yu Wang, Yu-Xuan Huang
  • Publication number: 20210336063
    Abstract: In an embodiment, a device includes: a first interconnect structure including metallization patterns; a second interconnect structure including a power rail; a device layer between the first interconnect structure and the second interconnect structure, the device layer including a first transistor, the first transistor including an epitaxial source/drain region; and a conductive via extending through the device layer, the conductive via connecting the power rail to the metallization patterns, the conductive via contacting the epitaxial source/drain region.
    Type: Application
    Filed: August 20, 2020
    Publication date: October 28, 2021
    Inventors: Yi-Bo Liao, Yu-Xuan Huang, Pei-Yu Wang, Cheng-Ting Chung, Ching-Wei Tsai, Hou-Yu Chen
  • Publication number: 20210335709
    Abstract: In an embodiment, a device includes: a first fin; a gate structure over the first fin; a first source/drain region adjacent the gate structure; an etch stop layer over the first source/drain region; a conductive line over the etch stop layer, the conductive line isolated from the first source/drain region by the etch stop layer, a top surface of the conductive line being coplanar with a top surface of the gate structure; and a power rail contact extending through the first fin, the power rail contact connected to the first source/drain region.
    Type: Application
    Filed: September 9, 2020
    Publication date: October 28, 2021
    Inventors: Pei-Yu Wang, Yu-Xuan Huang
  • Patent number: 11158721
    Abstract: The present disclosure provides a method of forming a semiconductor device including an nFET structure and a pFET structure where each of the nFET and pFET structures include a semiconductor substrate and a gate trench. The method includes depositing an interfacial layer in each gate trench; depositing a first metal oxide layer over the interfacial layer; removing the first metal oxide layer from the pFET structure; depositing a ferroelectric layer in each gate trench; depositing a second metal oxide layer over the ferroelectric layer; removing the second metal oxide layer from the nFET structure; and depositing a gate electrode in each gate trench.
    Type: Grant
    Filed: June 8, 2020
    Date of Patent: October 26, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Min Cao, Pei-Yu Wang, Sai-Hooi Yeong, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20210305393
    Abstract: A semiconductor device according to the present disclosure includes a vertical stack of channel members, a gate structure over and around the vertical stack of channel members, and a first source/drain feature and a second source/drain feature. Each of the vertical stack of channel members extends along a first direction between the first source/drain feature and the second source/drain feature. Each of the vertical stack of channel members is spaced apart from the first source/drain feature by a silicide feature.
    Type: Application
    Filed: March 31, 2020
    Publication date: September 30, 2021
    Inventor: Pei-Yu Wang
  • Publication number: 20210289652
    Abstract: In an example, a device mount may include a plurality of mounting standoffs which may be arranged in a mounting arrangement. Each mounting standoff of the plurality of mounting standoffs may include a fixed end and a free end disposed away from the fixed end. The fixed end may securably mount to a chassis of an electronic device. Additionally, the free end may engage with a mounting interface of a device board. The mounting standoff may also include a threaded cavity extending into the mounting standoff from the fixed end. The mounting standoff may also include a retention nut to engage with the free end to fix the device board to the mounting standoff.
    Type: Application
    Filed: September 14, 2017
    Publication date: September 16, 2021
    Inventors: Yao Wen Fan, Pei Yu Wang, Yu Wei Tan, Huang Chung Hung
  • Publication number: 20210249509
    Abstract: A device includes a first semiconductor strip protruding from a substrate, a second semiconductor strip protruding from the substrate, an isolation material surrounding the first semiconductor strip and the second semiconductor strip, a nanosheet structure over the first semiconductor strip, wherein the nanosheet structure is separated from the first semiconductor strip by a first gate structure including a gate electrode material, wherein the first gate structure partially surrounds the nanosheet structure, and a first semiconductor channel region and a semiconductor second channel region over the second semiconductor strip, wherein the first semiconductor channel region is separated from the second semiconductor channel region by a second gate structure including the gate electrode material, wherein the second gate structure extends on a top surface of the second semiconductor strip.
    Type: Application
    Filed: February 11, 2020
    Publication date: August 12, 2021
    Inventors: Pei-Yu Wang, Pei-Hsun Wang
  • Patent number: 11088281
    Abstract: A method for forming a semiconductor arrangement comprises forming a fin over a semiconductor layer. A gate structure is formed over a first portion of the fin. A second portion of the fin adjacent to the first portion of the fin and a portion of the semiconductor layer below the second portion of the fin are removed to define a recess. A stress-inducing material is formed in the recess. A first semiconductor material is formed in the recess over the stress-inducing material. The first semiconductor material is different than the stress-inducing material.
    Type: Grant
    Filed: September 20, 2019
    Date of Patent: August 10, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Pei-Yu Wang, Sai-Hooi Yeong
  • Patent number: 11081356
    Abstract: A method includes providing a structure having a substrate, first and second semiconductor fins extending from the substrate, and a dielectric fin between the first and second semiconductor fins; forming a temporary gate on top and sidewalls of the first and second semiconductor fins and the dielectric fin; forming gate spacers on sidewalls of the temporary gate; removing the temporary gate and a first portion of the dielectric fin between the gate spacers; forming a gate between the gate spacers and on top and sidewalls of the first and second semiconductor fins, wherein the dielectric fin is in physical contact with sidewalls of the gate; removing a second portion of the dielectric fin, thereby exposing the sidewalls of the gate; and performing an etching process to the gate through the exposed sidewalls of the gate, thereby separating the gate into a first gate segment and a second gate segment.
    Type: Grant
    Filed: March 27, 2019
    Date of Patent: August 3, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Pei-Yu Wang, Zhi-Chang Lin, Ching-Wei Tsai, Kuan-Lun Cheng
  • Publication number: 20210217890
    Abstract: A semiconductor device and a method of forming the same are provided. A semiconductor device according to an embodiment includes a P-type field effect transistor (PFET) and an N-type field effect transistor (NFET). The PFET includes a first gate structure formed over a substrate, a first spacer disposed on a sidewall of the first gate structure, and an unstrained spacer disposed on a sidewall of the first spacer. The NET includes a second gate structure formed over the substrate, the first spacer disposed on a sidewall of the second gate structure, and a strained spacer disposed on a sidewall of the first spacer.
    Type: Application
    Filed: March 29, 2021
    Publication date: July 15, 2021
    Inventors: Kai-Chieh Yang, Li-Yang Chuang, Pei-Yu Wang, Wei Ju Lee, Ching-Wei Tsai, Kuan-Lun Cheng
  • Patent number: 11031481
    Abstract: In a method for manufacturing a semiconductor device, a gate structure is formed over a channel layer and an isolation insulating layer. A first sidewall spacer layer is formed on a side surface of the gate structure. A sacrificial layer is formed so that an upper portion of the gate structure with the first sidewall spacer layer is exposed from the sacrificial layer and a bottom portion of the gate structure with the first sidewall spacer layer is embedded in the first sacrificial layer. A space is formed between the bottom portion of the gate structure and the sacrificial layer by removing at least part of the first sidewall spacer layer. After the first sidewall spacer layer is removed, an air gap is formed between the bottom portion of the gate structure and the sacrificial layer by forming a second sidewall spacer layer over the gate structure.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: June 8, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Hsiung Lin, Chia-Hao Chang, Chih-Hao Wang, Wai-Yi Lien, Chih-Chao Chou, Pei-Yu Wang
  • Publication number: 20210147034
    Abstract: A harmonic drive system for a pedal-electric-cycle comprises a transmission gear device including a wave generator assembled by an elliptical cam and a flexible bearing, a flexible-flexspline, a rigid-circular-spline having rigid-circular-spline internal gear teeth, a gear set, and a one-way clutch having an inner surface defining a space for containing a spindle of the pedal-electric-cycle. A first end of the flexible-flexspline has flexible-flexspline external gear teeth for meshing with the rigid-circular-spline internal gear teeth and an inner surface defining a space for containing the wave generator. The gear set has a first input portion connected to a second end of the flexible-flexspline, a second input portion having an inner surface defining a space for containing the one-way clutch, and an output portion connected to a sprocket of the pedal-electric-cycle. The first input portion has a first-input rotational axis. The second input portion has a second-input rotational axis.
    Type: Application
    Filed: August 4, 2020
    Publication date: May 20, 2021
    Inventors: Pei Yu WANG, Wei Sheng KE
  • Publication number: 20210122301
    Abstract: A vehicle decorative plate and a forming method thereof are disclosed. The vehicle decorative plate can be made into a vehicle emblem, a vehicle grille, a vehicle front bumper trim, a vehicle door trim or a vehicle rear bumper trim. The vehicle decorative plate includes a curved substrate, a display layer, and a curved covering. After the curved substrate is coated with a plating layer, unnecessary parts of the plating layer are removed by laser engraving to process the plating layer into the display layer. The curved covering is attached to the curved substrate and covers the display layer. At least one of the curved substrate and the curved covering is transparent or semi-transparent.
    Type: Application
    Filed: August 27, 2020
    Publication date: April 29, 2021
    Inventors: YI-KUAN LIN, PEI-YU WANG, FU-CHIEH HU
  • Patent number: 10964816
    Abstract: A semiconductor device and a method of forming the same are provided. A semiconductor device according to an embodiment includes a P-type field effect transistor (PFET) and an N-type field effect transistor (NFET). The PFET includes a first gate structure formed over a substrate, a first spacer disposed on a sidewall of the first gate structure, and an unstrained spacer disposed on a sidewall of the first spacer. The NET includes a second gate structure formed over the substrate, the first spacer disposed on a sidewall of the second gate structure, and a strained spacer disposed on a sidewall of the first spacer.
    Type: Grant
    Filed: June 14, 2019
    Date of Patent: March 30, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kai-Chieh Yang, Li-Yang Chuang, Pei-Yu Wang, Wei Ju Lee, Ching-Wei Tsai, Kuan-Lun Cheng
  • Publication number: 20210091179
    Abstract: A semiconductor device includes a substrate, semiconductor wires disposed over the substrate, a gate structure wrapping around each of the semiconductor wires, and an epitaxial source/drain (S/D) feature in contact with the semiconductor wires. A portion of the epitaxial S/D feature is horizontally surrounded by an air gap.
    Type: Application
    Filed: September 25, 2019
    Publication date: March 25, 2021
    Inventors: Pei-Yu Wang, Wei Ju Lee
  • Publication number: 20210082803
    Abstract: Semiconductor devices and method of forming the same are disclosed herein. A semiconductor device according to the present disclosure includes a first dielectric layer having a first top surface and a contact via extending through the first dielectric layer and rising above the first top surface of the first dielectric layer.
    Type: Application
    Filed: September 17, 2019
    Publication date: March 18, 2021
    Inventors: Pei-Yu Wang, Cheng-Ting Chung, Wei Ju Lee
  • Publication number: 20210066469
    Abstract: The present disclosure provides a method of forming a semiconductor device including an nFET structure and a pFET structure where each of the nFET and pFET structures include a semiconductor substrate and a gate trench. The method includes depositing an interfacial layer in each gate trench; depositing a first metal oxide layer over the interfacial layer; removing the first metal oxide layer from the pFET structure; depositing a ferroelectric layer in each gate trench; depositing a second metal oxide layer over the ferroelectric layer; removing the second metal oxide layer from the nFET structure; and depositing a gate electrode in each gate trench.
    Type: Application
    Filed: June 8, 2020
    Publication date: March 4, 2021
    Inventors: Min Cao, Pei-Yu Wang, Sai-Hooi Yeong, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang