Patents by Inventor Peng Shen

Peng Shen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10347498
    Abstract: Methods for minimizing plasma-induced sidewall damage during low k etch processes are disclosed. The methods etch the low k layers using the plasma activated vapor of an organofluorine compound having a formula selected from the group consisting of N?C—R; (N?C—)—(R)—(—C?N); Rx[—C?N(Rz)]y; and R(3-a)—N—Ha, wherein a=1-2, x=1-2, y=1-2, z=0-1, x+z=1-3, and each R independently has the formula HaFbCc with a=0-11, b=0-11, and c=0-5.
    Type: Grant
    Filed: March 16, 2018
    Date of Patent: July 9, 2019
    Assignee: L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
    Inventors: Chih-yu Hsu, Peng Shen, Nathan Stafford
  • Publication number: 20190207874
    Abstract: A data accessing method of a switch for transmitting data packets between a first source node and a first target node and between a second source node and a second target node includes: transmitting a data packet to the switch via at least one of the first communication link and the third communication link and configuring the control unit to store information contained in the data packet into the storage unit; and retrieving the information contained in the data packet from the storage unit via at least one of the second communication link and the fourth communication link. The first source node, the second source node, the first target node and the second target node share the same storage blocks.
    Type: Application
    Filed: March 8, 2019
    Publication date: July 4, 2019
    Inventors: Xiaoliang KANG, Jiin LAI, Weilin WANG, Peng SHEN
  • Publication number: 20190206696
    Abstract: Methods for isotropic etching at least a portion of a silicon-containing layer on a sidewall of high-aspect-ratio (HAR) apertures formed on a substrate in a reaction chamber are disclosed. The HAR aperture formed by plasma etching a stack of alternating layers of a first silicon-containing layer and a second silicon-containing layer, the second silicon-containing layer is different from the first silicon-containing layer. The method comprising the steps of: a) introducing a fluorine containing etching gas selected from the group consisting of nitrosyl fluoride (FNO), trifluoroamine oxide (F3NO), nitryl fluoride (FNO2) and combinations thereof into the reaction chamber; and b) removing at least a portion of the second silicon-containing layers by selectively etching the second silicon-containing layers versus the first silicon-containing layers with the fluorine containing etching gas to produce recesses between the first silicon-containing layers on the sidewall of the HAR aperture.
    Type: Application
    Filed: December 29, 2017
    Publication date: July 4, 2019
    Inventors: Chih-Yu Hsu, Peng Shen, Takashi Teramoto, Nathan Stafford, Jiro Yokota
  • Patent number: 10270714
    Abstract: A switch for transmitting data packets between at least one source node and at least one target node is provided. The switch includes a storage unit, a control unit, at least one receiving port and at least one transmitting port. The storage unit includes a plurality of storage blocks and configured to cache the data packets. The control unit is configured to manage the storage blocks. The switch receives and caches the data packets transmitted from the at least one source node via the receiving port and transmits the cached data packets to the at least one target node via the transmitting port. A data accessing method adapted for the switch is also provided.
    Type: Grant
    Filed: October 21, 2016
    Date of Patent: April 23, 2019
    Assignee: VIA Alliance Semiconductor Co., Ltd.
    Inventors: Xiaoliang Kang, Jiin Lai, Weilin Wang, Peng Shen
  • Publication number: 20190086564
    Abstract: A method is described for full waveform inversion using a b-spline projection that produces an earth model that can be used for seismic imaging. The method may be executed by a computer system.
    Type: Application
    Filed: September 20, 2018
    Publication date: March 21, 2019
    Applicant: Chevron U.S.A. Inc.
    Inventors: Peng Shen, Uwe K. Albertin, Lin Zhang
  • Patent number: 10216658
    Abstract: A schedule for refreshing a dynamic random access memory (DRAM). Access commands for a DRAM are queued in a command queue. A microcontroller uses a counter to count how many times a rank of the DRAM is refreshed entirely (whether by a one-time per-rank refresh operation or by a series of per-bank refresh operations). When the counter has not reached an upper limit and no access command corresponding to the rank is waiting in the command queue, the microcontroller repeatedly performs the per-rank refresh operation on the rank. Every refresh inspection interval, the microcontroller decreases the counter by 1.
    Type: Grant
    Filed: May 19, 2017
    Date of Patent: February 26, 2019
    Assignee: VIA ALLIANCE SEMICONDUCTOR CO., LTD.
    Inventors: Chen Chen, Peng Shen
  • Publication number: 20180366336
    Abstract: Replacement chemistries for the cC4F8 passivation gas in the Bosch etch process and processes for using the same are disclosed. These chemistries have the formula CxHyFz, with 1?x<7, 1?y?13, and 1?z?13. The replacement chemistries may reduce RIE lag associated with deep silicon aperture etching.
    Type: Application
    Filed: August 28, 2018
    Publication date: December 20, 2018
    Inventors: Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Vincent M. Omarjee, Nathan Stafford
  • Publication number: 20180355463
    Abstract: The Invention relates to an atmospheric-pressure acetylene carburizing furnace, comprises a reaction chamber, an acetylene intake duct, an exhaust gas duct, a control and metering apparatus, an exhaust gas measurement apparatus, and a computer controller. The computer controller calculates a total amount of carbon in the furnace and an enrichment rate of a workpiece, and adjusts an acetylene intake volume according to the calculation result until process requirements are met. The Invention realizes carburizing with acetylene under atmospheric pressure and reduces the usage costs while improving the equipment efficiency.
    Type: Application
    Filed: April 13, 2018
    Publication date: December 13, 2018
    Inventors: Jingfeng YANG, Peng SHEN, Fan YANG
  • Patent number: 10103031
    Abstract: Replacement chemistries for the cC4F8 passivation gas in the Bosch etch process and processes for using the same are disclosed. These chemistries have the formula CxHyFz, with 1?x<7, 1?y?13, and 1?z?13. The replacement chemistries may reduce RIE lag associated with deep silicon aperture etching.
    Type: Grant
    Filed: September 8, 2017
    Date of Patent: October 16, 2018
    Assignees: L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Georges Claude, American Air Liquide, Inc., Air Liquide Electronics U.S. LP
    Inventors: Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Vincent M. Omarjee, Nathan Stafford
  • Publication number: 20180232329
    Abstract: A schedule for refreshing a dynamic random access memory (DRAM). Access commands for a DRAM are queued in a command queue. A microcontroller uses a counter to count how many times a rank of the DRAM is refreshed entirely (whether by a one-time per-rank refresh operation or by a series of per-bank refresh operations). When the counter has not reached an upper limit and no access command corresponding to the rank is waiting in the command queue, the microcontroller repeatedly performs the per-rank refresh operation on the rank. Every refresh inspection interval, the microcontroller decreases the counter by 1.
    Type: Application
    Filed: May 19, 2017
    Publication date: August 16, 2018
    Inventors: Chen CHEN, Peng SHEN
  • Publication number: 20180211845
    Abstract: Methods for minimizing plasma-induced sidewall damage during low k etch processes are disclosed. The methods etch the low k layers using the plasma activated vapor of an organofluorine compound having a formula selected from the group consisting of N?C—R; (N?C—)—(R)—(—C?N); Rx[—C?N(Rz)]y; and R(3-a)—N—Ha, wherein a=1-2, x=1-2, y=1-2, z=0-1, x+z=1-3, and each R independently has the formula HaFbCc with a=0-11, b=0-11, and c=0-5.
    Type: Application
    Filed: March 16, 2018
    Publication date: July 26, 2018
    Inventors: Chih-yu Hsu, Peng Shen, nathan Stafford
  • Publication number: 20180187284
    Abstract: Disclosed are a high-pressure liquid-state or supercritical-state quenching apparatus, comprising a working chamber, a heating device, a cooling device, a vacuum pump set, a storage tank, a buffer tank, a gas booster, a first pressure gauge, and a temperature controller. According to the Invention, vacuum liquid-state or supercritical-state quenching is implemented, which satisfies a quenching requirement of a large workpiece, and can also achieve an effect of high-pressure gas quenching. In addition, clean heat treatment is implemented, which avoids waste gas and waste water pollution, and is energy-saving and environmentally-friendly heat treatment.
    Type: Application
    Filed: December 29, 2017
    Publication date: July 5, 2018
    Inventors: Jingfeng Yang, Peng Shen, Fan Yang
  • Patent number: 9966129
    Abstract: A schedule for refreshing a dynamic random access memory (DRAM). Access commands for a DRAM are queued in a command queue. First-rank bank-refresh time points and second-rank bank-refresh time points are alternately provided within a refresh inspection interval for the microcontroller to alternately refresh a first rank and a second rank of the DRAM bank-by-bank based on the content contained in the command queue.
    Type: Grant
    Filed: May 19, 2017
    Date of Patent: May 8, 2018
    Assignee: VIA ALLIANCE SEMICONDUCTOR CO., LTD.
    Inventors: Chen Chen, Peng Shen
  • Publication number: 20180076046
    Abstract: Replacement chemistries for the cC4F8 passivation gas in the Bosch etch process and processes for using the same are disclosed. These chemistries have the formula CxHyFz, with 1?x<7, 1?y?13, and 1?z?13. The replacement chemistries may reduce RIE lag associated with deep silicon aperture etching.
    Type: Application
    Filed: September 8, 2017
    Publication date: March 15, 2018
    Inventors: Peng SHEN, Christian DUSSARRAT, Curtis ANDERSON, Rahul GUPTA, Vincent M. OMARJEE, Nathan STAFFORD
  • Patent number: 9892932
    Abstract: Replacement chemistries for the cC4F8 passivation gas in the Bosch etch process and processes for using the same are disclosed. These chemistries have the formula CxHyFz, with 1 ?x<7, 1?y?13, and 1?z?13. The replacement chemistries may reduce RIE lag associated with deep silicon aperture etching.
    Type: Grant
    Filed: June 17, 2015
    Date of Patent: February 13, 2018
    Assignees: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, American Air Liquide, Inc., Air Liquide Electronics U.S. LP
    Inventors: Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Vincent M. Omarjee, Nathan Stafford
  • Patent number: 9894001
    Abstract: An I/O circuit includes buffers, a storage module, accumulators, timers, and an arbiter. Each buffer corresponds to a respective virtual channel. Each buffer corresponds to a respective token bucket, and outputs a normal transmission request according to the amount of tokens and an accumulating signal. The storage module stores a lookup table including a plurality of weightings. Each accumulator corresponds to a respective buffer, accumulates a data volume according to the corresponding weighting, and outputs the accumulating signal. Each timer corresponds to a respective buffer, times waiting period after the corresponding buffer outputs the normal transmission request, and outputs a time-out transmission request when the waiting period exceeds a predetermined period. The arbiter receives the time-out transmission requests and the normal transmission requests, and selects one of the buffers from all of the time-out transmission requests and the normal transmission requests.
    Type: Grant
    Filed: December 14, 2015
    Date of Patent: February 13, 2018
    Assignee: VIA ALLIANCE SEMICONDUCTOR CO., LTD.
    Inventors: Wei-Lin Wang, Peng Shen, Jiin Lai, Ziyang Li, Xiaoliang Kang
  • Publication number: 20170365487
    Abstract: Methods for fabricating a 3D NAND flash memory are disclosed. The method includes the steps of forming a hardmask pattern on the hardmask layer, and using the hardmask pattern to form apertures in the alternating layers by selectively plasma etching the alternating layers versus the hardmask layer using a hydrofluorocarbon etching gas selected from the group consisting of 1,1,1,3,3,3-hexafluoropropane (C3H2F6), 1,1,2,2,3,3-hexafluoropropane (iso-C3H2F6), 1,1,1,2,3,3,3-heptafluoropropane (C3HF7), and 1,1,1,2,2,3,3-heptafluoropropane (iso-C3HF7), wherein the first etching layer comprises a material different from that of the second etching layer.
    Type: Application
    Filed: August 31, 2017
    Publication date: December 21, 2017
    Applicant: L'Air Liquide, Societe Anonyme pour l'Etude et I'Exploitation des Procedes Georges Claude
    Inventors: Peng SHEN, Keiichiro URABE, Jiro YOKOTA, Nicolas GOSSET
  • Publication number: 20170331768
    Abstract: A switch for transmitting data packets between at least one source node and at least one target node is provided. The switch includes a storage unit, a control unit, at least one receiving port and at least one transmitting port. The storage unit includes a plurality of storage blocks and configured to cache the data packets. The control unit is configured to manage the storage blocks. The switch receives and caches the data packets transmitted from the at least one source node via the receiving port and transmits the cached data packets to the at least one target node via the transmitting port. A data accessing method adapted for the switch is also provided.
    Type: Application
    Filed: October 21, 2016
    Publication date: November 16, 2017
    Inventors: Xiaoliang KANG, Jiin LAI, Weilin WANG, Peng SHEN
  • Patent number: 9730331
    Abstract: A display panel motherboard and a manufacturing method thereof are provided. The display panel motherboard comprises display panel regions (Q1) spaced apart from each other and precut regions (Q2) adjacent to the display panel regions. The manufacturing method comprises forming an electrical insulating layer (102); and removing at least portions of the electrical insulating layer provided on the precut regions (Q2). The method avoids the problem of other patterns offset on the display panel motherboard caused by the larger internal stress within the electrical insulating layer.
    Type: Grant
    Filed: June 18, 2014
    Date of Patent: August 8, 2017
    Assignees: BOE Technology Group Co., Ltd., Beijing BOE Optoelectronics Technology Co., Ltd.
    Inventors: Guang Yang, Peng Shen, Yanming Wang
  • Publication number: 20170163543
    Abstract: An I/O circuit includes buffers, a storage module, accumulators, timers, and an arbiter. Each buffer corresponds to a respective virtual channel. Each buffer corresponds to a respective token bucket, and outputs a normal transmission request according to the amount of tokens and an accumulating signal. The storage module stores a lookup table including a plurality of weightings. Each accumulator corresponds to a respective buffer, accumulates a data volume according to the corresponding weighting, and outputs the accumulating signal. Each timer corresponds to a respective buffer, times waiting period after the corresponding buffer outputs the normal transmission request, and outputs a time-out transmission request when the waiting period exceeds a predetermined period. The arbiter receives the time-out transmission requests and the normal transmission requests, and selects one of the buffers from all of the time-out transmission requests and the normal transmission requests.
    Type: Application
    Filed: December 14, 2015
    Publication date: June 8, 2017
    Inventors: Wei-Lin WANG, Peng SHEN, Jiin LAI, Ziyang LI, Xiaoliang KANG