Abstract: A method and resulting device for accurately positioning an array of die modules in an imaging array, including larger partial width arrays and full page width arrays, is described herein. The method includes forming physical reference datum directly on an individual silicon die module, and positioning the individual die modules on a temporary holder. The temporary holder includes an alignment tool and singulated die are placed onto the temporary holder by abutting the physical reference datum against the alignment tool. A vacuum temporarily secures the die positioned on the temporary holder, and a permanent substrate is then attached to the die of the temporary holder. The temporary holder is released in favor of the permanent substrate having the accurately aligned die modules thereon.

Abstract: A substantially straight beam in an unbuckled state is compressed to cause the beam to buckle using an adjustable compressor. The adjustable compressor applies force to one or both ends of the beam and limits compression on the beam to allow the beam to move between a first buckled state and a second buckled state. The first buckled state and the second buckled state comprise substantially equal magnitude and opposite direction buckling movements from the unbuckled state.

Abstract: A method of connecting a chip to a package in a semiconductor device includes printing an encapsulant to a predetermined thickness on at least a portion of the chip and package and printing a layer of conductive material on the encapsulant in a predetermined pattern between the chip and package. The printed conductive material conforms to an upper surface of the encapsulant such that the encapsulant defines a distance from the printed conductive material to the chip and package. The method further includes printing a second layer of encapsulant over the printed conductive material curing at least the second layer of encapsulant.

Abstract: A method of fabricating a MEMS inkjet type print head and the resulting device is disclosed. The method includes providing a driver component and separately providing an actuatable membrane component, the actuatable membrane component being formed in the absence of an acid etch removing a sacrificial layer. The separately provided actuatable membrane component is bonded to the driver component and a nozzle plate is attached to the actuatable membrane component subsequent to the bonding. Separately fabricating the components removes the need for hydrofluoric acid etch removal of a sacrificial layer previously required for forming the actuatable membrane with respect to the driver component.

Abstract: A spectral filter includes a two-dimensional array of Fabry-Perot cavity structures, a controller, and a sampling circuit used to switch the Fabry-Perot cavity. The filter receives an incoming image, the sampling circuit switches the cavity to generate a filter image, and the filtered image is detected by the photodetectors to convert a filtered image into digital data. The controller coordinates all the image capture functions of the spectral filter.

Abstract: An optical apparatus may include a plurality of Fabry-Perot cavities and a controller. The plurality of Fabry-Perot cavities receives an incoming image. The controller controls a group of adjacent Fabry-Perot cavities of the plurality of Fabry-Perot cavities to sample spectral information from a pixel of the incoming image. The group maybe designated to the pixel. Sizes of the cavities within the group may differ from one another. The sizes of the cavities within the group may be fixed during the spectral information synthesis operation.

Abstract: A Micro-Electro-Mechanical System (MEMS) based Fabry-Perot array may be used as a spectral filter to light sensing array, such as a CCD or CMOS photodetector. Applying different voltages to the electrodes of individual Fabry-Perot cells within the array allows a gradient in the Fabry-Perot air gap across the Fabry-Perot array. In this manner the MEMS Fabry-Perot array serves as a spectral filter of light passing through the Fabry-Perot array to the photodetector array. Embodiments of the disclosed sensor, used with LEDs that emit light outside the photosensitivity range of a photoreceptor belt, may be used to measure spectral information from toned patches and/or images placed upon a photoreceptor belt within a marking system. Other embodiments of the disclosed senor, used with LEDs that emit light of any wavelength, may be used to measure spectral information from toned patches or images placed by a marking system upon a non-photosensitive output substrate, such as an intermediate belt or paper.

Abstract: A Micro-Electro-Mechanical System (MEMS) based Fabry-Perot array may be used as a spectral filter to light sensing array, such as a CCD or CMOS photodetector. Applying different voltages to the electrodes of individual Fabry-Perot cells within the array allows a gradient in the Fabry-Perot air gap across the Fabry-Perot array. In this manner the MEMS Fabry-Perot array serves as a spectral filter of light passing through the Fabry-Perot array to the photodetector array. Embodiments of the disclosed sensor, used with LEDs that emit light outside the photosensitivity range of a photoreceptor belt, may be used to measure spectral information from toned patches placed upon a photoreceptor belt within a marking system. Other embodiments of the disclosed sensor, used with LEDs that emit light of any wavelength, may be used to measure spectral information from toned patches placed by a marking system upon a non-photosensitive output substrate, such as an intermediate belt or paper.

Abstract: The present application is directed to novel electrostatic actuators and methods of making the electrostatic actuators. In one embodiment, the electrostatic actuator comprises a substrate, an electrode formed on the substrate and a deflectable member positioned in proximity to the electrode so as to provide a gap between the electrode and the deflectable member. The deflectable member is anchored on the substrate via one or more anchors. The gap comprises at least one first region having a first gap height positioned near the one or more anchors and at least one second region having a second gap height positioned farther from the anchors than the first region. The first gap height is smaller than the second gap height.

Abstract: The present application is directed to electrostatic actuators, and methods of making electrostatic actuators. In one embodiment, an electrostatic actuator of the present application comprises a first electrode and a second electrode. The second electrode is positioned in proximity to the first electrode so as to provide a gap between the first electrode and the second electrode. The first electrode is capable of being deflected toward the second electrode. A dielectric structure comprising a dielectric landing post is positioned in the gap between the first electrode and the second electrode, the dielectric structure extending over a greater surface of the gap than the landing post. The landing post protrudes out into the gap so as to limit the minimum contact spacing between the first electrode and the second electrode.

Abstract: An improved waveguide shuttle optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a waveguide shuttle platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alternative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

Abstract: An actuator system that includes two beams that are formed into a diamond pattern. A crossbar is positioned at a midsection to connect the two beams. When power is applied to the two beams, the diamond pattern is driven vertically. An actuator system may also include a substrate and a first layer above a second layer on the substrate. The first and second layers include upper and lower beams joined together at one end of the layers. A method of forming an actuator system includes forming a first layer above a second layer on a substrate, joining the first and second layers together at one end of the layers, and forming upper and lower beams. The upper and lower beams may be different in width, length and thickness to control a vertical movement of the actuator system.

Abstract: An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

Abstract: An optical switch for routing signals includes a latch receiver connected to a waveguide that routes the signals and an actuator that includes an upper plate, a lower plate and a latch connected to the lower plate, the lower plate of the actuator moving vertically when power is applied to the lower plate, causing the latch to move vertically and engage the latch receiver. A latching system includes a switch that includes a latch formed to include an extension on one end of the latch, the latch being driven by power, a latch receiver that is formed to receive the latch and a controller that controls the extension of the latch to engage the latch receiver when the power is applied to the latch, and controls the extension of the latch to lock in place against the latch receiver when the power is removed from the latch.

Abstract: A substantially straight beam in an unbuckled state is compressed to cause the beam to buckle using an adjustable compressor. The adjustable compressor applies force to one or both ends of the beam and limits compression on the beam to allow the beam to move between a first buckled state and a second buckled state. The first buckled state and the second buckled state comprise substantially equal magnitude and opposite direction buckling movements from the unbuckled state.

Abstract: A thermal oxidation process is used to fill trenches with an oxide; however, the oxidation process consumes some of the silicon. The embodiments herein advantageously apply this tendency for the oxidation process to consume silicon so as to convert all the silicon substrate material between the multiple trenches into an oxide. Therefore, because all of the silicon between the multiple trenches is consumed by the oxidation process, the multiple smaller trenches are combined into a single larger trench filled with the oxide.

Abstract: A vent connects a chamber to the external atmosphere surrounding a device to equalize pressure within the chamber. The vent has a size and shape to allow pressure equalization to occur outside a normal operating cycle of the chamber and controls the pressure to prevent undesirable deflection of a membrane within the chamber and ensure proper operation of the device.

Abstract: First and second ridge type photonic waveguides are provided. Each of the waveguides includes a core layer and a reflective cladding layer in continuous contact with a first side of a core layer. The core layer has a core index of the refraction and is formed in a ridge in a dimension and shape to impose lateral confinement. The reflective cladding layer has an index of refraction that is substantially different than the core index of refraction. An inter-waveguide slab portion is provided between the first and second waveguides. A substrate supports the first and second waveguides, the slab portion, and the reflective cladding layer. A light interceptor region is provided to hinder a transfer of photons between the first and second waveguides through the inter-waveguides slab portion. The light interceptor region may include a trench region, which is an air gap in one embodiment.

Abstract: An electrostatic actuator includes a segmented flexible membrane associated with individually addressable electrodes, one for each membrane segment. The electrodes are provided beneath a corresponding one of the membrane segments to define a plurality of actuator chambers between each of the electrodes and the corresponding membrane segment. Control electronics independently provide a bias voltage to select ones or all of the electrodes to generate an electrostatic field between any bias electrode and the corresponding membrane segment to attract the corresponding membrane segment toward the respective electrode. Upon elimination of the bias voltage, the corresponding membrane segments are elastically restored to their previous position. This structure can be incorporated into a fluid drop ejector to achieve variable drop size by control of the number of segments actuated.

Abstract: A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.