Patents by Inventor Peter Trefonas

Peter Trefonas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140227445
    Abstract: A copolymer composition is provided including a block copolymer having a poly(styrene) block and a poly(silyl acrylate) block; wherein the block copolymer exhibits a number average molecular weight, MN, of 1 to 1,000 kg/mol; and, wherein the block copolymer exhibits a polydispersity, PD, of 1 to 2. Also provided are substrates treated with the copolymer composition.
    Type: Application
    Filed: February 8, 2013
    Publication date: August 14, 2014
    Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC
    Inventors: Peter Trefonas, Phillip Hustad, Xinyu Gu, Erin Vogel, Valeriy Ginzburg, Shih-Wei Chang, Daniel Murray
  • Publication number: 20140227447
    Abstract: A block copolymer formulation is provided including a block copolymer blend including a first poly(acrylate)-b-poly(silyl acrylate) block copolymer; and, a second poly(acrylate)-b-poly(silyl acrylate) block copolymer. Also provided are substrates treated with the block copolymer formulation.
    Type: Application
    Filed: February 8, 2013
    Publication date: August 14, 2014
    Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC
    Inventors: Phillip Hustad, Peter Trefonas, Xinyu Gu, Shih-Wei Chang, Valeriy Ginzburg, Erin Vogel, Daniel Murray
  • Patent number: 8795774
    Abstract: Compositions containing certain organometallic oligomers suitable for use as spin-on, metal hardmasks are provided, where such compositions can be tailored to provide a metal oxide hardmask having a range of etch selectivity. Also provided are methods of depositing metal oxide hardmasks using the present compositions.
    Type: Grant
    Filed: September 23, 2012
    Date of Patent: August 5, 2014
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Deyan Wang, Jibin Sun, Peng-Wei Chuang, Peter Trefonas, III, Cong Liu
  • Publication number: 20140202632
    Abstract: Methods of treating the surface of a metal-containing hardmask used in the manufacture of semiconductors by contacting the hardmask surface with a composition capable of adjusting the water contact angle so as to substantially match that of subsequently applied organic coatings are provided.
    Type: Application
    Filed: January 19, 2013
    Publication date: July 24, 2014
    Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC
    Inventors: Deyan WANG, Peter TREFONAS, III, Jieqian ZHANG, Peng-Wei CHUANG
  • Publication number: 20140206201
    Abstract: Compositions suitable for forming oxymetal hardmask layers are provided. Methods of forming oxymetal hardmask layers using such compositions are also provided, where the surface of the oxymetal hardmask layer formed has a water contact angle substantially matched to that of subsequently applied organic coatings.
    Type: Application
    Filed: January 19, 2013
    Publication date: July 24, 2014
    Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC
    Inventors: Deyan WANG, Peter TREFONAS, III, Shintaro YAMADA, Kathleen M. O'Connell
  • Publication number: 20140179582
    Abstract: The invention provides a process for removing a film from a substrate, said process comprising applying a composition to the film, and wherein the composition comprises at least the following: a) water; and b) at least one compound selected from the following compounds (i-v): i) NR4HF2 (Formula 1), wherein R?H, alkyl, substituted alkyl, ii) NR4F (Formula 2), wherein R?H, alkyl, substituted alkyl, iii) HF (hydrofluoric acid), iv) H2SiF6 (hexafluorosilicic acid), or v) combinations thereof. The invention also provides a composition comprising at least the following: a) water; and b) at least one compound selected from the following compounds (i-v): i) NR4HF2 (Formula 1), wherein R?H, alkyl, substituted alkyl, ii) NR4F (Formula 2), wherein R?H, alkyl, substituted alkyl, iii) HF (hydrofluoric acid), iv) H2SiF6 (hexafluorosilicic acid), or v) combinations thereof.
    Type: Application
    Filed: March 6, 2013
    Publication date: June 26, 2014
    Applicant: Rohm and Haas Electronic Materials LLC
    Inventors: Deyan Wang, Martin W. Bayes, Peter Trefonas, Kathleen M. O'connell
  • Publication number: 20140141375
    Abstract: Disclosed herein is a composition comprising a graft block copolymer comprising a copolymer comprising a backbone polymer; and a first graft polymer that comprises a surface energy reducing moiety; the first graft polymer being grafted onto the backbone polymer; where the surface energy reducing moiety comprises a fluorine atom, a silicon atom, or a combination of a fluorine atom and a silicon atom; a photoacid generator; and a crosslinking agent.
    Type: Application
    Filed: November 19, 2012
    Publication date: May 22, 2014
    Inventors: Sangho Cho, Guorong Sun, Karen L. Wooley, James W. Thackeray, Peter Trefonas, III
  • Publication number: 20140142249
    Abstract: Disclosed herein is a graft block copolymer comprising a first block polymer; the first block polymer comprising a backbone polymer and a first graft polymer; where the first graft polymer comprises a surface energy reducing moiety; and a second block polymer; the second block polymer being covalently bonded to the first block; wherein the second block comprises the backbone polymer and a second graft polymer; where the second graft polymer comprises a functional group that is operative to crosslink the graft block copolymer.
    Type: Application
    Filed: November 19, 2012
    Publication date: May 22, 2014
    Inventors: Sangho Cho, Guorong Sun, Karen L. Wooley, James W. Thackeray, Peter Trefonas, III
  • Publication number: 20140142252
    Abstract: Disclosed herein is a copolymer comprising a backbone polymer; and a first graft polymer that comprises a surface energy reducing moiety; the first graft polymer being grafted onto the backbone polymer; where the surface energy reducing moiety comprises a fluorine atom, a silicon atom, or a combination of a fluorine atom and a silicon atom.
    Type: Application
    Filed: November 19, 2012
    Publication date: May 22, 2014
    Inventors: Sangho Cho, Guorong Sun, Karen L. Wooley, James W. Thackeray, Peter Trefonas, III
  • Publication number: 20140141376
    Abstract: Disclosed herein is a composition comprising a graft block copolymer comprising a first block polymer; the first block polymer comprising a backbone polymer and a first graft polymer; where the first graft polymer comprises a surface energy reducing moiety; and a second block polymer; the second block polymer being covalently bonded to the first block; wherein the second block comprises the backbone polymer and a second graft polymer; where the second graft polymer comprises a functional group that is operative to crosslink the graft block copolymer; a photoacid generator; and a crosslinking agent.
    Type: Application
    Filed: November 19, 2012
    Publication date: May 22, 2014
    Inventors: Sangho Cho, Guorong Sun, Karen L. Wooley, James W. Thackeray, Peter Trefonas, III
  • Publication number: 20140131078
    Abstract: Method of manufacturing patterned transparent conductor is provided, comprising: providing a silver ink core component containing silver nanoparticles dispersed in a silver carrier; providing a shell component containing a film forming polymer dispersed in a shell. carrier; providing a substrate; coelectrospinning the silver ink core component and the shell component to form a core shell fiber, wherein the silver nanoparticles are in the core; depositing the core shell fiber on the substrate; selectively treating a portion of the deposited core shell fiber to provide a patterned transparent conductor, wherein the patterned transparent conductor has a treated region and a non-treated region; wherein the treated region comprises a plurality of electrically interconnected silver miniwires and wherein the treated region is an electrically conductive region; and, wherein the non-treated region is an electrically insulative region.
    Type: Application
    Filed: November 7, 2013
    Publication date: May 15, 2014
    Inventors: Jaebum Joo, Jerome Claracq, Garo Khanarian, Kathleen M. O'Connell, Lijia Bu, Peter Trefonas
  • Patent number: 8710150
    Abstract: A block copolymer composition containing a diblock copolymer blend including a first poly(methyl methacrylate)-b-poly((trimethylsilyl)methyl methacrylate) diblock copolymer; and, a second poly(methyl methacrylate)-b-poly((trimethylsilyl)methyl methacrylate) diblock copolymer. Also provided are substrates treated with the block copolymer composition.
    Type: Grant
    Filed: February 10, 2012
    Date of Patent: April 29, 2014
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Shih-Wei Chang, Valeriy V. Ginzburg, Erin B. Vogel, Daniel J. Murray, Peter Trefonas, Phillip D. Hustad
  • Patent number: 8697810
    Abstract: A copolymer composition including a block copolymer having a poly(methyl methacrylate) block and a poly((trimethylsilyl)methyl methacrylate) block is provided; wherein the block copolymer exhibits a number average molecular weight, MN, of 1 to 1,000 kg/mol; and, wherein the block copolymer exhibits a polydispersity, PD, of 1 to 2. Also provided are substrates treated with the copolymer composition.
    Type: Grant
    Filed: February 10, 2012
    Date of Patent: April 15, 2014
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Erin B. Vogel, Valeriy V. Ginzburg, Shih-Wei Chang, Daniel J. Murray, Phillip D. Hustad, Peter Trefonas
  • Publication number: 20140087066
    Abstract: Compositions containing certain organometallic oligomers suitable for use as spin-on, metal hardmasks are provided, where such compositions can be tailored to provide a metal oxide hardmask having a range of etch selectivity. Also provided are methods of depositing metal oxide hardmasks using the present compositions.
    Type: Application
    Filed: September 23, 2012
    Publication date: March 27, 2014
    Inventors: Deyan WANG, Jibin SUN, Peng-Wei CHUANG, Peter TREFONAS, III, Cong LIU
  • Publication number: 20140061155
    Abstract: A copolymer composition and a method of processing a substrate to form line space features thereon are provided.
    Type: Application
    Filed: August 31, 2012
    Publication date: March 6, 2014
    Applicants: DOW GLOBAL TECHNOLOGIES LLC., ROHM AND HAAS ELECTRONIC MATERIALS LLC.
    Inventors: Xinyu Gu, Shih-Wei Chang, Rahul Sharma, Valeriy Ginzburg, Phillip Hustad, Jeffrey Weinhold, Peter Trefonas
  • Publication number: 20140065300
    Abstract: A method of manufacturing a silver miniwire film is provided, wherein the film exhibits a reduced sheet resistance.
    Type: Application
    Filed: August 15, 2013
    Publication date: March 6, 2014
    Inventors: Garo Khanarian, Kathleen M. O'connell, Peter Trefonas, Jerome Claracq, Lijia Bu, Jaebum Joo
  • Publication number: 20140027954
    Abstract: A process for manufacturing silver nanowires is provided, comprising: providing a silver ink core component containing ?60 wt % silver nanoparticles dispersed in a silver carrier; providing a shell component containing a film forming polymer dispersed in a shell carrier; providing a substrate; coelectrospinning the silver ink core component and the shell component depositing on the substrate a core shell fiber having a core and a shell surrounding the core, wherein the silver nanoparticles are in the core; and, treating the silver nanoparticles to form a population of silver nanowires, wherein the population of silver nanowires exhibit an average length, L, of ?60 ?m.
    Type: Application
    Filed: July 22, 2013
    Publication date: January 30, 2014
    Applicant: Rohm and Haas Electronic Materials LLC
    Inventors: Jerome Claracq, Garo Khanarian, Lujia Bu, Jaebum Joo, Peter Trefonas
  • Publication number: 20140014002
    Abstract: A method for processing a substrate is provided; wherein the method comprises applying a film of a copolymer composition, comprising a poly(styrene)-b-poly(siloxane) block copolymer component; and, an antioxidant to a surface of the substrate; optionally, baking the film; subjecting the film to a high temperature annealing process under a gaseous atmosphere for a specified period of time; followed by a treatment of the annealed film to remove the poly(styrene) from the annealed film and to convert the poly(siloxane) in the annealed film to SiOx.
    Type: Application
    Filed: July 12, 2012
    Publication date: January 16, 2014
    Applicants: DOW GLOBAL TECHNOLOGIES LLC, ROHM AND HAAS ELECTRONIC MATERIALS LLC
    Inventors: Xinyu Gu, Shih-Wei Chang, Phillip D. Hustad, Jeffrey D. Weinhold, Peter Trefonas
  • Publication number: 20140014001
    Abstract: A method for processing a substrate is provided; wherein the method comprises applying a film of a copolymer composition, comprising a poly(styrene)-b-poly(siloxane) block copolymer component; and, an antioxidant to a surface of the substrate; optionally, baking the film; annealing the film in a gaseous atmosphere containing ?20 wt % oxygen; followed by a treatment of the annealed film to remove the poly(styrene) from the annealed film and to convert the poly(siloxane) in the annealed film to SiOx.
    Type: Application
    Filed: July 12, 2012
    Publication date: January 16, 2014
    Applicants: DOW GLOBAL TECHNOLOGIES LLC, ROHM AND HAAS ELECTRONIC MATERIALS LLC
    Inventors: Phillip Hustad, Xinyu Gu, Shih-Wei Chang, Jeffrey Weinhold, Peter Trefonas
  • Publication number: 20130306594
    Abstract: Disclosed herein is a block copolymer comprising a first block derived from a vinyl aromatic monomer; and a second block derived from an acrylate monomer; where a chi parameter that measures interactions between the first block and the second block is greater than or equal to about 0.05, when measured at 240° C. Disclosed herein too is a method comprising polymerizing a vinyl aromatic monomer to form a first block; and polymerizing a second block onto the first block to form a block copolymer; where the second block is derived by polymerizing an acrylate monomer; and where the block copolymer has a chi parameter of greater than or equal to about 0.05, when measured at 240° C.; where the chi parameter is a measure of interactions between the first block and the second block.
    Type: Application
    Filed: May 16, 2012
    Publication date: November 21, 2013
    Inventors: Phillip Dene Hustad, Peter Trefonas, III, Frank Steven Bates, Marc Andrew Hillmyer, Justin Glenn Kennemur