Patents by Inventor Peter Van Der Meulen
Peter Van Der Meulen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8639365Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.Type: GrantFiled: October 23, 2007Date of Patent: January 28, 2014Assignee: Brooks Automation, Inc.Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
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Patent number: 8639489Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.Type: GrantFiled: October 23, 2007Date of Patent: January 28, 2014Assignee: Brooks Automation, Inc.Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
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Patent number: 8634633Abstract: A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.Type: GrantFiled: September 14, 2012Date of Patent: January 21, 2014Assignee: Brooks Automation, Inc.Inventors: Christopher C Kiley, Peter van der Meulen, Forrest T Buzan, Paul E. Fogel
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Publication number: 20130343841Abstract: Linear semiconductor handling systems provide more balanced processing capacity using various techniques to provide increased processing capacity to relatively slow processes. This may include use of hexagonal vacuum chambers to provide additional facets for slow process modules, use of circulating process modules to provide more processing capacity at a single facet of a vacuum chamber, or the use of wide process modules having multiple processing sites. This approach may be used, for example, to balance processing capacity in a typical process that includes plasma enhanced chemical vapor deposition steps and bevel etch steps.Type: ApplicationFiled: August 30, 2013Publication date: December 26, 2013Applicant: Brooks Automation, Inc.Inventor: Peter van der Meulen
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Patent number: 8612198Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.Type: GrantFiled: October 23, 2007Date of Patent: December 17, 2013Assignee: Brooks Automation, Inc.Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
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Patent number: 8602716Abstract: A method is provided where the method includes configuring a plurality of robots so that a wafer can be handed off between neighboring robots, and disposing a plurality of sensors so that a robotic arm-relative position of a wafer that is transported by a robot is determined from sensor outputs by moving the wafer through a retract, rotate, and extend path.Type: GrantFiled: October 23, 2007Date of Patent: December 10, 2013Assignee: Brooks Automation, Inc.Inventors: Peter van der Meulen, Christopher C Kiley, Patrick D. Pannese
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Patent number: 8523507Abstract: Linear semiconductor handling systems provide more balanced processing capacity using various techniques to provide increased processing capacity to relatively slow processes. This may include use of hexagonal vacuum chambers to provide additional facets for slow process modules, use of circulating process modules to provide more processing capacity at a single facet of a vacuum chamber, or the use of wide process modules having multiple processing sites. This approach may be used, for example, to balance processing capacity in a typical process that includes plasma enhanced chemical vapor deposition steps and bevel etch steps.Type: GrantFiled: September 29, 2011Date of Patent: September 3, 2013Assignee: Brooks Automation, Inc.Inventor: Peter van der Meulen
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Patent number: 8500388Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.Type: GrantFiled: February 4, 2008Date of Patent: August 6, 2013Assignee: Brooks Automation, Inc.Inventors: Peter van der Meulen, Christopher C Kiley, Patrick D. Pannese, Raymond S. Ritter, Thomas A. Schaefer
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Patent number: 8473270Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.Type: GrantFiled: October 23, 2007Date of Patent: June 25, 2013Assignee: Brooks Automation, Inc.Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
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Publication number: 20130121792Abstract: A semiconductor handling system including a vacuum workpiece handling system having a vacuum environment therein, the vacuum workpiece handling system including at least two workpiece handling robotic facilities, a mid-entry station positioned between the at least two workpiece handling robotic facilities, the mid-entry station including vertically stacked load locks, where the at least two workpiece handling robotic facilities are configured to transfer workpieces between the vertically stacked load locks, at least one workpiece loading station connected to the vacuum handling system, and a workpiece delivery system having an internal environment different from the vacuum environment, the workpiece delivery system being configured to transport the workpieces between each of the vertically stacked load locks of the mid-entry station and the at least one workpiece loading station.Type: ApplicationFiled: September 14, 2012Publication date: May 16, 2013Inventors: Peter van der Meulen, Christopher C. Kiley, Patrick D. Pannese
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Patent number: 8439623Abstract: Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities for vacuum-based semiconductor processing and handling, as well as linkable or extensible semiconductor processing facilities that can be flexibly configured to meet a variety of constraints.Type: GrantFiled: May 10, 2006Date of Patent: May 14, 2013Assignee: Brooks Automation, Inc.Inventor: Peter van der Meulen
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Patent number: 8434989Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.Type: GrantFiled: February 14, 2008Date of Patent: May 7, 2013Assignee: Brooks Automation, Inc.Inventor: Peter van der Meulen
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Patent number: 8424703Abstract: A system of moving magnets for sealing a container may include a plurality of moveable magnets disposed near a perimeter of a container door and a rotatable linkage hub positioned within the perimeter of the container door. In addition, the system may include a plurality of control linkages connecting each of the plurality of moveable magnets to the linkage hub so that rotating the linkage hub causes the control linkages to move the moveable magnets between a sealed position and an open position. Alternatively, the moveable magnets may be connected to each other by a magnet positioning mechanism to physically move the magnets along a path near the perimeter. A plurality of static magnets may be disposed near an opening sized to receive the container door and positioned to form a magnetic seal with the moveable magnets when the moveable magnets are positioned at the sealed position.Type: GrantFiled: May 1, 2009Date of Patent: April 23, 2013Assignee: Brooks Automation, Inc.Inventor: Peter van der Meulen
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Publication number: 20130085595Abstract: A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.Type: ApplicationFiled: September 14, 2012Publication date: April 4, 2013Inventors: Christopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel
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Patent number: 8403613Abstract: A bypass thermal adjuster, which may be placed between two robots, provides a chamber for isolation and thermal control of wafers while permitting other wafers to be passed through the adjuster by the robots.Type: GrantFiled: March 5, 2007Date of Patent: March 26, 2013Assignee: Brooks Automation, Inc.Inventor: Peter van der Meulen
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Patent number: 8313277Abstract: A variety of process modules are described for use in semiconductor manufacturing processes.Type: GrantFiled: October 23, 2007Date of Patent: November 20, 2012Assignee: Brooks Automation, Inc.Inventors: Peter van der Meulen, Christopher C Kiley, Patrick D. Pannese
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Patent number: 8267632Abstract: A system for processing semiconductor wafers including a plurality of robotic facilities serially joined to each other to form a substantially linear transport chamber through which wafers can be transferred from each facility, wherein the substantially linear transport chamber is sealed to hold a controlled atmosphere and each of the plurality of robotic facilities includes at least one scara robot having three arm links serially coupled to one another and having a substrate holder rotatably coupled at a distal end of the three arm links, the plurality of robot facilities being configured to effect the transfer of wafers through the substantially linear transport chamber via handoff a wafer between neighboring scara robots, and a multi-entry process module coupled to at least one of the plurality of robotic facilities, where each entry of the multi-entry process module is accessed by the at least one of the at least one scara robot.Type: GrantFiled: October 23, 2007Date of Patent: September 18, 2012Assignee: Brooks Automation, Inc.Inventors: Peter van der Meulen, Christopher C Kiley, Patrick D. Pannese
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Patent number: 8270702Abstract: A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.Type: GrantFiled: September 3, 2010Date of Patent: September 18, 2012Assignee: Brooks Automation, Inc.Inventors: Christopher C Kiley, Peter van der Meulen, Forrest T Buzan, Paul E. Fogel
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Patent number: 8253948Abstract: A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.Type: GrantFiled: February 27, 2012Date of Patent: August 28, 2012Assignee: Brooks Automation, Inc.Inventors: Christopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel
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Publication number: 20120154822Abstract: A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.Type: ApplicationFiled: February 27, 2012Publication date: June 21, 2012Applicant: BROOKS AUTOMATION, INC.Inventors: Christopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel