Patents by Inventor Peter Van Der Meulen

Peter Van Der Meulen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
    Publication number: 20080187418
    Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.
    Type: Application
    Filed: February 4, 2008
    Publication date: August 7, 2008
    Inventors: Peter van der Meulen, Christopher C. Kiley, Patrick D. Pannese, Raymond S. Ritter, Thomas A. Schaefer
  • SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
    Publication number: 20080187417
    Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.
    Type: Application
    Filed: February 4, 2008
    Publication date: August 7, 2008
    Inventors: Peter van der Meulen, Christopher C Kiley, Patrick D. Pannese, Raymond S. Ritter, Thomas A. Schaefer
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080167890
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: July 10, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080163095
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: July 3, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080163094
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: July 3, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080163096
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: July 3, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080155443
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: June 26, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080155448
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: June 26, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080155446
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: June 26, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080155449
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: June 26, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080155442
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: June 26, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080155445
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: June 26, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080155447
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: June 26, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080155444
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: June 26, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080155450
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: June 26, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • SEMICONDUCTOR MANUFACTURING PROCESS MODULES
    Publication number: 20080145192
    Abstract: A variety of process modules are described for use in semiconductor manufacturing processes.
    Type: Application
    Filed: February 14, 2008
    Publication date: June 19, 2008
    Inventors: Peter van der Meulen, Christopher C. Kiley, Patrick D. Pannese
  • WAFER CENTER FINDING
    Publication number: 20080147333
    Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
    Type: Application
    Filed: February 15, 2008
    Publication date: June 19, 2008
    Inventors: Peter van der Meulen, Forrest T. Buzan
  • Batch Wafer Alignment
    Publication number: 20080131237
    Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.
    Type: Application
    Filed: February 14, 2008
    Publication date: June 5, 2008
    Inventor: Peter van der Meulen
  • METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
    Publication number: 20080134075
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Application
    Filed: October 23, 2007
    Publication date: June 5, 2008
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • Particle-Reducing Load Lock Seal
    Publication number: 20080131238
    Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.
    Type: Application
    Filed: February 13, 2008
    Publication date: June 5, 2008
    Inventor: Peter van der Meulen