Abstract: A method of forming an edge termination structure in a semiconductor device is provided. The method includes: forming an epitaxial layer on a semiconductor substrate, the epitaxial layer extending laterally across active and edge termination regions in the device; forming active trenches in the active region and at least one outer trench in the edge termination region, each of the outer and active trenches extending vertically through at least a portion of the epitaxial layer; at least partially filling each of the outer and active trenches with a first insulating material; forming a moat by etching an area of the epitaxial layer in the edge termination region proximate to a last one of the plurality of active trenches in the active region; and at least partially filling the moat with a second insulating material to form a moat structure as an edge termination structure in the semiconductor device.

Abstract: An enhanced edge termination structure for use in a charge balanced semiconductor device is provided. The edge termination structure includes a plurality of edge termination trenches and a plurality of semiconductor mesa regions, each of the mesa regions being disposed between adjacent edge termination trenches. The edge termination trenches extend outwardly from an active region of the device on at least two adjacent sides of the active region when viewed in a plan view. The edge termination trenches are orthogonal to a corresponding edge of the active region from which they extend.

Abstract: A semiconductor device is provided that includes an epitaxial layer disposed on a semiconductor substrate, the epitaxial layer including an active region, in which at least one active element is formed, and an edge termination region, in which at least one edge termination structure is formed, the edge termination region being laterally adjacent to the active region. The semiconductor device further includes a charged layer disposed on an upper surface of the epitaxial layer, the charged layer covering at least a portion of the active region and extending laterally over at least a portion of the edge termination region. Active trenches may be formed in the active region, and at least one edge trench may be formed in the edge termination region. The charged layer may be formed on sidewalls of each of the active trenches and the edge trench using atomic layer deposition in a same processing step.

Abstract: A semiconductor device and a method of making a semiconductor device. The device includes a semiconductor substrate having a first conductivity type, a layer of doped silicon located on the substrate, a trench extending into the layer of silicon, and a gate electrode and gate dielectric located in the trench. The device also includes a drain region, a body region having a second conductivity type located adjacent the trench and above the drain region, and a source region having the first conductivity type located adjacent the trench and above the body region. The layer of doped silicon in a region located beneath the body region includes donor ions and acceptor ions forming a net doping concentration within said region by compensation. The net doping concentration of the layer of doped silicon as a function of depth has a minimum in a region located immediately beneath the body region.

Abstract: Aspects of the present disclosure are directed to circuitry operable with enhanced capacitance and mitigation of avalanche breakdown. As may be implemented in accordance with one or more embodiments, an apparatus and/or method involves respective transistors of a cascode circuit, one of which controls the other in an off state by applying a voltage to a gate thereof. A plurality of doped regions are separated by trenches, with the conductive trenches being configured and arranged with the doped regions to provide capacitance across the source and the drain of the second transistor, and restricting voltage at one of the source and the drain of the second transistor, therein mitigating avalanche breakdown of the second transistor.

Abstract: Aspects of the present disclosure are directed to circuitry operable with enhanced capacitance and mitigation of avalanche breakdown. As may be implemented in accordance with one or more embodiments, an apparatus and/or method involves respective transistors of a cascode circuit, one of which controls the other in an off state by applying a voltage to a gate thereof. A plurality of doped regions are separated by trenches, with the conductive trenches being configured and arranged with the doped regions to provide capacitance across the source and the drain of the second transistor, and restricting voltage at one of the source and the drain of the second transistor, therein mitigating avalanche breakdown of the second transistor.

Abstract: A trench-gate device with lateral RESURF pillars has an additional implant beneath the gate trench. The additional implant reduces the effective width of the semiconductor drift region between the RESURF pillars, and this provides additional gate shielding which improves the electrical characteristics of the device.

Abstract: Embodiments relate to a diode circuit which uses a Schottky diode. A parallel bypass branch has a switch and bypass diode in series. The operation of the switch is dependent on the voltage across the Schottky diode so that the bypass function is only effective when a desired voltage is reached. The diode circuit can be used as a replacement for a single diode, and provides bypass current protection preferably without requiring any external control input.

Abstract: A semiconductor device and a method of making a semiconductor device. The device includes a semiconductor substrate having a first conductivity type, a layer of doped silicon located on the substrate, a trench extending into the layer of silicon, and a gate electrode and gate dielectric located in the trench. The device also includes a drain region, a body region having a second conductivity type located adjacent the trench and above the drain region, and a source region having the first conductivity type located adjacent the trench and above the body region. The layer of doped silicon in a region located beneath the body region includes donor ions and acceptor ions forming a net doping concentration within said region by compensation. The net doping concentration of the layer of doped silicon as a function of depth has a minimum in a region located immediately beneath the body region.

Abstract: A cascoded power semiconductor circuit has a clamp circuit between the source and gate of a gallium nitride or silicon carbide FET to provide avalanche protection for the cascode MOSFET transistor.

Abstract: A semiconductor device, comprising first and second field effect transistors arranged in a cascode configuration: wherein the first field effect transistor is a depletion mode transistor; and wherein the second field effect transistor comprises a first source to gate capacitance and a second additional source to gate capacitance connected in parallel to the first source to gate capacitance. A power factor correction (PFC) circuit comprising the semiconductor device. A power supply comprising the PFC circuit.

Abstract: A cascode circuit arrangement has a low voltage MOSFET and a depletion mode power device mounted on a substrate (for example a ceramic substrate), which can then be placed in a semiconductor package. This enables inductances to be reduced, and can enable a three terminal packages to be used if desired.

Abstract: A method to manufacture a vertical capacitor region that comprises a plurality of trenches, wherein the portions of the semiconductor region in between the trenches comprise an impurity. This allows for the trenches to be placed in closer vicinity to each other, thus improving the capacitance per unit area ratio. The total capacitance of the device is defined by two series components, that is, the capacitance across the dielectric liner, and the depletion capacitance of the silicon next to the trench. An increase of the voltage on the capacitor increases the depletion in the silicon and the depletion capacitance as a result, such that the overall capacitance is reduced. This effect may be countered by minimizing the depletion region which may be achieved by ensuring that the silicon adjacent to the capacitor is as highly doped as possible.

Abstract: Embodiments relate to a diode circuit which uses a Schottky diode. A parallel bypass branch has a switch and bypass diode in series. The operation of the switch is dependent on the voltage across the Schottky diode so that the bypass function is only effective when a desired voltage is reached. The diode circuit can be used as a replacement for a single diode, and provides bypass current protection preferably without requiring any external control input.

Abstract: A trench-gate device with lateral RESURF pillars has an additional implant beneath the gate trench. The additional implant reduces the effective width of the semiconductor drift region between the RESURF pillars, and this provides additional gate shielding which improves the electrical characteristics of the device.

Abstract: A semiconductor device, comprising first and second field effect transistors arranged in a cascode configuration: wherein the first field effect transistor is a depletion mode transistor; and wherein the second field effect transistor comprises a first source to gate capacitance and a second additional source to gate capacitance connected in parallel to the first source to gate capacitance. A power factor correction (PFC) circuit comprising the semiconductor device. A power supply comprising the PFC circuit.

Abstract: Consistent with an example embodiment, a method of may be provided to manufacture a vertical capacitor region that comprises a plurality of said trenches, wherein the portions of the semiconductor region in between said trenches comprise an impurity. This allows for the trenches to be placed in closer vicinity to each other, thus improving the capacitance per unit area ratio. The total capacitance of the device is defined by two series components, that is, the capacitance across the dielectric liner, and the depletion capacitance of the silicon next to the trench. An increase of the voltage on the capacitor increases the depletion in the silicon and the depletion capacitance as a result, such that the overall capacitance is reduced. This effect may be countered by minimizing the depletion region which may be achieved by ensuring that the silicon adjacent to the capacitor is as highly doped as possible.

Abstract: A cascode circuit arrangement has a low voltage MOSFET and a depletion mode power device mounted on a substrate (for example a ceramic substrate), which can then be placed in a semiconductor package. This enables inductances to be reduced, and can enable a three terminal packages to be used if desired.

Abstract: A cascoded power semiconductor circuit has a clamp circuit between the source and gate of a gallium nitride or silicon carbide FET to provide avalanche protection for the cascode MOSFET transistor.

Abstract: A method of manufacturing a semiconductor device is presented. The device has: a gate terminal formed from polysilicon and covered by an insulation layer; and a plug extending through an insulation layer to provide an electrical connection to the gate trench. A metal layer is deposited to cover at least a portion of the insulation layer. The metal layer is then etched to remove the metal layer from above the plug.