Patents by Inventor Ping-Chia Shih

Ping-Chia Shih has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210217708
    Abstract: A device for generating a security key includes a substrate, semiconductor units, contact structures, and defects. The semiconductor units are disposed on the substrate. The contact structures are disposed on and connected with the semiconductor units. The defects are disposed in at least a part of the contact structures randomly. A manufacturing method of a device for generating a security key includes the following steps. First semiconductor units are formed on a substrate. First contact structures are formed on the first semiconductor units. The first contact structures are connected with the first semiconductor units, and defects are formed in at least a part of the first contact structures randomly.
    Type: Application
    Filed: January 14, 2020
    Publication date: July 15, 2021
    Inventors: Wen-Lin Wang, Ping-Chia Shih, Ming-Che Tsai, Kuei-Ya Chuang, Yi-Chun Teng, Po-Hsien Chen, Wan-Chun Liao
  • Patent number: 10720440
    Abstract: A method for fabricating a semiconductor structure is shown. A first gate of a first device and a second gate of a second device are formed over a semiconductor substrate. First LDD regions are formed in the substrate beside the first gate using the first gate as a mask. A conformal layer is formed covering the first gate, the second gate and the substrate, wherein the conformal layer has sidewall portions on sidewalls of the second gate. Second LDD regions are formed in the substrate beside the second gate using the second gate and the sidewall portions of the conformal layer as a mask.
    Type: Grant
    Filed: March 21, 2018
    Date of Patent: July 21, 2020
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Wen Wang, Hsiang-Chen Lee, Wen-Peng Hsu, Kuo-Lung Li, Meng-Chun Chen, Zi-Jun Liu, Ping-Chia Shih
  • Patent number: 10580780
    Abstract: Provided is a semiconductor structure including a substrate, an isolation structure, a fuse and two gate electrodes. The isolation structure is located in the substrate and defines active regions of the substrate. The fuse is disposed on the isolation structure. The gate electrodes are disposed on the active regions and connected to ends of the fuse. In an embodiment, a portion of a bottom surface of the fuse is lower than top surfaces of the active regions of the substrate.
    Type: Grant
    Filed: June 11, 2018
    Date of Patent: March 3, 2020
    Assignee: United Microelectronics Corp.
    Inventors: Zi-Jun Liu, Ping-Chia Shih, Chi-Cheng Huang, Kuo-Lung Li, Hung-Wei Lin, An-Hsiu Cheng, Chih-Hao Pan, Cheng-Hua Chou, Chih-Hung Wang
  • Publication number: 20190378846
    Abstract: Provided is a semiconductor structure including a substrate, an isolation structure, a fuse and two gate electrodes. The isolation structure is located in the substrate and defines active regions of the substrate. The fuse is disposed on the isolation structure. The gate electrodes are disposed on the active regions and connected to ends of the fuse. In an embodiment, a portion of a bottom surface of the fuse is lower than top surfaces of the active regions of the substrate.
    Type: Application
    Filed: June 11, 2018
    Publication date: December 12, 2019
    Applicant: United Microelectronics Corp.
    Inventors: Zi-Jun Liu, Ping-Chia Shih, Chi-Cheng Huang, Kuo-Lung Li, Hung-Wei Lin, An-Hsiu Cheng, Chih-Hao Pan, Cheng-Hua Chou, Chih-Hung Wang
  • Patent number: 10340282
    Abstract: A semiconductor memory device includes a substrate, having a plurality of cell regions, wherein the cell regions are parallel and extending along a first direction. A plurality of STI structures is disposed in the substrate, extending along the first direction to isolate the cell regions, wherein the STI structures have a uniform height lower than the substrate in the cell regions. A selection gate line is extending along a second direction and crossing over the cell regions and the STI structures. A control gate line is adjacent to the selection gate line in parallel extending along the second direction and also crosses over the cell regions and the STI structures. The selection gate line and the control gate line together form a two-transistor (2T) memory cell.
    Type: Grant
    Filed: February 13, 2018
    Date of Patent: July 2, 2019
    Assignee: United Microelectronics Corp.
    Inventors: Shu-Hung Yu, Chun-Hung Cheng, Chuan-Fu Wang, An-Hsiu Cheng, Ping-Chia Shih, Chi-Cheng Huang, Kuo-Lung Li, Chia-Hui Huang, Chih-Yao Wang, Zi-Jun Liu, Chih-Hao Pan
  • Patent number: 10312250
    Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a substrate, a plurality of isolation structures, a charge storage layer, and a conductive layer. The substrate has a memory region and a logic region. The substrate in the memory region has a plurality of semiconductor fins. The isolation structures are disposed in the substrate to isolate the semiconductor fins. The semiconductor fins are protruded beyond the isolation structures. The charge storage layer covers the semiconductor fins. The conductive layer is disposed across the semiconductor fins and the isolation structures such that the charge storage layer is disposed between the conductive layer and the semiconductor fins.
    Type: Grant
    Filed: January 23, 2018
    Date of Patent: June 4, 2019
    Assignee: United Microelectronics Corp.
    Inventors: Hsuan-Chun Tseng, Hsueh-Chun Hsiao, Tzu-Yun Chang, Chi-Cheng Huang, Ping-Chia Shih
  • Publication number: 20190043877
    Abstract: A non-volatile memory device includes a semiconductor substrate, a control gate electrode, a first oxide-nitride-oxide (ONO) structure, a selecting gate electrode, a second ONO structure, and a spacer structure. The control gate electrode and the selecting gate electrode are disposed on the semiconductor substrate. The first ONO structure is disposed between the control gate electrode and the semiconductor substrate. The second ONO structure is disposed between the control gate electrode and the selecting gate electrode in a first direction. The spacer structure is disposed between the control gate electrode and the second ONO structure in the first direction. A distance between the control gate electrode and the selecting gate electrode in the first direction is smaller than or equal to a sum of a width of the second ONO structure and a width of the spacer structure in the first direction.
    Type: Application
    Filed: August 1, 2017
    Publication date: February 7, 2019
    Inventors: Kuo-Lung Li, Ping-Chia Shih, Wen-Peng Hsu, Chia-Wen Wang, Meng-Chun Chen, Chih-Hao Pan
  • Patent number: 10199385
    Abstract: A non-volatile memory device includes a semiconductor substrate, a control gate electrode, a first oxide-nitride-oxide (ONO) structure, a selecting gate electrode, a second ONO structure, and a spacer structure. The control gate electrode and the selecting gate electrode are disposed on the semiconductor substrate. The first ONO structure is disposed between the control gate electrode and the semiconductor substrate. The second ONO structure is disposed between the control gate electrode and the selecting gate electrode in a first direction. The spacer structure is disposed between the control gate electrode and the second ONO structure in the first direction. A distance between the control gate electrode and the selecting gate electrode in the first direction is smaller than or equal to a sum of a width of the second ONO structure and a width of the spacer structure in the first direction.
    Type: Grant
    Filed: August 1, 2017
    Date of Patent: February 5, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kuo-Lung Li, Ping-Chia Shih, Wen-Peng Hsu, Chia-Wen Wang, Meng-Chun Chen, Chih-Hao Pan
  • Publication number: 20190013324
    Abstract: A method for fabricating a semiconductor integrated circuit (IC) having a SONOS memory device and a logic/analog device requiring different gate oxide layers comprises steps as follows: A substrate having a high voltage region, a memory region and a logic/analog is firstly provided. Next, a first gate oxide layer is formed on the high voltage region, the memory region and the logic/analog. The first gate oxide layer is then patterned to expose the logic/analog region and to define a first channel area and a second channel area respectively on the memory region and the high voltage region. Subsequently, a silicon oxide-silicon nitride-silicon oxide (ONO) structure is formed on the first channel area. A second gate oxide layer is then formed on the logic/analog and patterned to define a third channel area.
    Type: Application
    Filed: July 5, 2017
    Publication date: January 10, 2019
    Inventors: Ping-Chia Shih, Chun-Yao Wang, Ming-Hua Tsai, Wan-Chun Liao
  • Patent number: 10177165
    Abstract: A method for fabricating a semiconductor integrated circuit (IC) having a SONOS memory device and a logic/analog device requiring different gate oxide layers comprises steps as follows: A substrate having a high voltage region, a memory region and a logic/analog is firstly provided. Next, a first gate oxide layer is formed on the high voltage region, the memory region and the logic/analog. The first gate oxide layer is then patterned to expose the logic/analog region and to define a first channel area and a second channel area respectively on the memory region and the high voltage region. Subsequently, a silicon oxide-silicon nitride-silicon oxide (ONO) structure is formed on the first channel area. A second gate oxide layer is then formed on the logic/analog and patterned to define a third channel area.
    Type: Grant
    Filed: July 5, 2017
    Date of Patent: January 8, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ping-Chia Shih, Chun-Yao Wang, Ming-Hua Tsai, Wan-Chun Liao
  • Publication number: 20180211966
    Abstract: A method for fabricating a semiconductor structure is shown. A first gate of a first device and a second gate of a second device are formed over a semiconductor substrate. First LDD regions are formed in the substrate beside the first gate using the first gate as a mask. A conformal layer is formed covering the first gate, the second gate and the substrate, wherein the conformal layer has sidewall portions on sidewalls of the second gate. Second LDD regions are formed in the substrate beside the second gate using the second gate and the sidewall portions of the conformal layer as a mask.
    Type: Application
    Filed: March 21, 2018
    Publication date: July 26, 2018
    Applicant: United Microelectronics Corp.
    Inventors: Chia-Wen Wang, Hsiang-Chen Lee, Wen-Peng Hsu, Kuo-Lung Li, Meng-Chun Chen, Zi-Jun Liu, Ping-Chia Shih
  • Publication number: 20180182900
    Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a semiconductor substrate having a tunneling well, a tunneling oxide layer, a charge storage layer and a control gate. The tunneling oxide layer is disposed on the tunneling well. The tunneling oxide layer includes a first tunneling oxide segment having a first thickness, a second tunneling oxide segment having a second thickness, and a third tunneling oxide segment having a third thickness, and the first thickness, the second thickness and the third thickness are different from each other. The charge storage layer is disposed on the tunneling oxide layer, and the control gate is disposed on the charge storage layer.
    Type: Application
    Filed: February 21, 2017
    Publication date: June 28, 2018
    Inventors: Ya-Sheng Feng, Chi-Cheng Huang, Ping-Chia Shih, Hung-Wei Lin, Yu-Chun Chen, Ling-Hsiu Chou, An-Hsiu Cheng
  • Patent number: 10008615
    Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a semiconductor substrate having a tunneling well, a tunneling oxide layer, a charge storage layer and a control gate. The tunneling oxide layer is disposed on the tunneling well. The tunneling oxide layer includes a first tunneling oxide segment having a first thickness, a second tunneling oxide segment having a second thickness, and a third tunneling oxide segment having a third thickness, and the first thickness, the second thickness and the third thickness are different from each other. The charge storage layer is disposed on the tunneling oxide layer, and the control gate is disposed on the charge storage layer.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: June 26, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ya-Sheng Feng, Chi-Cheng Huang, Ping-Chia Shih, Hung-Wei Lin, Yu-Chun Chen, Ling-Hsiu Chou, An-Hsiu Cheng
  • Patent number: 9966382
    Abstract: A method for fabricating a semiconductor structure is shown. A first gate of a first device and a second gate of a second device are formed over a semiconductor substrate. First LDD regions are formed in the substrate beside the first gate using the first gate as a mask. A conformal layer is formed covering the first gate, the second gate and the substrate, wherein the conformal layer has sidewall portions on sidewalls of the second gate. Second LDD regions are formed in the substrate beside the second gate using the second gate and the sidewall portions of the conformal layer as a mask.
    Type: Grant
    Filed: August 16, 2016
    Date of Patent: May 8, 2018
    Assignee: United Microelectronics Corp.
    Inventors: Chia-Wen Wang, Hsiang-Chen Lee, Wen-Peng Hsu, Kuo-Lung Li, Meng-Chun Chen, Zi-Jun Liu, Ping-Chia Shih
  • Publication number: 20180053771
    Abstract: A method for fabricating a semiconductor structure is shown. A first gate of a first device and a second gate of a second device are formed over a semiconductor substrate. First LDD regions are formed in the substrate beside the first gate using the first gate as a mask. A conformal layer is formed covering the first gate, the second gate and the substrate, wherein the conformal layer has sidewall portions on sidewalls of the second gate. Second LDD regions are formed in the substrate beside the second gate using the second gate and the sidewall portions of the conformal layer as a mask.
    Type: Application
    Filed: August 16, 2016
    Publication date: February 22, 2018
    Applicant: United Microelectronics Corp.
    Inventors: Chia-Wen Wang, Hsiang-Chen Lee, Wen-Peng Hsu, Kuo-Lung Li, Meng-Chun Chen, Zi-Jun Liu, Ping-Chia Shih
  • Publication number: 20170200729
    Abstract: An integrated circuit process includes the following steps. A substrate including a flash cell area and a logic area is provided. A first sacrificial gate on the substrate of the flash cell area and a second sacrificial gate on the substrate of the logic area are formed, and a dielectric layer covers the substrate beside the first sacrificial gate and the second sacrificial gate. The first sacrificial gate is removed to forma first recess in the dielectric layer. An oxide/nitride/oxide layer is formed to conformally cover surfaces of the first recess. An integrated circuit formed by said integrated circuit process is also provided.
    Type: Application
    Filed: January 12, 2016
    Publication date: July 13, 2017
    Inventors: Tseng-Fang Dai, Ping-Chia Shih, Chi-Cheng Huang, Kun-I Chou, Hung-Wei Lin, Ching-Wen Yang
  • Publication number: 20170194511
    Abstract: A non-volatile memory (NVM) device includes a substrate, a charge trapping structure, a first gate electrode and a spacer. The charge trapping structure is disposed on the substrate. The first gate electrode is disposed on the charge trapping structure. The spacer is disposed on at least one sidewall of the first gate electrode and the charge trapping structure. Wherein, the charge trapping structure has a lateral size substantially greater than that of the first gate electrode.
    Type: Application
    Filed: January 27, 2016
    Publication date: July 6, 2017
    Inventors: Yu-Chun Chen, Chun-Hung Cheng, Yu-Chieh Lin, Ya-Sheng Feng, Ping-Chia Shih, Ling-Hsiu Chou
  • Patent number: 9466497
    Abstract: The invention provides a method for fabricating a silicon-oxide-nitride-oxide-silicon (SONOS) non-volatile memory cell, comprising: (S1) forming a pad oxide pattern on a silicon substrate having a recess exposing a tunnel region of the silicon substrate; (S2) forming a bottom oxide layer, a nitride layer, a top oxide layer covering the recess and the pad oxide pattern to form a first ONO structure; (S3) forming a photoresist on the first ONO structure covering the recess and a peripheral region of the pad oxide pattern; (S4) removing a part of the first ONO structure exposed by the photoresist to form an U-shaped ONO structure; (S5) trimming the photoresist to exposed a part of the U-shaped ONO structure above the recess; (S6) removing the part of the U-shaped ONO structure; (S7) removing the photoresist; (S8) removing the pad oxide pattern and the top oxide layer; and (S9) forming a gate structure.
    Type: Grant
    Filed: January 12, 2016
    Date of Patent: October 11, 2016
    Assignee: UNITED MICROELECTRONICS CORPORATION
    Inventors: Kuo-Lung Li, Ping-Chia Shih, Hsiang-Chen Lee, Yu-Chun Chang, Chia-Wen Wang, Meng-Chun Chen, Chih-Yang Hsu
  • Patent number: 9412851
    Abstract: A method for fabricating a semiconductor device includes forming a patterned multi-layered dielectric film on a substrate; forming a patterned stack on the patterned multi-layered dielectric film so that an edge of the patterned multi-layered dielectric film is exposed from the patterned stack; forming a cover layer to cover a part of the substrate and expose the patterned stack and the exposed edge of the patterned multi-layered dielectric film; removing at least a part of the exposed edge of the patterned multi-layered dielectric film by using the cover layer and the patterned stack as an etching mask; and performing an ion implantation process by using the cover layer as an etching mask so as to form a doped region.
    Type: Grant
    Filed: December 23, 2013
    Date of Patent: August 9, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yu-Chun Chang, Ping-Chia Shih, Chi-Cheng Huang, Kuo-Lung Li, Kun-I Chou, Chung-Che Huang, Chia-Cheng Hsu, Mu-Jia Liu
  • Patent number: 9397202
    Abstract: A method for fabricating semiconductor device is disclosed. Preferably, two hard masks are utilized to define the width of the first gate (may serve for a control gate) and the width of the second gate (may serve for a select gate). The widths are thus well controlled. For example, in an embodiment, the width of the select gate may be adjusted in advance as desired, and the select gate is protected by the second hard mask during an etch process, so as to obtain a select gate which upper portion has an appropriate width. Accordingly the semiconductor device would still have an excellent performance upon miniaturization.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: July 19, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hsiang-Chen Lee, Ping-Chia Shih, Chi-Cheng Huang, Wan-Fang Chung, Yu-Chun Chang, Je-Yi Su