Patents by Inventor Po-Chun Liu

Po-Chun Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11594413
    Abstract: A semiconductor structure includes a substrate. The semiconductor structure further includes a buffer layer over the substrate, wherein the buffer layer comprises a plurality of III-V layers, and a dopant type of each III-V layer of the plurality of III-V layers is opposite to a dopant of adjacent III-V layers of the plurality of III-V layers. The semiconductor structure further includes an active layer over the buffer layer. The semiconductor structure further includes a dielectric layer over the active layer.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: February 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Ming Chen, Po-Chun Liu, Chung-Yi Yu, Chia-Shiung Tsai
  • Publication number: 20230027354
    Abstract: The present disclosure relates a method of forming an integrated chip structure. The method includes etching a base substrate to form a recess defined by one or more interior surfaces of the base substrate. A doped epitaxial layer is formed along the one or more interior surfaces of the base substrate, and an epitaxial material is formed on horizontally and vertically extending surfaces of the doped epitaxial layer. A first doped photodiode region is formed within the epitaxial material and a second doped photodiode region is formed within the epitaxial material. The first doped photodiode region has a first doping type and the second doped photodiode region has a second doping type.
    Type: Application
    Filed: January 6, 2022
    Publication date: January 26, 2023
    Inventors: Po-Chun Liu, Eugene I-Chun Chen
  • Patent number: 11551927
    Abstract: A high electron mobility transistor includes: a first semiconductor layer over a substrate, and a second semiconductor layer over the first semiconductor layer, the second semiconductor layer having a band gap discontinuity with the first semiconductor layer, and at the first semiconductor layer and/or the second conductive layer includes indium. A top layer is over the second semiconductor layer, and a metal layer is over, and extends into, the top layer, the top layer separating the metal layer from the second semiconductor layer. A gate electrode is over the top layer, a third semiconductor layer being between the gate electrode and the top layer, where a sidewall of the third semiconductor layer and a sidewall of the metal layer are separated. A source and drain are on opposite sides of the gate electrode, the top layer extending continuously from below the source, below the gate electrode, and below the drain.
    Type: Grant
    Filed: November 4, 2020
    Date of Patent: January 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Chun Liu, Chung-Chieh Hsu, Chi-Ming Chen, Chung-Yi Yu, Chen-Hao Chiang, Min-Chang Ching
  • Patent number: 11508817
    Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a substrate having a first semiconductor material. A second semiconductor material is disposed on the first semiconductor material. The second semiconductor material is a group IV semiconductor or a group III-V compound semiconductor. A passivation layer is disposed on the second semiconductor material. The passivation layer includes the first semiconductor material. A first doped region and a second doped region extend through the passivation layer and into the second semiconductor material.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: November 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yin-Kai Liao, Sin-Yi Jiang, Hsiang-Lin Chen, Yi-Shin Chu, Po-Chun Liu, Kuan-Chieh Huang, Jyh-Ming Hung, Jen-Cheng Liu
  • Publication number: 20220367638
    Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a substrate having a first semiconductor material. A second semiconductor material is disposed on the first semiconductor material. The second semiconductor material is a group IV semiconductor or a group III-V compound semiconductor. A passivation layer is disposed on the second semiconductor material. The passivation layer includes the first semiconductor material. A first doped region and a second doped region extend through the passivation layer and into the second semiconductor material.
    Type: Application
    Filed: July 21, 2022
    Publication date: November 17, 2022
    Inventors: Yin-Kai Liao, Sin-Yi Jiang, Hsiang-Lin Chen, Yi-Shin Chu, Po-Chun Liu, Kuan-Chieh Huang, Jyh-Ming Hung, Jen-Cheng Liu
  • Publication number: 20220326297
    Abstract: A method for testing LEDs includes: Step 1: providing a wafer including a plurality of LEDs and selecting N LEDs from the plurality of LEDs to form an LED group; Step 2: selecting n LEDs from the LED group, where 1<n<N, and testing the n LEDs at a time to obtain a subgroup optical parameter of the LED group; Step 3: performing the Step 2 on the N LEDs repeatedly and alternately for another n LEDs in the LED group to obtain a plurality of the subgroup optical parameters; and Step 4: obtaining an optical parameter of each of the LEDs in the LED group from the plurality of the subgroup optical parameters.
    Type: Application
    Filed: April 11, 2022
    Publication date: October 13, 2022
    Inventors: Sheng Jie HSU, Chia Hui LIN, Po Chun LIU
  • Publication number: 20220328640
    Abstract: A method includes forming a gate structure over a silicon on insulator (SOI) substrate. The SOI substrate comprising: a base semiconductor layer; an insulator layer over the base semiconductor layer; and a top semiconductor layer over the insulator layer. The method further includes depositing a gate spacer layer over a top surface and along a sidewall of the gate structure; etching the gate spacer layer to define a gate spacer on the sidewall of the gate structure; after etching the gate spacer layer, etching a recess into the top semiconductor layer using a first etch process; and after the first etch process, extending the recess further into the top semiconductor layer using a second etch process. The first etch process is different from the second etch process. The method further includes forming a source/drain region in the recess after the second etch process.
    Type: Application
    Filed: June 30, 2022
    Publication date: October 13, 2022
    Inventors: Chi-Ming Chen, Kuei-Ming Chen, Po-Chun Liu, Chung-Yi Yu
  • Publication number: 20220328556
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming an image sensor in which a device layer has high crystalline quality. According to some embodiments, a hard mask layer is deposited covering a substrate. A first etch is performed into the hard mask layer and the substrate to form a cavity. A second etch is performed to remove crystalline damage from the first etch and to laterally recess the substrate in the cavity so the hard mask layer overhangs the cavity. A sacrificial layer is formed lining cavity, a blanket ion implantation is performed into the substrate through the sacrificial layer, and the sacrificial layer is removed. An interlayer is epitaxially grown lining the cavity and having a top surface underlying the hard mask layer, and a device layer is epitaxially grown filling the cavity over the interlayer. A photodetector is formed in the device layer.
    Type: Application
    Filed: June 17, 2022
    Publication date: October 13, 2022
    Inventors: Po-Chun Liu, Yung-Chang Chang, Eugene I-Chun Chen
  • Patent number: 11417520
    Abstract: A semiconductor structure includes a substrate. The semiconductor structure further includes a first III-V layer over the substrate, wherein the first III-V layer includes a first dopant type. The semiconductor structure further includes a second III-V layer over the first III-V layer, wherein the second III-V layer has a second dopant type opposite the first dopant type. The semiconductor structure further includes a third III-V layer over the second III-V layer, wherein the third III-V layer has the first dopant type. The semiconductor structure further includes a fourth III-V layer over the third III-V layer, the fourth III-V layer having the second dopant type. The semiconductor structure further includes an active layer over the fourth III-V layer. The semiconductor structure further includes a dielectric layer over the active layer.
    Type: Grant
    Filed: September 3, 2020
    Date of Patent: August 16, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Ming Chen, Po-Chun Liu, Chung-Yi Yu, Chia-Shiung Tsai
  • Publication number: 20220245858
    Abstract: An interaction method between reality and virtuality and an interaction system between reality and virtuality are provided in the embodiments of the present invention. A marker is provided on a controller. A computing apparatus is configured to determine control position information of the controller in a space according to the marker in an initial image captured by an image capturing apparatus; determine object position information of a virtual object image in the space corresponding to the marker according to the control position information; and integrate the initial image and the virtual object image according to the object position information, to generate an integrated image. The integrated image is used to be played on a display. Accordingly, an intuitive operation is provided.
    Type: Application
    Filed: January 27, 2022
    Publication date: August 4, 2022
    Applicant: COMPAL ELECTRONICS, INC.
    Inventors: Dai-Yun Tsai, Kai-Yu Lei, Po-Chun Liu, Yi-Ching Tu
  • Publication number: 20220245864
    Abstract: A generating method of conference image and an image conference system are provided. In the method, a user and one or more tags in a captured actual image are identified. The moving behavior of the user is tracked, and the position of the viewing range in the actual image is adjusted according to the moving behavior. The virtual image corresponding to the tag is synthesized according to the position relation between the user and the tag, to generate a conference image.
    Type: Application
    Filed: January 27, 2022
    Publication date: August 4, 2022
    Applicant: COMPAL ELECTRONICS, INC.
    Inventors: Yi-Ching Tu, Po-Chun Liu, Kai-Yu Lei, Dai-Yun Tsai
  • Patent number: 11393866
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming an image sensor in which a device layer has high crystalline quality. According to some embodiments, a hard mask layer is deposited covering a substrate. A first etch is performed into the hard mask layer and the substrate to form a cavity. A second etch is performed to remove crystalline damage from the first etch and to laterally recess the substrate in the cavity so the hard mask layer overhangs the cavity. A sacrificial layer is formed lining cavity, a blanket ion implantation is performed into the substrate through the sacrificial layer, and the sacrificial layer is removed. An interlayer is epitaxially grown lining the cavity and having a top surface underlying the hard mask layer, and a device layer is epitaxially grown filling the cavity over the interlayer. A photodetector is formed in the device layer.
    Type: Grant
    Filed: June 10, 2020
    Date of Patent: July 19, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Po-Chun Liu, Yung-Chang Chang, Eugene I-Chun Chen
  • Patent number: 11387105
    Abstract: First, second, and third trenches are formed in a layer over a substrate. The third trench is substantially wider than the first and second trenches. The first, second, and third trenches are partially filled with a first conductive material. A first anti-reflective material is coated over the first, second, and third trenches. The first anti-reflective material has a first surface topography variation. A first etch-back process is performed to partially remove the first anti-reflective material. Thereafter, a second anti-reflective material is coated over the first anti-reflective material. The second anti-reflective material has a second surface topography variation that is smaller than the first surface topography variation. A second etch-back process is performed to at least partially remove the second anti-reflective material in the first and second trenches. Thereafter, the first conductive material is partially removed in the first and second trenches.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: July 12, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jin-Dah Chen, Ming-Feng Shieh, Han-Wei Wu, Yu-Hsien Lin, Po-Chun Liu, Stan Chen
  • Patent number: 11329148
    Abstract: A semiconductor device includes a substrate. The semiconductor device includes an AlN seed layer in direct contact with the substrate. The AlN seed layer includes an AlN first seed sublayer, and an AlN second seed sublayer, wherein a portion of the AlN seed layer closest to the substrate includes carbon dopants and has a different lattice structure from a substrate lattice structure. The semiconductor device includes a graded layer in direct contact with the AlN seed layer. The graded layer includes a first graded sublayer including AlGaN, a second graded sublayer including AlGaN, and a third graded sublayer including AlGaN. The semiconductor device includes a channel layer over the graded layer. The semiconductor device includes an active layer over the channel layer, wherein the active layer has a band gap discontinuity with the channel layer.
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: May 10, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Ming Chen, Po-Chun Liu, Chung-Yi Yu, Chia-Shiung Tsai, Ru-Liang Lee
  • Patent number: 11306529
    Abstract: A space adjustment system and a control method thereof are provided. The space adjustment system includes a body, at least one door leaf, at least one motor, and a control circuit. The door leaf is movably disposed at the body. The door panel of each door leaf includes a panel. The motor can drive the motion of the door leaf. The control circuit is coupled with the panel of the door leaf and motor. The control circuit controls the motor to drive the door leaf, and adjusts the transparency or display function of the panel on the corresponding door leaf in response to a location of the door leaf. Accordingly, multiple space type can be created.
    Type: Grant
    Filed: February 27, 2019
    Date of Patent: April 19, 2022
    Assignee: COMPAL ELECTRONICS, INC.
    Inventors: Ruei-Hong Hong, Wen-Yi Chiu, Wei-Jun Wang, Po-Chun Liu
  • Patent number: 11208793
    Abstract: A sanitary equipment with a water supply system, a water route system, and a hand washing table are provided. The sanitary equipment includes a machine having a machine water outlet; a movable hand washing table pivoted on the machine and located below the machine water outlet, the movable hand washing table being capable of opening or retracting with respect to the machine; and a water route system disposed in the machine and connected to the machine water outlet to discharge potable water and non-potable water from the machine water outlet.
    Type: Grant
    Filed: October 21, 2019
    Date of Patent: December 28, 2021
    Assignee: COMPAL ELECTRONICS, INC.
    Inventors: Po-Chun Liu, Wen-Yi Chiu, Pin-Hsing Lee
  • Publication number: 20210391435
    Abstract: A method includes forming a gate structure over a silicon on insulator (SOI) substrate. The SOI substrate comprising: a base semiconductor layer; an insulator layer over the base semiconductor layer; and a top semiconductor layer over the insulator layer. The method further includes depositing a gate spacer layer over a top surface and along a sidewall of the gate structure; etching the gate spacer layer to define a gate spacer on the sidewall of the gate structure; after etching the gate spacer layer, etching a recess into the top semiconductor layer using a first etch process; and after the first etch process, extending the recess further into the top semiconductor layer using a second etch process. The first etch process is different from the second etch process. The method further includes forming a source/drain region in the recess after the second etch process.
    Type: Application
    Filed: June 15, 2020
    Publication date: December 16, 2021
    Inventors: Chi-Ming Chen, Kuei-Ming Chen, Po-Chun Liu, Chung-Yi Yu
  • Publication number: 20210375669
    Abstract: A semiconductor device with an image sensor and a method of fabricating the same are disclosed. The method includes depositing a dielectric layer on a substrate, forming a trench within the dielectric layer and the substrate, forming an epitaxial structure within the trench, and forming a barrier layer with first and second layer portions. The first layer portion is formed on a sidewall portion of the trench that is not covered by the epitaxial structure. The method further includes forming a capping layer on the epitaxial structure and adjacent to the barrier layer, selectively doping regions of the epitaxial structure and the capping layer, selectively forming a silicide layer on the doped regions, depositing an etch stop layer on the silicide layer, and forming conductive plugs on the silicide layer through the etch stop layer.
    Type: Application
    Filed: November 24, 2020
    Publication date: December 2, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Po-Chun LIU, Eugene I-Chun CHEN, Chun-Kai LAN
  • Publication number: 20210376086
    Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a substrate having a first semiconductor material. A second semiconductor material is disposed on the first semiconductor material. The second semiconductor material is a group IV semiconductor or a group III-V compound semiconductor. A passivation layer is disposed on the second semiconductor material. The passivation layer includes the first semiconductor material. A first doped region and a second doped region extend through the passivation layer and into the second semiconductor material.
    Type: Application
    Filed: September 29, 2020
    Publication date: December 2, 2021
    Inventors: Yin-Kai Liao, Sin-Yi Jiang, Hsiang-Lin Chen, Yi-Shin Chu, Po-Chun Liu, Kuan-Chieh Huang, Jyh-Ming Hung, Jen-Cheng Liu
  • Publication number: 20210167236
    Abstract: Some embodiments relate to an integrated circuit (IC) disposed on a silicon substrate, which includes a well region having a first conductivity type. An epitaxial pillar of SiGe or Ge extends upward from the well region. The epitaxial pillar includes a lower epitaxial region having the first conductivity type and an upper epitaxial region having a second conductivity type, which is opposite the first conductivity type. A dielectric layer is arranged over an upper surface of the substrate and is disposed around the lower epitaxial region to extend over outer edges of the well region. The dielectric layer has inner sidewalls that contact outer sidewalls of the epitaxial pillar. A dielectric sidewall structure has a bottom surface that rests on an upper surface of the dielectric layer and has inner sidewalls that extend continuously from the upper surface of the dielectric layer to a top surface of the epitaxial pillar.
    Type: Application
    Filed: January 14, 2021
    Publication date: June 3, 2021
    Inventors: Chih-Ming Chen, Lee-Chuan Tseng, Ming Chyi Liu, Po-Chun Liu