Patents by Inventor Po-Chun Liu

Po-Chun Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10991819
    Abstract: The present disclosure, in some embodiments, relates to a transistor device. The transistor device includes a layer of GaN over a substrate. A mobility-enhancing layer of AlzGa(1-z)N is over the layer of GaN and has a first molar fraction z in a first range of between approximately 0.25 and approximately 0.4. A resistance-reducing layer of AlxGa(1-x)N is over the mobility-enhancing layer and has a second molar fraction x in a second range of between approximately 0.1 and approximately 0.15. A source has a source contact and an underlying source region. A drain has a drain contact and an underlying drain region. The source and drain regions extend through the resistance-reducing layer of AlxGa(1-x)N and into the mobility-enhancing layer of AlzGa(1-z)N. The source and drain regions have bottoms over a bottom of the mobility-enhancing layer of AlzGa(1-z)N. A gate structure is laterally between the source and drain contacts.
    Type: Grant
    Filed: September 17, 2018
    Date of Patent: April 27, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Po-Chun Liu, Chung-Yi Yu, Chi-Ming Chen, Chen-Hao Chiang
  • Publication number: 20210098524
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming an image sensor in which a device layer has high crystalline quality. According to some embodiments, a hard mask layer is deposited covering a substrate. A first etch is performed into the hard mask layer and the substrate to form a cavity. A second etch is performed to remove crystalline damage from the first etch and to laterally recess the substrate in the cavity so the hard mask layer overhangs the cavity. A sacrificial layer is formed lining cavity, a blanket ion implantation is performed into the substrate through the sacrificial layer, and the sacrificial layer is removed. An interlayer is epitaxially grown lining the cavity and having a top surface underlying the hard mask layer, and a device layer is epitaxially grown filling the cavity over the interlayer. A photodetector is formed in the device layer.
    Type: Application
    Filed: June 10, 2020
    Publication date: April 1, 2021
    Inventors: Po-Chun Liu, Yung-Chang Chang, Eugene I-Chun Chen
  • Publication number: 20210074755
    Abstract: In some embodiments, a semiconductor device is provided. The semiconductor device includes an epitaxial structure having a group IV chemical element disposed in a semiconductor substrate, where the epitaxial structure extends into the semiconductor substrate from a first side of the semiconductor substrate. A photodetector is at least partially arranged in the epitaxial structure. A first capping structure having a first capping structure chemical element that is different than the first group IV chemical element covers the epitaxial structure on the first side of the semiconductor substrate. A second capping structure is arranged between the first capping structure and the epitaxial structure, where the second capping structure includes the group IV chemical element and the first capping structure chemical element.
    Type: Application
    Filed: November 19, 2020
    Publication date: March 11, 2021
    Inventors: Po-Chun Liu, Chung-Yi Yu, Eugene Chen
  • Patent number: 10937900
    Abstract: The present disclosure provides a semiconductor structure, including a substrate, a first III-V layer over the substrate, having a first band gap, and a second III-V layer over the first III-V layer, having a second band gap. The second III-V layer includes a first surface in contact with the first III-V layer and a second surface opposite to the first surface. The second band gap at the second surface is greater than the second band gap at the first surface. The present disclosure also provides a manufacturing method of the aforesaid semiconductor structure.
    Type: Grant
    Filed: April 22, 2016
    Date of Patent: March 2, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Po-Chun Liu, Chi-Ming Chen, Yao-Chung Chang, Jiun-Lei Jerry Yu, Chen-Hao Chiang, Chung-Yi Yu
  • Publication number: 20210050209
    Abstract: A high electron mobility transistor includes: a first semiconductor layer over a substrate, and a second semiconductor layer over the first semiconductor layer, the second semiconductor layer having a band gap discontinuity with the first semiconductor layer, and at the first semiconductor layer and/or the second conductive layer includes indium. A top layer is over the second semiconductor layer, and a metal layer is over, and extends into, the top layer, the top layer separating the metal layer from the second semiconductor layer. A gate electrode is over the top layer, a third semiconductor layer being between the gate electrode and the top layer, where a sidewall of the third semiconductor layer and a sidewall of the metal layer are separated. A source and drain are on opposite sides of the gate electrode, the top layer extending continuously from below the source, below the gate electrode, and below the drain.
    Type: Application
    Filed: November 4, 2020
    Publication date: February 18, 2021
    Inventors: Po-Chun LIU, Chung-Chieh HSU, Chi-Ming CHEN, Chung-Yi YU, Chen-Hao CHIANG, Min-Chang CHING
  • Publication number: 20210036140
    Abstract: A semiconductor device includes a doped substrate and a seed layer in direct contact with the substrate. The seed layer includes a first seed sublayer having a first lattice structure. The first seed layer is doped with carbon. The seed layer further includes a second seed sublayer over the first see layer, wherein the second seed layer has a second lattice structure. The semiconductor device further includes a graded layer in direct contact with the seed layer. The graded layer includes a first graded sublayer including AlGaN having a first Al:Ga ratio; a second graded sublayer including AlGaN having a second Al:Ga ratio different from the first Al:Ga ratio; and a third graded sublayer over including AlGaN having a third Al:Ga ratio different from the second Al:Ga ratio. The semiconductor device includes a channel layer over the graded layer. The semiconductor device includes an active layer over the channel layer.
    Type: Application
    Filed: October 20, 2020
    Publication date: February 4, 2021
    Inventors: Chi-Ming CHEN, Po-Chun LIU, Chung-Yi YU, Chia-Shiung TSAI, Ru-Liang LEE
  • Publication number: 20210028016
    Abstract: A semiconductor structure includes a substrate. The semiconductor structure further includes a buffer layer over the substrate, wherein the buffer layer comprises a plurality of III-V layers, and a dopant type of each III-V layer of the plurality of III-V layers is opposite to a dopant of adjacent III-V layers of the plurality of III-V layers. The semiconductor structure further includes an active layer over the buffer layer. The semiconductor structure further includes a dielectric layer over the active layer.
    Type: Application
    Filed: September 30, 2020
    Publication date: January 28, 2021
    Inventors: Chi-Ming CHEN, Po-Chun LIU, Chung-Yi YU, Chia-Shiung TSAI
  • Patent number: 10896985
    Abstract: Some embodiments relate to an integrated circuit (IC) disposed on a silicon substrate, which includes a well region having a first conductivity type. A dielectric layer is arranged over an upper surface of the silicon substrate, and extends over outer edges of the well region and includes an opening that leaves an inner portion of the well region exposed. An epitaxial pillar of SiGe or Ge extends upward from the inner portion of the well region. The epitaxial pillar includes a lower epitaxial region having the first conductivity type and an upper epitaxial region having a second conductivity type, which is opposite the first conductivity type. A dielectric sidewall structure surrounds the epitaxial pillar and has a bottom surface that rests on an upper surface of the dielectric layer.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: January 19, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Ming Chen, Lee-Chuan Tseng, Ming Chyi Liu, Po-Chun Liu
  • Publication number: 20200402797
    Abstract: A semiconductor structure includes a substrate. The semiconductor structure further includes a first III-V layer over the substrate, wherein the first III-V layer includes a first dopant type. The semiconductor structure further includes a second III-V layer over the first III-V layer, wherein the second III-V layer has a second dopant type opposite the first dopant type. The semiconductor structure further includes a third III-V layer over the second III-V layer, wherein the third III-V layer has the first dopant type. The semiconductor structure further includes a fourth III-V layer over the third III-V layer, the fourth III-V layer having the second dopant type. The semiconductor structure further includes an active layer over the fourth III-V layer. The semiconductor structure further includes a dielectric layer over the active layer.
    Type: Application
    Filed: September 3, 2020
    Publication date: December 24, 2020
    Inventors: Chi-Ming CHEN, Po-Chun LIU, Chung-Yi YU, Chia-Shiung TSAI
  • Patent number: 10867792
    Abstract: A high electron mobility transistor (HEMT) includes a substrate, and a channel layer over the substrate, wherein and at least one of the channel layer or the active layer comprises indium. The HEMT further includes an active layer over the channel layer. The active layer has a band gap discontinuity with the channel layer.
    Type: Grant
    Filed: February 18, 2014
    Date of Patent: December 15, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Chun Liu, Chi-Ming Chen, Min-Chang Ching, Chen-Hao Chiang, Chung-Yi Yu, Chung-Chieh Hsu
  • Publication number: 20200388497
    Abstract: First, second, and third trenches are formed in a layer over a substrate. The third trench is substantially wider than the first and second trenches. The first, second, and third trenches are partially filled with a first conductive material. A first anti-reflective material is coated over the first, second, and third trenches. The first anti-reflective material has a first surface topography variation. A first etch-back process is performed to partially remove the first anti-reflective material. Thereafter, a second anti-reflective material is coated over the first anti-reflective material. The second anti-reflective material has a second surface topography variation that is smaller than the first surface topography variation. A second etch-back process is performed to at least partially remove the second anti-reflective material in the first and second trenches. Thereafter, the first conductive material is partially removed in the first and second trenches.
    Type: Application
    Filed: August 24, 2020
    Publication date: December 10, 2020
    Inventors: Jin-Dah Chen, Ming-Feng Shieh, Han-Wei Wu, Yu-Hsien Lin, Po-Chun Liu, Stan Chen
  • Patent number: 10861896
    Abstract: In some embodiments, a semiconductor device is provided. The semiconductor device includes an epitaxial structure having a group IV chemical element disposed in a semiconductor substrate, where the epitaxial structure extends into the semiconductor substrate from a first side of the semiconductor substrate. A photodetector is at least partially arranged in the epitaxial structure. A first capping structure having a first capping structure chemical element that is different than the first group IV chemical element covers the epitaxial structure on the first side of the semiconductor substrate. A second capping structure is arranged between the first capping structure and the epitaxial structure, where the second capping structure includes the group IV chemical element and the first capping structure chemical element.
    Type: Grant
    Filed: July 27, 2018
    Date of Patent: December 8, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Po-Chun Liu, Chung-Yi Yu, Eugene Chen
  • Patent number: 10804101
    Abstract: A semiconductor structure including a substrate and a nucleation layer over the substrate. The semiconductor structure further includes a first III-V layer over the nucleation layer, wherein the first III-V layer includes a first dopant type. The semiconductor structure further includes one or more sets of III-V layers over the first III-V layer. Each set of the one or more sets of III-V layers includes a lower III-V layer, wherein the lower III-V layer has a second dopant type opposite the first dopant type, and an upper III-V layer on the lower III-V layer, wherein the upper III-V layer has the first dopant type. The semiconductor structure further includes a second III-V layer over the one or more sets of III-V layers, the second III-V layer having the second dopant type.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: October 13, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Ming Chen, Po-Chun Liu, Chung-Yi Yu, Chia-Shiung Tsai
  • Patent number: 10755936
    Abstract: First, second, and third trenches are formed in a layer over a substrate. The third trench is substantially wider than the first and second trenches. The first, second, and third trenches are partially filled with a first conductive material. A first anti-reflective material is coated over the first, second, and third trenches. The first anti-reflective material has a first surface topography variation. A first etch-back process is performed to partially remove the first anti-reflective material. Thereafter, a second anti-reflective material is coated over the first anti-reflective material. The second anti-reflective material has a second surface topography variation that is smaller than the first surface topography variation. A second etch-back process is performed to at least partially remove the second anti-reflective material in the first and second trenches. Thereafter, the first conductive material is partially removed in the first and second trenches.
    Type: Grant
    Filed: April 26, 2019
    Date of Patent: August 25, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jin-Dah Chen, Ming-Feng Shieh, Han-Wei Wu, Yu-Hsien Lin, Po-Chun Liu, Stan Chen
  • Publication number: 20200165859
    Abstract: A space adjustment system and a control method thereof are provided. The space adjustment system includes a body, at least one door leaf, at least one motor, and a control circuit. The door leaf is movably disposed at the body. The door panel of each door leaf includes a panel. The motor can drive the motion of the door leaf. The control circuit is coupled with the panel of the door leaf and motor. The control circuit controls the motor to drive the door leaf, and adjusts the transparency or display function of the panel on the corresponding door leaf in response to a location of the door leaf. Accordingly, multiple space type can be created.
    Type: Application
    Filed: February 27, 2019
    Publication date: May 28, 2020
    Applicant: COMPAL ELECTRONICS, INC.
    Inventors: Ruei-Hong Hong, Wen-Yi Chiu, Wei-Jun Wang, Po-Chun Liu
  • Publication number: 20200141098
    Abstract: A sanitary equipment with a water supply system, a water route system, and a hand washing table are provided. The sanitary equipment includes a machine having a machine water outlet; a movable hand washing table pivoted on the machine and located below the machine water outlet, the movable hand washing table being capable of opening or retracting with respect to the machine; and a water route system disposed in the machine and connected to the machine water outlet to discharge potable water and non-potable water from the machine water outlet.
    Type: Application
    Filed: October 21, 2019
    Publication date: May 7, 2020
    Applicant: COMPAL ELECTRONICS, INC.
    Inventors: Po-Chun Liu, Wen-Yi Chiu, Pin-Hsing Lee
  • Publication number: 20200083362
    Abstract: A semiconductor device includes a substrate. The semiconductor device includes an AlN seed layer in direct contact with the substrate. The AlN seed layer includes an AlN first seed sublayer, and an AlN second seed sublayer, wherein a portion of the AlN seed layer closest to the substrate includes carbon dopants and has a different lattice structure from a substrate lattice structure. The semiconductor device includes a graded layer in direct contact with the AlN seed layer. The graded layer includes a first graded sublayer including AlGaN, a second graded sublayer including AlGaN, and a third graded sublayer including AlGaN. The semiconductor device includes a channel layer over the graded layer. The semiconductor device includes an active layer over the channel layer, wherein the active layer has a band gap discontinuity with the channel layer.
    Type: Application
    Filed: November 18, 2019
    Publication date: March 12, 2020
    Inventors: Chi-Ming CHEN, Po-Chun LIU, Chung-Yi YU, Chia-Shiung TSAI, Ru-Liang LEE
  • Publication number: 20200035741
    Abstract: In some embodiments, a semiconductor device is provided. The semiconductor device includes an epitaxial structure having a group IV chemical element disposed in a semiconductor substrate, where the epitaxial structure extends into the semiconductor substrate from a first side of the semiconductor substrate. A photodetector is at least partially arranged in the epitaxial structure. A first capping structure having a first capping structure chemical element that is different than the first group IV chemical element covers the epitaxial structure on the first side of the semiconductor substrate. A second capping structure is arranged between the first capping structure and the epitaxial structure, where the second capping structure includes the group IV chemical element and the first capping structure chemical element.
    Type: Application
    Filed: July 27, 2018
    Publication date: January 30, 2020
    Inventors: Po-Chun Liu, Chung-Yi Yu, Eugene Chen
  • Patent number: D908851
    Type: Grant
    Filed: November 6, 2018
    Date of Patent: January 26, 2021
    Assignee: COMPAL ELECTRONICS, INC.
    Inventors: Pin-Hsing Lee, Po-Chun Liu, Wen-Yi Chiu
  • Patent number: D916716
    Type: Grant
    Filed: March 2, 2018
    Date of Patent: April 20, 2021
    Assignee: COMPAL ELECTRONICS, INC.
    Inventors: Ruei-Hong Hong, Wen-Yi Chiu, Po-Chun Liu, Wei-Jun Wang