Patents by Inventor Prashant Kumar

Prashant Kumar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10403515
    Abstract: Implementations disclosed herein describe a bevel etch apparatus within a loadlock bevel etch chamber and methods of using the same. The bevel etch apparatus has a mask assembly within the loadlock bevel etch chamber. During an etch process, the mask assembly delivers a gas flow to control bevel etch without the use of a shadow frame. As such, the edge exclusion at the bevel edge can be reduced, thus increasing product yield.
    Type: Grant
    Filed: February 2, 2016
    Date of Patent: September 3, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha, Brett Berens, Kalyanjit Ghosh, Jianhua Zhou, Ganesh Balasubramanian, Kwangduk Douglas Lee, Juan Carlos Rocha-Alvarez, Hiroyuki Ogiso, Liliya Krivulina, Rick Gilbert, Mohsin Waqar, Venkatanarayana Shankaramurthy, Hari K. Ponnekanti
  • Patent number: 10403535
    Abstract: Embodiments of the present disclosure provide an electrostatic chuck for maintaining a flatness of a substrate being processed in a plasma reactor at high temperatures. In one embodiment, the electrostatic chuck comprises a chuck body coupled to a support stem, the chuck body having a substrate supporting surface, and the chuck body has a volume resistivity value of about 1×107 ohm-cm to about 1×1015 ohm-cm in a temperature of about 250° C. to about 700° C., and an electrode embedded in the body, the electrode is coupled to a power supply. In one example, the chuck body is composed of an aluminum nitride material which has been observed to be able to optimize chucking performance around 600° C. or above during a deposition or etch process, or any other process that employ both high operating temperature and substrate clamping features.
    Type: Grant
    Filed: August 12, 2015
    Date of Patent: September 3, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin, Ren-Guan Duan, Kwangduk Douglas Lee, Bok Hoen Kim, Swayambhu P. Behera, Sungwon Ha, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Prashant Kumar Kulshreshtha, Jason K. Foster, Mukund Srinivasan, Uwe P. Haller, Hari K. Ponnekanti
  • Publication number: 20190263963
    Abstract: Disclosed is a continuous process and device for making polybutylene terephthalate (PBT) resin, particularly high molecular weight PBT resin. Also disclosed are a device for conducting the process, and a monitoring process for determining the carboxylic acid end group concentration of the resulting PBT.
    Type: Application
    Filed: March 11, 2019
    Publication date: August 29, 2019
    Inventors: Husnu Alp Alidedeoglu, Prashant Kumar, Brian Bougher, Cornelis Adrianus Maria van Gool, Sasi Sethumadhavan Kannamkumarath, Bing Zhou
  • Publication number: 20190252158
    Abstract: The present disclosure generally relates to processing chamber seasoning layers having a graded composition. In one example, the seasoning layer is a boron-carbon-nitride (BCN) film. The BCN film may have a greater composition of boron at the base of the film. As the BCN film is deposited, the boron concentration may approach zero, while the relative carbon and nitrogen concentration increases. The BCN film may be deposited by initially co-flowing a boron precursor, a carbon precursor, and a nitrogen precursor. After a first period of time, the flow rate of the boron precursor may be reduced. As the flow rate of boron precursor is reduced, RF power may be applied to generate a plasma during deposition of the seasoning layer.
    Type: Application
    Filed: November 13, 2018
    Publication date: August 15, 2019
    Inventors: Prashant Kumar KULSHRESHTHA, Ziqing DUAN, Abdul Aziz KHAJA, Zheng John YE, Amit Kumar BANSAL
  • Patent number: 10377854
    Abstract: A process for preparing polybutylene terephthalate (PBT) which includes step of melting solid PBT oligomer having an IV of between 0.13 and 0.17 dL/g and a CEG of between 90 and 180 mmol/kg; and further step of the PBT oligomer polycondensation; wherein the polycondensation process is carried out continuously using a melt tank for melting oligomers, one or more reactors for post-condensation processing, and one or more finishing reactors to increase molecular weight. The resulting PBT has an intrinsic viscosity (IV) of between 0.5 and 1.3 dl/g and a carboxylic end group (CEG) concentration of between 1 and 75 mmol/kg.
    Type: Grant
    Filed: August 4, 2015
    Date of Patent: August 13, 2019
    Assignee: SABIC GLOBAL TECHNOLOGIES B.V.
    Inventors: Husnu Alp Alidedeoglu, Prashant Kumar, Osit Karroonnirun, Mark Erik Nelson, Donald E. Owens, III
  • Patent number: 10380721
    Abstract: This disclosure covers systems and methods that sharpen the appearance of a digital illustration while moving the digital illustration. In certain embodiments, upon receiving a command to move a digital illustration, the disclosed systems and methods move the digital illustration (and its constituent line segments) to positions that both sharpen the appearance of the digital illustration and respond to the command. To facilitate sharpening the appearance of a digital illustration as part of a seemingly continuous movement, in some embodiments, the disclosed systems and methods move a blurry digital illustration to a position that sharpens the appearance of blurry axial-line segments by translating the digital illustration according to a translation vector and a command to move the digital illustration.
    Type: Grant
    Filed: April 27, 2017
    Date of Patent: August 13, 2019
    Assignee: ADOBE INC.
    Inventors: Vivek Agrawal, Prashant Kumar Singh, Ankit Aggarwal
  • Patent number: 10373822
    Abstract: Methods for modulating local stress and overlay error of one or more patterning films may include modulating a gas flow profile of gases introduced into a chamber body, flowing gases within the chamber body toward a substrate, rotating the substrate, and unifying a center-to-edge temperature profile of the substrate by controlling the substrate temperature with a dual zone heater. A chamber for depositing a film may include a chamber body comprising one or more processing regions. The chamber body may include a gas distribution assembly having a blocker plate for delivering gases into the one or more processing regions. The blocker plate may have a first region and a second region, and the first region and second region each may have a plurality of holes. The chamber body may have a dual zone heater.
    Type: Grant
    Filed: November 17, 2017
    Date of Patent: August 6, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee, Martin J. Seamons, Bok Hoen Kim, Ganesh Balasubramanian, Ziqing Duan, Lei Jing, Mandar B. Pandit
  • Patent number: 10364321
    Abstract: A batch process for preparing polybutylene terephthalate (PBT) includes heating a solid PBT oligomer having an intrinsic viscosity (IV) of 0.1 to 0.2 dL/g and a carboxylic acid end group concentration [CEG] of 90 to 180 mmol/kg at a temperature and pressure defined herein to form melted homogeneous PBT oligomer containing 0 to 300 ppm tetra(C1-C8 alkyl) titanate catalyst, and polycondensing the melted homogeneous PBT oligomer in the presence of a tetra(C1-C8 alkyl) titanate catalyst, reducing the pressure, and maintaining the temperature at approximately 245-260° C. for a sufficient time to provide PBT having an IV of 0.55 and 1.20 dL/g. The PBT oligomer can be prepared by heating a mixture of 1,4-butane diol and purified terephthalic acid in the presence of a tetra(C1-C8 alkyl) titanate catalyst.
    Type: Grant
    Filed: August 13, 2015
    Date of Patent: July 30, 2019
    Assignee: SABIC GLOBAL TECHNOLOGIES B.V.
    Inventors: Husnu Alp Alidedeoglu, Prashant Kumar
  • Publication number: 20190215270
    Abstract: A packet routing method for directing packets of a session in an IP network causes an intermediate node to obtain a lead packet of a plurality of packets in a given session. The intermediate node has an electronic interface in communication with the IP network and obtains the lead packet through that same interface. The method maintains, in a routing database, state information relating to a plurality of sessions in the IP network. Each session includes a single stateful session path formed by an ordered plurality of nodes in the IP network, and the state information includes information about the ordered plurality of nodes in the sessions. The method further accesses the routing database to determine the state of a plurality of sessions, and forms a stateful given path for packets of the given session across the IP network as a function of the state information in the routing database.
    Type: Application
    Filed: March 13, 2019
    Publication date: July 11, 2019
    Inventors: Patrick Timmons, Michael Baj, Hadriel S. Kaplan, Patrick MeLampy, Prashant Kumar, Robert Penfield
  • Patent number: 10346718
    Abstract: A tablet including a dishwashing detergent composition and a crosslinked acrylic acid polymer having a weight average molecular weight (Mw) of at least 500,000.
    Type: Grant
    Filed: February 6, 2018
    Date of Patent: July 9, 2019
    Assignee: Diversey, Inc.
    Inventors: Prashant Kumar Pandey, Anant Kondiram Parte
  • Patent number: 10344119
    Abstract: Disclosed is a continuous process and device for making polybutylene terephthalate (PBT) resin, particularly high molecular weight PBT resin. The process includes combining 1,4-butane diol and purified terephthalic acid to form a mixture and continuously supplying the mixture to a tower reactor having a plurality of reactor zones for esterification and/or transesterification. The product is continuously supplied to a first continuously stirred tank reactor, and further to a continuous polycondensation reactor. Particular conditions for each step of the process are further described herein. Also disclosed are a device for conducting the process, and a monitoring process for determining the carboxylic acid end group concentration of the resulting PBT.
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: July 9, 2019
    Assignee: SABIC GLOBAL TECHNOLOGIES B.V.
    Inventors: Husnu Alp Alidedeoglu, Prashant Kumar, Brian Bougher, Cornelis Adrianus Maria van Gool, Sasi Sethumadhavan Kannamkumarath, Bing Zhou
  • Patent number: 10348812
    Abstract: Techniques for managing session data in a computer system having a plurality of servers establishing sessions with clients. Communications from any particular client are forwarded to the server assigned to handle that client. A load balancer may determine that any particular session for any particular client should be moved between servers, based on load balancing criteria. In this case, the load balancer causes session data for the server assigned to the client to be transferred to a different server. Acknowledgment signals are sent between the servers and load balancer to indicate completion status. Load balancer maintains backup data at secondary servers which can be brought online when a primary server becomes unresponsive. A method, system, and computer-readable medium are provided.
    Type: Grant
    Filed: October 16, 2015
    Date of Patent: July 9, 2019
    Assignee: VMware Inc.
    Inventors: Prashant Kumar, Vineet Kumar Sinha, Prasenjit Sarkar, Anoop Shukla, Hrishikesh Dalvi
  • Patent number: 10341171
    Abstract: Embodiments of the invention relate techniques of implementing role-driven notification. The techniques can include determining a location of a role in a role hierarchy and a corresponding location of a first notification template in a notification template hierarchy. The techniques can also include identifying one or more child roles of the role corresponding to the user and one or more child notification templates of the notification template corresponding to the user. The techniques can include generating a second notification template, the second notification template including the one or more rules included in each of the one or more child notification templates and sending a notification for the user based on the second notification template.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: July 2, 2019
    Assignee: Oracle International Corporation
    Inventors: Suchet Singh Khalsa, Archana Shukla, Prashant Kumar Shetty, Jeffrey Doering, Gopalan Arun
  • Publication number: 20190172714
    Abstract: Implementations described herein generally relate to the fabrication of integrated circuits. More particularly, the implementations described herein provide techniques for deposition of amorphous carbon films on a substrate. In one implementation, a method of forming an amorphous carbon film is provided. The method comprises depositing an amorphous carbon film on an underlayer positioned on a susceptor in a first processing region. The method further comprises implanting a dopant or inert species into the amorphous carbon film in a second processing region. The dopant or inert species is selected from carbon, boron, nitrogen, silicon, phosphorous, argon, helium, neon, krypton, xenon or combinations thereof. The method further comprises patterning the doped amorphous carbon film. The method further comprises etching the underlayer.
    Type: Application
    Filed: November 13, 2018
    Publication date: June 6, 2019
    Inventors: Sarah BOBEK, Prashant KUMAR KULSHRESHTHA, Rajesh PRASAD, Kwangduk Douglas LEE, Harry WHITESELL, Hidetaka OSHIO, Dong Hyung LEE, Deven Matthew Raj MITTAL
  • Patent number: 10313200
    Abstract: Each known operating system, software, or hardware within a UNIX environment can correspond to a list of identifiable attributes that is used to uniquely identify the operating system, software, or hardware of interest. By using these identifiable attributes in rules, fingerprints can be generated that define the existence of an object (e.g. operating systems, software and hardware) within the UNIX environment. By using the generated fingerprints via a discovery tool, the existence of the objects can be determined within the UNIX environment (e.g. computing device, computing network).
    Type: Grant
    Filed: September 15, 2017
    Date of Patent: June 4, 2019
    Assignee: BDNA Corporation
    Inventors: Alexander Meau, Prashant Kumar Nagpal
  • Patent number: 10298616
    Abstract: An apparatus and/or method secures session communications between a first network (having a first encryption device configured to encrypt at least some session communications from the first network to the second network) and a second network. The apparatus and/or method receive, at the first network, given session packets of a given session between the first and second networks, and determine that at least one of the received given session packets is encrypted (“encrypted given session packet”). The given session involves a Layer 7 application that encrypted the at least one encrypted given session packet. Next, the apparatus and/or method controls, in response to determining that the given session packet is encrypted, the first encryption device to permit communication of the given session with the second network without further encrypting a plurality of the encrypted given session packets. Preferably, the first encryption device encrypts none of the given session packets.
    Type: Grant
    Filed: May 26, 2016
    Date of Patent: May 21, 2019
    Assignee: 128 Technology, Inc.
    Inventors: Prashant Kumar, Patrick J. MeLampy, Patrick Timmons
  • Publication number: 20190127519
    Abstract: Methods for preparing dynamic cross-linked polymer compositions derived from an ester oligomer component, a monomeric chain extender component, and transesterification and polycondensation catalysts are described.
    Type: Application
    Filed: April 28, 2017
    Publication date: May 2, 2019
    Inventors: Husnu Alp ALIDEDEOGLU, Manojkumar CHELLAMUTHU, Ramon GROOTE, Prashant KUMAR
  • Patent number: 10277506
    Abstract: A packet routing method for directing packets of a session in an IP network causes an intermediate node to obtain a lead packet of a plurality of packets in a given session. The intermediate node has an electronic interface in communication with the IP network and obtains the lead packet through that same interface. The method maintains, in a routing database, state information relating to a plurality of sessions in the IP network. Each session includes a single stateful session path formed by an ordered plurality of nodes in the IP network, and the state information includes information about the ordered plurality of nodes in the sessions. The method further accesses the routing database to determine the state of a plurality of sessions, and forms a stateful given path for packets of the given session across the IP network as a function of the state information in the routing database.
    Type: Grant
    Filed: December 8, 2014
    Date of Patent: April 30, 2019
    Assignee: 128 TECHNOLOGY, INC.
    Inventors: Patrick Timmons, Michael Baj, Hadriel Kaplan, Patrick MeLampy, Prashant Kumar, Robert Penfield
  • Publication number: 20190119455
    Abstract: Methods for preparing dynamic cross-linked polymer compositions derived from an ester oligomer component, a polymeric chain extender component, and transesterification and poly condensation catalysts are described.
    Type: Application
    Filed: April 28, 2017
    Publication date: April 25, 2019
    Inventors: Prashant Kumar, Husnu Alp Alidedeoglu, Manojkumar Chellamuthu, Ramon Groote
  • Publication number: 20190122889
    Abstract: Implementations of the present disclosure generally relate to the fabrication of integrated circuits. More particularly, the implementations described herein provide techniques for deposition of boron-carbon films on a substrate. In one implementation, a method of processing a substrate is provided. The method comprises flowing a hydrocarbon-containing gas mixture into a processing volume of a processing chamber having a substrate positioned therein, wherein the substrate is heated to a substrate temperature from about 400 degrees Celsius to about 700 degrees Celsius, flowing a boron-containing gas mixture into the processing volume and generating an RF plasma in the processing volume to deposit a boron-carbon film on the heated substrate, wherein the boron-carbon film has an elastic modulus of from about 200 to about 400 GPa and a stress from about ?100 MPa to about 100 MPa.
    Type: Application
    Filed: December 13, 2018
    Publication date: April 25, 2019
    Inventors: Prashant Kumar KULSHRESHTHA, Ziqing DUAN, Karthik Thimmavajjula NARASIMHA, Kwangduk Douglas LEE, Bok Hoen KIM