Patents by Inventor Ran Yan

Ran Yan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180366579
    Abstract: A high voltage transistor may be formed on the basis of CMOS techniques for forming sophisticated SOI devices, wherein a fully depleted channel portion may result in low on-resistance and high breakdown voltage. Thus, an LDMOS-type transistor may be formed on the basis of a fully depleted drift region, thereby providing a high degree of scalability and process compatibility with sophisticated CMOS techniques.
    Type: Application
    Filed: June 14, 2017
    Publication date: December 20, 2018
    Inventors: Ran Yan, Ming-Cheng Chang, Thomas Merbeth
  • Patent number: 10134730
    Abstract: A method of manufacturing a semiconductor device includes providing a semiconductor layer, forming a plurality of semiconductor fins on a surface of the semiconductor layer extending in parallel to each other along a first direction parallel to the surface of the semiconductor layer, and forming a plurality of gate electrodes comprising longitudinal portions extending parallel to the semiconductor fins along the first direction.
    Type: Grant
    Filed: July 6, 2017
    Date of Patent: November 20, 2018
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ming-Cheng Chang, Ran Yan, Bo Bai
  • Patent number: 9941348
    Abstract: The present disclosure provides a method of forming a capacitor structure and a capacitor structure. A semiconductor-on-insulator substrate is provided comprising a semiconductor layer, a buried insulating material layer and a semiconductor substrate material. A shallow trench isolation structure defining a first active region on the SOI substrate is formed, the first active region having a plurality of trenches formed therein. Within each trench, the semiconductor substrate material is exposed on inner sidewalls and a bottom face. A layer of insulating material covering the exposed semiconductor substrate material is formed, and an electrode material is deposited on the layer of insulating material in the first active region.
    Type: Grant
    Filed: April 29, 2016
    Date of Patent: April 10, 2018
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ran Yan, Ming-Cheng Chang, Ralf Richter
  • Patent number: 9881841
    Abstract: Methods for fabricating integrated circuits are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a structure having an n-channel gate stack and a p-channel gate stack formed over a semiconductor substrate. The method includes forming halo implant regions in the semiconductor substrate adjacent the p-channel gate stack and forming extension implant regions in the semiconductor substrate adjacent the p-channel gate stack. The method further includes annealing the halo implant regions and the extension implant regions in the semiconductor substrate adjacent the p-channel gate stack. Also, the method forms extension implant regions in the semiconductor substrate adjacent the n-channel gate stack.
    Type: Grant
    Filed: March 18, 2016
    Date of Patent: January 30, 2018
    Assignee: GLOBALFOUNDRIES, INC.
    Inventors: Alban Zaka, Ran Yan, El Mehdi Bazizi, Jan Hoentschel
  • Publication number: 20170317161
    Abstract: The present disclosure provides a method of forming a capacitor structure and a capacitor structure. A semiconductor-on-insulator substrate is provided comprising a semiconductor layer, a buried insulating material layer and a semiconductor substrate material. A shallow trench isolation structure defining a first active region on the SOI substrate is formed, the first active region having a plurality of trenches formed therein. Within each trench, the semiconductor substrate material is exposed on inner sidewalls and a bottom face. A layer of insulating material covering the exposed semiconductor substrate material is formed, and an electrode material is deposited on the layer of insulating material in the first active region.
    Type: Application
    Filed: April 29, 2016
    Publication date: November 2, 2017
    Inventors: Ran Yan, Ming-Cheng Chang, Ralf Richter
  • Publication number: 20170309628
    Abstract: A method of manufacturing a semiconductor device includes providing a semiconductor layer, forming a plurality of semiconductor fins on a surface of the semiconductor layer extending in parallel to each other along a first direction parallel to the surface of the semiconductor layer, and forming a plurality of gate electrodes comprising longitudinal portions extending parallel to the semiconductor fins along the first direction.
    Type: Application
    Filed: July 6, 2017
    Publication date: October 26, 2017
    Inventors: Ming-Cheng Chang, Ran Yan, Bo Bai
  • Publication number: 20170250181
    Abstract: A semiconductor device including a semiconductor layer, a plurality of semiconductor fins formed on a surface of the semiconductor layer and a plurality of gate electrodes formed over the surface of the semiconductor layer is provided. The semiconductor fins extend in parallel to each other along a first direction parallel to the surface of the semiconductor layer and have a first height in a second direction that is perpendicular to the first direction, and the gate electrodes comprise longitudinal portions extending parallel to the semiconductor fins along the first direction and, in particular, having a second height in the second direction lower than the first height.
    Type: Application
    Filed: February 26, 2016
    Publication date: August 31, 2017
    Inventors: Ming-Cheng Chang, Ran Yan, Bo Bai
  • Patent number: 9748236
    Abstract: A semiconductor device including a semiconductor layer, a plurality of semiconductor fins formed on a surface of the semiconductor layer and a plurality of gate electrodes formed over the surface of the semiconductor layer is provided. The semiconductor fins extend in parallel to each other along a first direction parallel to the surface of the semiconductor layer and have a first height in a second direction that is perpendicular to the first direction, and the gate electrodes comprise longitudinal portions extending parallel to the semiconductor fins along the first direction and, in particular, having a second height in the second direction lower than the first height.
    Type: Grant
    Filed: February 26, 2016
    Date of Patent: August 29, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ming-Cheng Chang, Ran Yan, Bo Bai
  • Patent number: 9741625
    Abstract: In a first aspect, the present disclosure provides a method of forming a semiconductor device, including providing an SOI structure comprising a base substrate, a buried insulating material layer formed on the base substrate and an active semiconductor layer formed on the buried insulating structure, forming a germanium-comprising layer on an exposed surface of the active semiconductor layer, forming a trench isolation structure, the trench isolation structure extending through the germanium-comprising layer and the active semiconductor layer, performing an annealing process after the trench isolation structure is formed, the annealing process resulting in an oxide layer disposed on a germanium-comprising active layer which is formed on the buried insulating material layer, and removing the oxide layer for exposing an upper surface of the germanium-comprising active layer.
    Type: Grant
    Filed: September 3, 2015
    Date of Patent: August 22, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ran Yan, Alban Zaka, Pei-Yu Chou
  • Publication number: 20170148850
    Abstract: A memory device structure includes a wafer substrate and a magnetic tunnel junction (MTJ) positioned above an upper surface of the wafer substrate. The MTJ includes a first magnetic layer, a second magnetic layer laterally adjacent the first magnetic layer, and a nonmagnetic layer interposed between the first and second magnetic layers, wherein the first magnetic layer, the nonmagnetic layer and the second magnetic layer comprise a substantially vertical layer stack that extends along a first direction that is substantially perpendicular to the upper surface of the wafer substrate. A first contact is electrically coupled to the first magnetic layer and a second contact is electrically coupled to the second magnetic layer.
    Type: Application
    Filed: February 9, 2017
    Publication date: May 25, 2017
    Inventors: Ralf Richter, Yu-Teh Chiang, Ran Yan
  • Publication number: 20170117322
    Abstract: The present disclosure provides a memory device structure including a wafer substrate, a magnetic tunnel junction (MTJ) formed by a first magnetic layer, a second magnetic layer, and a thin non-magnetic layer stacked along a first direction perpendicular to an upper surface of the wafer substrate above which the MTJ is formed, the non-magnetic layer being interposed between the first magnetic layer and the second magnetic layer, a first contact electrically coupled to the first magnetic layer, and a second contact electrically coupled to the second magnetic layer.
    Type: Application
    Filed: October 21, 2015
    Publication date: April 27, 2017
    Inventors: Ralf Richter, Yu-Teh Chiang, Ran Yan
  • Patent number: 9620589
    Abstract: Integrated circuits and methods for fabricating integrated circuits are provided. In an embodiment, a method includes providing a semiconductor substrate, defining a length on the semiconductor substrate corresponding to opposing vertices of a nanowire, removing a portion of the semiconductor substrate to provide a first fin structure and a second fin structure, etching a first cavity proximate to the first side, depositing a protective layer in the first cavity, removing a portion of the protective layer to expose a portion of the semiconductor substrate, and etching a second cavity at the exposed semiconductor substrate where the first and second cavities communicate. The first and second fin structures are adjacent where the length of the first fin structure corresponds to the opposing vertices and has a first side and a second side.
    Type: Grant
    Filed: April 7, 2014
    Date of Patent: April 11, 2017
    Assignee: GLOBALFOUNDRIES, INC.
    Inventors: Nicolas Sassiat, Ran Yan, Kun-Hsien Lin, Jan Hoentschel
  • Patent number: 9614003
    Abstract: The present disclosure provides a memory device structure including a wafer substrate, a magnetic tunnel junction (MTJ) formed by a first magnetic layer, a second magnetic layer, and a thin non-magnetic layer stacked along a first direction perpendicular to an upper surface of the wafer substrate above which the MTJ is formed, the non-magnetic layer being interposed between the first magnetic layer and the second magnetic layer, a first contact electrically coupled to the first magnetic layer, and a second contact electrically coupled to the second magnetic layer.
    Type: Grant
    Filed: October 21, 2015
    Date of Patent: April 4, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ralf Richter, Yu-Teh Chiang, Ran Yan
  • Publication number: 20170069550
    Abstract: In a first aspect, the present disclosure provides a method of forming a semiconductor device, including providing an SOI structure comprising a base substrate, a buried insulating material layer formed on the base substrate and an active semiconductor layer formed on the buried insulating structure, forming a germanium-comprising layer on an exposed surface of the active semiconductor layer, forming a trench isolation structure, the trench isolation structure extending through the germanium-comprising layer and the active semiconductor layer, performing an annealing process after the trench isolation structure is formed, the annealing process resulting in an oxide layer disposed on a germanium-comprising active layer which is formed on the buried insulating material layer, and removing the oxide layer for exposing an upper surface of the germanium-comprising active layer.
    Type: Application
    Filed: September 3, 2015
    Publication date: March 9, 2017
    Inventors: Ran Yan, Alban Zaka, Pei-Yu Chou
  • Publication number: 20160300947
    Abstract: The present disclosure provides, in a first aspect, a semiconductor device including an SOI substrate portion, a gate structure formed on the SOI substrate portion and source and drain regions having respective source and drain height levels, wherein the source and drain height levels are different. The semiconductor device may be formed by forming a gate structure over an SOI substrate portion, recessing the SOI substrate portion at one side of the gate structure so as to form a trench adjacent to the gate structure and forming source and drain regions at opposing sides of the gate structure, one of the source and drain regions being formed in the trench.
    Type: Application
    Filed: April 7, 2015
    Publication date: October 13, 2016
    Inventors: Ran Yan, Alban Zaka, Jan Hoentschel
  • Patent number: 9466717
    Abstract: The present disclosure provides, in a first aspect, a semiconductor device including an SOI substrate portion, a gate structure formed on the SOI substrate portion and source and drain regions having respective source and drain height levels, wherein the source and drain height levels are different. The semiconductor device may be formed by forming a gate structure over an SOI substrate portion, recessing the SOI substrate portion at one side of the gate structure so as to form a trench adjacent to the gate structure and forming source and drain regions at opposing sides of the gate structure, one of the source and drain regions being formed in the trench.
    Type: Grant
    Filed: April 7, 2015
    Date of Patent: October 11, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ran Yan, Alban Zaka, Jan Hoentschel
  • Patent number: 9460955
    Abstract: Integrated circuits with electrical components near shallow trench isolations and methods for producing such integrated circuits are provided. The method includes forming a trench is a substrate, where the trench has a trench surface. A barrier layer including silicon and germanium is formed overlying the trench surface. A shallow trench isolation is then formed with a core overlying the barrier layer, where the core includes a shallow trench isolation insulator.
    Type: Grant
    Filed: November 27, 2013
    Date of Patent: October 4, 2016
    Assignee: GLOBALFOUNDRIES, INC.
    Inventors: Ran Yan, Nicolas Sassiat, Alban Zaka, Kun-Hsien Lin
  • Patent number: 9461145
    Abstract: Enlarging the dummy electrode to the STI top width size by OPC cut mask correction and the resulting device are disclosed. Embodiments include forming an STI region in a silicon substrate, the STI region having a top width; and forming a dummy electrode on the STI region and a gate electrode on the silicon substrate, the dummy electrode having a width greater than or equal to the STI region top width.
    Type: Grant
    Filed: October 1, 2014
    Date of Patent: October 4, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ran Yan, Jan Hoentschel, Martin Gerhardt
  • Publication number: 20160204038
    Abstract: Methods for fabricating integrated circuits are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a structure having an n-channel gate stack and a p-channel gate stack formed over a semiconductor substrate. The method includes forming halo implant regions in the semiconductor substrate adjacent the p-channel gate stack and forming extension implant regions in the semiconductor substrate adjacent the p-channel gate stack. The method further includes annealing the halo implant regions and the extension implant regions in the semiconductor substrate adjacent the p-channel gate stack. Also, the method forms extension implant regions in the semiconductor substrate adjacent the n-channel gate stack.
    Type: Application
    Filed: March 18, 2016
    Publication date: July 14, 2016
    Inventors: Alban Zaka, Ran Yan, El Mehdi Bazizi, Jan Hoentschel
  • Patent number: 9324869
    Abstract: The present disclosure provides, in various aspects, a method of forming a semiconductor device and accordingly formed semiconductor devices. In accordance with some illustrative embodiments herein, a fin is provided in an upper surface of a substrate, the fin having a height dimension and an initial width dimension. After forming a mask on the fin, wherein the mask only partially covers an upper surface of the fin, the fin is exposed to an etch process for removing material in accordance with the mask such that a channel portion connecting end portions of the fin is formed. Herein, a width dimension of the channel portion is smaller than a width dimension of the end portions. In accordance with some illustrative embodiments of the present disclosure, the channel portion may substantially have a cross-section of one of a triangular shape and a double-sigma shape.
    Type: Grant
    Filed: February 4, 2015
    Date of Patent: April 26, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ran Yan, Alban Zaka, Jan Hoentschel