Abstract: Disclosed are systems, methods, and apparatus directed to the fabrication of vertical field effect transistors (VFETs) and VFETs with self-aligned wordlines. In one embodiment, the source and/or drain of the VFETs can include n-doped silicon. In one embodiment, the VFETs can include a channel that can be made of intrinsic silicon. In one embodiment, the source, drain, and/or channel can be deposited using physical vapor deposition (PVD), chemical vapor deposition (CVD), molecular beam chemical vapor deposition (MOCVD), and/or atomic layer deposition (ALD), and the like. In one embodiment, an STI process can be used to fabricate one or more recesses, which can reach the drains of the VFETs. In one embodiment, the systems, methods, and apparatus can permit the self-alignment of one or more wordlines of the VFETs with the one or more fins, and/or gate metals and gate materials of the VFETs.

Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack structure of a quantum dot device, wherein the quantum well stack structure includes an insulating material to define multiple rows of quantum dot formation regions; and a gate that extends over multiple ones of the rows.

Abstract: Disclosed herein are quantum dot devices with trenched substrates, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a substrate having a trench disposed therein, wherein a bottom of the trench is provided by a first material, and a quantum well stack at least partially disposed in the trench. A material of the quantum well stack may be in contact with the bottom of the trench, and the material of the quantum well stack may be different from the first material.

Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include a (111) silicon substrate, a (111) germanium quantum well layer above the substrate, and a plurality of gates above the quantum well layer. In some embodiments, a quantum dot device may include a silicon substrate, an insulating material above the silicon substrate, a quantum well layer above the insulating material, and a plurality of gates above the quantum well layer.

Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack including a quantum well layer, wherein the quantum well layer includes an isotopically purified material; a gate dielectric above the quantum well stack; and a gate metal above the gate dielectric, wherein the gate dielectric is between the quantum well layer and the gate metal.

Abstract: An integrated circuit structure includes: a field-effect transistor including a semiconductor region including a semiconductor material having a bandgap less than or equal to that of silicon, a semiconductor source and a semiconductor drain, the semiconductor region being between the semiconductor source and the semiconductor drain, a gate electrode, a gate dielectric between the semiconductor region and the gate electrode, a source contact adjacent to the semiconductor source, and a drain contact adjacent to the semiconductor drain; and a resistive switch or a capacitor electrically connected to the drain contact. One of the source contact and the drain contact includes a threshold switching region, to be a selector for the resistive switch or the capacitor. In some embodiments, the threshold switching region includes a threshold switching oxide or a threshold switching chalcogenide, and the resistive switch or the capacitor is part of a resistive memory cell or capacitive memory cell.

Abstract: A transistor, including an antiferroelectric (AFE) gate dielectric layer is described. The AFE gate dielectric layer may be crystalline and include oxygen and a dopant. The transistor further includes a gate electrode on the AFE gate dielectric layer, a source structure and a drain structure on the substrate, where the gate electrode is between the source structure and the drain structure. The transistor further includes a source contact coupled with the source structure and a drain contact coupled with the drain structure.

Abstract: Disclosed herein are selector devices, and related devices and techniques. In some embodiments, a selector device may include a first electrode, a second electrode, a selector material between the first electrode and the second electrode, and a getter layer between the first electrode and the selector material. The first electrode may include a material having a work function that is less than 4.5 electron volts.

Abstract: An embodiment includes a system comprising: a thin film transistor (TFT) comprising a source, a channel, a drain, and a gate; first, second, and third dielectric portions; wherein (a) a first vertical axis intersects the source, the channel, and the drain; (b) the first dielectric portion surrounds the source in a first plane; (c) the second dielectric portion surrounds the channel in a second plane; (d) the third dielectric surrounds the drain in a third plane; (e) a second vertical axis intersects the first, second, and third dielectric portions; (f) the source includes a first dopant, the first dielectric portion includes the first dopant, the second dielectric portion includes at least one of the first dopant and a second dopant, the drain includes the at least one of the first and second dopants, and the third dielectric portion includes the at least one of the first and second dopants.

Abstract: Techniques and mechanisms for providing a space efficient complementary metal-oxide-semiconductor (CMOS) circuit. In an embodiment, a p-type transistor of a circuit is to conduct current in a direction parallel to a surface of a semiconductor substrate, wherein an n-type thin film transistor (TFT) of the circuit is to conduct current in a direction which is orthogonal to the surface. A first interconnect is directly coupled to each of the two transistors, wherein the first interconnect, a high mobility channel structure of the n-type TFT, and a source or drain of the p-type transistor are on the same line of direction. A second interconnect comprises a conductive path which extends to respective gates of the p-type transistor and the n-type TFT, wherein the conductive path is limited to a region over a footprint of the p-type transistor. In another embodiment, functionality of a logical inverter is provided with the circuit.

Abstract: Transistor structures with a deposited channel semiconductor material may have a vertical structure that includes a gate dielectric material that is localized to a sidewall of a gate electrode material layer. With localized gate dielectric material threshold voltage variation across a plurality of vertical transistor structures, such as a NAND flash memory string, may be reduced. A via may be formed through a material stack, exposing a sidewall of the gate electrode material layer and sidewalls of the dielectric material layers. A sidewall of the gate electrode material layer may be recessed selectively from the sidewalls of the dielectric material layers. A gate dielectric material, such as a ferroelectric material, may be selectively deposited upon the recessed gate electrode material layer, for example at least partially backfilling the recess. A semiconductor material may be deposited on sidewalls of the dielectric material layers and on the localized gate dielectric material.

Abstract: Quantum dot devices, and related systems and methods, are disclosed herein. In some embodiments, a quantum dot device may include a quantum well stack; a plurality of first gates above the quantum well stack; and a plurality of second gates above the quantum well stack; wherein the plurality of first gates are arranged in electrically continuous rows extending in a first direction, and the plurality of second gates are arranged in electrically continuous rows extending in a second direction perpendicular to the first direction.

Abstract: Techniques and mechanisms for operating transistors that are in a stacked configuration. In an embodiment, an integrated circuit (IC) device includes transistors arranged along a line of direction which is orthogonal to a surface of a semiconductor substrate. A first epitaxial structure and a second epitaxial structure are coupled, respectively, to a first channel structure of a first transistor and a second channel structure of a second transistor. The first epitaxial structure and the second epitaxial structure are at different respective levels relative to the surface of the semiconductor substrate. A dielectric material is disposed between the first epitaxial structure and the second epitaxial structure to facilitate electrical insulation of the channels from each other. In another embodiment, the stacked transistors are coupled to provide a complementary metal-oxide-semiconductor (CMOS) inverter circuit.

Abstract: Thin film transistors having relatively increased width and shared bitlines are described. In an example, an integrated circuit structure includes a plurality of transistors formed in an insulator structure above a substrate. The plurality of transistors arranged in a column such that the respective lateral arrangement of the source, the gate, and the drain of each of the transistors aligns with an adjacent thin film transistor, wherein the plurality transistors extend vertically through the insulator structure at least two interconnect levels to provide increased relative width. A first conductive contact is formed between one of sources and drains of at least two of the plurality of transistors in the column, and the conductive contact extends through the insulator structure at least two interconnect levels.

Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack including a quantum well layer, wherein the quantum well layer includes an isotopically purified material; a gate dielectric above the quantum well stack; and a gate metal above the gate dielectric, wherein the gate dielectric is between the quantum well layer and the gate metal.

Abstract: Quantum dot devices, and related systems and methods, are disclosed herein. In some embodiments, a quantum dot device may include a quantum well stack; a plurality of first gates above the quantum well stack; and a plurality of second gates above the quantum well stack; wherein the plurality of first gates are arranged in electrically continuous first rows and the plurality of second gates are arranged in electrically continuous second rows parallel to the first rows. Quantum dot devices according to various embodiments of the present disclosure are based on arranging first and second gates in hexagonal/honeycomb arrays.

Abstract: Techniques and mechanisms for providing efficient transistor functionality of an integrated circuit. In an embodiment, a transistor device comprises a first body of a high mobility semiconductor and a second body of a wide bandgap semiconductor. The first body adjoins each of, and is disposed between, the second body and a gate dielectric layer of the transistor. The second body extends between, and variously adjoins, each of a source of the transistor and a drain of the transistor. A location of the second body mitigates current leakage that might otherwise occur via the first body. In another embodiment, a mobility of the first body is equal to or greater than 100 cm2/V·s, wherein a bandgap of the second body is equal to or greater than 2.0 eV.

Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack structure of a quantum dot device, wherein the quantum well stack structure includes an insulating material to define multiple rows of quantum dot formation regions; and a gate that extends over multiple ones of the rows.

Abstract: Techniques and mechanisms for operating transistors that are in a stacked configuration. In an embodiment, an integrated circuit (IC) device includes transistors arranged along a line of direction which is orthogonal to a surface of a semiconductor substrate. A first epitaxial structure and a second epitaxial structure are coupled, respectively, to a first channel structure of a first transistor and a second channel structure of a second transistor. The first epitaxial structure and the second epitaxial structure are at different respective levels relative to the surface of the semiconductor substrate. A dielectric material is disposed between the first epitaxial structure and the second epitaxial structure to facilitate electrical insulation of the channels from each other. In another embodiment, the stacked transistors are coupled to provide a complementary metal-oxide-semiconductor (CMOS) inverter circuit.

Abstract: Embodiments related to transistors having one or more non-planar transition metal dichalcogenide cladding layers, integrated circuits and systems incorporating such transistors, and methods for fabricating them are discussed.