Patents by Inventor Richard Lindsay

Richard Lindsay has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8546916
    Abstract: Semiconductor devices, capacitors, and methods of manufacture thereof are disclosed. In one embodiment, a method of fabricating a capacitor includes forming a first material over a workpiece, and patterning the first material, forming a first capacitor plate in a first region of the workpiece and forming a first element in a second region of the workpiece. A second material is formed over the workpiece and over the patterned first material. The second material is patterned, forming a capacitor dielectric and a second capacitor plate in the first region of the workpiece over the first capacitor plate and forming a second element in a third region of the workpiece.
    Type: Grant
    Filed: May 27, 2008
    Date of Patent: October 1, 2013
    Assignee: Infineon Technologies AG
    Inventors: Martin Ostermayr, Richard Lindsay
  • Patent number: 8482042
    Abstract: A method of making a semiconductor device is disclosed. An upper surface of a semiconductor body is amorphized and a liner is formed over the amorphized upper surface. The upper surface can then be annealed. A transistor is formed at the upper surface.
    Type: Grant
    Filed: January 22, 2010
    Date of Patent: July 9, 2013
    Assignee: Infineon Technologies AG
    Inventor: Richard Lindsay
  • Patent number: 8450171
    Abstract: To form a semiconductor device, an electrode layer is formed over a semiconductor body. The electrode layer includes an amorphous portion. A liner, e.g., a stress-inducing liner, is deposited over the electrode layer. The electrode layer is annealed to recrystallize the amorphous portion of the electrode layer. The liner can then be removed and an electronic component (e.g., a transistor) that includes a feature (e.g., a gate) formed from the electrode layer can be formed.
    Type: Grant
    Filed: April 8, 2011
    Date of Patent: May 28, 2013
    Assignee: Infineon Technologies AG
    Inventor: Richard Lindsay
  • Patent number: 8431972
    Abstract: An ESD protection device includes a semiconductor body, a gate formed over a channel in the semiconductor body, the channel being doped with a first concentration of dopants of a first conductivity type. A first source/drain region is formed on the surface of the semiconductor body adjacent to a first edge of the gate, wherein the first source/drain region is doped with a dopant of a second conductivity type opposite the first conductivity type, and at least a portion of the first source/drain region is doped with a dopant of the first conductivity type. The concentration of the second conductivity type dopant exceeds the concentration of the first conductivity type dopant, and the concentration of the first conductivity type dopant in the first source/drain exceeds the first concentration.
    Type: Grant
    Filed: December 13, 2006
    Date of Patent: April 30, 2013
    Assignee: Infineon Technologies AG
    Inventors: David Alvarez, Richard Lindsay, Manfred Eller, Cornelius Christian Russ
  • Publication number: 20130008782
    Abstract: A cell stack has frames having lines of four apertures (41) at each end. In the stack, the apertures form four ducts at each end of the side of the stack, with the ducts extending from end to end of the stack for electrolyte flow therethrough. The apertures in the transfer frames have no passages connected to them. The eight apertures (41) in the passage frame are surrounded in pairs by four grooves (44) and 0-rings (45), dividing them into a pair for anolyte feed, a pair for anolyte return, a pair for catholyte feed and a pair for catholyte return. The stack is divided into opposite end sections (46, 47). Only one of each pair is connected to a local feed or return flow passage, contained within the 0-rings. The other is connected in the other section. The anolyte feed and return passages (51,52,55,56) lead from their apertures to respective openings (61) from the side (4) of each passage frame to its plain face (18).
    Type: Application
    Filed: March 11, 2011
    Publication date: January 10, 2013
    Inventor: Richard Lindsay Underwood
  • Patent number: 8338887
    Abstract: An embodiment of the invention provides a semiconductor fabrication method. The method comprises forming an isolation region between a first and a second region in a substrate, forming a recess in the substrate surface, and lining the recess with a uniform oxide. Embodiments further include doping a channel region under the bottom recess surface in the first and second regions and depositing a gate electrode material in the recess. Preferred embodiments include forming source/drain regions adjacent the channel region in the first and second regions, preferably after the step of depositing the gate electrode material. Another embodiment of the invention provides a semiconductor device comprising a recess in a surface of the first and second active regions and in the isolation region, and a dielectric layer having a uniform thickness lining the recess.
    Type: Grant
    Filed: July 6, 2005
    Date of Patent: December 25, 2012
    Assignee: Infineon Technologies AG
    Inventors: Richard Lindsay, Matthias Hierlemann
  • Patent number: 8187959
    Abstract: Method of producing a semiconductor device, comprising: a) providing a semiconductor substrate, b) making a first amorphous layer in a top layer of the semiconductor substrate by a suitable implant, the first amorphous layer having a first depth, c) implanting a first dopant into the semiconductor substrate to provide the first amorphous layer with a first doping profile, d) applying a first solid phase epitaxial regrowth action to partially regrow the first amorphous layer and form a second amorphous layer having a second depth that is less than the first depth and activate the first dopant, e) implanting a second dopant into the semiconductor substrate to provide the second amorphous layer with a second doping profile with a higher doping concentration than the first doping profile, f) applying a second solid phase epitaxial regrowth action to regrow the second amorphous layer and activate the second dopant.
    Type: Grant
    Filed: December 2, 2004
    Date of Patent: May 29, 2012
    Assignee: IMEC
    Inventors: Bartlomiej Jan Pawlak, Raymond James Duffy, Richard Lindsay
  • Publication number: 20120074499
    Abstract: Integrated circuits and methods of manufacture and design thereof are disclosed. For example, a method of manufacturing includes using a first mask to pattern a gate material forming a plurality of first and second features. The first features form gate electrodes of the semiconductor devices, whereas the second features are dummy electrodes. Based on the location of these dummy electrodes, selected dummy electrodes are removed using a second mask. The use of the method provides greater flexibility in tailoring individual devices for different objectives.
    Type: Application
    Filed: November 15, 2011
    Publication date: March 29, 2012
    Applicant: Infineon Technologies AG
    Inventors: Henning Haffner, Manfred Eller, Richard Lindsay
  • Patent number: 8078998
    Abstract: Integrated circuits and methods of manufacture and design thereof are disclosed. For example, a method of manufacturing includes using a first mask to pattern a gate material forming a plurality of first and second features. The first features form gate electrodes of the semiconductor devices, whereas the second features are dummy electrodes. Based on the location of these dummy electrodes, selected dummy electrodes are removed using a second mask. The use of the method provides greater flexibility in tailoring individual devices for different objectives.
    Type: Grant
    Filed: July 20, 2010
    Date of Patent: December 13, 2011
    Assignee: Infineon Technologies AG
    Inventors: Henning Haffner, Manfred Eller, Richard Lindsay
  • Patent number: 8003458
    Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a semiconductor device includes a first transistor having a first active area, and a second transistor having a second active area. A top surface of the first active area is elevated or recessed with respect to a top surface of the second active area, or a top surface of the first active area is elevated or recessed with respect to a top surface of at least portions of an isolation region proximate the first transistor.
    Type: Grant
    Filed: February 23, 2010
    Date of Patent: August 23, 2011
    Assignee: Infineon Technologies AG
    Inventors: Frank Huebinger, Richard Lindsay
  • Publication number: 20110183487
    Abstract: To form a semiconductor device, an electrode layer is formed over a semiconductor body. The electrode layer includes an amorphous portion. A liner, e.g., a stress-inducing liner, is deposited over the electrode layer. The electrode layer is annealed to recrystallize the amorphous portion of the electrode layer. The liner can then be removed and an electronic component (e.g., a transistor) that includes a feature (e.g., a gate) formed from the electrode layer can be formed.
    Type: Application
    Filed: April 8, 2011
    Publication date: July 28, 2011
    Inventor: Richard Lindsay
  • Patent number: 7952122
    Abstract: To form a semiconductor device, an electrode layer is formed over a semiconductor body. The electrode layer includes an amorphous portion. A liner, e.g., a stress-inducing liner, is deposited over the electrode layer. The electrode layer is annealed to recrystallize the amorphous portion of the electrode layer. The liner can then be removed and an electronic component (e.g., a transistor) that includes a feature (e.g., a gate) formed from the electrode layer can be formed.
    Type: Grant
    Filed: February 17, 2010
    Date of Patent: May 31, 2011
    Assignee: Infineon Technologies AG
    Inventor: Richard Lindsay
  • Publication number: 20100276759
    Abstract: Integrated circuits and methods of manufacture and design thereof are disclosed. For example, a method of manufacturing includes using a first mask to pattern a gate material forming a plurality of first and second features. The first features form gate electrodes of the semiconductor devices, whereas the second features are dummy electrodes. Based on the location of these dummy electrodes, selected dummy electrodes are removed using a second mask. The use of the method provides greater flexibility in tailoring individual devices for different objectives.
    Type: Application
    Filed: July 20, 2010
    Publication date: November 4, 2010
    Inventors: Henning Haffner, Manfred Eller, Richard Lindsay
  • Patent number: 7785946
    Abstract: Integrated circuits and methods of manufacture and design thereof are disclosed. For example, a method of manufacturing includes using a first mask to pattern a gate material forming a plurality of first and second features. The first features form gate electrodes of the semiconductor devices, whereas the second features are dummy electrodes. Based on the location of these dummy electrodes, selected dummy electrodes are removed using a second mask. The use of the method provides greater flexibility in tailoring individual devices for different objectives.
    Type: Grant
    Filed: September 25, 2007
    Date of Patent: August 31, 2010
    Assignee: Infineon Technologies AG
    Inventors: Henning Haffner, Manfred Eller, Richard Lindsay
  • Publication number: 20100193867
    Abstract: A preferred embodiment includes a method of manufacturing a fuse element that includes forming a polysilicon layer over a semiconductor structure, doping the polysilicon layer with carbon or nitrogen, depositing a metal over the polysilicon layer; and annealing the metal and polysilicon layer to form a silicide in an upper portion of the polysilicon layer.
    Type: Application
    Filed: February 3, 2009
    Publication date: August 5, 2010
    Inventors: Jiang Yan, Henning Haffiner, Frank Huebinger, SunOo Kim, Richard Lindsay, Klaus Schruefer
  • Publication number: 20100151640
    Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a semiconductor device includes a first transistor having a first active area, and a second transistor having a second active area. A top surface of the first active area is elevated or recessed with respect to a top surface of the second active area, or a top surface of the first active area is elevated or recessed with respect to a top surface of at least portions of an isolation region proximate the first transistor.
    Type: Application
    Filed: February 23, 2010
    Publication date: June 17, 2010
    Inventors: Frank Huebinger, Richard Lindsay
  • Patent number: 7737009
    Abstract: A method of forming an isolation trench structure is disclosed, the method includes forming an isolation trench in a semiconductor body associated with an isolation region, and implanting a non-dopant atom into the isolation trench, thereby forming a region to modify the halo profile in the semiconductor body. Subsequently, the isolation trench is filled with a dielectric material.
    Type: Grant
    Filed: August 8, 2007
    Date of Patent: June 15, 2010
    Assignee: Infineon Technologies AG
    Inventors: Richard Lindsay, Yong Meng Lee, Manfred Eller
  • Publication number: 20100140722
    Abstract: To form a semiconductor device, an electrode layer is formed over a semiconductor body. The electrode layer includes an amorphous portion. A liner, e.g., a stress-inducing liner, is deposited over the electrode layer. The electrode layer is annealed to recrystallize the amorphous portion of the electrode layer. The liner can then be removed and an electronic component (e.g., a transistor) that includes a feature (e.g., a gate) formed from the electrode layer can be formed.
    Type: Application
    Filed: February 17, 2010
    Publication date: June 10, 2010
    Inventor: Richard Lindsay
  • Publication number: 20100117159
    Abstract: A method of making a semiconductor device is disclosed. An upper surface of a semiconductor body is amorphized and a liner is formed over the amorphized upper surface. The upper surface can then be annealed. A transistor is formed at the upper surface.
    Type: Application
    Filed: January 22, 2010
    Publication date: May 13, 2010
    Inventor: Richard Lindsay
  • Patent number: 7704823
    Abstract: To form a semiconductor device, an electrode layer is formed over a semiconductor body. The electrode layer includes an amorphous portion. A liner, e.g., a stress-inducing liner, is deposited over the electrode layer. The electrode layer is annealed to recrystallize the amorphous portion of the electrode layer. The liner can then be removed and an electronic component (e.g., a transistor) that includes a feature (e.g., a gate) formed from the electrode layer can be formed.
    Type: Grant
    Filed: September 15, 2006
    Date of Patent: April 27, 2010
    Assignee: Infineon Technologies AG
    Inventor: Richard Lindsay