Patents by Inventor Robert Aigner

Robert Aigner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20260163550
    Abstract: Bulk acoustic wave (BAW) resonators and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.
    Type: Application
    Filed: April 16, 2025
    Publication date: June 11, 2026
    Inventors: Alireza Tajic, Paul Stokes, Robert Aigner
  • Patent number: 12584994
    Abstract: A wireless device operable to detect a nearby object is disclosed. Herein, an object is considered a nearby object when a roundtrip propagation duration of a pulse(s) between an antenna and the object is less than two nanoseconds (2 ns). Given the close proximity of the object, an echo of the emitted pulse(s) may be reflected instantaneously toward the antenna to potentially overlap with the emitted pulse(s), thus causing difficulty in detecting the reflected pulse(s). In this regard, in embodiments disclosed herein, an acoustic delay circuit is provided in the wireless device to add a temporal delay in the emitted pulse(s) and the reflected pulse(s) to prevent the reflected pulse(s) from overlapping with the emitted pulse(s). As a result, the wireless device can accurately receive the reflected pulse(s) to thereby detect the nearby object.
    Type: Grant
    Filed: July 7, 2023
    Date of Patent: March 24, 2026
    Assignee: Qorvo US, Inc.
    Inventors: Nadim Khlat, Robert Aigner
  • Patent number: 12512813
    Abstract: Lateral field excitation acoustic resonators and methods of manufacture are disclosed. In one aspect, an acoustically resonating material such as a piezoelectric film or membrane is spaced from a substrate by electrodes having an air gap therebetween. When current flows through the electrodes, lateral field acoustic waves are excited in the resonating material with relatively good coupling and adequate heat dissipation.
    Type: Grant
    Filed: February 24, 2023
    Date of Patent: December 30, 2025
    Assignee: Qorvo US, Inc.
    Inventors: Marc Solal, Robert Aigner
  • Publication number: 20250357909
    Abstract: The present disclosure relates to acoustic devices incorporating a multilayer van der Waals (vdW) material(s). In various embodiments disclosed herein, a multilayer vdW material(s) is provided in various types of acoustic devices, such as surface acoustic wave (SAW) devices, bulk acoustic wave (BAW) devices, cross bulk acoustic resonator (XBAR) devices, and acoustic gyroscope devices, to help manipulate (e.g., separate, trap, guide, etc.) a shear acoustic wave(s) and/or a longitudinal acoustic wave(s) in the acoustic devices. By utilizing the multilayer vdW material(s), it is thus possible to improve size, thermal dissipation, and performance of the acoustic devices.
    Type: Application
    Filed: April 2, 2025
    Publication date: November 20, 2025
    Inventor: Robert Aigner
  • Patent number: 12425002
    Abstract: Bulk acoustic wave (BAW) resonators and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.
    Type: Grant
    Filed: April 17, 2024
    Date of Patent: September 23, 2025
    Assignee: Qorvo US, Inc.
    Inventors: Alireza Tajic, Paul Stokes, Robert Aigner
  • Patent number: 12255614
    Abstract: Disclosed is a Bulk Acoustic Wave (BAW) filter structure with a conductive bridge forming an electrical loop with an electrode for reduced electrical losses. In exemplary aspects disclosed herein, the BAW filter structure includes a transducer with electrodes, a piezoelectric layer between the electrodes, and at least one conductive bridge offset from at least a portion of one of the electrodes by an insulating volume. The conductive bridge forms a first electrical loop between a medial end and a distal end of the electrode. Such a configuration reduces electrical resistance, heat resistance, and/or ohmic losses for improved electrical loss of the BAW filter structure.
    Type: Grant
    Filed: November 10, 2022
    Date of Patent: March 18, 2025
    Assignee: Qorvo US, Inc.
    Inventors: Yazid Yusuf, Mohammad J. Modarres-Zadeh, Andreas Tag, Paul Stokes, Robert Aigner, Gernot Fattinger
  • Publication number: 20250062743
    Abstract: Disclosed is a Bulk Acoustic Wave (BAW) filter structure with a conductive bridge forming an electrical loop with an electrode for reduced electrical losses. In exemplary aspects disclosed herein, the BAW filter structure includes a transducer with electrodes, a piezoelectric layer between the electrodes, and at least one conductive bridge offset from at least a portion of one of the electrodes by an insulating volume. The conductive bridge forms a first electrical loop between a medial end and a distal end of the electrode. Such a configuration reduces electrical resistance, heat resistance, and/or ohmic losses for improved electrical loss of the BAW filter structure.
    Type: Application
    Filed: November 7, 2024
    Publication date: February 20, 2025
    Inventors: Yazid Yusuf, Mohammad J. Modarres-Zadeh, Andreas Tag, Paul Stokes, Robert Aigner, Gernot Fattinger
  • Patent number: 12081194
    Abstract: Bulk acoustic wave (BAW) resonators and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.
    Type: Grant
    Filed: March 29, 2023
    Date of Patent: September 3, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Alireza Tajic, Paul Stokes, Robert Aigner
  • Publication number: 20240267022
    Abstract: Bulk acoustic wave (BAW) resonators and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.
    Type: Application
    Filed: April 17, 2024
    Publication date: August 8, 2024
    Inventors: Alireza Tajic, Paul Stokes, Robert Aigner
  • Patent number: 11923238
    Abstract: The present disclosure relates to a radio frequency device and a process for making the same. According to the process, a precursor wafer, which includes device regions, individual interfacial layers formed of SiGe, and a silicon handle substrate, is first provided. Each individual interfacial layer is over an active layer of a corresponding device region, and the silicon handle substrate is over each individual interfacial layer. A first bonding layer is formed underneath the precursor wafer. The precursor wafer is then attached to a support carrier with a second bonding layer. The first bonding layer and the second bonding layer merge to form a bonding structure between the precursor wafer and the support carrier. Next, the silicon handle substrate is removed from the precursor wafer to provide an etched wafer, and a first mold compound is applied to the etched wafer to provide a mold device wafer.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: March 5, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Robert Aigner
  • Publication number: 20240027576
    Abstract: A wireless device operable to detect a nearby object is disclosed. Herein, an object is considered a nearby object when a roundtrip propagation duration of a pulse(s) between an antenna and the object is less than two nanoseconds (2 ns). Given the close proximity of the object, an echo of the emitted pulse(s) may be reflected instantaneously toward the antenna to potentially overlap with the emitted pulse(s), thus causing difficulty in detecting the reflected pulse(s). In this regard, in embodiments disclosed herein, an acoustic delay circuit is provided in the wireless device to add a temporal delay in the emitted pulse(s) and the reflected pulse(s) to prevent the reflected pulse(s) from overlapping with the emitted pulse(s). As a result, the wireless device can accurately receive the reflected pulse(s) to thereby detect the nearby object.
    Type: Application
    Filed: July 7, 2023
    Publication date: January 25, 2024
    Inventors: Nadim Khlat, Robert Aigner
  • Publication number: 20230291380
    Abstract: Lateral field excitation acoustic resonators and methods of manufacture are disclosed. In one aspect, an acoustically resonating material such as a piezoelectric film or membrane is spaced from a substrate by electrodes having an air gap therebetween. When current flows through the electrodes, lateral field acoustic waves are excited in the resonating material with relatively good coupling and adequate heat dissipation.
    Type: Application
    Filed: February 24, 2023
    Publication date: September 14, 2023
    Inventors: Marc Solal, Robert Aigner
  • Patent number: 11722119
    Abstract: Bulk acoustic wave (BAW) resonators, and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.
    Type: Grant
    Filed: August 24, 2022
    Date of Patent: August 8, 2023
    Assignee: Qorvo US, Inc.
    Inventors: Alireza Tajic, Paul Stokes, Robert Aigner
  • Publication number: 20230231535
    Abstract: Bulk acoustic wave (BAW) resonators and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.
    Type: Application
    Filed: March 29, 2023
    Publication date: July 20, 2023
    Inventors: Alireza Tajic, Paul Stokes, Robert Aigner
  • Publication number: 20230074357
    Abstract: Disclosed is a Bulk Acoustic Wave (BAW) filter structure with a conductive bridge forming an electrical loop with an electrode for reduced electrical losses. In exemplary aspects disclosed herein, the BAW filter structure includes a transducer with electrodes, a piezoelectric layer between the electrodes, and at least one conductive bridge offset from at least a portion of one of the electrodes by an insulating volume. The conductive bridge forms a first electrical loop between a medial end and a distal end of the electrode. Such a configuration reduces electrical resistance, heat resistance, and/or ohmic losses for improved electrical loss of the BAW filter structure.
    Type: Application
    Filed: November 10, 2022
    Publication date: March 9, 2023
    Inventors: Yazid Yusuf, Mohammad J. Modarres-Zadeh, Andreas Tag, Paul Stokes, Robert Aigner, Gernot Fattinger
  • Publication number: 20220416761
    Abstract: Bulk acoustic wave (BAW) resonators, and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.
    Type: Application
    Filed: August 24, 2022
    Publication date: December 29, 2022
    Inventors: Alireza Tajic, Paul Stokes, Robert Aigner
  • Patent number: 11532444
    Abstract: The invention relates to a contact unit and to a method for steering electric arcs on a contact unit, in particular for supplying vehicles with power via an overhead wire (20), the contact unit comprising a sliding contact device (19), the sliding contact device having a contact strip support (21) and a contact strip (22) disposed thereon, the contact unit having a steering device (24) for electric arcs (25) which is disposed on the contact unit, the steering device being provided with a magnet (30).
    Type: Grant
    Filed: December 18, 2018
    Date of Patent: December 20, 2022
    Assignee: SCHUNK CARBON TECHNOLOGY GMBH
    Inventors: Hans Rastl, Siegfried Gadocha, Herbert Wallmann, Robert Aigner
  • Patent number: 11528007
    Abstract: Disclosed is a Bulk Acoustic Wave (BAW) filter structure with a conductive bridge forming an electrical loop with an electrode for reduced electrical losses. In exemplary aspects disclosed herein, the BAW filter structure includes a transducer with electrodes, a piezoelectric layer between the electrodes, and at least one conductive bridge offset from at least a portion of one of the electrodes by an insulating volume. The conductive bridge forms a first electrical loop between a medial end and a distal end of the electrode. Such a configuration reduces electrical resistance, heat resistance, and/or ohmic losses for improved electrical loss of the BAW filter structure.
    Type: Grant
    Filed: February 16, 2021
    Date of Patent: December 13, 2022
    Assignee: Qorvo US, Inc.
    Inventors: Yazid Yusuf, Mohammad J. Modarres-Zadeh, Andreas Tag, Paul Stokes, Robert Aigner, Gernot Fattinger
  • Patent number: 11502667
    Abstract: Bulk acoustic wave (BAW) resonators, and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.
    Type: Grant
    Filed: July 30, 2019
    Date of Patent: November 15, 2022
    Assignee: Qorvo US, Inc.
    Inventors: Alireza Tajic, Paul Stokes, Robert Aigner
  • Publication number: 20220352862
    Abstract: A method of fabricating a bonded wafer with low carrier lifetime in silicon comprises providing a silicon substrate having opposing top and bottom surfaces, modifying a top portion of the silicon substrate to reduce carrier lifetime in the top portion relative to the carrier lifetime in portions of the silicon substrate other than the top portion, bonding a piezoelectric layer having opposing top and bottom surfaces separated by a distance T over the top surface of the silicon substrate, and providing a pair of electrodes having fingers that are inter-digitally dispersed on a top surface of the piezoelectric layer, the electrodes comprising a portion of a Surface Acoustic Wave (SAW) device. The modifying and bonding steps may be performed in any order. The modified top portion of the silicon substrate prevents the creation of a parasitic conductance within that portion during operation of the SAW device.
    Type: Application
    Filed: July 5, 2022
    Publication date: November 3, 2022
    Inventors: Shogo Inoue, Marc Solal, Robert Aigner