Patents by Inventor Robert Aigner

Robert Aigner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220416761
    Abstract: Bulk acoustic wave (BAW) resonators, and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.
    Type: Application
    Filed: August 24, 2022
    Publication date: December 29, 2022
    Inventors: Alireza Tajic, Paul Stokes, Robert Aigner
  • Patent number: 11532444
    Abstract: The invention relates to a contact unit and to a method for steering electric arcs on a contact unit, in particular for supplying vehicles with power via an overhead wire (20), the contact unit comprising a sliding contact device (19), the sliding contact device having a contact strip support (21) and a contact strip (22) disposed thereon, the contact unit having a steering device (24) for electric arcs (25) which is disposed on the contact unit, the steering device being provided with a magnet (30).
    Type: Grant
    Filed: December 18, 2018
    Date of Patent: December 20, 2022
    Assignee: SCHUNK CARBON TECHNOLOGY GMBH
    Inventors: Hans Rastl, Siegfried Gadocha, Herbert Wallmann, Robert Aigner
  • Patent number: 11528007
    Abstract: Disclosed is a Bulk Acoustic Wave (BAW) filter structure with a conductive bridge forming an electrical loop with an electrode for reduced electrical losses. In exemplary aspects disclosed herein, the BAW filter structure includes a transducer with electrodes, a piezoelectric layer between the electrodes, and at least one conductive bridge offset from at least a portion of one of the electrodes by an insulating volume. The conductive bridge forms a first electrical loop between a medial end and a distal end of the electrode. Such a configuration reduces electrical resistance, heat resistance, and/or ohmic losses for improved electrical loss of the BAW filter structure.
    Type: Grant
    Filed: February 16, 2021
    Date of Patent: December 13, 2022
    Assignee: Qorvo US, Inc.
    Inventors: Yazid Yusuf, Mohammad J. Modarres-Zadeh, Andreas Tag, Paul Stokes, Robert Aigner, Gernot Fattinger
  • Patent number: 11502667
    Abstract: Bulk acoustic wave (BAW) resonators, and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.
    Type: Grant
    Filed: July 30, 2019
    Date of Patent: November 15, 2022
    Assignee: Qorvo US, Inc.
    Inventors: Alireza Tajic, Paul Stokes, Robert Aigner
  • Publication number: 20220352862
    Abstract: A method of fabricating a bonded wafer with low carrier lifetime in silicon comprises providing a silicon substrate having opposing top and bottom surfaces, modifying a top portion of the silicon substrate to reduce carrier lifetime in the top portion relative to the carrier lifetime in portions of the silicon substrate other than the top portion, bonding a piezoelectric layer having opposing top and bottom surfaces separated by a distance T over the top surface of the silicon substrate, and providing a pair of electrodes having fingers that are inter-digitally dispersed on a top surface of the piezoelectric layer, the electrodes comprising a portion of a Surface Acoustic Wave (SAW) device. The modifying and bonding steps may be performed in any order. The modified top portion of the silicon substrate prevents the creation of a parasitic conductance within that portion during operation of the SAW device.
    Type: Application
    Filed: July 5, 2022
    Publication date: November 3, 2022
    Inventors: Shogo Inoue, Marc Solal, Robert Aigner
  • Patent number: 11451206
    Abstract: A method of fabricating a bonded wafer with low carrier lifetime in silicon comprises providing a silicon substrate having opposing top and bottom surfaces, modifying a top portion of the silicon substrate to reduce carrier lifetime in the top portion relative to the carrier lifetime in portions of the silicon substrate other than the top portion, bonding a piezoelectric layer having opposing top and bottom surfaces separated by a distance T over the top surface of the silicon substrate, and providing a pair of electrodes having fingers that are inter-digitally dispersed on a top surface of the piezoelectric layer, the electrodes comprising a portion of a Surface Acoustic Wave (SAW) device. The modifying and bonding steps may be performed in any order. The modified top portion of the silicon substrate prevents the creation of a parasitic conductance within that portion during operation of the SAW device.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: September 20, 2022
    Assignee: Qorvo US, Inc.
    Inventors: Shogo Inoue, Marc Solal, Robert Aigner
  • Publication number: 20220131521
    Abstract: Disclosed is a Bulk Acoustic Wave (BAW) filter structure with a conductive bridge forming an electrical loop with an electrode for reduced electrical losses. In exemplary aspects disclosed herein, the BAW filter structure includes a transducer with electrodes, a piezoelectric layer between the electrodes, and at least one conductive bridge offset from at least a portion of one of the electrodes by an insulating volume. The conductive bridge forms a first electrical loop between a medial end and a distal end of the electrode. Such a configuration reduces electrical resistance, heat resistance, and/or ohmic losses for improved electrical loss of the BAW filter structure.
    Type: Application
    Filed: February 16, 2021
    Publication date: April 28, 2022
    Inventors: Yazid Yusuf, Mohammad J. Modarres-Zadeh, Andreas Tag, Paul Stokes, Robert Aigner, Gernot Fattinger
  • Patent number: 11165413
    Abstract: Various arrangements for electrically coupling the electrodes of coupled resonator structures (CRSes) to form unique two- and three-terminal devices as well as the use of such CRSes in filter networks are disclosed.
    Type: Grant
    Filed: January 30, 2018
    Date of Patent: November 2, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Nadim Khlat, Robert Aigner
  • Patent number: 11165412
    Abstract: A zero-output coupled resonator filter (ZO-CRF) and related radio frequency (RF) filter circuit are provided. In examples discussed herein, the ZO-CRF can be configured to function as a shunt resonator(s) in an RF filter circuit (e.g., a ladder filter circuit). The ZO-CRF includes a first resonator and a second resonator that are coupled to each other via a coupling layer. The first resonator and the second resonator receive a first voltage and a second voltage, respectively. The first voltage and the second voltage can be configured in a number of ways to cause the ZO-CRF to resonate at different resonance frequencies. As such, it may be possible to modify resonance frequency of the ZO-CRF in an RF filter circuit based on signal connection. As a result, it may be possible to reduce total inductance of the RF filter circuit, thus helping to reduce footprint of the RF filter circuit.
    Type: Grant
    Filed: March 20, 2019
    Date of Patent: November 2, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Nadim Khlat, Robert Aigner
  • Patent number: 11152913
    Abstract: An acoustic resonator includes a first piezoelectric layer, a second piezoelectric layer, a coupler layer, a first electrode, and a second electrode. The first piezoelectric layer has a first polarity. The second piezoelectric layer has a second polarity opposite the first polarity. The coupler layer is between the first piezoelectric layer and the second piezoelectric layer. The first electrode is on the first piezoelectric layer opposite the coupler layer. The second electrode is on the second piezoelectric layer opposite the coupler layer.
    Type: Grant
    Filed: March 1, 2019
    Date of Patent: October 19, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Jyothi Swaroop Sadhu, Gernot Fattinger, Robert Aigner, Michael Schaefer
  • Patent number: 11146235
    Abstract: The present disclosure relates to a tunable Bulk Acoustic Wave (BAW) resonator with a top electrode, a bottom electrode, a piezoelectric layer sandwiched between the top electrode and the bottom electrode, and a reflection region underneath the bottom electrode. The reflection region includes a reflection layer and an ion-conductible structure between the bottom electrode and the reflection layer. Herein, the ion-conductible structure has a first terminal layer coupled to the bottom electrode, a second terminal layer coupled to the reflection layer, and an ion conductor between the first terminal layer and the second terminal layer. The ion conductor is eligible to transport ions between the first terminal layer and the second terminal layer, so as to achieve a mass-loading shift between the first terminal layer and the second terminal layer, and consequently, to tune a resonance frequency of the tunable BAW resonator.
    Type: Grant
    Filed: May 15, 2020
    Date of Patent: October 12, 2021
    Assignee: Qorvo US, Inc.
    Inventor: Robert Aigner
  • Patent number: 11117799
    Abstract: A wire-based microelectromechanical systems (MEMS) apparatus is provided. In examples discussed herein, the wire-based MEMS apparatus includes a MEMS control bus and at least one passive MEMS switch circuit. The passive MEMS switch circuit is configured to close a MEMS switch(es) by generating a constant voltage(s) that exceeds a defined threshold voltage (e.g., 30-50 V). In a non-limiting example, the passive MEMS switch circuit can generate the constant voltage(s) based on a radio frequency (RF) voltage(s), which may be harvested from an RF signal(s) received via the MEMS control bus. In this regard, it may be possible to eliminate active components and/or circuits from the passive MEMS switch circuit, thus helping to reduce leakage and power consumption. As a result, it may be possible to provide the passive MEMS switch circuit in a low power apparatus for supporting such applications as the Internet-of-Things (IoT).
    Type: Grant
    Filed: December 19, 2019
    Date of Patent: September 14, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Nadim Khlat, Robert Aigner
  • Patent number: 11063021
    Abstract: The present disclosure relates to a microelectronics package with vertically stacked flip-chip dies, and a process for making the same. The disclosed microelectronics package includes a module board, a first thinned flip-chip die with a through-die via, a second flip-chip die with a package contact at the bottom, and a mold compound. Herein, a top portion of the through-die via is exposed at top of the first thinned flip-chip die. The first thinned flip-chip die and the mold compound reside over the module substrate. The mold compound surrounds the first thinned flip-chip die and extends above the first thinned flip-chip die to define an opening. The second flip-chip die, which has a smaller plane size than the first thinned flip-chip die, resides within the opening and is stacked with the first thinned flip-chip die by coupling the package contact to the exposed top portion of the through-die via.
    Type: Grant
    Filed: July 31, 2019
    Date of Patent: July 13, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Robert Aigner, Gernot Fattinger, Dirk Robert Walter Leipold, George Maxim, Baker Scott, Merrill Albert Hatcher, Jr., Jon Chadwick
  • Patent number: 11050412
    Abstract: A filter circuit includes a first input node and a second input node for receiving an input signal, and a first output node and a second output node for providing an output signal. A first series acoustic resonator is coupled in series between the first input node and the first output node. At least one coupled resonator filter (CRF) includes first and second transducers, which may be acoustically coupled to one another. The first transducer has a first electrode coupled to the first input node, a second electrode coupled to the second input node, and a first piezoelectric layer between the first electrode and the second electrode. A second transducer has a third electrode coupled to the first output node, a fourth electrode coupled to the second output node, and a second piezoelectric layer between the third electrode and the fourth electrode.
    Type: Grant
    Filed: September 7, 2017
    Date of Patent: June 29, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Nadim Khlat, Robert Aigner
  • Publication number: 20210183693
    Abstract: The present disclosure relates to a radio frequency device and a process for making the same. According to the process, a precursor wafer, which includes device regions, individual interfacial layers formed of SiGe, and a silicon handle substrate, is first provided. Each individual interfacial layer is over an active layer of a corresponding device region, and the silicon handle substrate is over each individual interfacial layer. A first bonding layer is formed underneath the precursor wafer. The precursor wafer is then attached to a support carrier with a second bonding layer. The first bonding layer and the second bonding layer merge to form a bonding structure between the precursor wafer and the support carrier. Next, the silicon handle substrate is removed from the precursor wafer to provide an etched wafer, and a first mold compound is applied to the etched wafer to provide a mold device wafer.
    Type: Application
    Filed: December 14, 2020
    Publication date: June 17, 2021
    Inventors: Julio C. Costa, Robert Aigner
  • Patent number: 11025224
    Abstract: RF circuitry, which includes a first acoustic RF resonator (ARFR) and a first compensating ARFR, is disclosed. A first inductive element is coupled between the first compensating ARFR and a first end of the first ARFR. A second inductive element is coupled between the first compensating ARFR and a second end of the first ARFR. The first compensating ARFR, the first inductive element, and the second inductive element at least partially compensate for a parallel capacitance of the first ARFR.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: June 1, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Nadim Khlat, Jean-Frederic Chiron, Marcus Granger-Jones, Andrew F. Folkmann, Robert Aigner
  • Patent number: 11011498
    Abstract: The present disclosure relates to a microelectronics package with vertically stacked flip-chip dies, and a process for making the same. The disclosed microelectronics package includes a module board, a first thinned flip-chip die with a through-die via, a second flip-chip die with a package contact at the bottom, and a mold compound. Herein, a top portion of the through-die via is exposed at top of the first thinned flip-chip die. The first thinned flip-chip die and the mold compound reside over the module substrate. The mold compound surrounds the first thinned flip-chip die and extends above the first thinned flip-chip die to define an opening. The second flip-chip die, which has a smaller plane size than the first thinned flip-chip die, resides within the opening and is stacked with the first thinned flip-chip die by coupling the package contact to the exposed top portion of the through-die via.
    Type: Grant
    Filed: July 31, 2019
    Date of Patent: May 18, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Robert Aigner, Gernot Fattinger, Dirk Robert Walter Leipold, George Maxim, Baker Scott, Merrill Albert Hatcher, Jr., Jon Chadwick
  • Patent number: 11005450
    Abstract: A filter circuit includes a first input node and a second input node for receiving an input signal, and a first output node and a second output node for providing an output signal. A first series acoustic resonator is coupled in series between the first input node and the first output node. At least one coupled resonator filter (CRF) includes first and second transducers, which may be acoustically coupled to one another. The first transducer has a first electrode coupled to the first input node, a second electrode coupled to the second input node, and a first piezoelectric layer between the first electrode and the second electrode. A second transducer has a third electrode coupled to the first output node, a fourth electrode coupled to the second output node, and a second piezoelectric layer between the third electrode and the fourth electrode.
    Type: Grant
    Filed: September 7, 2017
    Date of Patent: May 11, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Nadim Khlat, Robert Aigner
  • Patent number: 10964672
    Abstract: The present disclosure relates to a microelectronics package with vertically stacked flip-chip dies, and a process for making the same. The disclosed microelectronics package includes a module board, a first thinned flip-chip die with a through-die via, a second flip-chip die with a package contact at the bottom, and a mold compound. Herein, a top portion of the through-die via is exposed at top of the first thinned flip-chip die. The first thinned flip-chip die and the mold compound reside over the module substrate. The mold compound surrounds the first thinned flip-chip die and extends above the first thinned flip-chip die to define an opening. The second flip-chip die, which has a smaller plane size than the first thinned flip-chip die, resides within the opening and is stacked with the first thinned flip-chip die by coupling the package contact to the exposed top portion of the through-die via.
    Type: Grant
    Filed: July 31, 2019
    Date of Patent: March 30, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Robert Aigner, Gernot Fattinger, Dirk Robert Walter Leipold, George Maxim, Baker Scott, Merrill Albert Hatcher, Jr., Jon Chadwick
  • Patent number: 10958245
    Abstract: A filter circuit includes a first input node and a second input node for receiving an input signal, and a first output node and a second output node for providing an output signal. A first series acoustic resonator is coupled in series between the first input node and the first output node. At least one coupled resonator filter (CRF) includes first and second transducers, which may be acoustically coupled to one another. The first transducer has a first electrode coupled to the first input node, a second electrode coupled to the second input node, and a first piezoelectric layer between the first electrode and the second electrode. A second transducer has a third electrode coupled to the first output node, a fourth electrode coupled to the second output node, and a second piezoelectric layer between the third electrode and the fourth electrode.
    Type: Grant
    Filed: September 7, 2017
    Date of Patent: March 23, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Nadim Khlat, Robert Aigner