Abstract: A dual damascene process flow for forming interconnect lines and vias in which at least part of the via (116) is etched prior to the trench etch. A low-k material such as a thermoset organic polymer is used for the ILD (106) and IMD (110). After the at least partial via etch, a BARC (120) is deposited over the structure including in the via (116). Then, the trench (126) is patterned and etched. Although at least some of the BARC (120) material is removed during the trench etch, the bottom of the via (116) is protected.

Abstract: An embodiment of the invention is a dual damascene layer 13 of an integrated circuit 2 containing a dual damascene pattern liner 21. Another embodiment of the invention is a method of manufacturing dual damascene layer 13 where a dual damascene pattern liner 21 is formed over a cap layer 25 and within via holes. Yet another embodiment of the invention is a method of manufacturing dual damascene layer 13 where a dual damascene pattern liner 21 is formed over a cap layer 25 and within trench spaces.

Abstract: An embodiment of the invention is a dual damascene layer 13 of an integrated circuit 2 containing a dual damascene pattern liner 21. Another embodiment of the invention is a method of manufacturing dual damascene layer 13 where a dual damascene pattern liner 21 is formed over a cap layer 25 and within via holes. Yet another embodiment of the invention is a method of manufacturing dual damascene layer 13 where a dual damascene pattern liner 21 is formed over a cap layer 25 and within trench spaces.

Abstract: After via etch, a low-k dielectric layer (104) is treated with an in-situ O2 plasma. Resist poisoning is caused by a N source that causes an interaction between low-k films (104), such as OSG, and DUV resist (130, 132). The in-situ plasma treatment immediately removes the source of poisoning to reduce or eliminate poisoning at trench patterning.

Abstract: A unique, solid flat panel lighting emitting luminaire has been created that utilizes a light source remote from the luminaire coupled with a hollow light pipe. The light panel luminaire is fed light flux via a hollow light pipe system into one or two edges of the flat panel. The light panel has imbedded irregular tapered tetrahedron light guides that emit light in a uniform controlled fashion over the length of the emitting surface. The subject lighting luminaire provides light emitted from an adjacent High Intensity Discharge (HID) light source. The luminaire is specifically designed to provide light over a large surface for backlit billboard applications without the limitations of traditional fluorescent light source light boxes. The luminaire does not require any maintenance to its interior as the light source is remote from the emitting surface.

Abstract: A BARC etch comprises a selective etch chemistry in combination with a high-polymerizing gas for CD control. The BARC etch may be used in a via-first dual damascene method. After via (116) pattern and etch, a thick BARC layer (120) is deposited to fill the via (116) and coat the IMD (110). A trench resist pattern (125) is formed over the BARC layer (120). Then, the exposed portion of BARC (120) over the IMD (110) is etched using a high-polymerizing gas added to a selective etch chemistry. The more polymerizing gas passivates the trench resist (125) sidewall to preserve or improve the trench CD. During the main trench etch, portions of BARC (120) remain in the via to protect the etch-stop (104) at the bottom of the via (116).

Abstract: An embodiment of the invention is a metal layer 14 of a back-end module 6 where the height of the interconnects 17 is greater than the height of the dielectric regions 20. Another embodiment of the invention is a method of fabricating a semiconductor wafer 4 where the height of the interconnects 17 is greater than the height of the dielectric regions 20.

Abstract: An embodiment of the invention is a metal layer 14 of a back-end module 6 where the height of the interconnects 17 is greater than the height of the dielectric regions 20. Another embodiment of the invention is a method of fabricating a semiconductor wafer 4 where the height of the interconnects 17 is greater than the height of the dielectric regions 20.

Abstract: An embodiment of the invention is a metal layer 14 of a back-end module 6 where the height of the interconnects 17 is greater than the height of the dielectric regions 20. Another embodiment of the invention is a method of fabricating a semiconductor wafer 4 where the height of the interconnects 17 is greater than the height of the dielectric regions 20.

Abstract: A method of fabricating an integrated circuit, having copper metallization formed by a dual damascene process, is disclosed. A layered insulator structure is formed over a first conductor (22), within which a second conductor (40) is formed to contact the first conductor. The layered insulator structure includes a via etch stop layer (24), an interlevel dielectric layer (26), a trench etch stop layer (28), an intermetal dielectric layer (30), and a hardmask layer (32). The interlevel dielectric layer (26) and the intermetal dielectric layer (30) are preferably of the same material. A via is partially etched through the intermetal dielectric layer (30), and through an optional trench etch stop layer (28). A trench location is then defined by photoresist (38), and this trench location is transferred to the hardmask layer (32).

Abstract: One aspect of the invention relates to a method of removing contaminants from a low-k film. The method involves forming a sacrificial layer over the contaminated film. The contaminants combine with the sacrificial layer and are removed by etching away the sacrificial layer. An effective material for the sacrificial layer is, for example, a silicon carbide. The method can be used to prevent the occurrence of pattern defects in chemically amplified photoresists formed over low-k films.

Abstract: The present invention is directed to a process and system for removing artifacts resulting from the interactions of a preparation sequence and a gradient echo sequence. A process for suppressing stimulated echoes for spatial preparation sequences without affecting sequence timing or image contrast is disclosed. Stimulated echoes often form when gradient crushers of a preparation sequence are constant in magnitude and direction throughout the imaging sequence. Changing the direction or effective areas of these gradient crushers throughout imaging acquisition prevents stimulated echoes from forming, thereby eliminating ghosting and blurring artifacts. By applying unbalanced gradients or sets of unbalanced gradients between selective RF pulses of an RF pulse sequence, signals attributable to spin transverse magnetization are suppressed resulting in reduced ghosting and/or artifacts.

Abstract: Plasma treating a low-k dielectric layer (104) using an oxidation reaction (e.g., O2) to improve patterning. Resist poisoning occurs due to an interaction between low-k films (104), such as OSG, and DUV resist (130, 132). The plasma treatment is performed to either pretreat a low-k dielectric (104) before forming the pattern (130, 132), during a rework of the pattern (130, 132), or between via and trench patterning to reduce resist poisoning.

Abstract: One aspect of the invention relates to a method of removing contaminants from a low-k film. The method involves forming a sacrificial layer over the contaminated film. The contaminants combine with the sacrificial layer and are removed by etching away the sacrificial layer. An effective material for the sacrificial layer is, for example, a silicon carbide. The method can be used to prevent the occurrence of pattern defects in chemically amplified photoresists formed over low-k films.

Abstract: A five step, low pressure, high-density-plasma etch process used to etch complicated DRAM transistor gate stacks with high inter-layer selectivity. Such stacks typically consist of the following layers: silicon nitride (310), tungsten (320), titanium nitride (330), and polysilicon (340). The process includes one step for each of the four layers in the gate stack, and one step to ash the photoresist. These five process steps can preferably be performed in four separate chambers on a cluster tool platform. The innovative etch process of the present invention fabricates gates with lengths of 0.25 microns and below with excellent profile, excellent linewidth uniformity across the wafer, and minimal loss of the gate oxide.

Abstract: A unique, solid flat panel lighting emitting luminaire has been created that utilizes a light source remote from the luminaire coupled with a hollow light pipe. The light panel luminaire is fed light flux via a hollow light pipe system into one or two edges of the flat panel. The light panel has imbedded irregular tapered tetrahedron light guides that emit light in a uniform controlled fashion over the length of the emitting surface. The subject lighting luminaire provides light emitted from an adjacent High Intensity Discharge (HID) light source. The luminaire is specifically designed to provide light over a large surface for backlit billboard applications without the limitations of traditional fluorescent light source light boxes. The luminaire does not require any maintenance to its interior as the light source is remote from the emitting surface.

Abstract: A unique solid flat panel lighting emitting luminaire (light panel) has been created that utilizes a light source remote from the luminaire. The light panel luminaire is fed light flux via a light pipe and/or a fiber optic system into one or two edges of the flat panel. The light panel has imbedded irregular tapered tetrahedron shaped light guides that emit light in a uniform controlled fashion over the length of the emitting surface. The subject lighting luminaire provides light without generating heat. The luminaire is unaffected by environmental temperatures and pressures within the boundaries of the base construction materials utilized.

Abstract: A general lighting system has been created to collect light from a high efficiency light source, concentrate the light into a flux with a tapered light guide, transport the light flux via a large diameter hexagonal light pipe to the edge of a light emitting flat panel. The light panel emits the light remote from the light source. The light source may use high intensity discharge lamp or combination of lamps to provide a light flux that is efficiently generated and balanced for the desired color. A hollow, tapered light pipe concentrator made of polished reflective heat resistant material, concentrates the light flux into an area of transmission output. The light flux is transported via a solid plastic hexagonal light pipe. The light flux is fed to the edge of a light emitting flat panel. The system is specifically created to replace fluorescent light luminairs.

Abstract: Plasma treating a low-k dielectric layer (104) using an oxidation reaction (e.g., O2) to improve patterning. Resist poisoning occurs due to an interaction between low-k films (104), such as OSG, and DUV resist (130, 132). The plasma treatment is performed to either pretreat a low-k dielectric (104) before forming the pattern (130, 132), during a rework of the pattern (130, 132), or between via and trench patterning to reduce resist poisoning.

Abstract: After via etch, a low-k dielectric layer (104) is treated with an in-situ O2 plasma. Resist poisoning is caused by a N source that causes an interaction between low-k films (104), such as OSG, and DUV resist (130, 132). The in-situ plasma treatment immediately removes the source of poisoning to reduce or eliminate poisoning at trench patterning.