Patents by Inventor Roman Baburske
Roman Baburske has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11264459Abstract: A power semiconductor device includes a semiconductor body having front and back sides. The semiconductor body includes drift, field stop and emitter adjustment regions each of a first conductivity type. The field stop region is arranged between the drift region and the backside and has dopants of the first conductivity type at a higher dopant concentration than the drift region. The emitter adjustment region is arranged between the field stop region and the backside and has dopants of the first conductivity type at a higher dopant concentration than the field stop region. The semiconductor body has a concentration of interstitial oxygen of at least 1E17 cm?3. The field stop region includes a region where the dopant concentration is higher than that in the drift region at least by a factor of three. At least 20% of the dopants of the first conductivity type in the region are oxygen-induced thermal donors.Type: GrantFiled: December 12, 2019Date of Patent: March 1, 2022Assignee: Infineon Technologies AGInventors: Roman Baburske, Moriz Jelinek, Franz-Josef Niedernostheide, Frank Dieter Pfirsch, Christian Philipp Sandow, Hans-Joachim Schulze
-
Publication number: 20220059682Abstract: A semiconductor device includes a drift region of a first conductivity type in a semiconductor body having a first main surface, and a body region of a second conductivity type between the drift region and the first main surface. Trenches extend into the semiconductor body from the first main surface and pattern the semiconductor body into mesas including a first mesa between first and second trenches, and a second mesa between second and third trenches. An electrode in the first trench is one electrode out of an electrode group of an electrode electrically coupled to a first gate driver output, an electrode electrically coupled to a second gate driver output, and an electrode electrically connected to a first load contact. An electrode in the second trench is another electrode out the electrode group, and an electrode in the third trench is a remaining electrode out of the electrode group.Type: ApplicationFiled: August 14, 2021Publication date: February 24, 2022Inventor: Roman Baburske
-
Patent number: 11257914Abstract: A semiconductor die includes a semiconductor body having first and second active portions. The first active portion includes first source regions. The second active portion includes second source regions. A gate structure extends from a first surface into the semiconductor body and has a longitudinal gate extension along a lateral first direction. A first load pad and the first source regions are electrically connected. A second load pad and the second source regions are electrically connected. A gap laterally separates the first and second load pads. A lateral longitudinal extension of the gap is parallel to the first direction or deviates therefrom by not more than 60 degree. A connection structure electrically connects the first and second load pads. The connection structure is formed in a groove extending from the first surface into the semiconductor body and/or in a wiring layer formed on the first surface.Type: GrantFiled: October 9, 2020Date of Patent: February 22, 2022Assignee: Infineon Technologies AGInventors: Vera Van Treek, Roman Baburske, Christian Jaeger, Christian Robert Mueller, Franz-Josef Niedernostheide, Frank Dieter Pfirsch, Alexander Philippou, Judith Specht
-
Publication number: 20220052190Abstract: A power semiconductor device first trench structures extending from a first main surface into a semiconductor body up to a first depth. The first trench structures extend in parallel along a first lateral direction. Each first trench structure includes a first dielectric and a first electrode. The power semiconductor device further includes second trench structures extending from the first main surface into the semiconductor body up to a second depth that is smaller than the first depth. The second trench structures extend in parallel along a second lateral direction and intersect the first trenches at intersection positions. Each second trench structure includes a second dielectric and a second electrode. The second dielectric is arranged between the first electrode and the second electrode at the intersection positions.Type: ApplicationFiled: August 6, 2021Publication date: February 17, 2022Inventors: Thorsten Arnold, Roman Baburske, Ilaria Imperiale, Alexander Philippou, Hans-Juergen Thees
-
Publication number: 20210376069Abstract: A power semiconductor device includes a semiconductor body coupled to first and second load terminals. The body includes: at least a diode structure configured to conduct a load current between the terminals and including an anode port electrically connected to the first load terminal and a cathode port electrically connected to the second load terminal; and drift and field stop regions of the same conductivity type. The cathode port includes first port sections and second port sections with dopants of the opposite conductivity type. A transition between each of the second port sections and the field stop region forms a respective pn-junction that extends along a first lateral direction. A lateral separation distance between immediately adjacent ones of second port sections in a second group is smaller than in a first group.Type: ApplicationFiled: August 13, 2021Publication date: December 2, 2021Inventors: Roman Baburske, Philip Christoph Brandt, Johannes Georg Laven
-
Patent number: 11133380Abstract: A power semiconductor device includes a semiconductor body coupled to first and second load terminals. The body includes: at least a diode structure configured to conduct a load current between the terminals and including an anode port electrically connected to the first load terminal and a cathode port electrically connected to the second load terminal; and drift and field stop regions of the same conductivity type. The cathode port includes first port sections and second port sections with dopants of the opposite conductivity type. A transition between each of the second port sections and the field stop region forms a respective pn-junction that extends along a first lateral direction. A diffusion voltage of a respective one of the pn-junctions in an extension direction perpendicular to the first lateral direction is greater than a lateral voltage drop laterally overlapping with the lateral extension of the respective pn-junction.Type: GrantFiled: June 3, 2019Date of Patent: September 28, 2021Assignee: Infineon Technologies AGInventors: Roman Baburske, Philip Christoph Brandt, Johannes Georg Laven
-
Publication number: 20210210604Abstract: An power semiconductor device having a barrier region is provided. A power unit cell of the power semiconductor device has at least two trenches that may both extend into the barrier region. The at least two trenches may both have a respective trench electrode coupled to a control terminal of the power semiconductor device. For example, the trench electrodes are structured to reduce the total gate charge of the power semiconductor device. The barrier region may be p-doped and vertically confined, i.e., in and against the extension direction, by the drift region. The barrier region can be electrically floating.Type: ApplicationFiled: March 22, 2021Publication date: July 8, 2021Inventors: Alexander Philippou, Roman Baburske, Christian Jaeger, Johannes Georg Laven, Helmut Maeckel
-
Publication number: 20210193800Abstract: A power semiconductor device includes: a semiconductor body; a first load terminal structure coupled to the body front side and a second load terminal structure coupled to the body backside; an active area for conducting a load current between the load terminal structures; a drift region having a first conductivity type; a backside region arranged at the backside and including, inside the active area, first and second backside emitter zones. At least one of the backside emitter zones includes: first sectors each having at least one first region of a second conductivity type, the first region arranged in contact with the second load terminal structure and having a smallest lateral extension of at most 50 ?m; and/or second sectors each having a second region of the second conductivity type arranged in contact with the second load terminal structure and having a smallest lateral extension of at least 50 ?m.Type: ApplicationFiled: December 11, 2020Publication date: June 24, 2021Inventors: Roman Baburske, Moritz Hauf, Hans-Joachim Schulze, Holger Schulze, Benedikt Stoib
-
Publication number: 20210119003Abstract: A semiconductor die includes a semiconductor body having first and second active portions. The first active portion includes first source regions. The second active portion includes second source regions. A gate structure extends from a first surface into the semiconductor body and has a longitudinal gate extension along a lateral first direction. A first load pad and the first source regions are electrically connected. A second load pad and the second source regions are electrically connected. A gap laterally separates the first and second load pads. A lateral longitudinal extension of the gap is parallel to the first direction or deviates therefrom by not more than 60 degree. A connection structure electrically connects the first and second load pads. The connection structure is formed in a groove extending from the first surface into the semiconductor body and/or in a wiring layer formed on the first surface.Type: ApplicationFiled: October 9, 2020Publication date: April 22, 2021Inventors: Vera Van Treek, Roman Baburske, Christian Jaeger, Christian Robert Mueller, Franz-Josef Niedernostheide, Frank Dieter Pfirsch, Alexander Philippou, Judith Specht
-
Patent number: 10978560Abstract: A power semiconductor device having a barrier region is provided. A power unit cell of the power semiconductor device has at least two trenches that may both extend into the barrier region. The at least two trenches may both have a respective trench electrode coupled to a control terminal of the power semiconductor device. For example, the trench electrodes are structured to reduce the total gate charge of the power semiconductor device. The barrier region may be p-doped and vertically confined, i.e., in and against the extension direction, by the drift region. The barrier region can be electrically floating.Type: GrantFiled: March 28, 2019Date of Patent: April 13, 2021Assignee: Infineon Technologies AGInventors: Alexander Philippou, Roman Baburske, Christian Jaeger, Johannes Georg Laven, Helmut Maeckel
-
Publication number: 20210083051Abstract: A power device includes: a diode section; a semiconductor body; a drift region extending into the diode section; trenches in the diode section and extending along a vertical direction into the semiconductor body, two adjacent trenches defining a respective mesa portion in the semiconductor body; a body region in the mesa portions; in the diode section, a barrier region between the body and drift regions and having a dopant concentration at least 100 times greater than an average dopant concentration of the drift region and a dopant dose greater than that of the body region. The barrier region has a lateral structure according to which at least 50% of the body region in the diode section is coupled to the drift region at least by the barrier region, and at least 5% of the body region in the diode section is coupled to the drift region without the barrier region.Type: ApplicationFiled: September 10, 2020Publication date: March 18, 2021Inventors: Johannes Georg Laven, Roman Baburske, Alexander Philippou, Christian Philipp Sandow
-
Publication number: 20210083081Abstract: An RC IGBT with an n-barrier region in a transition section between a diode section and an IGBT section is presented.Type: ApplicationFiled: September 10, 2020Publication date: March 18, 2021Inventors: Johannes Georg Laven, Roman Baburske, Frank Dieter Pfirsch, Alexander Philippou, Christian Philipp Sandow
-
Patent number: 10903344Abstract: According to an embodiment of a semiconductor device, the semiconductor device includes a semiconductor mesa having source zones arranged along a longitudinal axis of the semiconductor mesa and at least one body zone forming first pn junctions with the source zones and a second pn junction with a drift zone. The semiconductor device further includes stripe-shaped electrode structures on opposite sides of the semiconductor mesa and separation regions between neighboring ones of the source zones. At least one of the electrode structures includes a gate electrode. In the separation regions, at least one of (i) a capacitive coupling between the gate electrode and the semiconductor mesa and (ii) a conductivity of majority charge carriers of the drift zone is lower than outside of the separation regions.Type: GrantFiled: June 4, 2019Date of Patent: January 26, 2021Assignee: Infineon Technologies AGInventors: Roman Baburske, Matteo Dainese, Peter Lechner, Hans-Joachim Schulze, Johannes Georg Laven
-
Patent number: 10886909Abstract: An electric assembly includes an insulated gate bipolar transistor device, a wide-bandgap transistor device electrically connected in parallel with the bipolar transistor device and a control circuit. The control circuit is electrically coupled to a gate terminal of the bipolar transistor device and to a control terminal of the wide-bandgap transistor device. The control circuit is configured to turn on the bipolar transistor device and to turn on the wide-bandgap transistor device at a predefined turn-on delay with respect to a turn-on of the bipolar transistor device.Type: GrantFiled: June 13, 2017Date of Patent: January 5, 2021Assignee: Infineon Technologies AGInventors: Roman Baburske, Johannes Georg Laven, Thomas Basler
-
Patent number: 10825906Abstract: A semiconductor device includes transistor cells and enhancement cells. Each transistor cell includes a body zone that forms a first pn junction with a drift structure. The transistor cells may form, in the body zones, inversion channels when a first control signal exceeds a first threshold. The inversion channels form part of a connection between the drift structure and a first load electrode. A delay unit generates a second control signal which trailing edge is delayed with respect to a trailing edge of the first control signal. The enhancement cells form inversion layers in the drift structure when the second control signal falls below a second threshold lower than the first threshold. The inversion layers are effective as minority charge carrier emitters.Type: GrantFiled: May 22, 2018Date of Patent: November 3, 2020Assignee: Infineon Technologies AGInventors: Johannes Georg Laven, Roman Baburske, Matteo Dainese, Christian Jaeger
-
Publication number: 20200243509Abstract: A semiconductor device is operable a forward current mode and a reverse current mode and comprises a semiconductor region, and a controllable charge carrier injector, and a gate. A method includes detecting, in the reverse current mode, if the present load current in the reversed direction does not exceed a threshold value, providing a gate signal such that the gate electrode causes the charge carrier injector to induce a first charge carrier density within the semiconductor region so as to conduct a nominal load current in the reverse direction; if the present load current in the reverse direction does exceed the threshold value, operating the semiconductor device in an overload state by providing the gate signal with a voltage that causes the semiconductor region to conduct an overload current in the reverse direction, wherein the second charge carrier density is higher than the first charge carrier density.Type: ApplicationFiled: April 9, 2020Publication date: July 30, 2020Inventors: Johannes Georg Laven, Roman Baburske, Thomas Basler, Philip Christoph Brandt, Maria Cotorogea
-
Publication number: 20200194550Abstract: A power semiconductor device includes a semiconductor body having front and back sides. The semiconductor body includes drift, field stop and emitter adjustment regions each of a first conductivity type. The field stop region is arranged between the drift region and the backside and has dopants of the first conductivity type at a higher dopant concentration than the drift region. The emitter adjustment region is arranged between the field stop region and the backside and has dopants of the first conductivity type at a higher dopant concentration than the field stop region. The semiconductor body has a concentration of interstitial oxygen of at least 1E17 cm?3. The field stop region includes a region where the dopant concentration is higher than that in the drift region at least by a factor of three. At least 20% of the dopants of the first conductivity type in the region are oxygen-induced thermal donors.Type: ApplicationFiled: December 12, 2019Publication date: June 18, 2020Inventors: Roman Baburske, Moriz Jelinek, Franz-Josef Niedernostheide, Frank Dieter Pfirsch, Christian Philipp Sandow, Hans-Joachim Schulze
-
Patent number: 10651165Abstract: A semiconductor device includes a semiconductor region having charge carriers of a first conductivity type, a transistor cell in the semiconductor region, and a semiconductor channel region in the transistor cell and having a first doping concentration of charge carriers of a second conductivity type. A semiconductor auxiliary region in the semiconductor region has a second doping concentration of charge carriers of the second conductivity type, which is at least 30% higher than the first doping concentration. A pn-junction between the semiconductor auxiliary region and the semiconductor region is positioned as deep or deeper in the semiconductor region as a pn-junction between the semiconductor channel region and the semiconductor region. The semiconductor auxiliary region is positioned closer to the semiconductor channel region than any other semiconductor region having charge carriers of the second conductivity type and that forms a further pn-junction with the semiconductor region.Type: GrantFiled: December 16, 2015Date of Patent: May 12, 2020Assignee: Infineon Technologies AGInventors: Johannes Georg Laven, Roman Baburske, Thomas Basler, Philip Christoph Brandt, Maria Cotorogea
-
Patent number: 10546939Abstract: A power semiconductor device having a semiconductor body configured to conduct a load current is disclosed. In one example, the device includes a source region having dopants of a first conductivity type; a semiconductor channel region implemented in the semiconductor body and separating the source region from a remaining portion of the semiconductor body; a trench of a first trench type extending in the semiconductor body along an extension direction and being arranged adjacent to the semiconductor channel region, the trench of the first trench type including a control electrode that is insulated from the semiconductor body. The semiconductor body further comprises: a barrier region and a drift volume having at least a first drift region wherein the barrier region couples the first drift region with the semiconductor channel region.Type: GrantFiled: May 24, 2019Date of Patent: January 28, 2020Assignee: Infineon Technologies AGInventors: Roman Baburske, Markus Bina, Hans-Joachim Schulze, Oana Julia Spulber
-
Patent number: 10483384Abstract: A transistor device includes a first emitter region of a first doping type, a second emitter region of a second doping type, a body of the second doping type, a drift region of the first doping type, a field-stop region of the first doping type, at least one boost structure, and a gate electrode. The boost structure is arranged between the field-stop region and the second emitter region. The at least one boost structure includes a base region of the first doping type and at least one auxiliary emitter region of the second doping type separated from the second emitter region by the base region. An overall dopant dose in the drift region and the field-stop region in a current flow direction of the transistor device is higher than a breakthrough charge of a semiconductor material of the drift region and the field-stop region.Type: GrantFiled: August 22, 2017Date of Patent: November 19, 2019Assignee: Infineon Technologies AGInventors: Riteshkumar Bhojani, Franz-Josef Niedernostheide, Hans-Joachim Schulze, Josef Lutz, Roman Baburske