Patents by Inventor Russell J. Low

Russell J. Low has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas flow restricting cathode system for ion implanter and related method
    Patent number: 6984831
    Abstract: A cathode system having a cathode element configured to extend through an aperture in a wall of an arc chamber of an ion implanter system. A gas flow through a spacing between the cathode element and the aperture is restricted by a restriction member. A method of ionizing a source gas and a cathode element incorporating the restriction member are also provided.
    Type: Grant
    Filed: March 5, 2004
    Date of Patent: January 10, 2006
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Russell J. Low, Joseph C. Olson, Curt D. Bergeron, Eric R. Cobb, Jeffrey A. Burgess