Abstract: An vibration element includes a drive vibration section and a detection vibration section, and the detection vibration section has a detection mode 1 and a detection mode 2 as an vibration mode for detection in which the detection vibration section resonates with Coriolis force produced in the drive vibration section and vibrates. A resonance frequency (vibration frequency) of the drive vibration section is higher than a resonance frequency (vibration frequency) in the detection mode 1 and a resonance frequency (vibration frequency) in the detection mode 2, or the vibration frequency of the drive vibration section is lower than the resonance frequency (vibration frequency) in the detection mode 1 and the resonance frequency (vibration frequency) in the detection mode 2.

Abstract: A vibrator element includes drive vibrating arms extending from an end of a base section, the drive vibrating arms are each provided with an obverse surface, a reverse surface disposed on an opposite side to the obverse surface, and a side surface connecting the obverse surface and the reverse surface to each other, a tilted section facing toward the obverse surface is disposed at least a part of the side surface, and there are disposed a first drive electrode and a second drive electrode obtained by bisection with an electrode separation section disposed in the tilted section.

Abstract: A gyro element as a resonator element includes a drive resonating arm as a drive portion that is driven by application of a voltage, and a detection resonating arm as a detection portion in which charge is generated in response to a Coriolis force generated in the drive resonating arm. An amount of charge detected in the detection resonating arm in a state where the Coriolis force is not generated is greater than 0% and equal to or less than 0.1% of an amount of charge generated in the drive resonating arm when driving the drive resonating arm.

Abstract: An electronic device includes a vibration element having a detection signal electrode and a drive signal electrode, an IC disposed so as to be opposed to the vibration element, a first wiring pattern located between the IC and the vibration element, and electrically connected to the drive signal electrode, and a shield wiring pattern located on the vibration element side of the first wiring pattern, and electrically connected to a constant potential (ground).

Abstract: A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion.

Abstract: A vibrating element has a drive mode, and first and second detection modes in which the vibrating element vibrates in a direction orthogonal to a vibration direction in the drive mode. In frequency-temperature characteristic curves representing a change in frequency due to a change in temperature in the respective modes with a horizontal axis representing an ambient temperature and a vertical axis representing a change in frequency, when a turnover temperature of the frequency-temperature characteristic curve in the drive mode is Ta [° C.], a turnover temperature of the frequency-temperature characteristic curve in the first detection mode is Tb [° C.], and a turnover temperature of the frequency-temperature characteristic curve in the second detection mode is Tc [° C.], Ta is lower than Tb and Tc, or Ta is higher than Tb and Tc.

Abstract: A physical quantity detection circuit includes a filter circuit, and a synchronous detection circuit that is provided at a downstream of the filter circuit and detects a signal in response to a physical quantity contained in an output signal of a vibrating element based on a drive signal for driving the vibrating element. The filter circuit has a cutoff frequency between a resonance frequency in a drive mode and a resonance frequency in a detection mode of the vibrating element and contains the resonance frequency in the drive mode in a passband.

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

Abstract: A vibrating reed includes a base part. A drive vibrating arm, a detection vibrating arm, and an adjustment vibrating arm extend from the base part. A first adjustment electrode and a second adjustment electrode are connected to the adjustment vibrating arm. The first adjustment electrode generates an electrical signal in first phase. The second adjustment electrode generates an electrical signal in second phase opposite to the first phase. The electrical signals of the adjustment electrodes are superimposed on the detection signal of the detection vibrating arm, and thereby, vibration leakage components are cancelled out. The adjustment vibrating arm is partially sandwiched between a first electrode piece and a second electrode piece, and the adjustment vibrating arm is partially sandwiched between a third electrode piece and a fourth electrode piece.

Abstract: A flexural vibrator element has a vibrator arm extending from a base section and having a rectangular cross-sectional shape, the vibrator arm having first and second step sections composed of step surfaces intersecting respectively with a left side surface and a right side surface, and step side surfaces intersecting respectively with an upper surface and a lower surface, between the lower surface, the upper surface and the left side surface, the right side surface, and first and fourth detection electrodes on the left and right side surfaces and second and third detection electrodes on the step side surfaces are respectively separated in a thickness direction of the vibrator arm. The first through fourth detection electrodes are patterned with accuracy by exposure from the upper surface and the lower surface using a common exposure device by existing photo etching.

Abstract: A vibration element includes a vibrating portion, a support portion that supports the vibrating portion, and a suspension arm that couples the vibrating portion to the support portion. In addition, the suspension arm includes a meandering portion extending out the support portion and an inclination portion that couples the meandering portion to the vibrating portion.

Abstract: An angular velocity sensor includes fixing units, a base portion, beam portions that support the base portion with respect to the fixing units, driving vibrating arms connected to the base portion, and detection vibrating arms connected to the base portion. When a width of a detection frequency band is set to f1 [Hz], a resonance frequency in a rotational vibration mode in which the base portion rotates and vibrates around a detection axis with respect to the fixing units in association with the deformation of the beam portions is set to f2 [Hz], and a detuning frequency is set to f3 [Hz], the relation of f1<f2<f3 is satisfied.

Abstract: In an angular velocity sensor, when a width of a detection frequency band is set to f1 [Hz], a resonance frequency in a first rotational vibration mode in which a base portion rotates and vibrates around a detection axis with respect to fixing units in association with the deformation of beam portions is set to f2 [Hz], a detuning frequency is set to f3 [Hz], and a resonance frequency in a second rotational vibration mode, having a phase opposite to that of the first rotational vibration mode, in which the base portion rotates and vibrates around the detection axis with respect to the fixing units in association with the deformation of the beam portions is set to f4, a relation of f1<f2<f3<f4 or a relation of f1<f2<f4<f3 is satisfied.

Abstract: A vibrating element has a drive mode, and first and second detection modes in which the vibrating element vibrates in a direction orthogonal to a vibration direction in the drive mode. In frequency-temperature characteristic curves representing a change in frequency due to a change in temperature in the respective modes with a horizontal axis representing an ambient temperature and a vertical axis representing a change in frequency, when a turnover temperature of the frequency-temperature characteristic curve in the drive mode is Ta [° C.], a turnover temperature of the frequency-temperature characteristic curve in the first detection mode is Tb [° C.], and a turnover temperature of the frequency-temperature characteristic curve in the second detection mode is Tc [° C.], Ta is lower than Tb and Tc, or Ta is higher than Tb and Tc.

Abstract: A vibrator element has a first vibration mode in which first and second detection portions perform flexural vibration in opposite directions in the opposite phase to first and second driving portions which vibrate in opposite directions according to a Coriolis force, and a second vibration mode in which the first and second detection portions perform flexural vibration in opposite directions in the same phase as the first and second driving portions which vibrate in opposite directions according to a Coriolis force. A ratio r=R2/R1 of equivalent series resistance R2 at the time of the second vibration mode to equivalent series resistance R1 at the time of the first vibration mode is set between 0.15 and 6.0.

Abstract: A vibration gyro element includes: a base section; a detection arm extending from the base section in a first direction; a joint section disposed at an end portion of the base section; a first drive arm extending from the joint section in a second direction intersecting with the first direction in a plan view; a second drive arm extending from the joint section in a direction opposite to the extending direction of the first drive arm; a first set of drive electrodes provided to the first drive arm; a second set of drive electrodes provided to the second drive arm; and a set of detection electrodes provided to the detection arm, wherein the first drive arm vibrates in a third direction perpendicular to the first direction and the second direction, the second drive arm vibrates in a same direction as the first drive arm.

Abstract: A vibrator element includes a pair of first and second drive vibrating arms that extend in opposite directions from a base portion; a first weight that is spaced from a tip of at least one of the first and second drive vibrating arms toward the base portion and is provided in a first region of the at least one of the drive vibrating arms; and a second weight that is provided in a second region that is a region between a tip of the first weight and the tip of the at least one of the drive vibrating arms. When an area of the first region is represented as A1, a mass of the first weight is represented as B1, an area of the second region is represented as A2, and a mass of the second weight is represented as B2, B1/A1>B2/A2 is established.

Abstract: A resonator element includes: a base part; plural vibrating arms extended from the base part, each having a first principal surface and a second principal surface opposed to each other and a first side surface and a second side surface connecting the first principal surface and the second principal surface and opposed to each other, the first side surface of at least one vibrating arm of the plural vibrating arms having a first step part provided from the first principal surface side and a second step part provided from the second principal surface side; a first electrode provided on the second side surface of the vibrating arm; a second electrode provided in a position opposed to the first electrode of the first step part; and a third electrode provided in a position opposed to the first electrode of the second step part.

Abstract: A vibrating piece includes a driving arm at least partially formed by a piezoelectric body, the driving arm including a first surface spreading along the direction of excited vibration, a second surface on the opposite side of the first surface, a first side surface configured to connect the first surface and the second surface, and a second side surface arranged on the opposite side of the first side surface and configured to connect the first surface and the second surface. The vibrating piece includes first electrodes arranged at least on one surface side of the first surface and the second surface and second electrodes arranged on at least one surface side of the first side surface and the second side surface. The first electrodes are provided asymmetrically with respect to an equally dividing plane of the driving arm orthogonal to the direction of the excited vibration of the driving arm.

Abstract: A vibrating reed includes a base part. A drive vibrating arm, a detection vibrating arm, and an adjustment vibrating arm extend from the base part. A first adjustment electrode and a second adjustment electrode are connected to the adjustment vibrating arm. The first adjustment electrode generates an electrical signal in first phase. The second adjustment electrode generates an electrical signal in second phase opposite to the first phase. The electrical signals of the adjustment electrodes are superimposed on the detection signal of the detection vibrating arm, and thereby, vibration leakage components are cancelled out. The adjustment vibrating arm is partially sandwiched between a first electrode piece and a second electrode piece, and the adjustment vibrating arm is partially sandwiched between a third electrode piece and a fourth electrode piece.