Abstract: A vibration element includes: a quartz crystal substrate having a first vibration part and a second vibration part; a pair of first excitation electrodes formed at two main surfaces of the quartz crystal substrate, at the first vibration part; and a pair of second excitation electrodes formed in such a way as to sandwich the second vibration part in a direction of thickness of the quartz crystal substrate, at the second vibration part. At least one second excitation electrode of the pair of second excitation electrodes is formed at an inclined surface inclined to at least one of the two main surfaces.

Abstract: A vibrator device includes a vibrator element, a base, and a support configured to support the vibrator element with respect to the base. The support includes a frame shaped like a frame, a base mount disposed outside the frame, and fixed to the base, an element holder which is disposed inside the frame, and on which the vibrator element is mounted, a pair of first beams which extend along a first direction from the element holder, and couple the element holder and the frame to each other, and a pair of second beams which extend along a second direction from the frame, and couple the frame and the base mount to each other, and W12/L1<30, in which a length in the first direction of the first beam is L1 (?m), and a width in a direction perpendicular to the first direction of the first beam is W1 (?m).

Abstract: A vibrator device includes: a vibrator element that includes a vibrator substrate including a vibrating arm, and an electrode arranged in the vibrator substrate; a base; a support substrate that includes a base mount fixed to the base, an element support that supports the vibrator element, and a beam that connects between the base mount and the element support, and supports the vibrator element relative to the base; a wiring pattern that is arranged in the support substrate, and is electrically connected to the vibrator element; and a buffer member that is arranged on the wiring pattern of the support substrate, and whose hardness is lower than that of the support substrate. Also the buffer member is arranged on a face of the support substrate, that opposes the vibrator element, and overlaps the vibrating arm in a plan view of the support substrate.

Abstract: A vibrator device includes a vibrator element, and a support substrate disposed so as to be opposed to the vibrator element. The support substrate includes a base configured to support the vibrator element, a support configured to support the base, a plurality of beams configured to couple the base and the support to each other, and a drive signal interconnection, a drive constant-potential interconnection, a detection signal interconnection, and a detection constant-potential interconnection each laid around the base and the support passing the beams, and in predetermined one of the beams, at least one of the drive constant-potential interconnection and the detection constant-potential interconnection is disposed on a surface on the vibrator element side, and the detection signal interconnection is disposed on a surface on the opposite side.

Abstract: A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.

Abstract: An oscillator includes a first container, a second container accommodated in the first container, a resonator element accommodated in the second container, a temperature sensor accommodated in the second container, a first circuit element that is accommodated in the second container and includes an oscillation circuit that causes the resonator element to oscillate so as to generate an oscillation signal on which temperature compensation is performed based on a detected temperature of the temperature sensor, and a second circuit element which is accommodated in the first container and includes a frequency control circuit that controls a frequency of the oscillation signal. The second container and the second circuit element are spaced from each other and are disposed to overlap each other in plan view.

Abstract: An oscillator includes a first container, a second container accommodated in the first container, a resonator element accommodated in the second container, a temperature sensor accommodated in the second container, a first circuit element that is accommodated in the second container and includes an oscillation circuit that causes the resonator element to oscillate so as to generate an oscillation signal on which temperature compensation is performed based on a detected temperature of the temperature sensor, and a second circuit element that is accommodated in the first container and includes a frequency control circuit that controls a frequency of the oscillation signal. The second container and the second circuit element are stacked.

Abstract: An oscillator includes a first container that includes a first base substrate and a first lid and that has a first internal space, a second container that is fixed to the first base substrate in the first internal space and that includes a second base substrate and a second lid and that has a second internal space, a resonator element that is disposed on the lower surface side of the second base substrate in the second internal space, a temperature sensor that is disposed on the upper surface side of the second base substrate, a first circuit element that includes an oscillation circuit and a second circuit element that is fixed to the first base substrate in the first internal space and that includes a frequency control circuit that controls a frequency of the oscillation signal output by the oscillation circuit. The second container and the second circuit element are arranged side by side in plan view.

Abstract: An oscillator includes a first container that includes a first base substrate and a first lid bonded to the first base substrate and has a first internal space, a second container that is accommodated in the first internal space and fixed to the first base substrate, a resonator element that is accommodated in the second container, a temperature sensor that is accommodated in the second container, a first circuit element that is accommodated in the second container and includes an oscillation circuit oscillating the resonator element and generating an oscillation signal on which temperature compensation is performed based on a detected temperature of the temperature sensor, and a second circuit element that is fixed to the first base substrate and includes a frequency control circuit that controls a frequency of the oscillation signal, in which the second container and the second circuit element are arranged side by side in plan view.

Abstract: A sensor element includes: a base portion; a drive arm coupled to the base portion via a coupling arm extending on a first axis from the base portion; a first detection arm extending from the base portion in a positive direction of a second axis orthogonal to the first axis and a second detection arm extending from the base portion in a negative direction of the second axis in the plan view; a drive signal wiring disposed on the base portion along the first axis in the plan view; and a first detection signal wiring and a second detection signal wiring disposed on the base portion in the plan view, in which shapes of the first detection signal wiring and the second detection signal wiring are different from each other in line symmetrical shapes based on the first axis in the plan view.

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

Abstract: Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0<f1 is satisfied in which f0 is a resonance frequency of a vibration of the vibrator structure body along the B axis and f1 is a drive frequency of the vibrator element.

Abstract: A vibration device including a vibrator, a circuit component, a relay substrate disposed between the vibrator and the circuit component, a package that accommodates the vibrator, the circuit component, and the relay substrate, a first metal bump that joins the circuit component to the package, a second metal bump that joins the relay substrate to the circuit component, and a third metal bump that joins the vibrator to the relay substrate.

Abstract: A vibrator device includes a base, a relay substrate supported by the base, and a vibrating element supported by the relay substrate, the relay substrate includes a base mount that is directly or indirectly fixed to the base, a vibrating element mount on which the vibrating element is mounted, and a beam that couples the base mount and the vibrating element mount, and parts of the vibrating element mount that are coupled to the vibrating element are positioned on both sides of the base mount while interposing the base mount therebetween in a plan view.

Abstract: The vibrator device includes: a base; a circuit element disposed on the base; a vibrating element disposed to at least partially overlap the circuit element in a plan view; and a support substrate that is disposed between the circuit element and the vibrating element and supports the vibrating element. In addition, the vibrating element has a frequency adjustment portion that performs frequency adjustment by removing at least a part of the vibrating element, and the support substrate includes a base portion that supports the vibrating element, a support portion that supports the base portion, a beam portion that couples the base portion the support portion, and a shielding portion that is connected to the beam portion, overlaps the frequency adjustment portion in a plan view, and has light shielding properties.

Abstract: A vibration device includes a vibration element that has a plurality of terminals, a base that has a plurality of electrical connection terminals, and a board that has a wiring portion which electrically connects the plurality of electrical connection terminal and the plurality of terminals to each other, and that supports the vibration element with respect to the base. The board has a base fixing portion fixed to the base, a vibration element mounting portion on which the vibration element is mounted, and at least one beam portion which couples the base fixing portion and the vibration element mounting portion to each other. At least the one beam portion has a first portion which extends in a first direction and a second portion which extends in a second direction intersecting the first direction.

Abstract: An oscillator includes a first container, a second container accommodated in the first container, a resonator element accommodated in the second container, a temperature sensor accommodated in the second container, a first circuit element that is accommodated in the second container and includes an oscillation circuit that causes the resonator element to oscillate so as to generate an oscillation signal on which temperature compensation is performed based on a detected temperature of the temperature sensor, and a second circuit element that is accommodated in the first container and includes a frequency control circuit that controls a frequency of the oscillation signal. The second container and the second circuit element are stacked.

Abstract: An oscillator includes a first container that includes a first base substrate and a first lid and that has a first internal space, a second container that is fixed to the first base substrate in the first internal space and that includes a second base substrate and a second lid and that has a second internal space, a resonator element that is disposed on the lower surface side of the second base substrate in the second internal space, a temperature sensor that is disposed on the upper surface side of the second base substrate, a first circuit element that includes an oscillation circuit and a second circuit element that is fixed to the first base substrate in the first internal space and that includes a frequency control circuit that controls a frequency of the oscillation signal output by the oscillation circuit. The second container and the second circuit element are arranged side by side in plan view.

Abstract: An oscillator includes a first container that includes a first base substrate and a first lid bonded to the first base substrate and has a first internal space, a second container that is accommodated in the first internal space and fixed to the first base substrate, a resonator element that is accommodated in the second container, a temperature sensor that is accommodated in the second container, a first circuit element that is accommodated in the second container and includes an oscillation circuit oscillating the resonator element and generating an oscillation signal on which temperature compensation is performed based on a detected temperature of the temperature sensor, and a second circuit element that is fixed to the first base substrate and includes a frequency control circuit that controls a frequency of the oscillation signal, in which the second container and the second circuit element are arranged side by side in plan view.

Abstract: An oscillator includes a first container, a second container accommodated in the first container, a resonator element accommodated in the second container, a temperature sensor accommodated in the second container, a first circuit element that is accommodated in the second container and includes an oscillation circuit that causes the resonator element to oscillate so as to generate an oscillation signal on which temperature compensation is performed based on a detected temperature of the temperature sensor, and a second circuit element which is accommodated in the first container and includes a frequency control circuit that controls a frequency of the oscillation signal. The second container and the second circuit element are spaced from each other and are disposed to overlap each other in plan view.