Abstract: An vibrating gyro device includes a base, drive vibrating arms extending from one end of the base, and detection vibrating arms extending from the other end of the base that faces away from the one end, and an adjustment film is provided on each of the drive vibrating arms in an area close to the base.

Abstract: A flexural vibrator element has a vibrator arm extending from a base section and having a rectangular cross-sectional shape, the vibrator arm having first and second step sections composed of step surfaces intersecting respectively with a left side surface and a right side surface, and step side surfaces intersecting respectively with an upper surface and a lower surface, between the lower surface, the upper surface and the left side surface, the right side surface, and first and fourth detection electrodes on the left and right side surfaces and second and third detection electrodes on the step side surfaces are respectively separated in a thickness direction of the vibrator arm. The first through fourth detection electrodes are patterned with accuracy by exposure from the upper surface and the lower surface using a common exposure device by existing photo etching.

Abstract: A vibrator element includes: a base part; and a vibrating arm extended from the base part in a first direction, the vibrating arm including a first region, a second region, and a third region sequentially arranged from the base part side in the first direction, the first region to the third region including first electrodes and second electrodes that generate electric fields in second directions perpendicular to the first direction in a plan view and are electrically independent from each other, wherein electric field directions of the first region and the third region and an electric field direction of the second region are opposite to each other, and the vibrating arm is expanded and contracted in the first direction by the electric fields in the second directions, and the vibrating arm is vibrated in third directions as directions perpendicular to the respective first direction and second directions.

Abstract: A vibratory sensor includes a resonator element including (i) a first base portion and a second base portion, each ot the first and the second base portions having an upper main surface and a lower main surface, (ii) a resonating arm extended in a beam shape between the first and the second base portions to be vibrated at a predetermined resonance frequency, (iii) a first narrow portion formed by reducing a width of a portion extended from the first base portion to be smaller than a width of the first base portion in a direction orthogonal to an extending direction of the resonating arm, (iv) a second narrow portion formed by reducing a width of a portion extended from the second base portion to be smaller than a width of the second base portion in the direction orthogonal to the extending direction of the resonating arm, (v) a first support portion extended from the first narrow portion in a direction opposite to the first base portion, and (vi) a second support portion extended from the second narrow portio

Abstract: A vibrator element includes: a base part; and a vibrating arm extended from the base part in a first direction, the vibrating arm including a first region, a second region, and a third region sequentially arranged from the base part side in the first direction, the first region to the third region including first electrodes and second electrodes that generate electric fields in second directions perpendicular to the first direction in a plan view and are electrically independent from each other, wherein electric field directions of the first region and the third region and an electric field direction of the second region are opposite to each other, and the vibrating arm is expanded and contracted in the first direction by the electric fields in the second directions, and the vibrating arm is vibrated in third directions as directions perpendicular to the respective first direction and second directions.

Abstract: A vibration gyro element includes: a base section; a detection arm extending from the base section in a first direction; a joint section disposed at an end portion of the base section; a first drive arm extending from the joint section in a second direction intersecting with the first direction in a plan view; a second drive arm extending from the joint section in a direction opposite to the extending direction of the first drive arm; a first set of drive electrodes provided to the first drive arm; a second set of drive electrodes provided to the second drive arm; and a set of detection electrodes provided to the detection arm, wherein the first drive arm vibrates in a third direction perpendicular to the first direction and the second direction, the second drive arm vibrates in a same direction as the first drive arm.

Abstract: A vibrator element includes: a base portion; a vibrating arm that extends in a first direction from the base portion, has a width in a second direction perpendicular to the first direction in the plan view, and has a thickness in a third direction perpendicular to the first direction and the second direction; and an inter digital transducer, in which electrode fingers are arranged in the first direction, disposed at least one of a first surface, which is perpendicular to the third direction, and a second surface, which faces the first surface, of the vibrating arm, wherein the vibrating arm is vibrated in the third direction by stretching or contacting the vibrating arm in the first direction by using an electric field in the first direction that is generated by the inter digital transducer.

Abstract: A resonator element includes: a base part; plural vibrating arms extended from the base part, each having a first principal surface and a second principal surface opposed to each other and a first side surface and a second side surface connecting the first principal surface and the second principal surface and opposed to each other, the first side surface of at least one vibrating arm of the plural vibrating arms having a first step part provided from the first principal surface side and a second step part provided from the second principal surface side; a first electrode provided on the second side surface of the vibrating arm; a second electrode provided in a position opposed to the first electrode of the first step part; and a third electrode provided in a position opposed to the first electrode of the second step part.

Abstract: An acceleration sensor having a vibrating body includes: a base fixed to a pedestal; an oscillating arm extended from the base in a beam-like shape, oscillating transversally in a planer direction at a predetermined resonant frequency. Here, the oscillating arm includes: an oscillating block defined by a through hole opened through a thickness direction at a widthwise center of the oscillating arm, the through hole extending in a lengthwise direction thereof; an added mass being a junction of a distal end of the oscillating block defined by the through hole; and an excitation means installed on the oscillating arm. At this time, the oscillating arm is supported by the base and by the added mass, either in a pseudo-dual anchor structure or a single anchor structure. With the above configuration, the acceleration sensor detects a resonant frequency variability of the vibrating body caused by an inertial effect of the added mass under acceleration.

Abstract: A vibratory sensor includes a resonator element including (i) a first base portion and a second base portion, each of the first and the second base portions having an upper main surface and a lower main surface, (ii) a resonating arm extended in a beam shape between the first and the second base portions to be vibrated at a predetermined resonance frequency, (iii) a first narrow portion formed by reducing a width of a portion extended from the first base portion to be smaller than a width of the first base portion in a direction orthogonal to an extending direction of the resonating arm, (iv) a second narrow portion formed by reducing a width of a portion extended from the second base portion to be smaller than a width of the second base portion in the direction orthogonal to the extending direction of the resonating arm, (v) a first support portion extended from the first narrow portion in a direction opposite to the first base portion, and (vi) a second support portion extended from the second narrow portio

Abstract: An acceleration sensor having a vibrating body includes: a base fixed to a pedestal; an oscillating arm extended from the base in a beam-like shape, oscillating transversally in a planer direction at a predetermined resonant frequency. Here, the oscillating arm includes: an oscillating block defined by a through hole opened through a thickness direction at a widthwise center of the oscillating arm, the through hole extending in a lengthwise direction thereof; an added mass being a junction of a distal end of the oscillating block defined by the through hole; and an excitation means installed on the oscillating arm. At this time, the oscillating arm is supported by the base and by the added mass, either in a pseudo-dual anchor structure or a single anchor structure. With the above configuration, the acceleration sensor detects a resonant frequency variability of the vibrating body caused by an inertial effect of the added mass under acceleration.