Abstract: Methods and systems for realizing a high throughput wafer positioning system with high positioning accuracy are presented herein. The high throughput, high accuracy wafer positioning system is employed to measure structural and material characteristics (e.g., material composition, dimensional characteristics of structures and films, etc.) associated with different semiconductor fabrication processes. In one aspect, iron core linear motor assemblies are arranged in a magnetically opposed configuration such that the magnetic attraction forces inherent to each opposing iron core linear motor assembly largely cancel one another. The reduced force applied to sensitive stage frame elements, in turn, reduces induced deformations and stage positioning errors. In some embodiments, a wafer positioning system includes stacked magnetically opposed long stroke stages.

Abstract: Feeding stock used to form a tapered structure into a curving device such that each point on the stock undergoes rotational motion about a peak location of the tapered structure; and the stock meets a predecessor portion of stock along one or more adjacent edges.

Abstract: Feeding stock used to form a tapered structure into a curving device such that each point on the stock undergoes rotational motion about a peak location of the tapered structure; and the stock meets a predecessor portion of stock along one or more adjacent edges.

Abstract: Embodiments herein describe methods, devices, and systems for reducing an electric field at a clamp-reticle interface using an enhanced electrostatic clamp. In particular, the electrostatic clamp includes a clamp body, an electrode layer disposed on a top surface of the clamp body, and a plurality of burls that project from a bottom surface of the clamp body, wherein the electrode layer comprises a plurality of cutouts at predetermined locations that vertically correspond to locations of the plurality of burls at the bottom surface of the clamp body.

Abstract: An instrument port for introducing instruments into a surgical site, including a port body having a channel running therethrough from a proximal end to a distal end, an instrument sleeve in slidable contact with the channel, creating a gap therebetween, and fluid flow for removing emboli efficiently from the instrument port, wherein the fluid flow includes the gap is provided. A fluid flow system for use in an instrument port is provided. A method of removably securing an instrument sleeve to a port body by anchoring the instrument port to heart tissue, making at least one flood line in a channel, flushing out emboli, and performing surgery with the instrument port.

Abstract: Feeding stock used to form a tapered structure into a curving device such that each point on the stock undergoes rotational motion about a peak location of the tapered structure; and the stock meets a predecessor portion of stock along one or more adjacent edges.

Abstract: Feeding stock used to form a tapered structure into a curving device such that each point on the stock undergoes rotational motion about a peak location of the tapered structure; and the stock meets a predecessor portion of stock along one or more adjacent edges.

Abstract: A lithographic apparatus has a support structure configured to support a patterning device, the patterning device serving to pattern a radiation beam according to a desired pattern and having a planar main surface through which the radiation beam passes; an outlet opening configured to direct a flow of a gas onto the patterning device; and an inlet opening configured to extract the gas which has exited the outlet opening, wherein the outlet opening and inlet opening are in a facing surface facing the planar main surface of the patterning device.

Abstract: Systems and methods are disclosed that provide a support system in the Z direction for patterning devices that can function under high acceleration and deceleration with minimal effect on travel and hysteresis in the X and Y directions. A reticle clamping system includes a support device and a holding device. The holding device is configured to releasably couple a reticle to the support device. The holding device includes a plurality of burls. The reticle clamping system further includes a metallic support system coupled to the support device. The metallic support system provides a vacuum path from a vacuum channel to the holding device.

Abstract: Systems and methods are disclosed that provide a support system in the Z direction for patterning devices that can function under high acceleration and deceleration with minimal effect on travel and hysteresis in the X and Y directions. A reticle clamping system includes a support device and a holding device. The holding device is configured to releasably couple a reticle to the support device. The holding device includes a plurality of burls. The reticle clamping system further includes a metallic support system coupled to the support device. The metallic support system provides a vacuum path from a vacuum channel to the holding device.

Abstract: A system includes a torque sensor; and a hybrid power system. The hybrid power sensor includes a frame; an engine mounted on the frame; and a generator, the generator including: a generator rotor mechanically coupled to a shaft of the engine; and a generator stator coupled to the frame by the torque sensor. The torque sensor is configured to measure a torque on the generator stator.

Abstract: An unmanned aerial vehicle includes at least one rotor motor configured to drive at least one propeller to rotate; a passenger compartment sized to contain a human or animal passenger; and a hybrid generator system configured to provide power to the at least one rotor motor and to generate lift sufficient to carry the human or animal passenger. The hybrid generator system includes a rechargeable battery configured to provide power to the at least one rotor motor; an engine configured to generate mechanical power; and a generator motor coupled to the engine and configured to generate electrical power from the mechanical power generated by the engine.

Abstract: An unmanned aerial vehicle includes at least one rotor motor configured to drive at least one propeller to rotate; a passenger compartment sized to contain a human or animal passenger; and a hybrid generator system configured to provide power to the at least one rotor motor and to generate lift sufficient to carry the human or animal passenger. The hybrid generator system includes a rechargeable battery configured to provide power to the at least one rotor motor; an engine configured to generate mechanical power; and a generator motor coupled to the engine and configured to generate electrical power from the mechanical power generated by the engine.

Abstract: Feeding stock used to form a tapered structure into a curving device such that each point on the stock undergoes rotational motion about a peak location of the tapered structure; and the stock meets a predecessor portion of stock along one or more adjacent edges.

Abstract: An unmanned aerial vehicle includes multiple rotor arms; a rotor disposed at an end of each of the multiple rotor arms; and an adjustment component configured to enable a first rotor arm to move relative to a second rotor arm.

Abstract: An aerial vehicle includes a hybrid power generation system comprising an engine; a generator mechanically coupled to the engine; and a propulsion system comprising an electric motor electrically coupled to the generator and a rotational mechanism coupled to the electric motor.

Abstract: An unmanned aerial vehicle includes multiple rotor arms; a rotor disposed at an end of each of the multiple rotor arms; and an adjustment component configured to enable a first rotor arm to move relative to a second rotor arm.

Abstract: An unmanned aerial vehicle includes at least one rotor motor configured to drive at least one propeller to rotate; a passenger compartment sized to contain a human or animal passenger; and a hybrid generator system configured to provide power to the at least one rotor motor and to generate lift sufficient to carry the human or animal passenger. The hybrid generator system includes a rechargeable battery configured to provide power to the at least one rotor motor; an engine configured to generate mechanical power; and a generator motor coupled to the engine and configured to generate electrical power from the mechanical power generated by the engine.

Abstract: An unmanned aerial vehicle includes at least one rotor motor configured to drive at least one propeller to rotate. The unmanned aerial vehicle includes a data center including a processor; a data storage component; and a wireless communications component. The unmanned aerial vehicle includes a hybrid generator system configured to provide power to the at least one rotor motor and to the data center, the hybrid generator system including a rechargeable battery configured to provide power to the at least one rotor motor; an engine configured to generate mechanical power; and a generator motor coupled to the engine and configured to generate electrical power from the mechanical power generated by the engine. The data center may include an intelligent data management module configured to control power distribution and execution of mission tasks in response to available power generation and mission task priorities.

Abstract: An aerial vehicle includes a hybrid power generation system comprising an engine; a generator mechanically coupled to the engine; and a propulsion system comprising an electric motor electrically coupled to the generator and a rotational mechanism coupled to the electric motor.