Patents by Inventor Samir A. Nayfeh
Samir A. Nayfeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20150301456Abstract: A patterning device support (1100) for controlling a temperature of a patterning device (1102) can include a movable component (1104). The movable component can include a gas inlet (1108) for supplying a gas flow across a surface of the patterning device and a gas outlet (1110) for extracting the gas flow. The patterning device support can also include a gas flow generator (1118) coupled to a duct (1114, 1116) for recirculating the gas flow from the gas outlet to the gas inlet.Type: ApplicationFiled: October 21, 2013Publication date: October 22, 2015Applicants: ASML Holding N.V., ASML Neherlands B.V.Inventors: Earl William EBERT, JR., Johannes ONVLEE, Samir A. NAYFEH, Mark Josef SCHUSTER, Peter A. DELMASTRO, Christopher Charles WARD, Frank Johannes Jacobus VAN BOXTEL, Abdullah ALIKHAN, Daniel Nathan BURBANK, Daniel Nicholas GALBURT, Justin Matthew VERDIRAME
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Publication number: 20150241796Abstract: A system for controlling temperature of a patterning device in a lithographic apparatus is discussed. The system includes a patterning device support configured to support a patterning device and a reticle cooling system configured to provide substantially uniform temperature distribution across the patterning device. The reticle cooling system includes a first and second array of gas inlets configured to provide a first and second gas flow along a first and second direction across a surface of the patterning device, respectively, where first and second directions are opposite to each other. The reticle cooling system further includes a switching control system configured to control operation of the first and second arrays of gas inlets.Type: ApplicationFiled: April 29, 2015Publication date: August 27, 2015Applicants: ASML Holding N.V., ASML Netherlands B.V.Inventors: Earl William EBERT, JR., Johannes ONVLEE, Samir A. NAYFEH, Mark Josef SCHUSTER, Peter A. DELMASTRO, Christopher Charles WARD, Frank Johannes Jacobus VAN BOXTEL, Abdullah ALIKHAN, Daniel Nathan BURBANK, Daniel Nicholas GALBURT, Justin Matthew VERDIRAME, Thomas VENTURINO
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Publication number: 20150168854Abstract: A lithographic apparatus has a support structure configured to support a patterning device, the patterning device serving to pattern a radiation beam according to a desired pattern and having a planar main surface through which the radiation beam passes; an outlet opening configured to direct a flow of a gas onto the patterning device; and an inlet opening configured to extract the gas which has exited the outlet opening, wherein the outlet opening and inlet opening are in a facing surface facing the planar main surface of the patterning device.Type: ApplicationFiled: June 5, 2013Publication date: June 18, 2015Applicants: ASML Netherlands B.V., ASML Holding N.V.Inventors: Jan Steven Christiaan Westerlaken, Ruud Hendrikus Martinus Johannes Bloks, Peter A. Delmastro, Thibault Simon Mathieu Laurent, Martinus Hendrikus Antonius Leenders, Mark Josef Schuster, Christopher Charles Ward, Frank Johannes Jacobus Van Boxtel, Justin Matthew Verdirame, Samir A. Nayfeh
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Patent number: 9036326Abstract: An electrostatic clamp is provided having a clamping plate, wherein the clamping plate has a central region and an annulus region. A plurality of gas supply orifices are defined in the central region of the clamping plate, wherein the plurality of gas supply orifices are in fluid communication with a pressurized gas supply, and wherein the pressurized gas supply is configured to provide a cushion of gas between the clamping surface and the workpiece in the central region of the clamping plate via the plurality of gas supply orifices. One or more gas return orifices defined in one or more of the central region and annulus region of the clamping plate, wherein the one or more gas return orifices are in fluid communication with a vacuum source, therein generally defining an exhaust path for the cushion of gas.Type: GrantFiled: April 30, 2008Date of Patent: May 19, 2015Assignee: Axcelis Technologies, Inc.Inventors: William David Lee, Marvin Raymond LaFontaine, Ashwin Madhukar Purohit, Joseph Daniel Gillespie, Donovan Beckel, Teng Chao Tao, Alexander Henry Slocum, Samir Nayfeh
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Patent number: 8976336Abstract: A lithographic apparatus is described that comprises a support structure to hold an object. The object may be a patterning device or a substrate to be exposed. The support structure comprises a chuck, on which the object is supported, and an array of shear-compliant elongated elements normal to the chuck and the stage, such that first ends of the elongated elements contact a surface of the chuck and second ends of the elongated elements contact a stage. Through using the array of elongated elements, a transfer of stress between the stage and the chuck is substantially uniform, resulting in minimization of slippage of the object relative to the surface of the chuck during a deformation of the chuck due to the stress.Type: GrantFiled: April 23, 2014Date of Patent: March 10, 2015Assignee: ASML Holding N.V.Inventors: Samir A. Nayfeh, Mark Edd Williams, Justin Matthew Verdirame
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Publication number: 20140233009Abstract: A lithographic apparatus is described that comprises a support structure to hold an object. The object may be a patterning device or a substrate to be exposed. The support structure comprises a chuck, on which the object is supported, and an array of shear-compliant elongated elements normal to the chuck and the stage, such that first ends of the elongated elements contact a surface of the chuck and second ends of the elongated elements contact a stage. Through using the array of elongated elements, a transfer of stress between the stage and the chuck is substantially uniform, resulting in minimization of slippage of the object relative to the surface of the chuck during a deformation of the chuck due to the stress.Type: ApplicationFiled: April 23, 2014Publication date: August 21, 2014Applicant: ASML Holding N.V.Inventors: Samir A. NAYFEH, Mark Edd Williams, Justin Matthew Verdirame
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Patent number: 8786832Abstract: A lithographic apparatus is described that comprises a support structure to hold an object. The object may be a patterning device or a substrate to be exposed. The support structure comprises a chuck, on which the object is supported, and an array of shear-compliant elongated elements normal to the chuck and the stage, such that first ends of the elongated elements contact a surface of the chuck and second ends of the elongated elements contact a stage. Through using the array of elongated elements, a transfer of stress between the stage and the chuck is substantially uniform, resulting in minimization of slippage of the object relative to the surface of the chuck during a deformation of the chuck due to the stress.Type: GrantFiled: July 10, 2013Date of Patent: July 22, 2014Assignee: ASML Holding N.V.Inventors: Samir A. Nayfeh, Mark Edd Williams, Justin Matthew Verdirame
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Patent number: 8779635Abstract: A reticle positioning apparatus for actinic EUV reticle inspection including a sealed inspection chamber containing a reticle stage for holding a reticle. The reticle stage has a magnetically suspended upper stage with a long travel in a “y” direction and a magnetically suspended lower stage with a long travel in an “x” direction; and a cable stage chamber isolated from the inspection chamber by a cable chamber wall. The cable stage chamber has a cable stage movable in the “y” direction; and a tube connected at one end to the reticle stage and to the cable stage at the other end. The tube passes from the cable stage through the inspection chamber through a seal in the chamber wall and opening into the cable entry chamber for entry of cables and hoses within the cable stage chamber, which cables and hoses pass through the tube to the reticle stage.Type: GrantFiled: April 9, 2013Date of Patent: July 15, 2014Assignee: KLA-Tencor CorporationInventors: Pradeep Subrahmanyan, Mark Williams, Samir Nayfeh
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Patent number: 8724115Abstract: A stage metrology suitable for REBL includes an interferometer stage metrology system configured to measure the position and rotation of a short-stroke wafer scanning stage, wherein the interferometer metrology system includes two or more interferometers for each axis of measurement, wherein a first interferometer mirror is disposed on a first surface of the short-stroke wafer scanning stage and a second interferometer mirror is disposed on a second surface of the short-stroke wafer scanning stage, and a control system configured to determine a shape error for the first interferometer mirror using two or more interferometer measurements from the two or more interferometers associated with the first interferometer mirror and a shape error for the second interferometer mirror using two or more interferometer measurements from the two or more interferometers associated with the second interferometer mirror.Type: GrantFiled: June 10, 2013Date of Patent: May 13, 2014Assignee: KLA-Tencor CorporationInventors: Upendra Ummethala, Layton Hale, Josh Clyne, Samir Nayfeh, Mark Williams, Joseph A. DiRegolo, Andrew Wilson
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Publication number: 20140016110Abstract: A lithographic apparatus is described that comprises a support structure to hold an object. The object may be a patterning device or a substrate to be exposed. The support structure comprises a chuck, on which the object is supported, and an array of shear-compliant elongated elements normal to the chuck and the stage, such that first ends of the elongated elements contact a surface of the chuck and second ends of the elongated elements contact a stage. Through using the array of elongated elements, a transfer of stress between the stage and the chuck is substantially uniform, resulting in minimization of slippage of the object relative to the surface of the chuck during a deformation of the chuck due to the stress.Type: ApplicationFiled: July 10, 2013Publication date: January 16, 2014Applicant: ASML Holding N.V.Inventors: Samir A. NAYFEH, Mark Edd WILLIAMS, Justin Matthew VERDIRAME
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Patent number: 8625070Abstract: In a lithographic apparatus, dampers are provided that may be used within mounts for optical elements in order to damp the motion of the optical element relative to the component to which it is mounted.Type: GrantFiled: October 27, 2008Date of Patent: January 7, 2014Assignee: ASML Holding N.V.Inventors: Windy Lynn Farnsworth, Santiago E. Del Puerto, Samir A. Nayfeh
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Publication number: 20130342827Abstract: A stage metrology suitable for REBL includes an interferometer stage metrology system configured to measure the position and rotation of a short-stroke wafer scanning stage, wherein the interferometer metrology system includes two or more interferometers for each axis of measurement, wherein a first interferometer mirror is disposed on a first surface of the short-stroke wafer scanning stage and a second interferometer mirror is disposed on a second surface of the short-stroke wafer scanning stage, and a control system configured to determine a shape error for the first interferometer mirror using two or more interferometer measurements from the two or more interferometers associated with the first interferometer mirror and a shape error for the second interferometer mirror using two or more interferometer measurements from the two or more interferometers associated with the second interferometer mirror.Type: ApplicationFiled: June 10, 2013Publication date: December 26, 2013Applicant: KLA-Tencor CorporationInventors: Upendra Ummethala, Layton Hale, Josh Clyne, Samir Nayfeh, Mark Williams, Joseph A. DiRegolo, Andrew Wilson
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Publication number: 20130293865Abstract: A linear stacked stage suitable for REBL may include a first upper fast stage configured to translate a first plurality of wafers in a first direction along a first axis, the first upper fast stage configured to secure a first plurality of wafers; a second upper fast stage configured to translate a second plurality of wafers in a second direction along the first axis, the second upper fast stage configured to secure the second plurality of wafers, the second direction opposite to the first direction, wherein the translation of the first upper fast stage and the translation of the second upper fast stage are configured to substantially eliminate inertial reaction forces generated by motion of the first upper fast stage and the second upper fast stage; and a carrier stage configured to translate the first and second upper fast stages along a second axis.Type: ApplicationFiled: September 6, 2012Publication date: November 7, 2013Applicant: KLA-TENCOR CORPORATIONInventors: Upendra Ummethala, Layton Hale, Joshua Clyne, Samir Nayfeh, Mark Williams, Joseph A. Di Regolo, Andrew Wilson
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Publication number: 20130264494Abstract: A reticle positioning apparatus for actinic EUV reticle inspection including a sealed inspection chamber containing a reticle stage for holding a reticle. The reticle stage has a. magnetically suspended upper stage with a long travel in a “y” direction and a magnetically suspended lower stage with a long travel in an “x” direction; and a cable stage chamber isolated from the inspection chamber by a cable chamber wall. The cable stage chamber has a cable stage movable in the “y” direction; and a tube connected at one end to the reticle stage and to the cable stage at the other end, The tube passes from the cable stage through the inspection chamber through a seal in the chamber wail and opening into the cable entry chamber for entry of cables and hoses within the cable stage chamber, which cables and hoses pass through the tube to the reticle stage.Type: ApplicationFiled: April 9, 2013Publication date: October 10, 2013Inventors: Pradeep Subrahmanyan, Mark Williams, Samir Nayfeh
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Publication number: 20130261400Abstract: The instrument ports for introducing instruments into a surgical site that are disclosed herein include a port body having a channel running therethrough from a proximal end to a distal end, an instrument sleeve in slidable contact with the channel, creating a gap therebetween, and a fluid flow element for removing emboli efficiently from the instrument port, wherein the fluid flow element includes the gap. Disclosed fluid flow systems are for use in the disclosed instrument ports. Methods are also disclosed for removably securing an instrument sleeve to a port body by anchoring the instrument port to heart tissue, making at least one flood line in a channel, flushing out emboli, and performing surgery with the instrument port.Type: ApplicationFiled: March 11, 2013Publication date: October 3, 2013Inventors: Christopher DiBiasio, Keith Durand, Jonathan Brigham Hopkins, Zach Traina, Alexander Slocum, Samir Nayfeh, Pedro J. del Nido, Nikolay V. Vasilyev
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Publication number: 20130074564Abstract: Feeding stock used to form a tapered structure into a curving device such that each point on the stock undergoes rotational motion about a peak location of the tapered structure; and the stock meets a predecessor portion of stock along one or more adjacent edges.Type: ApplicationFiled: September 20, 2012Publication date: March 28, 2013Inventors: Eric Smith, Rosalind Takata, Alexander Slocum, Samir Nayfeh
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Patent number: 8394015Abstract: An instrument port for introducing instruments into a surgical site, including a port body having a channel running therethrough from a proximal end to a distal end, an instrument sleeve in slidable contact with the channel, creating a gap therebetween, and fluid flow for removing emboli efficiently from the instrument port, wherein the fluid flow includes the gap is provided. A fluid flow system for use in an instrument port is provided. A method of removably securing an instrument sleeve to a port body by anchoring the instrument port to heart tissue, making at least one flood line in a channel, flushing out emboli, and performing surgery with the instrument port.Type: GrantFiled: January 5, 2007Date of Patent: March 12, 2013Assignees: Children's Medical Center Corporation, Massachusetts Institute of TechnologyInventors: Christopher DiBiasio, Keith Durand, Jonathan Brigham Hopkins, Zach Traina, Alexander Slocum, Samir Nayfeh, Pedro J. Del Nido, Nikolay V. Vasilyev
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Publication number: 20120026474Abstract: An apparatus and method reduce temperature variation across a reticle so as to reduce the expansion variation of the reticle. One method for realizing reduced temperature variation is to fill an inner space with backfill gas under pressure, using distribution trenches and walls (e.g., flow restriction dams), rather than providing uniform backfill gas pressure across the entire reticle. In another method, the perimeter of inner space can be chosen to reduce the expansion variation across the reticle based on the functional relationship between expansion and temperature for the reticle material. In an optional or alternative approach, reduced temperature variation across the reticle can be obtained by selectively filling cavities in the interior of the fluid cooled chuck with backfill gas.Type: ApplicationFiled: April 29, 2011Publication date: February 2, 2012Applicant: ASML HOLDING N.V.Inventor: Samir A. NAYFEH
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Publication number: 20110013164Abstract: A lithographic apparatus is described that comprises a support structure (300) to hold an object (210). The object may be a patterning device or a substrate to be exposed. The support structure comprises a chuck (321), on which the object is supported, and an array of shear-compliant elongated elements (325) normal to the chuck and the stage (230), such that first ends of the elongated elements contact a surface of the chuck and second ends of the elongated elements contact a stage. Through using the array of elongated elements, a transfer of stress between the stage and the chuck is substantially uniform, resulting in minimization of slippage of the object relative to the surface of the chuck during a deformation of the chuck due to the stress.Type: ApplicationFiled: April 7, 2009Publication date: January 20, 2011Applicant: ASML Holding N.V.Inventors: Samir A. Nayfeh, Mark Edd Williams, Justin Matthew Verdirame
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Publication number: 20090273878Abstract: An electrostatic clamp is provided having a clamping plate, wherein the clamping plate has a central region and an annulus region. A plurality of gas supply orifices are defined in the central region of the clamping plate, wherein the plurality of gas supply orifices are in fluid communication with a pressurized gas supply, and wherein the pressurized gas supply is configured to provide a cushion of gas between the clamping surface and the workpiece in the central region of the clamping plate via the plurality of gas supply orifices. One or more gas return orifices defined in one or more of the central region and annulus region of the clamping plate, wherein the one or more gas return orifices are in fluid communication with a vacuum source, therein generally defining an exhaust path for the cushion of gas.Type: ApplicationFiled: April 30, 2008Publication date: November 5, 2009Applicant: Axcelis Technologies, Inc.Inventors: William David Lee, Marvin Raymond LaFontaine, Ashwin Madhukar Purohit, Joseph Daniel Gillespie, Donovan Beckel, Teng Chao Tao, Alexander Henry Slocum, Samir Nayfeh