Patents by Inventor Sang Choon Ko
Sang Choon Ko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20140159049Abstract: A method of manufacturing a semiconductor device includes forming devices including source, drain and gate electrodes on a front surface of a substrate including a bulk silicon, a buried oxide layer, an active silicon, a gallium nitride layer, and an aluminum-gallium nitride layer sequentially stacked, etching a back surface of the substrate to form a via-hole penetrating the substrate and exposing a bottom surface of the source electrode, conformally forming a ground interconnection on the back surface of the substrate having the via-hole, forming a protecting layer on the front surface of the substrate, and cutting the substrate to separate the devices from each other.Type: ApplicationFiled: May 30, 2013Publication date: June 12, 2014Applicant: Electronics and Telecommunications Research InstituteInventors: Sang Choon KO, Jae Kyoung Mun, Byoung-Gue Min, Young Rak Park, Hokyun Ahn, Jeong-Jin Kim, Eun Soo Nam
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Patent number: 8723222Abstract: The present disclosure relates to a nitride electronic device and a method for manufacturing the same, and particularly, to a nitride electronic device and a method for manufacturing the same that can implement various types of nitride integrated structures on the same substrate through a regrowth technology (epitaxially lateral over-growth: ELOG) of a semi-insulating gallium nitride (GaN) layer used in a III-nitride semiconductor electronic device including Group III elements such as gallium (Ga), aluminum (Al) and indium (In) and nitrogen.Type: GrantFiled: July 13, 2012Date of Patent: May 13, 2014Assignee: Electronics and Telecommunications Research InstituteInventors: Sung Bum Bae, Eun Soo Nam, Jae Kyoung Mun, Sung Bock Kim, Hae Cheon Kim, Chull Won Ju, Sang Choon Ko, Jong-Won Lim, Ho Kyun Ahn, Woo Jin Chang, Young Rak Park
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Publication number: 20140103539Abstract: A semiconductor device may include a substrate having a lower via-hole, an epitaxial layer having an opening exposing a top surface of the substrate, a semiconductor chip disposed on the top surface of the substrate and including first, second, and third electrodes, an upper metal layer connected to the first electrode, a supporting substrate disposed on the upper metal layer and having an upper via-hole, an upper pad disposed on the substrate and extending into the upper via-hole, a lower pad connected to the second electrode in the opening, and a lower metal layer covering a bottom surface of the substrate and connected to the lower pad through the lower via-hole.Type: ApplicationFiled: September 9, 2013Publication date: April 17, 2014Applicant: Electronics and Telecommunications Research InstituteInventors: Byoung-Gue MIN, Sang Choon KO, Jong-Won Lim, Hokyun AHN, Hyung Sup YOON, Jae Kyoung MUN, Eun Soo NAM
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Publication number: 20140097685Abstract: The inventive concept relates to a system supplying a constant current direct current power to serial loads connected in series with one another. The inventive concept is constituted by a constant current source power supply unit outputting a predetermined direct current, a load connection unit having the same rated current characteristic as the constant current source, a load connection unit having a rated current characteristic smaller than the constant current source, a load connection unit having a rated current characteristic greater than the constant current source, a load connection unit having a rated current characteristic greater or smaller than the constant current source and a circuit controlling or protecting them.Type: ApplicationFiled: September 27, 2013Publication date: April 10, 2014Applicant: Electronics and Telecommunications Research InstituteInventors: Yong il JUN, SANG CHOON KO, Jae Kyoung MUN, Dae Woo LEE, Kyu-Seok LEE, Ho Young KIM, Chul Won JU
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Patent number: 8664833Abstract: Disclosed are a slim self-powering power supplier using a flexible PCB for a wireless sensor network and a sensor node using the same, and a fabrication method thereof. An exemplary embodiment of the present disclosure provides a self-powering power supplier including: a flexible PCB; a lower electrode positioned on the flexible PCB; a piezoelectric body having a cantilever structure deposited on the lower electrode; and an upper electrode formed on the piezoelectric body.Type: GrantFiled: November 4, 2011Date of Patent: March 4, 2014Assignee: Electronics & Telecommunications Research InstituteInventors: Sang Choon Ko, Chi Hoon Jun
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Publication number: 20140054262Abstract: Disclosed is a piezoelectric micro energy harvester and manufacturing method thereof, the method including: forming an insulation film on a substrate; patterning the insulation film and forming an electrode pad pattern, a center electrode pattern, and a side electrode pattern; forming an open cavity at an inside of the substrate for suspension of the center electrode pattern and the side electrode pattern; disposing a conductive film on the electrode pad pattern, the center electrode pattern, and the side electrode pattern and forming electrode pads, a center electrode, and a side electrode; and forming a piezoelectric film so as to cover a space between the center electrode and the side electrode and upper surfaces of the center electrode and the side electrode.Type: ApplicationFiled: October 29, 2013Publication date: February 27, 2014Applicant: Electronics and Telecommunications Research InstituteInventors: Chi Hoon JUN, Sang Choon KO, Jong Tae MOON
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Patent number: 8598768Abstract: Disclosed is a piezoelectric micro energy harvester and manufacturing method thereof, the method including: forming an insulation film on a substrate; patterning the insulation film and forming an electrode pad pattern, a center electrode pattern, and a side electrode pattern; forming an open cavity at an inside of the substrate for suspension of the center electrode pattern and the side electrode pattern; disposing a conductive film on the electrode pad pattern, the center electrode pattern, and the side electrode pattern and forming electrode pads, a center electrode, and a side electrode; and forming a piezoelectric film so as to cover a space between the center electrode and the side electrode and upper surfaces of the center electrode and the side electrode.Type: GrantFiled: December 12, 2011Date of Patent: December 3, 2013Assignee: Electronics and Telecommunications Research InstituteInventors: Chi Hoon Jun, Sang Choon Ko, Jong Tae Moon
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Publication number: 20130069173Abstract: Disclosed are a power semiconductor device and a method of fabricating the same which can increase a breakdown voltage of the device through a field plate formed between a gate electrode and a drain electrode and achieve an easier manufacturing process at the same time. The power semiconductor device according to an exemplary embodiment of the present disclosure includes a source electrode and a drain electrode formed on a substrate; a dielectric layer formed between the source electrode and the drain electrode to have a lower height than heights of the two electrodes and including an etched part exposing the substrate; a gate electrode formed on the etched part; a field plate formed on the dielectric layer between the gate electrode and the drain electrode; and a metal configured to connect the field plate and the source electrode.Type: ApplicationFiled: August 23, 2012Publication date: March 21, 2013Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTEInventors: Woo Jin CHANG, Jong Won LIM, Ho Kyun AHN, Sang Choon KO, Sung Bum BAE, Chull Won JU, Young Rak PARK, Jae Kyoung MUN, Eun Soo NAM
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Publication number: 20130069127Abstract: A method for fabricating a field effect transistor according to an exemplary embodiment of the present disclosure includes: forming an active layer, a cap layer, an ohmic metal layer and an insulating layer on a substrate; forming multilayered photoresists on the insulating layer; patterning the multilayered photoresists to form a photoresist pattern including a first opening for gate electrode and a second opening for field electrode; etching the insulating layer by using the photoresist pattern as an etching mask so that the insulating layer in the first opening is etched more deeply and the cap layer is exposed through the first opening; etching the cap layer exposed by etching the insulating layer through the first opening to form a gate recess region; and depositing a metal on the gate recess region and the etched insulating layer to form a gate-field electrode layer.Type: ApplicationFiled: July 24, 2012Publication date: March 21, 2013Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTEInventors: Ho Kyun AHN, Jong-Won Lim, Sung Bum Bae, Sang Choon Ko, Young Rak Park, Woo Jin Chang, Jae Kyoung Mun, Eun Soo Nam, Jeong Jin Kim, Chull Won Ju
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Publication number: 20130020649Abstract: The present disclosure relates to a nitride electronic device and a method for manufacturing the same, and particularly, to a nitride electronic device and a method for manufacturing the same that can implement various types of nitride integrated structures on the same substrate through a regrowth technology (epitaxially lateral over-growth: ELOG) of a semi-insulating gallium nitride (GaN) layer used in a III-nitride semiconductor electronic device including Group III elements such as gallium (Ga), aluminum (Al) and indium (In) and nitrogen.Type: ApplicationFiled: July 13, 2012Publication date: January 24, 2013Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTEInventors: Sung Bum BAE, Eun Soo NAM, Jae Kyoung MUN, Sung Bock KIM, Hae Cheon KIM, Chull Won JU, Sang Choon KO, Jong-Won LIM, Ho Kyun AHN, Woo Jin CHANG, Young Rak PARK
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Patent number: 8319397Abstract: Provided is a small piezoelectric power generator applied to a wireless sensor network system of a tire pressure monitoring system (TPMS) for monitoring an internal environment of a tire such as variation in air pressure in the tire. In particular, when the system, in which air pressure, temperature and acceleration sensors are mounted, installed in the tire is operated in the TPMS for an automobile, a small piezoelectric power generator for the TPMS can be used as a power source in place of a conventional battery. The piezoelectric power generator includes a substrate having an electrode for transmitting power to the exterior, a metal plate formed on the substrate, and a piezoelectric body disposed on the metal plate and transmitting the power generated by a piezoelectric material to the electrode.Type: GrantFiled: August 24, 2010Date of Patent: November 27, 2012Assignee: Electronics and Telecommunications Research InstituteInventors: Sang Choon Ko, Chang Han Je, Ho Jun Ryu, Sung Sik Lee, Chi Hoon Jun
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Patent number: 8263426Abstract: Provided is a high-sensitivity MEMS-type z-axis vibration sensor, which may sense z-axis vibration by differentially shifting an electric capacitance between a doped upper silicon layer and an upper electrode from positive to negative or vice versa when center mass of a doped polysilicon layer is moved due to z-axis vibration. Particularly, since a part of the doped upper silicon layer is additionally connected to the center mass of the doped polysilicon layer, and thus an error made by the center mass of the doped polysilicon layer is minimized, it may sensitively respond to weak vibration of low frequency such as seismic waves. Accordingly, since the high-sensitivity MEMS-type z-axis vibration sensor sensitively responds to a small amount of vibration in a low frequency band, it can be applied to a seismograph sensing seismic waves of low frequency which have a very small amount of vibration and a low vibration speed.Type: GrantFiled: July 24, 2009Date of Patent: September 11, 2012Assignee: Electronics and Telecommunications Research InstituteInventors: Sang Choon Ko, Chi Hoon Jun, Byoung Gon Yu, Chang Auck Choi
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Publication number: 20120153778Abstract: Disclosed is a piezoelectric micro energy harvester and manufacturing method thereof, the method including: forming an insulation film on a substrate; patterning the insulation film and forming an electrode pad pattern, a center electrode pattern, and a side electrode pattern; forming an open cavity at an inside of the substrate for suspension of the center electrode pattern and the side electrode pattern; disposing a conductive film on the electrode pad pattern, the center electrode pattern, and the side electrode pattern and forming electrode pads, a center electrode, and a side electrode; and forming a piezoelectric film so as to cover a space between the center electrode and the side electrode and upper surfaces of the center electrode and the side electrode.Type: ApplicationFiled: December 12, 2011Publication date: June 21, 2012Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTEInventors: Chi Hoon JUN, Sang Choon KO, Jong Tae MOON
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Publication number: 20120152028Abstract: Disclosed are a slim self-powering power supplier using a flexible PCB for a wireless sensor network and a sensor node using the same, and a fabrication method thereof. An exemplary embodiment of the present disclosure provides a self-powering power supplier including: a flexible PCB; a lower electrode positioned on the flexible PCB; a piezoelectric body having a cantilever structure deposited on the lower electrode; and an upper electrode formed on the piezoelectric body.Type: ApplicationFiled: November 4, 2011Publication date: June 21, 2012Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTEInventors: Sang Choon KO, Chi Hoon Jun
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Patent number: 8047074Abstract: Provided are a humidity sensor and a method of manufacturing the same. The humidity sensor has high sensitivity, quick response time, improved temperature characteristics, low hysteresis and excellent durability. Moreover, for the humidity sensor, a humidity sensitive layer may be formed of various materials. The humidity sensor may be manufactured in a small size on a large scale.Type: GrantFiled: November 12, 2009Date of Patent: November 1, 2011Assignee: Electronics and Telecommunications Research InstituteInventors: Chi Hoon Jun, Sang Choon Ko, Chang Auck Choi, Byoung Gon Yu
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Patent number: 7963147Abstract: Provided are a micro gas sensor for measuring a gas concentration configured to achieve a high heating and cooling rate of a gas sensitive layer, achieve temperature uniformity, and achieve durability against thermal impact and mechanical impact; and a method for manufacturing the micro gas sensor. The micro gas sensor includes: a vacuum cavity disposed in a substrate; a support layer covering the vacuum cavity; a sealing layer sealing the support layer and the vacuum cavity; a micro heater disposed on the sealing layer; a plurality of electrodes disposed on the micro heater, insulated from the micro heater; and a gas sensitive layer covering the electrodes.Type: GrantFiled: December 6, 2007Date of Patent: June 21, 2011Assignee: Electronics and Telecommunications Research InstituteInventors: Chi-Hoon Jun, Sang-Choon Ko, Hyeon-Bong Pyo, Seon-Hee Park
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Publication number: 20110140578Abstract: Provided is a small piezoelectric power generator applied to a wireless sensor network system of a tire pressure monitoring system (TPMS) for monitoring an internal environment of a tire such as variation in air pressure in the tire. In particular, when the system, in which air pressure, temperature and acceleration sensors are mounted, installed in the tire is operated in the TPMS for an automobile, a small piezoelectric power generator for the TPMS can be used as a power source in place of a conventional battery. The piezoelectric power generator includes a substrate having an electrode for transmitting power to the exterior, a metal plate formed on the substrate, and a piezoelectric body disposed on the metal plate and transmitting the power generated by a piezoelectric material to the electrode.Type: ApplicationFiled: August 24, 2010Publication date: June 16, 2011Applicant: Electronics and Telecommunications Research InstituteInventors: Sang Choon Ko, Chang Han Je, Ho Jun Ryu, Sung Sik Lee, Chi Hoon Jun
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Patent number: 7879629Abstract: Provided is a method for manufacturing a floating structure of a MEMS. The method for manufacturing a floating structure of a microelectromechanical system (MEMS), comprising the steps of: a) forming a sacrificial layer including a thin layer pattern doped with impurities on a substrate; b) forming a support layer on the sacrificial layer; c) forming a structure to be floated on the support layer by using a subsequent process; d) forming an etch hole exposing both side portions of the thin layer pattern; and e) removing the sacrificial layer through the etch hole to form an air gap between the support layer and the substrate.Type: GrantFiled: October 30, 2007Date of Patent: February 1, 2011Assignee: Electronics and Telecommunications Research InstituteInventors: Sang-Choon Ko, Chi-Hoon Jun, Hyeon-Bong Pyo, Seon-Hee Park
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Patent number: 7861575Abstract: A micro gas sensor is disclosed including a substrate; an open cavity formed in the substrate; an electrode pad separation groove formed on the substrate; a first and a second electrode pads formed over the substrate and electrically insulated from each other by the electrode pad separation groove; a micro heater connected to the first electrode pad and configured of a bridge structure suspended over the open cavity; a first sensing electrode extending from the first electrode pad and suspended over the open cavity; a second sensing electrode extending from the first electrode pad and suspended over the open cavity; and a gas sensing film electrically coupled to the micro heater and filling a gap between the first and the second sensing electrodes.Type: GrantFiled: June 19, 2008Date of Patent: January 4, 2011Assignee: Electronics and Telecommunications Research InstituteInventors: Chi Hoon Jun, Sang Choon Ko, Moon Youn Jung, Seon Hee Park
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Publication number: 20100147070Abstract: Provided are a humidity sensor and a method of manufacturing the same. The humidity sensor has high sensitivity, quick response time, improved temperature characteristics, low hysteresis and excellent durability. Moreover, for the humidity sensor, a humidity sensitive layer may be formed of various materials. The humidity sensor may be manufactured in a small size on a large scale.Type: ApplicationFiled: November 12, 2009Publication date: June 17, 2010Applicant: Electronics and Telecommunications Research InstituteInventors: Chi Hoon JUN, Sang Choon Ko, Chang Auck Choi, Byoung Gon Yu