Abstract: A substrate support apparatus includes a substrate stage to support a substrate, and a ground ring assembly along a circumference of the substrate stage, the ground ring assembly including a ground ring body, the ground ring body having a plurality of recesses along a circumferential portion thereof, and a plurality of ground blocks movable to be received into respective recesses of the plurality of recesses, the plurality of ground blocks including a conductive material to be electrically grounded.

Abstract: A semiconductor manufacturing apparatus includes a loadlock module including a loadlock chamber in which a substrate container is received, wherein the loadlock module is configured to switch an internal pressure of the loadlock chamber between atmospheric pressure and a vacuum; and a transfer module configured to transfer a substrate between the substrate container received in the loadlock chamber and a process module for performing a semiconductor manufacturing process on the substrate, wherein the loadlock module includes a purge gas supply unit configured to supply a purge gas into the substrate container through a gas supply line connected to the substrate container; and an exhaust unit configured to discharge a gas in the substrate container through an exhaust line connected to the substrate container.

Abstract: An electrode structure inserting apparatus includes an electrode structure fixing unit to which the electrode structure is detachably fixed, and a vibration generator connected to the electrode structure fixing unit to vibrate the electrode structure fixing unit in an insertion direction of the electrode structure, and the electrode structure inserting apparatus inserts the invasive electrode structure into a nerve in a biological tissue.

Abstract: Disclosed is a peripheral nerve fixing apparatus, which includes: a suction unit configured to provide a negative pressure to a peripheral nerve at an end portion thereof to fix the peripheral nerve; and a negative pressure generating unit having a vacuum pump for generating a negative pressure and connected to the suction unit so that the negative pressure is provided to the suction unit, wherein at one surface of the end portion of the suction unit, the suction unit includes: a fixing unit provided to contact the peripheral nerve to keep a stable fixed state; and a suction hole formed in the fixing unit so that the negative pressure is provided to the peripheral nerve therethrough.

Abstract: Provided is a plasma processing apparatus for controlling a distribution of plasma at an edge region of a chamber during a plasma process, thereby reliably performing the plasma process on a semiconductor substrate. The plasma processing apparatus includes a chamber including an outer wall defining a reaction space and a window covering an upper portion of the outer wall; a coil antenna positioned above the window and including at least two coils; and an electrostatic chuck (ESC) positioned in a lower portion of the chamber, wherein an electrode is located inside the ESC, wherein the electrode includes a first electrode for chucking and at least one second electrode, the at least one second electrode provided at an edge of the inside of the ESC so as to have a tilt with respect to the top surface of the ESC.

Abstract: An apparatus for inserting an electrode structure into nerve in tissue of a living body includes a nerve fixing part which fixes the nerve such that at least part of the nerve is hung thereon, and an electrode structure ejector on which the electrode structure is mounted, and which moves the electrode structure in insertion direction to insert the electrode structure into the fixed part of the nerve, wherein the nerve fixing part and the electrode structure ejector are disposed on the same axis.

Abstract: A nerve probe array has a connector made of a flexible material; and a plurality of probes coupled to the connector, each of the plurality of probe having an electrode formed at a body thereof. The plurality of probes are arranged with intervals in a length direction of the connector, and the connector surrounds an outer circumference of a nerve, and the plurality of probes pierce the outer circumference of the nerve and are inserted into the nerve.

Abstract: The virtual model control system has an input device configured to provide input information for formation, movement or transformation of a virtual model; a control device configured to form the virtual model based on the input information received from the input device, move or transform the virtual model, form a plurality of physical particles at the virtual model, form contact point information therefor, and move the plurality of physical particles to update the contact point information; an output device configured to output the virtual model to the outside. When the plurality of physical particles penetrates into another virtual model in the virtual space, the control devices update the contact point information so that the penetrating physical particles are rearranged at an outer side of the another virtual model.

Abstract: A movement conversion apparatus has a frame, a plurality of auxiliary moving bodies connected to the frame to allow linear movement, a plurality of actuators configured to move the plurality of auxiliary moving bodies with respect to the frame, a main moving body surrounded by the plurality of auxiliary moving bodies and connected to the plurality of auxiliary moving bodies to have a hollow formed therein, and a rotating body rotatable on the basis of a rotary shaft fixed through the hollow. The plurality of auxiliary moving bodies are selectively moved to adjust a location of the main moving body. The rotating body is inserted into the hollow to rotate by a movement of the main moving body.

Abstract: A robot control system includes a detecting device configured to detect an obstacle, and a control device configured to control a robot by planning a driving path of the robot. The control device generates a road map space including nodes containing information about a state of the robot and edges connecting the nodes. Also, the control device checks whether the obstacle detected by the detecting device overlaps with the nodes, removes an overlapped node, generates a driving path by sampling remaining nodes and edges, and checks whether the edges of the driving path overlap with the obstacle. When there is no overlapped edge, the control device determines the driving path on the road map space to plan a path along which the robot drives without colliding with the obstacle.

Abstract: Provided are substrate processing apparatuses including a temperature measurement unit. The substrate processing apparatus comprises a chamber including a substrate processing region, a dielectric sheet that is disposed on the substrate processing region and includes an insertion hole and a temperature measurement unit that is disposed on the dielectric sheet to measure the temperature of the dielectric sheet, and has a screw portion inserted into the insertion hole, wherein each of the insertion hole and the screw portion has thread helixes meshed with each other.

Abstract: Provided are a composition including Stellera chamaejasme extract for treating wound, a method of treating wound of a subject, a cosmetic composition for wound improving, skin wrinkle improving, or skin anti-aging, and a method of cosmeticizing for wound improving, skin wrinkle improving, or skin anti-aging.

Abstract: A neural probe structure, which is fixed to a nerve to acquire an electrical signal from the nerve or apply electrical stimulation to the nerve, includes a body which is bent to enclose at least a part of circumference of the nerve, and a probe which extends longitudinally from the body and passes through the nerve, wherein the probe has electrodes. A neural probe assembly includes the neural probe structure, wherein the probe passes through the nerve and the body encloses at least a part of circumference of the nerve, so that the neural probe structure is fixed to the nerve.

Abstract: An electrode structure inserting apparatus includes an electrode structure fixing unit to which the electrode structure is detachably fixed, and a vibration generator connected to the electrode structure fixing unit to vibrate the electrode structure fixing unit in an insertion direction of the electrode structure, and the electrode structure inserting apparatus inserts the invasive electrode structure into a nerve in a biological tissue.

Abstract: Provided are a composition including Stellera chamaejasme extract for treating wound, a method of treating wound of a subject, a cosmetic composition for wound improving, skin wrinkle improving, or skin anti-aging, and a method of cosmeticizing for wound improving, skin wrinkle improving, or skin anti-aging.

Abstract: A method of processing a substrate including loading the substrate into a plasma-processing apparatus. The plasma-processing apparatus includes a focus ring. The substrate is processed in the plasma-processing apparatus using plasma. The substrate is unloaded from the plasma-processing apparatus. A layer is formed on the focus ring. The layer is formed by an in-situ process in the plasma-processing apparatus.

Abstract: Disclosed is a vibration generating method includes providing a vibration generating device which receives a driving power and generates a vibration, and controlling vibration of a vibrator of the vibration generating device, wherein the vibration of the vibrator is controlled by systematizing an inertia matrix and a stiffness matrix of the vibrator, and wherein the inertia matrix and the stiffness matrix simultaneously satisfy diagonalization. A vibration generating device using this method is also disclosed.

Abstract: A robot control system includes a detecting device configured to detect an obstacle, and a control device configured to control a robot by planning a driving path of the robot. The control device generates a road map space including nodes containing information about a state of the robot and edges connecting the nodes. Also, the control device checks whether the obstacle detected by the detecting device overlaps with the nodes, removes an overlapped node, generates a driving path by sampling remaining nodes and edges, and checks whether the edges of the driving path overlap with the obstacle. When there is no overlapped edge, the control device determines the driving path on the road map space to plan a path along which the robot drives without colliding with the obstacle.

Abstract: A movement conversion apparatus has a frame, a plurality of auxiliary moving bodies connected to the frame to allow linear movement, a plurality of actuators configured to move the plurality of auxiliary moving bodies with respect to the frame, a main moving body surrounded by the plurality of auxiliary moving bodies and connected to the plurality of auxiliary moving bodies to have a hollow formed therein, and a rotating body rotatable on the basis of a rotary shaft fixed through the hollow. The plurality of auxiliary moving bodies are selectively moved to adjust a location of the main moving body. The rotating body is inserted into the hollow to rotate by a movement of the main moving body.

Abstract: Provided are substrate processing apparatuses including a temperature measurement unit. The substrate processing apparatus comprises a chamber including a substrate processing region, a dielectric sheet that is disposed on the substrate processing region and includes an insertion hole and a temperature measurement unit that is disposed on the dielectric sheet to measure the temperature of the dielectric sheet, and has a screw portion inserted into the insertion hole, wherein each of the insertion hole and the screw portion has thread helixes meshed with each other.