Abstract: A method for forming a metal pattern in a semiconductor device includes forming an etch stop layer over a semi-finished substrate including a metal layer, forming a hard mask over the etch stop layer, etching the hard mask to form a hard mask pattern exposing the etch stop layer, and etching the etch stop layer and the metal layer using the hard mask pattern.

Abstract: A method for fabricating a semiconductor device including a first region and a second region, wherein pattern density of etch target patterns formed in the second region is lower than that of etch target patterns formed in the first region includes providing a substrate including the first region and the second region, forming an etch target layer over the substrate, forming a hard mask layer over the etch target layer, etching the hard mask layer to form a first and a second hard mask pattern in the first and the second regions, respectively, reducing a width of the second hard mask pattern formed in the second region and etching the etch target layer using the first hard mask pattern and the second hard mask pattern having the reduced width as an etch barrier to form the etch target patterns in the first and the second regions.

Abstract: An etching method in a semiconductor device includes forming a nitride-based first hard mask layer over a target etch layer, forming a carbon-based second hard mask pattern over the first hard mask layer, etching the first hard mask layer using the second hard mask pattern as an etch barrier to form a first hard mask pattern, cleaning a resultant structure including the first hard mask pattern, and etching the target etch layer using the second hard mask pattern as an etch barrier.

Abstract: A method of visual tracking with use of color includes the step of three-dimensional color modeling of the target, the step of target recognition for initially perceiving the target, and the step of visual tracking for repetitive visual tracking. In order to be robust to irregular or abrupt changes of illumination, the present invention provides a visual tracking method in which characteristics of the photographing element (CCD or CMOS) used by the camera are analyzed beforehand and the results of the analysis are modeled by a B-spline curve, allowing effects of the real-time visual tracking and adaptability to situations of rapid target movement.

Abstract: The present invention discloses a displacement measurement marker capable of measuring displacement of an object moving on a plane by using a line scan camera, and a displacement measurement method using the same. The displacement measurement marker according to the present invention comprises a plurality of repeatedly arranged figures having the same size and shape. Each of the figures is measurable by means of the line scan camera and is asymmetric with respect to a direction of a scan line of the line scan camera. Preferably, each of the figures is a right-angled triangle of which base is a horizontal line. According to the present invention, there are advantages in that a two-dimensional planar motion of the object can be measured from one-dimensional linear image data, and the motion of the object which moves at a high speed or on which an impact is exerted can be accurately measured.

Abstract: The present invention relates to a flexible and compact motor control module based on the Controller Area Network (CAN) communication network. More specifically, the present invention relates to a motor control module which is based on the ISO11898 standard Controller Area Network (CAN), recognized for its suitability in the communication of intelligent sensors and actuators, and also capable of obtaining the location, speed and torque control commands of a motor and executing digital control functions irrespective of motor's type and power consumption, transmitting feedback data.

Abstract: The present invention discloses a displacement measurement marker capable of measuring displacement of an object moving on a plane by using a line scan camera, and a displacement measurement method using the same. The displacement measurement marker according to the present invention comprises a plurality of repeatedly arranged figures having the same size and shape. Each of the figures is measurable by means of the line scan camera and is asymmetric with respect to a direction of a scan line of the line scan camera. Preferably, each of the figures is a right-angled triangle of which base is a horizontal line. According to the present invention, there are advantages in that a two-dimensional planar motion of the object can be measured from one-dimensional linear image data, and the motion of the object which moves at a high speed or on which an impact is exerted can be accurately measured.

Abstract: The present invention relates to a three-dimensional visual inspection method of semiconductor packages and apparatus using single camera, which is able to carry out a three-dimensional visual inspection of small-size, high-density semiconductor packages having a large-scale of integration by using a single camera. The present invention presents an optical system that can obtain a stereo image to extract distance information by using an LED light and a single camera, and it also presents a three-dimensional measurement/inspection method using the same.

Abstract: The present invention relates to a flexible and compact motor control module based on the Controller Area Network (CAN) communication network. More specifically, the present invention relates to a motor control module which is based on the ISO11898 standard Controller Area Network (CAN), recognized for its suitability in the communication of intelligent sensors and actuators, and also capable of obtaining the location, speed and torque control commands of a motor and executing digital control functions irrespective of motor's type and power consumption, transmitting feedback data.

Abstract: The present invention relates to a method of visual tracking with use of color. The visual tracking method according to the present invention comprise the step of 3-dimensional color modeling of the target, the step of target recognition for initially perceiving the target, and the step of visual tracking for repetitive visual tracking.