Patents by Inventor Satoshi Sakai

Satoshi Sakai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210082766
    Abstract: In a manufacturing process of a three-dimensional structure device such as a GAA type FET or a nanosheet fork type FET having stacked channels in which channels having a shape of a wire or a sheet are stacked in a direction vertical to a substrate, a work function control metal is separately formed without expanding a space between FETs having different threshold voltages. Therefore, a first step S10 of performing anisotropic etching to open the mask material 23 until the work function control metal film 22 is exposed; a second step S11 of depositing a protective film 26; a third step S12 of performing anisotropic etching to remove the protective film while remaining the protective film deposited on sidewalls of the mask material opened in the first step; and a fourth step S13 of performing isotropic etching to selectively remove the mask material between the channels relative to the protective film and the work function control metal film are executed.
    Type: Application
    Filed: September 13, 2019
    Publication date: March 18, 2021
    Applicant: Hitachi High-Tech Corporation
    Inventors: Makoto Miura, Kiyohiko Sato, Yasushi Sonoda, Satoshi Sakai
  • Patent number: 10937635
    Abstract: In a vacuum processing apparatus including: a vacuum container including a processing chamber therein; a plasma formation chamber; plate members being arranged between the processing chamber and the plasma formation chamber; and a lamp and a window member being arranged around the plate members, in order that a wafer and the plate members are heated by electromagnetic waves from the lamp, a bottom surface and a side surface of the window member is formed of a member transmitting the electromagnetic waves therethrough.
    Type: Grant
    Filed: April 9, 2019
    Date of Patent: March 2, 2021
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Yutaka Kouzuma, Satoshi Sakai, Masaru Izawa
  • Publication number: 20210039527
    Abstract: An airbag includes plural bag portions respectively including two sheet members which are attached to each other, the plural bag portions arranged to be overlapped with each other in a thickness direction of the sheet member, and a welded portion at which the sheet members being in contact with each other are attached to each other. The welded portion includes a communication hole penetrating the sheet members which are in contact with each other to communicate the bag portions which are arranged to be overlapped with each other, and a rib portion arranged radially outward of the communication hole, the rib portion protruding in the thickness direction from a welded surface of the welded portion. The rib portion includes an annular rib surrounding the communication hole, and a cutout portion provided at the annular rib.
    Type: Application
    Filed: July 24, 2020
    Publication date: February 11, 2021
    Applicant: AISIN SEIKI KABUSHIKI KAISHA
    Inventors: Satoshi MASUDA, Ryosuke Mizuno, Makoto Sakai
  • Publication number: 20210039131
    Abstract: A substrate processing apparatus includes a cover member placed to surround a substrate held by a rotary holder; a collecting member placed in an exhaust path formed between the cover member and the rotary holder; and a solvent supply placed above the collecting member and configured to supply a solvent to the collecting member. The solvent supply includes an inner storage space surrounding the substrate; an outer storage space surrounding the inner storage space; and a partition wall extending along a circumferential direction to partition the inner storage space and the outer storage space. Multiple communication holes are extended to penetrate the partition wall such that the solvent introduced into the outer storage space flows to the inner storage space. Multiple dripping holes are extended to penetrate a bottom wall of the inner storage space such that the solvent within the inner storage space drops toward the collecting member.
    Type: Application
    Filed: August 6, 2020
    Publication date: February 11, 2021
    Inventors: Satoshi Shimmura, Yuji Sakai, Kenta Shibasaki, Koji Takayanagi, Kenji Yada, Hiroichi Inada, Shinichi Seki, Kento Ogata
  • Publication number: 20210031596
    Abstract: An air discharge device includes an air discharge unit for discharging an air flow. The air discharge unit includes at least one main hole from which an air flow is blown out as a working air flow, and a separation structure configured to separate a central portion of a thickness of a velocity boundary layer of the working air flow from a center line of the main hole at a downstream side of the main hole.
    Type: Application
    Filed: October 7, 2020
    Publication date: February 4, 2021
    Inventors: Jun YAMAOKA, Masaharu SAKAI, Yuuji OKAMURA, Yasuhiko NIIMI, Takahito NAKAMURA, Yusuke KOMATSUBARA, Marie NAGAHAMA, Yasuki OMORI, Shogo HAYAKAWA, Satoshi TAKOTANI
  • Publication number: 20210016635
    Abstract: An air discharge device is configured to discharge an air flow. The air discharge device includes a main hole for discharging an air flow as a working air flow, an auxiliary hole provided around the main hole to discharge a support air flow, and a vortex suppression structure configured to suppress development of vortices generated in a velocity boundary layer of the working air flow at a downstream side of an outlet of the main hole. This vortex suppression structure is configured to make a central portion of the thickness of the velocity boundary layer of the working air flow at the downstream side of the outlet of the main hole to be closer to a mainstream of the support air flow, at the downstream side of the outlet of the main hole.
    Type: Application
    Filed: October 7, 2020
    Publication date: January 21, 2021
    Inventors: Jun YAMAOKA, Masaharu SAKAI, Yasuhiko NIIMI, Takahito NAKAMURA, Yusuke KOMATSUBARA, Marie NAGAHAMA, Yasuki OMORI, Shogo HAYAKAWA, Satoshi TAKOTANI, Yuuji OKAMURA, Tatsuya YOSHIDA
  • Publication number: 20210016634
    Abstract: An air discharge device includes a duct that defines a flow passage through which a working air flow to be discharged passes, and a hole forming member defining an air discharge hole as an outlet of the working air flow. The hole forming member has a vortex generation structure configured to generate an auxiliary vortex having a vortex characteristic including a vortex rotation direction and a vortex axis direction. The vortex characteristic of the auxiliary vortex is different from that of a lateral vortex generated by the working air flow at a downstream side of the air discharge hole. The vortex generation structure is configured in the hole forming member so that the auxiliary vortex collides with the lateral vortex in a state where at least one of the vortex rotation direction and the vortex axial direction of the vortex characteristic is different from that of the lateral vortex.
    Type: Application
    Filed: October 7, 2020
    Publication date: January 21, 2021
    Inventors: Jun YAMAOKA, Masaharu SAKAI, Yuuji OKAMURA, Shogo HAYAKAWA, Yasuki OMORI, Satoshi TAKOTANI, Takashi KANEKO, Marie NAGAHAMA, Yasuhiko NIIMI, Yusuke KOMATSUBARA, Takahito NAKAMURA
  • Patent number: 10892158
    Abstract: A manufacturing process of a semiconductor device including a SiGe channel can form a Si segregation layer for protecting the SiGe channel without damaging the SiGe channel. A manufacturing method of a semiconductor device includes: a first step for performing plasma processing on a semiconductor substrate having a silicon layer and a silicon germanium layer formed on the silicon layer under a first condition to expose the silicon germanium layer; and a second step for performing plasma processing on the semiconductor substrate under a second condition to segregate silicon on the surface of the exposed silicon germanium layer. The silicon germanium layer or layers lying adjacent to the silicon germanium layer can be etched under the first condition, hydrogen plasma processing is performed under the second condition, and the first step and the second step are executed in series in the same processing chamber of a plasma processing apparatus.
    Type: Grant
    Filed: April 1, 2019
    Date of Patent: January 12, 2021
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Makoto Miura, Yohei Ishii, Satoshi Sakai, Kenji Maeda
  • Publication number: 20200328099
    Abstract: A plasma processing apparatus includes a stage disposed in a processing chamber for mounting a wafer, a plasma generation chamber disposed above the processing chamber for plasma generation using process gas, a plate member having multiple introduction holes, made of a dielectric material, disposed above the stage and between the processing chamber and the plasma generation chamber, and a lamp disposed around the plate member for heating the wafer. The plasma processing apparatus further includes an external IR light source, an emission fiber arranged in the stage, that outputs IR light from the external IR light source toward a wafer bottom, and a light collection fiber for collecting IR light from the wafer. Data obtained using only IR light from the lamp is subtracted from data obtained also using IR light from the external IR light source during heating of the wafer. Thus, a wafer temperature is determined.
    Type: Application
    Filed: June 26, 2020
    Publication date: October 15, 2020
    Inventors: Hiroyuki KOBAYASHI, Nobuya MIYOSHI, Kazunori SHINODA, Tatehito USUI, Naoyuki KOFUJI, Yutaka KOUZUMA, Tomoyuki WATANABE, Kenetsu YOKOGAWA, Satoshi SAKAI, Masaru IZAWA
  • Publication number: 20200313583
    Abstract: A motor driving apparatus including a driving circuit for supplying a first pulse with which a first coil included in a two-phase stepping motor generates a first magnetic flux, a second pulse with which a second coil included in the stepping motor generates a second magnetic flux opposite to the first magnetic flux, a third pulse with which the first coil generates the second magnetic flux, and a fourth pulse with which the second coil generates the first magnetic flux, to the stepping motor. The driving circuit supplies the second pulse, the third pulse, and the fourth pulse in this order to the stepping motor in a state of being stopped to start the stepping motor, and supplies the first pulse, the second pulse, the third pulse, and the fourth pulse in this order to the stepping motor after starting to continuously drive the stepping motor.
    Type: Application
    Filed: February 26, 2020
    Publication date: October 1, 2020
    Inventors: Tetsuya NOBE, Satoshi SAKAI, Kazumi SAKUMOTO, Kosuke YAMAMOTO, Akihito OKUMURA
  • Publication number: 20200312658
    Abstract: A manufacturing process of a semiconductor device including a SiGe channel can form a Si segregation layer for protecting the SiGe channel without damaging the SiGe channel. A manufacturing method of a semiconductor device includes: a first step for performing plasma processing on a semiconductor substrate having a silicon layer and a silicon germanium layer formed on the silicon layer under a first condition to expose the silicon germanium layer; and a second step for performing plasma processing on the semiconductor substrate under a second condition to segregate silicon on the surface of the exposed silicon germanium layer. The silicon germanium layer or layers lying adjacent to the silicon germanium layer can be etched under the first condition, hydrogen plasma processing is performed under the second condition, and the first step and the second step are executed in series in the same processing chamber of a plasma processing apparatus.
    Type: Application
    Filed: April 1, 2019
    Publication date: October 1, 2020
    Inventors: Makoto MIURA, Yohei ISHII, Satoshi SAKAI, Kenji MAEDA
  • Publication number: 20200314293
    Abstract: This embodiment relates to a transmitter and the like that prevent an increase of the number of cables of an external interface even when the types of signals to be transmitted increase. The transmitter includes a latch circuit, an encoder, a serializer, and a selector. The latch circuit keeps a level of each of a plurality of signals at the timing specified by a sampling clock, and then, outputs the plurality of signals as a parallel data signal. The encoder generates an encoded parallel data signal based on the parallel data signal from the latch circuit. The serializer generates a serial data signal based on the encoded parallel data signal from the encoder. The sampling clock has a frequency higher than a transmission rate of the fastest signal of the plurality of signals.
    Type: Application
    Filed: March 25, 2020
    Publication date: October 1, 2020
    Applicant: THINE ELECTRONICS, INC.
    Inventors: Tomohiro SAKAI, Kazuhisa SASAKI, Satoshi MIURA, Daisuke IWAMA
  • Patent number: 10790706
    Abstract: A wireless power transmission apparatus includes a high-frequency power generator, a power-transmitting electrode, a plurality of power-receiving electrodes, a switchable matching device, a detection circuit and a controller. The high-frequency power generator generates high-frequency power. The power-transmitting electrode is configured to transmit the high-frequency power generated by the high-frequency power generator. Each of the power-receiving electrodes is capable of wirelessly receiving the high-frequency power from the power-transmitting electrode. The matching device is electrically connected with the power-transmitting electrode and includes one or more matching circuits. The detection circuit detects, based on the output of reflected power from the power-transmitting electrode, whether or not the generation of the high-frequency power by the high-frequency power generator and the transmission of the high-frequency power at the power-transmitting electrode match each other.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: September 29, 2020
    Assignees: DENSO CORPORATION, National University Corporation Toyohashi University of Technology
    Inventors: Masayoshi Sugino, Takashi Ohira, Naoki Sakai, Satoshi Kitabayashi, Motoaki Miyazaki
  • Publication number: 20200249630
    Abstract: A timepiece includes a stepping motor having a rotor and a coil, and a drive circuit that applies a first drive pulse having a stable stationary position at a rotor rotation angle of 90 degrees or less from a reference position and a second drive pulse having the stable stationary position at a rotor rotation angle of 90 degrees or more from the reference position, as a pulse for driving the rotor, to the coil. When a period during which the pulse is not applied to the coil is assumed as a waiting period, the drive circuit generates the waiting period after a first application of the second drive pulse after an application of the pulse to the coil is started and rotates the rotor by one or more turns without passing through the waiting period at at least one predetermined timing after the waiting period.
    Type: Application
    Filed: January 27, 2020
    Publication date: August 6, 2020
    Inventors: Satoshi SAKAI, Tetsuya Nobe
  • Publication number: 20200249320
    Abstract: Provided is a light emitting device including: a base material mounted on a wiring substrate; a light emitting element array provided on the base material; a first conductive pattern provided on the surface of the base material, the first conductive pattern including a first facing region connected to the light emitting element array, the first facing region being along a side surface of the light emitting element array and facing to the light emitting element array, and a first extending region extended beyond the first facing region; and penetrating members penetrating the base material from the first conductive pattern to a back surface side of the base material, each penetrating member being connected to the first facing region or the first extending region.
    Type: Application
    Filed: July 15, 2019
    Publication date: August 6, 2020
    Applicant: FUJI XEROX CO., LTD.
    Inventors: Tomoaki SAKITA, Satoshi INADA, Takeshi MINAMIRU, Daisuke IGUCHI, Kazuhiro SAKAI, Yoshinori SHIRAKAWA
  • Patent number: 10712712
    Abstract: A timepiece capable of selecting a timepiece mode and a chronograph mode includes an hour hand and a minute hand which indicate current time in a case where the timepiece mode is, selected. A main control unit performs control so as to start measuring time by simultaneously starting hand operations of the hour hand and the minute hand in a case where the chronograph mode is selected. When the hand operation of one of the hands is stopped, the control unit performs control so as to indicate the time when the hand operation of the one hand is stopped, and to continue to measure the time by continuing the hand operation of the other hand.
    Type: Grant
    Filed: January 10, 2018
    Date of Patent: July 14, 2020
    Assignee: SEIKO INSTRUMENTS INC.
    Inventors: Satoshi Sakai, Tomohiro Ihashi
  • Patent number: 10680462
    Abstract: A high frequency oscillator has a high frequency generation part, an oscillation part, a matching unit, rectification element parts and switch parts. The oscillation part oscillates high frequency power generated by the high frequency generation part. The matching unit is arranged between the high frequency generation part and the oscillation part, and has one or more capacitors and matching circuits having difference characteristics so as to perform matching between the high frequency generation part and the oscillation part. The rectification element parts and the matching circuits are arranged in one-to-one correspondence. The rectification element parts rectify high frequency power supplied from the high frequency generation part to the oscillation part. The switch part is connected to the corresponding rectification element part to switch the corresponding capacitor connected to the corresponding matching circuit through the corresponding rectification element part.
    Type: Grant
    Filed: November 21, 2018
    Date of Patent: June 9, 2020
    Assignees: DENSO CORPORATION, National University Corporation Toyohashi University of Technology
    Inventors: Masayoshi Sugino, Takashi Ohira, Naoki Sakai, Satoshi Kitabayashi, Shinji Abe
  • Patent number: 10674216
    Abstract: A graphical user interface is disclosed which achieves an easy search for a desired item. When an operation inputting section accepts a selective operation input for selection of one of plural processing functions, plural representation images individually representing plural processing object items of the processing function are displayed in an array along one direction of a display screen such that one of the representation images can be selected as a noticed representation image by an inputting operation through the operation inputting section. A decision section decides whether or not plural processing object items of the selected processing function are divided in a plurality of groups. If the processing object items are divided in groups, then the group name of the group to which the processing object item of the noticed representation image belongs is displayed in the proximity of the noticed representation image.
    Type: Grant
    Filed: February 21, 2018
    Date of Patent: June 2, 2020
    Assignee: Saturn Licensing LLC
    Inventors: Shingo Utsuki, Kazuto Nishizawa, Daisuke Inaishi, Ko Kusanagi, Hiroshi Sato, Daisuke Sato, Kenichi Moriwaki, Satoshi Kanda, Yuji Ishimura, Shimon Sakai, Masahiro Urano
  • Publication number: 20200161989
    Abstract: Provided is an actuator including: a stack including: an elastomer layer; and an elastic electrode disposed on each surface of the elastomer layer, in which the stack is subjected to a pre-strain of 50% or more at least in one direction.
    Type: Application
    Filed: December 29, 2017
    Publication date: May 21, 2020
    Applicant: Sony Corporation
    Inventors: Satoshi Nakamaru, Hiroichi Ishikawa, Kentarou Sakai, Akihiro Nakata, Kazuhiro Wakana, Yoshio Goto
  • Patent number: 10642204
    Abstract: An image forming apparatus that forms an image on a sheet includes: a rotating body that forms the image; a motor that rotationally drives the rotating body; a current measurer that measures a motor current flowing through a current supply path including a winding of the motor at a measurement timing that is a timing after the motor is started; a torque acquisitor that acquires a torque value of the motor, based on a measured value of the motor current; and a corrector that performs correction to cancel a current change amount based on a characteristic change depending on a temperature state of the motor at the measurement timing, in acquisition of the torque value by the torque acquisitor.
    Type: Grant
    Filed: January 28, 2019
    Date of Patent: May 5, 2020
    Assignee: KONICA MINOLTA, INC.
    Inventors: Katsuhide Sakai, Yasuhiro Ishihara, Satoshi Chikazawa