Abstract: In a manufacturing process of a three-dimensional structure device such as a GAA type FET or a nanosheet fork type FET having stacked channels in which channels having a shape of a wire or a sheet are stacked in a direction vertical to a substrate, a work function control metal is separately formed without expanding a space between FETs having different threshold voltages. Therefore, a first step S10 of performing anisotropic etching to open the mask material 23 until the work function control metal film 22 is exposed; a second step S11 of depositing a protective film 26; a third step S12 of performing anisotropic etching to remove the protective film while remaining the protective film deposited on sidewalls of the mask material opened in the first step; and a fourth step S13 of performing isotropic etching to selectively remove the mask material between the channels relative to the protective film and the work function control metal film are executed.

Abstract: In a vacuum processing apparatus including: a vacuum container including a processing chamber therein; a plasma formation chamber; plate members being arranged between the processing chamber and the plasma formation chamber; and a lamp and a window member being arranged around the plate members, in order that a wafer and the plate members are heated by electromagnetic waves from the lamp, a bottom surface and a side surface of the window member is formed of a member transmitting the electromagnetic waves therethrough.

Abstract: A manufacturing process of a semiconductor device including a SiGe channel can form a Si segregation layer for protecting the SiGe channel without damaging the SiGe channel. A manufacturing method of a semiconductor device includes: a first step for performing plasma processing on a semiconductor substrate having a silicon layer and a silicon germanium layer formed on the silicon layer under a first condition to expose the silicon germanium layer; and a second step for performing plasma processing on the semiconductor substrate under a second condition to segregate silicon on the surface of the exposed silicon germanium layer. The silicon germanium layer or layers lying adjacent to the silicon germanium layer can be etched under the first condition, hydrogen plasma processing is performed under the second condition, and the first step and the second step are executed in series in the same processing chamber of a plasma processing apparatus.

Abstract: A plasma processing apparatus includes a stage disposed in a processing chamber for mounting a wafer, a plasma generation chamber disposed above the processing chamber for plasma generation using process gas, a plate member having multiple introduction holes, made of a dielectric material, disposed above the stage and between the processing chamber and the plasma generation chamber, and a lamp disposed around the plate member for heating the wafer. The plasma processing apparatus further includes an external IR light source, an emission fiber arranged in the stage, that outputs IR light from the external IR light source toward a wafer bottom, and a light collection fiber for collecting IR light from the wafer. Data obtained using only IR light from the lamp is subtracted from data obtained also using IR light from the external IR light source during heating of the wafer. Thus, a wafer temperature is determined.

Abstract: A motor driving apparatus including a driving circuit for supplying a first pulse with which a first coil included in a two-phase stepping motor generates a first magnetic flux, a second pulse with which a second coil included in the stepping motor generates a second magnetic flux opposite to the first magnetic flux, a third pulse with which the first coil generates the second magnetic flux, and a fourth pulse with which the second coil generates the first magnetic flux, to the stepping motor. The driving circuit supplies the second pulse, the third pulse, and the fourth pulse in this order to the stepping motor in a state of being stopped to start the stepping motor, and supplies the first pulse, the second pulse, the third pulse, and the fourth pulse in this order to the stepping motor after starting to continuously drive the stepping motor.

Abstract: A manufacturing process of a semiconductor device including a SiGe channel can form a Si segregation layer for protecting the SiGe channel without damaging the SiGe channel. A manufacturing method of a semiconductor device includes: a first step for performing plasma processing on a semiconductor substrate having a silicon layer and a silicon germanium layer formed on the silicon layer under a first condition to expose the silicon germanium layer; and a second step for performing plasma processing on the semiconductor substrate under a second condition to segregate silicon on the surface of the exposed silicon germanium layer. The silicon germanium layer or layers lying adjacent to the silicon germanium layer can be etched under the first condition, hydrogen plasma processing is performed under the second condition, and the first step and the second step are executed in series in the same processing chamber of a plasma processing apparatus.

Abstract: A timepiece includes a stepping motor having a rotor and a coil, and a drive circuit that applies a first drive pulse having a stable stationary position at a rotor rotation angle of 90 degrees or less from a reference position and a second drive pulse having the stable stationary position at a rotor rotation angle of 90 degrees or more from the reference position, as a pulse for driving the rotor, to the coil. When a period during which the pulse is not applied to the coil is assumed as a waiting period, the drive circuit generates the waiting period after a first application of the second drive pulse after an application of the pulse to the coil is started and rotates the rotor by one or more turns without passing through the waiting period at at least one predetermined timing after the waiting period.

Abstract: A timepiece capable of selecting a timepiece mode and a chronograph mode includes an hour hand and a minute hand which indicate current time in a case where the timepiece mode is, selected. A main control unit performs control so as to start measuring time by simultaneously starting hand operations of the hour hand and the minute hand in a case where the chronograph mode is selected. When the hand operation of one of the hands is stopped, the control unit performs control so as to indicate the time when the hand operation of the one hand is stopped, and to continue to measure the time by continuing the hand operation of the other hand.

Abstract: A system for augmented reality layout includes an augmented reality layout server and an augmented reality layout device, including a processor; a non-transitory memory; an input/output; a model viewer providing two-dimensional top, three-dimensional, and augmented reality views of a design model; a model editor; a model synchronizer, which aligns and realigns the design model with a video stream of an environment; a model cache; and an object cache. Also disclosed is method for augmented reality layout including creating model outline, identifying alignment vector, creating layout, verifying design model, editing design model, and realigning design model.

Abstract: An electromagnetic device includes a coil, a fixed iron core, a movable iron core configured to reciprocate to separate from the fixed iron core by a predetermined gap when a current applied to the coil is stopped and move to the fixed iron core by an attractive force when the current is applied to the coil, and a permanent magnet. The permanent magnet is arranged so that the permanent magnet is opposed to the gap in a second direction perpendicular to a first direction and separated from the fixed iron core and the movable iron core with a space interposed therebetween. A direction of a second magnetic flux generated by the permanent magnet conforms to a direction of the first magnetic flux between opposed surfaces of the fixed iron core and the movable iron core.

Abstract: An electromagnetic device includes a fixed iron core through which a first magnetic flux flows, a movable iron core that reciprocates to separate from the fixed iron core by a predetermined gap when a current applied to a coil, which generates the first magnetic flux, is stopped and move to the fixed iron core by an attractive force when the current is applied to the coil. The electromagnetic device also includes a permanent magnet that generates a second magnetic flux. The opposed surface of the fixed iron core and the opposed surface of the movable iron core may be opposed in a reciprocating direction of the movable iron core. The permanent magnet may be attached to the fixed iron core such that a magnetized surface of the permanent magnet is opposed and exposed to the opposed surface of the movable iron core.

Abstract: An electromagnetic device includes: a coil configured to generate a first magnetic flux; a fixed member, a movable member configured to reciprocate to separate from the fixed member by a predetermined gap when a current applied to the coil is stopped and move to the fixed member by an attractive force when the current is applied to the coil; and a permanent magnet configured to generate a second magnetic flux between the respective opposed surfaces of the fixed member and the movable member in the same direction as the first magnetic flux. The permanent magnet is attached to at least one of the fixed member and the movable member such that a magnetized surface of the permanent magnet is opposed and exposed to the opposed surface of the other one of the fixed member and the movable member.

Abstract: An electromagnetic device includes a coil, a fixed member, a movable member configured to reciprocate to separate from the fixed member by a predetermined gap when a current applied to the coil is stopped and move to the fixed member by an attractive force when the current is applied to the coil, and a permanent magnet. The permanent magnet is arranged at a position adjacent to the gap and separated from the fixed member and the movable member with a space interposed therebetween. A direction of a second magnetic flux generated by the permanent magnet conforms to a direction of a first magnetic flux generated between the respective opposed surfaces of the fixed member and the movable member when the current is applied to the coil.

Abstract: A method for etching a titanium nitride film includes a first process of supplying reactive species, which include hydrogen and fluorine, to a base material including a titanium nitride film on at least a part of a surface, and a second process of vacuum-heating the base material to remove the surface reaction layer that is generated on the surface of the titanium nitride film in the first process.

Abstract: In a vacuum processing apparatus including: a vacuum container including a processing chamber therein; a plasma formation chamber; plate members being arranged between the processing chamber and the plasma formation chamber; and a lamp and a window member being arranged around the plate members, in order that a wafer and the plate members are heated by electromagnetic waves from the lamp, a bottom surface and a side surface of the window member is formed of a member transmitting the electromagnetic waves therethrough.

Abstract: A plasma processing apparatus includes a processing chamber to be depressurized in a vacuum vessel with a sidewall made of a transparent or translucent dielectric material, a stage in the processing chamber to mount a wafer thereon, a coil disposed around an outer side of the sidewall and supplied with radio-frequency power for forming plasma above the stage in the processing chamber, a lamp disposed above the coil outside the vacuum vessel which radiates light onto the wafer, and a reflector disposed the coil and reflecting light to irradiate an inside of the processing chamber.

Abstract: A power saving movement includes a center wheel and pinion driving a minute hand and minute detection wheel. A gear ratio of the center wheel/pinion with respect to the minute detection wheel is 1/M. The minute detection wheel has N minute detection portions which are disposed on the same rotation trajectory as the center wheel & pinion. N and M are integers. The minute detection wheel transmittable portions are disposed at an interval of 360°/N. A pair of the center wheel transmittable portions are disposed in parallel at an unequal angular interval of a center axle of the center wheel & pinion. An angular interval of the center wheel transmittable portions adjacent to each other in the circumferential direction of the center axle of the center wheel & pinion is set to magnification of 360°/(M×N).

Abstract: There is provided a timepiece capable of selecting a timepiece mode and a chronograph mode. The timepiece includes an hour hand and a minute hand which indicate a time in a case where the timepiece mode is selected, and a main control unit that performs control so as to start time measurement by simultaneously starting hand operations of the hour hand and the minute hand in a case where the chronograph mode is selected, to indicate a measured time at the time of stopping by stopping the hand operation of the hour hand, and to continue the time measurement by continuing the hand operation of the minute hand.

Abstract: According to one embodiment, an X-ray CT apparatus includes an X-ray source, an X-ray detector, processing circuitry, a showing device, an image processing circuit, and a gantry device. The X-ray source irradiates an object with X-rays. The X-ray detector detects X-rays radiated by the X-ray source and passed through the object. The processing circuitry sets an irradiation section, which is a moving section of the X-ray source or the X-ray detector during X-ray irradiation. The showing device displays the irradiation section. The image processing circuit generates an X-ray CT image based on data obtained by the X-ray detector during the X-ray irradiation through the irradiation section. The gantry device is provided with the X-ray source, the X-ray detector, and the showing device.

Abstract: A timepiece movement includes a center wheel & pinion that drives a minute hand, a second wheel & pinion arranged coaxially with a center axle of the center wheel & pinion, a first light emitting element arranged on one side in an axial direction of the center axle with respect to the center wheel & pinion and the second wheel & pinion, and a first light receiving element arranged on the other side in the axial direction of the center axle across the second wheel & pinion, and that detects light emitted from the first light emitting element. The center wheel & pinion has a first center wheel transmittable portion through which the light emitted from the first light emitting element is transmittable, and a second center wheel transmittable portion which is disposed on a rotation trajectory of the first center wheel transmittable portion and through which the light emitted from the first light emitting element is transmittable.