Abstract: A plasma X-ray source in which a discharge tube containing a pair of coaxial cylindrical electrodes is filled with a gas, a high voltage pulse from a charged capacitor is applied between the cylindrical electrodes to convert the gas into a plasma, the plasma is focused on a position near the end of the inner one of the cylindrical electrodes to generate X-rays, and the X-rays thus generated are emitted to the outside of the discharge tube through a window provided thereon, is disclosed. In the above X-ray source, the high voltage pulse is applied between the cylindrical electrodes so that the inner cylindrical electrode is at a negative potential with respect to the outer cylindrical electrode.

Abstract: Disclosed is a compact fluorescent lamp which comprises an airtight outer bulb filled with a rare gas and mercury; inner tube means provided within the outer bulb, said means having opening to a space of the inside of the outer bulb, and a coating formed onto at least one of an inner surface of said outer bulb and an outer surface of said inner tube means, said coating being so transparent as substantially not to scater visible rays and which consists of at least one material of an oxide and a phosphate.A compact fluorescent lamp mostly in the electric bulb shape of the present invention has been remarkably improved in the so-called lumen output maintenance without lowering of the initial lumen output.

Abstract: A high-pressure discharge lamp operating circuit performs a low-frequency AC operating at an early stage of operating and thereafter performs a high-frequency AC operation or DC operation during the steady-state of lamp operation. This circuit comprises a circuit for effecting a transition from the low-frequency AC operation to the high-frequency AC operation or DC operation either at the time which is a predetermined time period after the ignition of discharge before the high-pressure discharge lamp reaches the steady-state of operation, or after having detected at least one of predetermined lamp characteristics, thereby providing a stabilized light output.

Abstract: An apparatus according to the present invention for thin film formation using a photo-induced chemical reaction comprises a reaction chamber in which a substrate can be set, means to introduce a reactive gas into the reaction chamber for the purpose of causing a surface of the substrate to adsorb the reactive gas, means to evacuate the reaction chamber, means to irradiate the substrate surface having adsorbed the reactive gas with photon energy for the purpose of forming a nucleus required for growing a film on the substrate surface, means to generate metastable excited molecules which can react with the reactive gas to decompose it, and means to introduce the reactive gas and the metastable excited molecules into the reaction chamber for the purpose of growing the film on the substrate formed with the nucleus on the basis of the nucleus.

Abstract: A plasma X-ray source comprises inner and outer cylindrical electrodes disposed coaxially and with a certain distance with respect to each other, an electrical insulator disposed between end portions of the inner and outer cylindrical electrodes, and a discharge vessel disposed to envelop the inner and outer cylindrical electrodes. A pulse voltage is applied between the inner and outer cylindrical electrodes to produce plasma in the discharge vessel. An electrically conductive spherical shield is disposed to envelop a space where the plasma is pinched, and the spherical shield is maintained at a potential equal to that applied to the outer cylindrical electrode.

Abstract: A low-pressure mercury vapor discharge lamp in which a rare gas and mercury are provided in an outer bulb, which in turn contains therein a plurality of bent inner tubes, each having an opening at an end and an electrode at the other end thereof. A starting probe is provided between the openings in the outer bulb. An operating circuit or starter is connected to the electrodes. Further, a starting probe circuit is connected to the starting probe to apply a high voltage to the starting probe at the time of ignition.

Abstract: A method of photochemically treating a surface of a material is disclosed which includes a step of introducing a reaction gas into a reaction chamber having a substrate therein, to make the reaction gas be adsorbed on the surface of the substrate, and a step of exposing the substrate to radiation of a wavelength at which the absorption of radiation energy by the reaction gas existing in the inner space of the reaction chamber is negligibly small and the radiation energy is absorbed by the reaction gas adsorbed on the surface of the substrate, wherein the kind of the reaction gas and the wavelength of the radiation are selected so that the surface of a predetermined material forming a pattern on the substrate can be selectively treated.

Abstract: The present invention consists in a grazing incidence reflection spectrometer wherein light is caused to incide on a surface of a sample, and an intensity of light reflected from the sample surface is detected, thereby to measure an electronic absorption spectrum of a material adsorbed to the sample surface, characterized in that the incident light is visible light or ultraviolet light, and that the incident light has a predetermined glancing angle to the sample surface.

Abstract: A dry etching method according to the present invention is composed of the steps of evacuating the reaction chamber in which a substrate to be etched is set, introducing etching gas into the reaction chamber, causing the substrate to adsorb the introduced etching gas and thereafter evacuate the etching gas remaining in the reaction chamber, and irradiating the surface of the substrate to be etched with photon energy through a light window provided in the reaction chamber.

Abstract: A low-pressure mercury vapor discharge lamp comprising a glass tube in which a metal oxide or phosphate layer and then a phosphor layer are formed on its inner surface, in which during operation of the lamp, the lowest temperature of the wall of the glass tube along its discharge path is kept at 80.degree. C. or above.

Abstract: A plasma X-ray source is operable, like the plasma focus type source, to generate impulse discharge through a gas filled in a discharge tube. A relatively small amount of the gas is continuously supplied to and evacuated from the discharge tube in accordance with an occurrence frequency of discharge, without operating evacuation and filling of the gas at each cycle of discharge, under the regulation to make constant the pressure within the discharge tube, thereby eliminating the time for exchange of gas contaminated by discharge, reducing the amount of gas used, and improving reproducibility of discharge.

Abstract: A high intensity ultraviolet light-source comprises an arc tube having a pair of electrodes, filled with certain amounts of mercury, tantalum halide and rare gas, and provided with a tube loading of at least 13 Watt/cm.sup.2.

Abstract: A discharge lamp comprising an inner arc tube and an outer tube enclosing the inner tube. The outer tube is filled with neon at a pressure of 0.1 atm or more, or a gas mixture of neon in 80 pressure percent or more and breakdown suppressing gas.

Abstract: An etching apparatus according to the present invention comprises means to generate metastable excited species such as of nitrogen or rare gas molecules, means to transfer the metastable excited species into a reaction chamber in which a substrate to-be-etched is set, and means to introduce a reactive gas for etching into the reaction chamber in which the substrate to-be-etched is set; the reactive gas being activated by collision between the metastable excited species and the reactive gas so as to etch the substrate to-be-etched owing to a reaction between the activated reactive gas and the substrate to-be-etched. Further, a light source for photo-exciting the substrate to-be-etched may well be added.

Abstract: A low-pressure mercury vapor discharge lamp in which a rare gas and mercury are provided in an outer bulb, which in turn contains therein a plurality of bent inner tubes, each having an opening at an end and an electrode at the other end thereof. A starting probe is provided between the openings in the outer bulb. An operating circuit or starter is connected to the electrodes. Further, a starting probe circuit is connected to the starting probe to apply a high voltage to the starting probe at the time of ignition.

Abstract: A high pressure discharge lamp in which discharge between a pair of main electrodes in an arc tube of the discharge lamp is sustained by a D.C. or high frequency current. The circuit comprises discharge mode controller for controlling the discharge such that mainly a low-frequency discharge is produced between the main electrodes at least within a predetermined time from initiation of the discharge within the arc tube, and subsequently transferred to the D.C. or high-frequency discharge.

Abstract: A low-pressure mercury vapor discharge lamp comprising an envelope forming a gas-tight closed space and a pair of inner tubes provided in the closed space and having an end thereof sealed at the first end of the outer envelope, the other end thereof being opened into the closed space, and electrodes provided at the sealed end sides in the inner tubes. The temperature of the coldest spot of the envelope is in a range between 45.degree. C. and 65.degree. C. at an ambient temperature of 25.degree. C.

Abstract: A liquid chromatography apparatus comprises a detector part having as a light source a metal halide lamp filled with tantalum halide, mercury and rare gas.

Abstract: Disclosed is a system for controlling the temperature of an atomizer for an element analyzer, said system comprising a birefringent prism arranged on the optical axis of radiant light emitted out of the atomizer, and a light sensor for detecting the radiant light which passes through said birefringent prism.

Abstract: In measuring a change in the polarization state of light attributed to magnetooptic anisotropy, a means for generating optic anisotropy is added to a light source or onto an optical path extending from the light source to a polarization analyzer. This allows high precision analysis of the polarization state of light emergent from the polarization analyzer.