Patents by Inventor Shao-Ming Yu

Shao-Ming Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12376363
    Abstract: A semiconductor device includes a substrate having an I/O region and a core region; a first transistor in the I/O region; and a second transistor in the core region, wherein the first transistor includes a first gate structure having: an interfacial layer; a first high-k region over the interfacial layer; and a conductive layer over the first high-k region, wherein the second transistor includes a second gate structure having: the interfacial layer; a second high-k region over the interfacial layer; and the conductive layer over the second high-k region, and where in the first high-k region is thicker than the second high-k region.
    Type: Grant
    Filed: December 13, 2019
    Date of Patent: July 29, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chao-Ching Cheng, Wei-Sheng Yun, I-Sheng Chen, Shao-Ming Yu, Tzu-Chiang Chen, Chih Chieh Yeh
  • Patent number: 12349607
    Abstract: Semiconductor devices and methods of manufacturing the same are provided in which memory cells are manufactured with a double sided word line structure. In embodiments a first word line is located on a first side of the memory cells and a second word line is located on a second side of the memory cells opposite the first side.
    Type: Grant
    Filed: August 9, 2023
    Date of Patent: July 1, 2025
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tung-Ying Lee, Shao-Ming Yu, Cheng-Chun Chang
  • Patent number: 12324364
    Abstract: A memory device is provided. The memory device includes a bottom electrode, a first data storage layer, a second data storage layer, an interfacial conductive layer and a top electrode. The first data storage layer is disposed on the bottom electrode and in contact with the bottom electrode. The second data storage layer is disposed over the first data storage layer. The interfacial conductive layer is disposed between the first data storage layer and the second data storage layer. The top electrode is disposed over the second data storage layer.
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: June 3, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung-Ying Lee, Shao-Ming Yu, Kai-Tai Chang, Hung-Li Chiang, Yu-Sheng Chen
  • Patent number: 12324214
    Abstract: In some embodiments, a method for forming an integrated chip (IC) is provided. The method incudes forming an interlayer dielectric (ILD) layer over a substrate. A first opening is formed in the ILD layer and in a first region of the IC. A second opening is formed in the ILD layer and in a second region of the IC. A first high-k dielectric layer is formed lining both the first and second openings. A second dielectric layer is formed on the first high-k dielectric layer and lining the first high-k dielectric layer in both the first and second regions. The second high-k dielectric layer is removed from the first region. A conductive layer is formed over both the first and second high-k dielectric layers, where the conductive layer contacts the first high-k dielectric layer in the first region and contacts the second high-k dielectric in the second region.
    Type: Grant
    Filed: August 2, 2023
    Date of Patent: June 3, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung Ying Lee, Shao-Ming Yu, Tzu-Chung Wang
  • Patent number: 12324362
    Abstract: A method includes forming a dielectric layer over a substrate, the dielectric layer having a top surface; etching an opening in the dielectric layer; forming a bottom electrode within the opening, the bottom electrode including a barrier layer; forming a phase-change material (PCM) layer within the opening and on the bottom electrode, wherein a top surface of the PCM layer is level with or below the top surface of the dielectric layer; and forming a top electrode on the PCM layer.
    Type: Grant
    Filed: January 26, 2024
    Date of Patent: June 3, 2025
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tung Ying Lee, Yu Chao Lin, Shao-Ming Yu
  • Publication number: 20250176443
    Abstract: A memory device includes a memory cell, a protection coating, and a first sidewall spacer. The memory cell is disposed over an inter-metal dielectric (IMD) layer. The memory cell includes a bottom electrode, a top electrode and a resistance-switchable structure between the top electrode and the bottom electrode. The protection coating is on an outer sidewall of the resistance-switchable structure. The protection coating consists of a binary compound of carbon and hydrogen. The first sidewall spacer is on an outer sidewall of the protection coating. The first sidewall spacer has a greater nitrogen atomic concentration than the protection coating.
    Type: Application
    Filed: January 28, 2025
    Publication date: May 29, 2025
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Chao LIN, Yuan-Tien TU, Shao-Ming YU, Tung-Ying LEE
  • Patent number: 12317529
    Abstract: A device includes a plurality of semiconductor fins extending from a substrate. A plurality of first source/drain regions are epitaxially grown from first regions of the semiconductor fins. Adjacent two of the plurality of first source/drain regions grown from adjacent two of the plurality of semiconductor fins are spaced apart by an isolation dielectric. A gate structure laterally surrounds second regions of the plurality of semiconductor fins above the first regions of the plurality of semiconductor fins. A plurality of second source/drain regions are over third regions of the plurality of semiconductor fins above the second regions of the plurality of semiconductor fins.
    Type: Grant
    Filed: April 3, 2023
    Date of Patent: May 27, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wei-Sheng Yun, Shao-Ming Yu, Tung-Ying Lee, Chih-Chieh Yeh
  • Patent number: 12317515
    Abstract: A memory device and a semiconductor die are provided. The memory device includes single-level-cells (SLCs) and multi-level-cells (MLCs). Each of the SLCs and the MLCs includes: a phase change layer; and a first electrode, in contact with the phase change layer, and configured to provide joule heat to the phase change layer during a programming operation. The first electrode in each of the MLCs is greater in footprint area as compared to the first electrode in each of the SLCs.
    Type: Grant
    Filed: August 4, 2022
    Date of Patent: May 27, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung-Ying Lee, Shao-Ming Yu, Win-San Khwa, Yu-Chao Lin, Chien-Hsing Lee
  • Patent number: 12317761
    Abstract: A phase-change memory device and a method for fabricating the same are provided. The phase-change memory device comprises a first electrode, a stack and a multi-layered spacer. The first electrode is disposed on and electrically connected to an interconnect wiring of the interconnect structure. The stack is disposed on the first electrode and comprises a phase-change layer disposed on the first electrode and a second electrode disposed on the phase-change layer. The multi-layered spacer covers the stack. A first portion of the multi-layered spacer covers a top surface of the stack, and a second portion of the multi-layered spacer covers a sidewall of the stack.
    Type: Grant
    Filed: August 25, 2022
    Date of Patent: May 27, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shao-Ming Yu, Yu-Chao Lin, Tung-Ying Lee
  • Publication number: 20250151307
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a plurality of nanostructures over a substrate, and a gate electrode surrounding the nanostructures. The semiconductor device structure includes a source/drain (S/D) portion adjacent to the gate electrode, and an interlayer dielectric layer adjacent formed over the source/drain portion. The semiconductor device structure includes an etch stop layer adjacent between the source/drain portion and the interlayer dielectric layer, and a protective element adjacent formed over the interlayer dielectric layer.
    Type: Application
    Filed: January 13, 2025
    Publication date: May 8, 2025
    Inventors: Chao-Ching CHENG, Wei-Sheng YUN, Shao-Ming YU, Tsung-Lin LEE, Chih-Chieh YEH
  • Patent number: 12245526
    Abstract: A phase change random access memory (PCRAM) device includes a memory cell overlying an inter-metal dielectric (IMD) layer, a protection coating, and a first sidewall spacer. The memory cell includes a bottom electrode, a top electrode and a phase change element between the top electrode and the bottom electrode. The protection coating is on an outer sidewall of the phase change element. The first sidewall spacer is on an outer sidewall of the protection coating. The first sidewall spacer has a greater nitrogen atomic concentration than the protection coating. The protection coating forms a first interface with the phase change element. The first interface has a first slope at a first position and a second slope at a second position higher than the first position, the second slope is different from the first slope.
    Type: Grant
    Filed: September 27, 2023
    Date of Patent: March 4, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Chao Lin, Yuan-Tien Tu, Shao-Ming Yu, Tung-Ying Lee
  • Publication number: 20250048941
    Abstract: Provided are a memory cell and a method of forming the same. The memory cell includes a bottom electrode, an etching stop layer, a variable resistance layer, and a top electrode. The etching stop layer is disposed on the bottom electrode. The variable resistance layer is embedded in the etching stop layer and in contact with the bottom electrode. The top electrode is disposed on the variable resistance layer. A semiconductor device having the memory cell is also provided.
    Type: Application
    Filed: October 24, 2024
    Publication date: February 6, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Carlos H. Diaz, Shao-Ming Yu, Tung-Ying Lee
  • Patent number: 12218239
    Abstract: A semiconductor structure includes an isolation feature formed in the semiconductor substrate and a first fin-type active region. The first fin-type active region extends in a first direction. A dummy gate stack is disposed on an end region of the first fin-type active region. The dummy, gate stack may overlie an isolation structure. In an embodiment, any recess such as formed for a source/drain region in the first fin-type active region will be displaced from the isolation region by the distance the dummy gate stack overlaps the first fin-type active region.
    Type: Grant
    Filed: May 24, 2023
    Date of Patent: February 4, 2025
    Assignee: Mosaid Technologies Incorporated
    Inventors: Shao-Ming Yu, Chang-Yun Chang, Chih-Hao Chang, Hsin-Chih Chen, Kai-Tai Chang, Ming-Feng Shieh, Kuei-Liang Lu, Yi-Tang Lin
  • Patent number: 12199169
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a plurality of nanostructures over a substrate, and a gate electrode surrounding the nanostructures. The semiconductor device structure includes a source/drain portion adjacent to the gate electrode, and a semiconductor layer between the gate electrode and the source/drain portion.
    Type: Grant
    Filed: January 21, 2021
    Date of Patent: January 14, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chao-Ching Cheng, Wei-Sheng Yun, Shao-Ming Yu, Tsung-Lin Lee, Chih-Chieh Yeh
  • Patent number: 12165869
    Abstract: A semiconductor device includes a substrate, a first semiconductor stack including elongated semiconductor features isolated from each other and overlaid in a direction perpendicular to a top surface of the substrate, and a second semiconductor stack including elongated semiconductor features isolated from each other and overlaid in the direction perpendicular to the top surface of the substrate. The second semiconductor stack has different geometric characteristics than the first semiconductor stack. A top surface of the first semiconductor stack is coplanar with a top surface of the second semiconductor stack.
    Type: Grant
    Filed: December 30, 2019
    Date of Patent: December 10, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tung Ying Lee, Shao-Ming Yu, Wei-Sheng Yun
  • Publication number: 20240395624
    Abstract: A method of manufacturing a semiconductor device includes forming a first semiconductor layer having a first composition over a semiconductor substrate, and forming a second semiconductor layer having a second composition over the first semiconductor layer. Another first semiconductor layer having the first composition is formed over the second semiconductor layer. A third semiconductor layer having a third composition is formed over the another first semiconductor layer. The first semiconductor layers, second semiconductor layer, and third semiconductor layer are patterned to form a fin structure. A portion of the third semiconductor layer is removed thereby forming a nanowire comprising the second semiconductor layer, and a conductive material is formed surrounding the nanowire. The first semiconductor layers, second semiconductor layer, and third semiconductor layer include different materials.
    Type: Application
    Filed: July 30, 2024
    Publication date: November 28, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shao-Ming YU, Tung Ying LEE, Wei-Sheng YUN, Fu-Hsiang YANG
  • Publication number: 20240397839
    Abstract: A semiconductor structure includes a first dielectric layer, an electrode in the first dielectric layer, a second dielectric layer in the electrode, and a phase change material over the first dielectric layer, the electrode, and the second dielectric layer. According to some embodiments, an uppermost surface of the electrode is at least one of above an uppermost surface of the first dielectric layer, above an uppermost surface of the second dielectric layer, or above a lowermost surface of the phase change material.
    Type: Application
    Filed: July 31, 2024
    Publication date: November 28, 2024
    Inventors: Kerem Akarvardar, Yu Chao LIN, Wei-Sheng Yun, Shao-Ming Yu, Tzu-Chiang Chen, Tung Ying Lee
  • Patent number: 12156485
    Abstract: Provided are a memory cell and a method of forming the same. The memory cell includes a bottom electrode, an etching stop layer, a variable resistance layer, and a top electrode. The etching stop layer is disposed on the bottom electrode. The variable resistance layer is embedded in the etching stop layer and in contact with the bottom electrode. The top electrode is disposed on the variable resistance layer. A semiconductor device having the memory cell is also provided.
    Type: Grant
    Filed: January 25, 2022
    Date of Patent: November 26, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Carlos H. Diaz, Shao-Ming Yu, Tung-Ying Lee
  • Publication number: 20240381791
    Abstract: Memory stacks and method of forming the same are provided. A memory stack includes a bottom electrode layer, a top electrode layer and a phase change layer between the bottom electrode layer and the top electrode layer. A width of the top electrode layer is greater than a width of the phase change layer. A first portion of the top electrode layer uncovered by the phase change layer is rougher than a second portion of the top electrode layer covered by the phase change layer.
    Type: Application
    Filed: July 21, 2024
    Publication date: November 14, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung-Ying Lee, Shao-Ming Yu, Yu-Chao Lin
  • Patent number: 12144268
    Abstract: A semiconductor structure includes a first dielectric layer, an electrode in the first dielectric layer, a second dielectric layer in the electrode, and a phase change material over the first dielectric layer, the electrode, and the second dielectric layer. According to some embodiments, an uppermost surface of the electrode is at least one of above an uppermost surface of the first dielectric layer, above an uppermost surface of the second dielectric layer, or above a lowermost surface of the phase change material.
    Type: Grant
    Filed: February 15, 2022
    Date of Patent: November 12, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Kerem Akarvardar, Yu Chao Lin, Wei-Sheng Yun, Shao-Ming Yu, Tzu-Chiang Chen, Tung Ying Lee