Patents by Inventor Shao-Ming Yu
Shao-Ming Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12376363Abstract: A semiconductor device includes a substrate having an I/O region and a core region; a first transistor in the I/O region; and a second transistor in the core region, wherein the first transistor includes a first gate structure having: an interfacial layer; a first high-k region over the interfacial layer; and a conductive layer over the first high-k region, wherein the second transistor includes a second gate structure having: the interfacial layer; a second high-k region over the interfacial layer; and the conductive layer over the second high-k region, and where in the first high-k region is thicker than the second high-k region.Type: GrantFiled: December 13, 2019Date of Patent: July 29, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chao-Ching Cheng, Wei-Sheng Yun, I-Sheng Chen, Shao-Ming Yu, Tzu-Chiang Chen, Chih Chieh Yeh
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Patent number: 12349607Abstract: Semiconductor devices and methods of manufacturing the same are provided in which memory cells are manufactured with a double sided word line structure. In embodiments a first word line is located on a first side of the memory cells and a second word line is located on a second side of the memory cells opposite the first side.Type: GrantFiled: August 9, 2023Date of Patent: July 1, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tung-Ying Lee, Shao-Ming Yu, Cheng-Chun Chang
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Patent number: 12324364Abstract: A memory device is provided. The memory device includes a bottom electrode, a first data storage layer, a second data storage layer, an interfacial conductive layer and a top electrode. The first data storage layer is disposed on the bottom electrode and in contact with the bottom electrode. The second data storage layer is disposed over the first data storage layer. The interfacial conductive layer is disposed between the first data storage layer and the second data storage layer. The top electrode is disposed over the second data storage layer.Type: GrantFiled: June 30, 2021Date of Patent: June 3, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tung-Ying Lee, Shao-Ming Yu, Kai-Tai Chang, Hung-Li Chiang, Yu-Sheng Chen
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Patent number: 12324214Abstract: In some embodiments, a method for forming an integrated chip (IC) is provided. The method incudes forming an interlayer dielectric (ILD) layer over a substrate. A first opening is formed in the ILD layer and in a first region of the IC. A second opening is formed in the ILD layer and in a second region of the IC. A first high-k dielectric layer is formed lining both the first and second openings. A second dielectric layer is formed on the first high-k dielectric layer and lining the first high-k dielectric layer in both the first and second regions. The second high-k dielectric layer is removed from the first region. A conductive layer is formed over both the first and second high-k dielectric layers, where the conductive layer contacts the first high-k dielectric layer in the first region and contacts the second high-k dielectric in the second region.Type: GrantFiled: August 2, 2023Date of Patent: June 3, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tung Ying Lee, Shao-Ming Yu, Tzu-Chung Wang
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Patent number: 12324362Abstract: A method includes forming a dielectric layer over a substrate, the dielectric layer having a top surface; etching an opening in the dielectric layer; forming a bottom electrode within the opening, the bottom electrode including a barrier layer; forming a phase-change material (PCM) layer within the opening and on the bottom electrode, wherein a top surface of the PCM layer is level with or below the top surface of the dielectric layer; and forming a top electrode on the PCM layer.Type: GrantFiled: January 26, 2024Date of Patent: June 3, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tung Ying Lee, Yu Chao Lin, Shao-Ming Yu
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Publication number: 20250176443Abstract: A memory device includes a memory cell, a protection coating, and a first sidewall spacer. The memory cell is disposed over an inter-metal dielectric (IMD) layer. The memory cell includes a bottom electrode, a top electrode and a resistance-switchable structure between the top electrode and the bottom electrode. The protection coating is on an outer sidewall of the resistance-switchable structure. The protection coating consists of a binary compound of carbon and hydrogen. The first sidewall spacer is on an outer sidewall of the protection coating. The first sidewall spacer has a greater nitrogen atomic concentration than the protection coating.Type: ApplicationFiled: January 28, 2025Publication date: May 29, 2025Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yu-Chao LIN, Yuan-Tien TU, Shao-Ming YU, Tung-Ying LEE
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Patent number: 12317529Abstract: A device includes a plurality of semiconductor fins extending from a substrate. A plurality of first source/drain regions are epitaxially grown from first regions of the semiconductor fins. Adjacent two of the plurality of first source/drain regions grown from adjacent two of the plurality of semiconductor fins are spaced apart by an isolation dielectric. A gate structure laterally surrounds second regions of the plurality of semiconductor fins above the first regions of the plurality of semiconductor fins. A plurality of second source/drain regions are over third regions of the plurality of semiconductor fins above the second regions of the plurality of semiconductor fins.Type: GrantFiled: April 3, 2023Date of Patent: May 27, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Sheng Yun, Shao-Ming Yu, Tung-Ying Lee, Chih-Chieh Yeh
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Patent number: 12317515Abstract: A memory device and a semiconductor die are provided. The memory device includes single-level-cells (SLCs) and multi-level-cells (MLCs). Each of the SLCs and the MLCs includes: a phase change layer; and a first electrode, in contact with the phase change layer, and configured to provide joule heat to the phase change layer during a programming operation. The first electrode in each of the MLCs is greater in footprint area as compared to the first electrode in each of the SLCs.Type: GrantFiled: August 4, 2022Date of Patent: May 27, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tung-Ying Lee, Shao-Ming Yu, Win-San Khwa, Yu-Chao Lin, Chien-Hsing Lee
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Patent number: 12317761Abstract: A phase-change memory device and a method for fabricating the same are provided. The phase-change memory device comprises a first electrode, a stack and a multi-layered spacer. The first electrode is disposed on and electrically connected to an interconnect wiring of the interconnect structure. The stack is disposed on the first electrode and comprises a phase-change layer disposed on the first electrode and a second electrode disposed on the phase-change layer. The multi-layered spacer covers the stack. A first portion of the multi-layered spacer covers a top surface of the stack, and a second portion of the multi-layered spacer covers a sidewall of the stack.Type: GrantFiled: August 25, 2022Date of Patent: May 27, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shao-Ming Yu, Yu-Chao Lin, Tung-Ying Lee
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Publication number: 20250151307Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a plurality of nanostructures over a substrate, and a gate electrode surrounding the nanostructures. The semiconductor device structure includes a source/drain (S/D) portion adjacent to the gate electrode, and an interlayer dielectric layer adjacent formed over the source/drain portion. The semiconductor device structure includes an etch stop layer adjacent between the source/drain portion and the interlayer dielectric layer, and a protective element adjacent formed over the interlayer dielectric layer.Type: ApplicationFiled: January 13, 2025Publication date: May 8, 2025Inventors: Chao-Ching CHENG, Wei-Sheng YUN, Shao-Ming YU, Tsung-Lin LEE, Chih-Chieh YEH
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Patent number: 12245526Abstract: A phase change random access memory (PCRAM) device includes a memory cell overlying an inter-metal dielectric (IMD) layer, a protection coating, and a first sidewall spacer. The memory cell includes a bottom electrode, a top electrode and a phase change element between the top electrode and the bottom electrode. The protection coating is on an outer sidewall of the phase change element. The first sidewall spacer is on an outer sidewall of the protection coating. The first sidewall spacer has a greater nitrogen atomic concentration than the protection coating. The protection coating forms a first interface with the phase change element. The first interface has a first slope at a first position and a second slope at a second position higher than the first position, the second slope is different from the first slope.Type: GrantFiled: September 27, 2023Date of Patent: March 4, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yu-Chao Lin, Yuan-Tien Tu, Shao-Ming Yu, Tung-Ying Lee
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Publication number: 20250048941Abstract: Provided are a memory cell and a method of forming the same. The memory cell includes a bottom electrode, an etching stop layer, a variable resistance layer, and a top electrode. The etching stop layer is disposed on the bottom electrode. The variable resistance layer is embedded in the etching stop layer and in contact with the bottom electrode. The top electrode is disposed on the variable resistance layer. A semiconductor device having the memory cell is also provided.Type: ApplicationFiled: October 24, 2024Publication date: February 6, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Chao Lin, Carlos H. Diaz, Shao-Ming Yu, Tung-Ying Lee
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Patent number: 12218239Abstract: A semiconductor structure includes an isolation feature formed in the semiconductor substrate and a first fin-type active region. The first fin-type active region extends in a first direction. A dummy gate stack is disposed on an end region of the first fin-type active region. The dummy, gate stack may overlie an isolation structure. In an embodiment, any recess such as formed for a source/drain region in the first fin-type active region will be displaced from the isolation region by the distance the dummy gate stack overlaps the first fin-type active region.Type: GrantFiled: May 24, 2023Date of Patent: February 4, 2025Assignee: Mosaid Technologies IncorporatedInventors: Shao-Ming Yu, Chang-Yun Chang, Chih-Hao Chang, Hsin-Chih Chen, Kai-Tai Chang, Ming-Feng Shieh, Kuei-Liang Lu, Yi-Tang Lin
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Patent number: 12199169Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a plurality of nanostructures over a substrate, and a gate electrode surrounding the nanostructures. The semiconductor device structure includes a source/drain portion adjacent to the gate electrode, and a semiconductor layer between the gate electrode and the source/drain portion.Type: GrantFiled: January 21, 2021Date of Patent: January 14, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chao-Ching Cheng, Wei-Sheng Yun, Shao-Ming Yu, Tsung-Lin Lee, Chih-Chieh Yeh
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Patent number: 12165869Abstract: A semiconductor device includes a substrate, a first semiconductor stack including elongated semiconductor features isolated from each other and overlaid in a direction perpendicular to a top surface of the substrate, and a second semiconductor stack including elongated semiconductor features isolated from each other and overlaid in the direction perpendicular to the top surface of the substrate. The second semiconductor stack has different geometric characteristics than the first semiconductor stack. A top surface of the first semiconductor stack is coplanar with a top surface of the second semiconductor stack.Type: GrantFiled: December 30, 2019Date of Patent: December 10, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tung Ying Lee, Shao-Ming Yu, Wei-Sheng Yun
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Publication number: 20240395624Abstract: A method of manufacturing a semiconductor device includes forming a first semiconductor layer having a first composition over a semiconductor substrate, and forming a second semiconductor layer having a second composition over the first semiconductor layer. Another first semiconductor layer having the first composition is formed over the second semiconductor layer. A third semiconductor layer having a third composition is formed over the another first semiconductor layer. The first semiconductor layers, second semiconductor layer, and third semiconductor layer are patterned to form a fin structure. A portion of the third semiconductor layer is removed thereby forming a nanowire comprising the second semiconductor layer, and a conductive material is formed surrounding the nanowire. The first semiconductor layers, second semiconductor layer, and third semiconductor layer include different materials.Type: ApplicationFiled: July 30, 2024Publication date: November 28, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shao-Ming YU, Tung Ying LEE, Wei-Sheng YUN, Fu-Hsiang YANG
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Publication number: 20240397839Abstract: A semiconductor structure includes a first dielectric layer, an electrode in the first dielectric layer, a second dielectric layer in the electrode, and a phase change material over the first dielectric layer, the electrode, and the second dielectric layer. According to some embodiments, an uppermost surface of the electrode is at least one of above an uppermost surface of the first dielectric layer, above an uppermost surface of the second dielectric layer, or above a lowermost surface of the phase change material.Type: ApplicationFiled: July 31, 2024Publication date: November 28, 2024Inventors: Kerem Akarvardar, Yu Chao LIN, Wei-Sheng Yun, Shao-Ming Yu, Tzu-Chiang Chen, Tung Ying Lee
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Patent number: 12156485Abstract: Provided are a memory cell and a method of forming the same. The memory cell includes a bottom electrode, an etching stop layer, a variable resistance layer, and a top electrode. The etching stop layer is disposed on the bottom electrode. The variable resistance layer is embedded in the etching stop layer and in contact with the bottom electrode. The top electrode is disposed on the variable resistance layer. A semiconductor device having the memory cell is also provided.Type: GrantFiled: January 25, 2022Date of Patent: November 26, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Chao Lin, Carlos H. Diaz, Shao-Ming Yu, Tung-Ying Lee
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Publication number: 20240381791Abstract: Memory stacks and method of forming the same are provided. A memory stack includes a bottom electrode layer, a top electrode layer and a phase change layer between the bottom electrode layer and the top electrode layer. A width of the top electrode layer is greater than a width of the phase change layer. A first portion of the top electrode layer uncovered by the phase change layer is rougher than a second portion of the top electrode layer covered by the phase change layer.Type: ApplicationFiled: July 21, 2024Publication date: November 14, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tung-Ying Lee, Shao-Ming Yu, Yu-Chao Lin
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Patent number: 12144268Abstract: A semiconductor structure includes a first dielectric layer, an electrode in the first dielectric layer, a second dielectric layer in the electrode, and a phase change material over the first dielectric layer, the electrode, and the second dielectric layer. According to some embodiments, an uppermost surface of the electrode is at least one of above an uppermost surface of the first dielectric layer, above an uppermost surface of the second dielectric layer, or above a lowermost surface of the phase change material.Type: GrantFiled: February 15, 2022Date of Patent: November 12, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Kerem Akarvardar, Yu Chao Lin, Wei-Sheng Yun, Shao-Ming Yu, Tzu-Chiang Chen, Tung Ying Lee