Patents by Inventor Shaofeng Yu

Shaofeng Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070037342
    Abstract: The present invention provides a method of fabricating a microelectronics device. In one aspect, the method comprises forming a capping layer 610 over gate structures 230 located over a microelectronics substrate 210 wherein the gate structures 230 include sidewall spacers 515 and have a doped region 525 located between them. A protective layer 710 is placed over the capping layer 610 and the doped region 525, and a portion of the protective layer 710 and capping layer 610 that are located over the gate structures are removed to expose a top surface of the gate structures 230. A remaining portion of the protective layer 710 and capping layer 610 remains over the doped region 525. With the top surface of the gate structures 230 exposed, metal is incorporated into the gate structures to form gate electrodes 230.
    Type: Application
    Filed: August 11, 2005
    Publication date: February 15, 2007
    Applicant: Texas Instruments, Incorporated
    Inventors: Freidoon Mehrad, Shaofeng Yu, Joe Tran
  • Patent number: 7157358
    Abstract: The present invention provides a method for manufacturing a semiconductor device and a method for manufacturing an integrated circuit including the semiconductor device. The method for manufacturing the semiconductor device, among other possible steps, forming a polysilicon gate electrode (250) over a substrate (210) and forming a protective layer (260) over the polysilicon gate electrode (250) to provide a capped polysilicon gate electrode (230). The method further includes forming a protective oxide (510) on a surface proximate the polysilicon gate electrode (250), and removing the protective oxide (510) using a wet etch, the wet etch not having a substantial impact on the protective layer (260).
    Type: Grant
    Filed: July 2, 2004
    Date of Patent: January 2, 2007
    Assignee: Texas Instruments Incorporated
    Inventors: Lindsey Hall, Haowen Bu, Shaofeng Yu
  • Patent number: 7148143
    Abstract: The present invention provides a semiconductor device, a method of manufacture therefor, and a method for manufacturing an integrated circuit. The semiconductor device (100), among other possible elements, includes a silicided gate electrode (150) located over a substrate (110), the silicided gate electrode (150) having gate sidewall spacers (160) located on sidewalls thereof. The semiconductor device (100) further includes source/drain regions (170) located in the substrate (110) proximate the silicided gate electrode (150), and silicided source/drain regions (180) located in the source/drain regions (170) and at least partially under the gate sidewall spacers (160).
    Type: Grant
    Filed: March 24, 2004
    Date of Patent: December 12, 2006
    Assignee: Texas Instruments Incorporated
    Inventors: Haowen Bu, Jiong-Ping Lu, Shaofeng Yu, Ping Jiang, Clint Montgomery
  • Patent number: 7148097
    Abstract: A method for manufacturing an integrated circuit 10 having transistors 20, 30 of two threshold voltages where protected transistor stacks 270 have a gate protection layer 220 that are formed with the use of a single additional mask step. Also, an integrated circuit 10 having at least one polysilicon gate transistor 20 and at least one FUSI metal gate transistor 30.
    Type: Grant
    Filed: March 7, 2005
    Date of Patent: December 12, 2006
    Assignee: Texas Instruments Incorporated
    Inventors: Shaofeng Yu, Benjamin P. McKee
  • Publication number: 20060263924
    Abstract: A photosensitive device for enabling high speed detection of electromagnetic radiation. The device includes recessed electrodes for providing a generally homogeneous electric field in an active region. Carriers generated in the active region are detected using the recessed electrodes.
    Type: Application
    Filed: July 31, 2006
    Publication date: November 23, 2006
    Inventors: Miriam Reshotko, Shaofeng Yu, Bruce Block
  • Publication number: 20060199324
    Abstract: A method for manufacturing an integrated circuit 10 having transistors 20, 30 of two threshold voltages where protected transistor stacks 270 have a gate protection layer 220 that are formed with the use of a single additional mask step. Also, an integrated circuit 10 having at least one polysilicon gate transistor 20 and at least one FUSI metal gate transistor 30.
    Type: Application
    Filed: March 7, 2005
    Publication date: September 7, 2006
    Inventors: Shaofeng Yu, Benjamin McKee
  • Patent number: 7084471
    Abstract: A photosensitive device for enabling high speed detection of electromagnetic radiation. The device includes recessed electrodes for providing a generally homogeneous electric field in an active region. Carriers generated in the active region are detected using the recessed electrodes.
    Type: Grant
    Filed: May 4, 2005
    Date of Patent: August 1, 2006
    Assignee: Intel Corporation
    Inventors: Miriam R. Reshotko, Shaofeng Yu, Bruce A. Block
  • Publication number: 20060134844
    Abstract: A method for making PMOS and NMOS transistors 60, 70 on a semiconductor substrate 20 that includes having a gate protection layer 210 over the gate electrode layer 110 during the formation of source/drain silicides 120. The method may include implanting dopants into a gate polysilicon layer 115 before forming the protection layer 215.
    Type: Application
    Filed: December 20, 2004
    Publication date: June 22, 2006
    Inventors: Jiong-Ping Lu, Shaofeng Yu, Haowen Bu, Lindsey Hall, Mark Visokay
  • Publication number: 20060121713
    Abstract: The present invention provides a method for manufacturing a semiconductor device and a method for manufacturing an integrated circuit. The method for manufacturing the semiconductor device, among other steps, includes providing a capped polysilicon gate electrode (290) over a substrate (210), the capped polysilicon gate electrode (290) including a buffer layer (260) located between a polysilicon gate electrode layer (250) and a protective layer (270). The method further includes forming source/drain regions (710) in the substrate (210) proximate the capped polysilicon gate electrode (290), removing the protective layer (270) and the buffer layer (260), and siliciding the polysilicon gate electrode layer (250) to form a silicided gate electrode (1110).
    Type: Application
    Filed: December 8, 2004
    Publication date: June 8, 2006
    Applicant: Texas Instruments, Inc.
    Inventors: Shaofeng Yu, Haowen Bu, Jiong-Ping Lu, Lindsey Hall
  • Publication number: 20060040462
    Abstract: A technique is disclosed for increasing the width of a transistor (300) while the transistor itself may be scaled down. The transistor width (382) is increased by forming recesses (352) within shallow trench isolation (STI) regions (328) adjacent to the transistor (300). The recesses (352) provide an area that wraps around the transistor and thereby increases the width (382) of the transistor (300). This wraparound area provides additional space for dopant atom deposition, which facilitates a reduction in random dopant fluctuation (RDF). In this manner, transistors formed in accordance with one or more aspects of the present invention, may yield improved performance when incorporated into SRAM since the probability that such transistors will be more closely matched is increased.
    Type: Application
    Filed: August 19, 2004
    Publication date: February 23, 2006
    Inventors: Zhiqiang Wu, Shaofeng Yu, C. Cleavelin
  • Publication number: 20050274978
    Abstract: Strained Si/strained SiGe dual-channel layer substrate provides mobility advantage and when used as a CMOS substrate enables single workfunction metal-gate electrode technology. A single metal electrode with workfunction of 4.5 eV produces near ideal CMOS performance on a dual-channel layer substrate that consists sequentially of a silicon wafer, an epitaxially grown 30% Ge relaxed SiGe layer, a compressively strained 60% Ge layer, and a tensile-strained Si cap layer.
    Type: Application
    Filed: May 26, 2005
    Publication date: December 15, 2005
    Inventors: Dimitri Antoniadis, Judy Hoyt, Jongwan Jung, Shaofeng Yu
  • Publication number: 20050215055
    Abstract: The present invention provides a semiconductor device, a method of manufacture therefor, and a method for manufacturing an integrated circuit. The semiconductor device (100), among other possible elements, includes a silicided gate electrode (150) located over a substrate (110), the silicided gate electrode (150) having gate sidewall spacers (160) located on sidewalls thereof. The semiconductor device (100) further includes source/drain regions (170) located in the substrate (110) proximate the silicided gate electrode (150), and silicided source/drain regions (180) located in the source/drain regions (170) and at least partially under the gate sidewall spacers (160).
    Type: Application
    Filed: March 24, 2004
    Publication date: September 29, 2005
    Applicant: Texas Instruments, Incorporated
    Inventors: Haowen Bu, Jiong-Ping Lu, Shaofeng Yu, Ping Jiang, Clint Montgomery
  • Publication number: 20050215038
    Abstract: The present invention provides a method for manufacturing a semiconductor device and a method for manufacturing an integrated circuit including the semiconductor device. The method for manufacturing the semiconductor device, among other possible steps, forming a polysilicon gate electrode (250) over a substrate (210) and forming a protective layer (260) over the polysilicon gate electrode (250) to provide a capped polysilicon gate electrode (230). The method further includes forming a protective oxide (510) on a surface proximate the polysilicon gate electrode (250), and removing the protective oxide (510) using a wet etch, the wet etch not having a substantial impact on the protective layer (260).
    Type: Application
    Filed: July 2, 2004
    Publication date: September 29, 2005
    Applicant: Texas Instruments, Incorporated
    Inventors: Lindsey Hall, Haowen Bu, Shaofeng Yu
  • Publication number: 20050215037
    Abstract: The present invention provides a method for manufacturing a semiconductor device and a method for manufacturing an integrated circuit including the semiconductor device. The method for manufacturing the semiconductor device (100), among other possible steps, includes forming a polysilicon gate electrode over a substrate (110) and forming source/drain regions (170) in the substrate (110) proximate the polysilicon gate electrode. The method further includes forming a blocking layer (180) over the source/drain regions (170), the blocking layer (180) comprising a metal silicide, and siliciding the polysilicon gate electrode to form a silicided gate electrode (150).
    Type: Application
    Filed: March 26, 2004
    Publication date: September 29, 2005
    Applicant: Texas Instruments, Incorporated
    Inventors: Jiong-Ping Lu, Haowen Bu, Shaofeng Yu, Ping Jiang
  • Publication number: 20050202312
    Abstract: A photosensitive device for enabling high speed detection of electromagnetic radiation. The device includes recessed electrodes for providing a generally homogeneous electric field in an active region. Carriers generated in the active region are detected using the recessed electrodes.
    Type: Application
    Filed: May 4, 2005
    Publication date: September 15, 2005
    Inventors: Miriam Reshotko, Shaofeng Yu, Bruce Block
  • Publication number: 20050145944
    Abstract: Various embodiments of the invention relate to a PMOS device having a transistor channel of silicon germanium material on a substrate, a gate dielectric having a dielectric constant greater than that of silicon dioxide on the channel, a gate electrode conductor material having a work function in a range between a valence energy band edge and a conductor energy band edge for silicon on the gate dielectric, and a gate electrode semiconductor material on the gate electrode conductor material.
    Type: Application
    Filed: December 24, 2003
    Publication date: July 7, 2005
    Inventors: Anand Murthy, Boyan Boyanov, Suman Datta, Brian Doyle, Been-Yih Jin, Shaofeng Yu, Robert Chau
  • Patent number: 6903432
    Abstract: A photosensitive device for enabling high speed detection of electromagnetic radiation. The device includes recessed electrodes for providing a generally homogeneous electric field in an active region. Carriers generated in the active region are detected using the recessed electrodes.
    Type: Grant
    Filed: February 13, 2003
    Date of Patent: June 7, 2005
    Assignee: Intel Corporation
    Inventors: Miriam R. Reshotko, Shaofeng Yu, Bruce A. Block
  • Publication number: 20040159899
    Abstract: A photosensitive device for enabling high speed detection of electromagnetic radiation. The device includes recessed electrodes for providing a generally homogeneous electric field in an active region. Carriers generated in the active region are detected using the recessed electrodes.
    Type: Application
    Filed: February 13, 2003
    Publication date: August 19, 2004
    Applicant: Intel Corporation
    Inventors: Miriam R. Reshotko, Shaofeng Yu, Bruce A. Block
  • Publication number: 20030131044
    Abstract: In one embodiment of the invention, a Peer-to-Peer (P2P) subsystem includes a cache of a current peer and a peer locator. The current peer is in a current ring at a current level. The cache stores information of ring peers within the current ring. The current ring is part of a hierarchical ring structure of P2P nodes. The hierarchical ring structure has at least one of a lower level and a upper level. The peer locator locates a target peer in the cache in response to a request.
    Type: Application
    Filed: January 4, 2002
    Publication date: July 10, 2003
    Inventors: Gururaj Nagendra, Shaofeng Yu
  • Publication number: 20030126199
    Abstract: A peer-to-peer network communication method is disclosed. When a server is active in the network, the server is queried for information about a desired peer. When the server is not active in the network, neighbor peers are queried for information about the desired peer.
    Type: Application
    Filed: January 2, 2002
    Publication date: July 3, 2003
    Inventors: Seemab Aslam Kadri, Shaofeng Yu