Abstract: An internal combustion engine fluidly coupled to an exhaust aftertreatment system includes a particulate filter device, a first selective catalytic reduction device disposed upstream relative to a second selective catalytic reduction device, and an injection system disposed to inject a reductant into the exhaust gas feedstream upstream relative to the first selective catalytic reduction device. A method for controlling the internal combustion engine includes monitoring engine operation, and determining an amount of particulate matter stored on the particulate filter based thereon. An amount of reductant stored on the second selective catalytic reduction device and operating conditions associated with the exhaust aftertreatment system are also determined.

Abstract: Disclosed are methods and apparatus for measuring a characteristics of a through-silicon via (TSV) structure. A beam profile reflectivity (BPR) tool is used to move to a first xy position having a TSV structure. The BPR tool is then used to obtain an optimum focus of at the first xy position by adjusting the z position to a first optimum z position for obtaining measurements at the first xy position. Via the BPR tool, reflectivity measurements for a plurality of angles of incidence are obtained at the first xy position. One or more film thicknesses for the TSV structure are determined based on the reflectivity measurements. A z position can also be recorded and used to determine a height of such TSV structure, as well as one or more adjacent xy positions.

Abstract: An internal combustion engine is described in conjunction with a method for dynamically determining a mass flow rate of nitrogen oxides (NOx) for its exhaust gas feedstream. The method includes determining a present engine operating point and determining a reference NOx content for a reference engine operating point. A combustion chemical reaction rate is determined based upon the present engine operating point and the reference engine operating point. A NOx content in the exhaust gas feedstream is dynamically determined during operation of the internal combustion engine based upon the reference NOx content, the combustion chemical reaction rate and a combustion mixing rate constant.

Abstract: A system according to the present disclosure includes a model predictive control (MPC) module and an actuator module. The MPC module generates a set of possible target values for an actuator of an engine and predicts an operating parameter for the set of possible target values. The predicted operating parameter includes an emission level and/or an operating parameter of an exhaust system. The MPC module determines a cost for the set of possible target values and selects the set of possible target values from multiple sets of possible target values based on the cost. The MPC module determines whether the predicted operating parameter for the selected set satisfies a constraint and sets target values to the possible target values of the selected set when the predicted operating parameter satisfies the constraint. The actuator module controls an actuator of an engine based on at least one of the target values.

Abstract: A system includes a target generating module, a model predictive control (MPC) module, and an actuator module. The target generating module generates a target value for an actuator of an engine. The MPC module generates a set of possible adjustments to the target value and predicts an operating parameter for the set of possible adjustments. The predicted operating parameter includes an emission level and/or an operating parameter of an exhaust system. The MPC module determines a cost for the set of possible adjustments and selects the set of possible adjustments from multiple sets of possible adjustments based on the cost. The MPC module determines whether the predicted operating parameter for the selected set satisfies a constraint and adjusts the target value using the possible adjustments of the selected set when the predicted operating parameter satisfies the constraint. The actuator module controls the actuator based on the target value as adjusted.

Abstract: A system determines a value, such as a thickness, surface roughness, material concentration, and/or critical dimension, of a layer on a wafer based on normalized signals and reflected total intensities. A light source directs a beam at a surface of the wafer. A sensor receives the reflected beam and provides at least a pair of polarization channels. The signals from the polarization channels are received by a controller, which normalizes a difference between a pair of the signals to generate the normalized result. The value of the wafer is determined through analyzing the signal with a modeling of the system.

Abstract: An exhaust system for a lean-burn internal combustion engine is described, and includes an injection system for injecting reductant into an exhaust gas feedstream upstream of a selective catalytic reduction device (SCR). A control method for controlling the injection system includes determining an upstream NOx gas concentration upstream of the SCR device, determining a measured downstream NOx gas concentration based upon a signal output from a sensor configured to monitor NOx gas concentration downstream of the SCR device, and determining an estimated downstream NOx gas concentration based upon an executable model. A first correlation between the upstream NOx gas concentration and the measured downstream NOx gas concentration is determined, and a second correlation between the upstream NOx gas concentration and the estimated downstream NOx gas concentration is determined. The reductant injection is controlled based upon the first and second correlations.

Abstract: An engine assembly includes an intake manifold and a manifold absolute pressure sensor configured to generate a current measured manifold absolute pressure (MAPM) signal for the intake manifold. The assembly includes a throttle valve adjustable to control airflow to the intake manifold and a throttle position sensor configured to generate a current measured throttle position (TPM) signal. A controller is operatively connected to the throttle valve and the manifold absolute pressure sensor and has a processor and tangible, non-transitory memory on which is recorded instructions for executing a method for determining a predicted manifold absolute pressure (MAPP). Execution of the instructions by the processor causes the controller to determine the predicted manifold absolute pressure (MAPP) based at least partially on a predicted throttle flow (TFP) and the current measured manifold absolute pressure (MAPM) signal.

Abstract: Photoreflectance spectroscopy is used to measure strain at or near the edge of a wafer in a production process. The strain measurement is used to anticipate defects and make prospective corrections in later stages of the production process. Strain measurements are used to associate various production steps with defects to enhance later production processes.

Abstract: A method for improving computation efficiency for diffraction signals in optical metrology is described. The method includes simulating a set of diffraction orders for a three-dimensional structure. The diffraction orders within the set of diffraction orders are then prioritized. The set of diffraction orders is truncated to provide a truncated set of diffraction orders based on the prioritizing. Finally, a simulated spectrum is provided based on the truncated set of diffraction orders.

Abstract: A system includes a first beam splitter, a second beam splitter, and a mirror. The second beam splitter can produce two lines of light, which are received by at least one sensor. The two lines of light have different focal heights on the wafer. A distance between the second beam splitter and the mirror can be configured to change a focal height on the wafer. A height of an illuminated region on a surface of the wafer relative to a normal surface of the wafer can be determined using the two lines of light.

Abstract: A system that can be used for used for semiconductor height inspection and metrology includes a complementary plate that is used with a beam splitter to create desired astigmatism and to remove chromatic aberration. Simultaneous optimization of lateral resolution and sensitivity can be enabled. The complementary plate can be made of the same material and have the same thickness as the beam splitter.

Abstract: A method for controlling a selective catalytic reduction device in an exhaust aftertreatment system of a vehicle includes monitoring vehicle connectivity information, and controlling ammonia storage in the selective catalytic reduction device based on the monitored vehicle connectivity information. Vehicle connectivity information is used to predict vehicle operating conditions along an estimated path of vehicle travel. The predicted vehicle operating conditions are used to predict profiles for vehicle exhaust gas parameters. Predicted profiles for exhaust gas parameters are used in determining ammonia storage setpoints for the selective catalytic reduction device. The ammonia storage setpoints are use in regulating an amount of ammonia producing dosing agent injected into the exhaust aftertreatment system, thereby controlling ammonia storage in the selective catalytic reduction device.

Abstract: Disclosed are apparatus and methods for determining height of a semiconductor structure. The system includes an illumination module for directing one or more source lines or points towards a specimen having multiple surfaces at different relative heights and a collection module for detecting light reflected from the surfaces. The collection module contains at least two detectors with one slit or pinhole in front of each detector that that are positioned to receive light reflected from one of the surfaces. A first detector receives reflected light from a slit or pinhole that is positioned before a focal point, and a second detector receive reflected light from a slit or pinhole that is positioned after the focal point so that the first and second detector receive light having different intensity values unless the surface is at an optimum focus. The system includes a processor system for determining a height based on the detected light received by the detectors from two of the surfaces.

Abstract: A method to determine a rotational position of a phaser for variable phasing system including a low-resolution rotational position sensing system includes estimating a rotational position of the phaser based upon a time interval between occurrence of a measured position of the phaser and a present periodic timepoint, a commanded position of the phaser, said measured position of the phaser, and a time constant of the variable phasing system when the occurrence of the measured position of the phaser is subsequent to a preceding periodic timepoint occurring at a set time interval prior to the present periodic timepoint.

Abstract: An internal combustion engine is described in conjunction with a method for dynamically determining a mass flow rate of nitrogen oxides (NOx) for its exhaust gas feedstream. The method includes determining a present engine operating point and determining a reference NOx content for a reference engine operating point. A combustion chemical reaction rate is determined based upon the present engine operating point and the reference engine operating point. A NOx content in the exhaust gas feedstream is dynamically determined during operation of the internal combustion engine based upon the reference NOx content, the combustion chemical reaction rate and a combustion mixing rate constant.

Abstract: A system includes a turbocharged engine, sensors, and a controller. The engine includes an engine intake manifold, air intake manifold, a compressor, a first aftercooler device, a throttle that admits cooled compressed air to the engine intake manifold, and cylinders. The sensors determine engine status signals and include a first manifold pressure (MAP) sensor positioned with respect to the first aftercooler device, a second MAP sensor positioned with respect to the engine intake manifold, a mass airflow (MAF) sensor positioned in the air intake manifold, a first manifold temperature (MAT) sensor positioned in the engine intake manifold, and a second MAT sensor positioned between the first aftercooler device and the throttle. The controller executes a method to calculate a cylinder air charge using an oxygen level of post-combustion gasses and the engine status signals, and controls an operation of the engine using the calculated air charge via engine control signals.

Abstract: A system includes a turbocharged engine, sensors, and a controller. The engine includes an engine intake manifold, air intake manifold, a compressor, a first aftercooler device, a throttle that admits cooled compressed air to the engine intake manifold, and cylinders. The sensors determine engine status signals and include a first manifold pressure (MAP) sensor positioned with respect to the first aftercooler device, a second MAP sensor positioned with respect to the engine intake manifold, a mass airflow (MAF) sensor positioned in the air intake manifold, a first manifold temperature (MAT) sensor positioned in the engine intake manifold, and a second MAT sensor positioned between the first aftercooler device and the throttle. The controller executes a method to calculate a cylinder air charge using an oxygen level of post-combustion gasses and the engine status signals, and controls an operation of the engine using the calculated air charge via engine control signals.

Abstract: Systems and methods for enhancing inspection sensitivity to detect defects in wafers using an inspection tool are disclosed. A plurality of light emitting diodes illuminate at least a portion of a wafer and capture a set of grayscale images. A residual signal is determined in each image of the grayscale image set and the residual signal is subtracted from each image of the grayscale image set. Defects are identified based on the subtracted grayscale image set. Models of the inspection tool and wafer may be built and refined in some embodiments of the disclosed systems and methods.

Abstract: An engine system includes a mass air flow sensor and a manifold absolute pressure sensor configured to provide a real-time MAP signal during an event. The mass air flow sensor is configured to generate a set of mass air flow readings based on an airflow through the mass air flow sensor during the event. The set of mass air flow readings have a maximum value and a minimum value. A controller is configured to execute a method for detecting reversion in the air flow. If the rate of change in the real-time MAP signal is less than the predetermined transient threshold value (T0), the method includes setting a delta factor (D) as the difference between the maximum value and the minimum value. Reversion is detected based at least partially on a magnitude of the delta factor (D).