Patents by Inventor Shigeharu Yamagami
Shigeharu Yamagami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20080023707Abstract: A semiconductor device, includes: 1) an electric field relaxing area, including: i) a hetero junction formed by the followings: a) a first semiconductor material, and b) a second semiconductor material different from the first semiconductor material in band gap, and ii) an impurity introducing area so formed on the first semiconductor material as to contact the hetero junction.Type: ApplicationFiled: July 27, 2006Publication date: January 31, 2008Inventors: Hideaki Tanaka, Masakatsu Hoshi, Yoshio Shimoida, Tetsuya Hayashi, Shigeharu Yamagami
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Publication number: 20080009089Abstract: A semiconductor substrate made of a semiconductor material is prepared, and a hetero semiconductor region is formed on the semiconductor substrate to form a heterojunction in an interface between the hetero semiconductor region and the semiconductor substrate. The hetero semiconductor region is made of a semiconductor material having a bandgap different from that of the semiconductor material, and a part of the hetero semiconductor region includes a film thickness control portion whose film thickness is thinner than that of the other part thereof. By oxidizing the hetero semiconductor region with a thickness equal to the film thickness of the film thickness control portion, a gate insulating film adjacent to the heterojunction is formed. A gate electrode is formed on the gate insulating film. This makes it possible to manufacture a semiconductor device including the gate insulating film with a lower ON resistance, and with a higher insulating characteristic and reliability.Type: ApplicationFiled: July 5, 2007Publication date: January 10, 2008Inventors: Tetsuya HAYASHI, Masakatsu HOSHI, Yoshio SHIMOIDA, Hideaki TANAKA, Shigeharu YAMAGAMI
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Publication number: 20070257277Abstract: A semiconductor device having SRAM cell units each comprising a pair of driving transistors, a pair of load transistors and a pair of access transistors, in which each of the transistors has a semiconductor layer projecting upward from a substrate plane, a gate electrode extending on opposite sides of the semiconductor layer so as to stride over a top of the semiconductor layer, a gate insulting film interposed between the gate electrode and the semiconductor layer, and a pair of source/drain areas formed in the semiconductor layer; a longitudinal direction of each semiconductor layer extends along a first direction; and between the adjacent SRAM cell units in the first direction, the semiconductor layer in one of the corresponding transistors is located on a center line of the semiconductor layer in the other transistor which center line extends along the first direction.Type: ApplicationFiled: May 7, 2005Publication date: November 8, 2007Applicant: NEC CORPORATIONInventors: Koichi Takeda, Hitoshi Wakabayashi, Kiyoshi Takeuchi, Shigeharu Yamagami, Masahiro Nomura, Masayasu Tanaka, Koichi Terashima, Risho Koh, Katsuhiko Tanaka
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Publication number: 20070252173Abstract: A semiconductor device is provided with: a semiconductor substrate of a predetermined electroconduction type; a hetero semiconductor region contacted with a first main surface of the semiconductor substrate and comprising a semiconductor material having a bandgap different from that of the semiconductor substrate; a gate electrode formed through a gate insulator layer at a position adjacent to a junction region between the hetero semiconductor region and the semiconductor substrate; a source electrode connected to the hetero semiconductor region; and a drain electrode connected to the semiconductor substrate; wherein the hetero semiconductor region includes a contact portion contacted with the source electrode, at least a partial region of the contact portion is of the same electroconduction type as the electroconduction type of the semiconductor substrate, and the partial region has an impurity concentration higher than an impurity concentration of at least that partial region of a gate-electrode facing portType: ApplicationFiled: April 27, 2007Publication date: November 1, 2007Inventors: Tetsuya Hayashi, Masakatsu Hoshi, Yoshio Shimoida, Hideaki Tanaka, Shigeharu Yamagami
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Publication number: 20070252168Abstract: An electrostatic discharge protection element and a protection resistor, which are formed on an N-drain region with a field oxide film interposed therebetween for the purpose of preventing electrical breakdown of a field effect transistor, are composed as a stacked bidirectional Zener diode of one or a plurality of N+ polycrystalline silicon regions of a first layer and a P+ polycrystalline silicon region of a second layer, and a stacked resistor of one or a plurality of N+ resistor layers of the first layer and an N+ resistor layer of the second layer, respectively. One end of the plurality of N+ polycrystalline silicon regions of the first layer is connected to an external gate electrode terminal, and the other end is connected to a source electrode. One end of the plurality of N+ resistor layers of the first layer is connected to a gate electrode, and the other end is connected to the external gate electrode terminal.Type: ApplicationFiled: April 27, 2007Publication date: November 1, 2007Inventors: Yoshio Shimoida, Masakatsu Hoshi, Tetsuya Hayashi, Hideaki Tanaka, Shigeharu Yamagami
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Publication number: 20070252172Abstract: A semiconductor device, includes: 1) a semiconductor base having a first face; 2) a hetero semiconductor region configured to contact the first face of the semiconductor base and different from the semiconductor base in band gap, the semiconductor base and the hetero semiconductor region defining therebetween a junction part in the hetero semiconductor region, a concentration of an impurity introduced in at least a first certain region including the junction part being less than or equal to a solid solution limit to a semiconductor material included in the hetero semiconductor region; 3) a gate electrode formed, via a gate insulation film, in a certain position adjacent to the junction part; 4) a source electrode configured to be connected to the hetero semiconductor region; and 5) a drain electrode configured to be connected to the semiconductor base.Type: ApplicationFiled: April 27, 2007Publication date: November 1, 2007Inventors: Tetsuya Hayashi, Masakatsu Hoshi, Yoshio Shimoida, Hideaki Tanaka, Shigeharu Yamagami
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Publication number: 20070252174Abstract: After a polycrystalline silicon as a hetero-semiconductor region forming a heterojunction with a semiconductor base is formed on an epitaxial layer configuring the semiconductor base, the unevenness on the surface of the polycrystalline silicon is planarized before a gate insulating film is formed. Alternatively, as the hetero-semiconductor region, amorphous or microcrystal hetero-semiconductor of which crystal grain diameter is small is used. When an amorphous or microcrystal hetero-semiconductor is deposited as the hetero-semiconductor region, a recrystallization annealing process of transforming into the polycrystalline silicon can be applied after the deposition. As a material of the semiconductor base, silicon carbide, gallium nitride or diamond can be used. As a material of the hetero-semiconductor region, silicon, silicon germanium, germanium, or gallium arsenide can be used.Type: ApplicationFiled: April 25, 2007Publication date: November 1, 2007Inventors: Shigeharu Yamagami, Masakatsu Hoshi, Yoshio Shimoida, Tetsuya Hayashi, Hideaki Tanaka
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Publication number: 20070252171Abstract: As semiconductor regions in contact with a first main surface of a semiconductor base composed by forming an N? silicon carbide epitaxial layer on an N+ silicon carbide substrate connected to a cathode electrode, there are provided both of an N+ polycrystalline silicon layer of a same conduction type as a conduction type of the semiconductor base and a P+ polycrystalline silicon layer of a conduction type different from the conduction type of the semiconductor base. Both of the N+ polycrystalline silicon layer and the P+ polycrystalline silicon layer are hetero-joined to the semiconductor base, and are ohmically connected to the anode electrode.Type: ApplicationFiled: April 26, 2007Publication date: November 1, 2007Inventors: Shigeharu Yamagami, Masakatsu Hoshi, Yoshio Shimoida, Tetsuya Hayashi, Hideaki Tanaka
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Publication number: 20070235745Abstract: Impurity concentration of a second semiconductor region is set such that when a predetermined reverse bias is applied to a heterojunction diode configured by a first semiconductor region and the second semiconductor region, a breakdown voltage at least in a heterojunction region other than outer peripheral ends of the heterojunction diode is a breakdown voltage of a semiconductor device.Type: ApplicationFiled: April 10, 2007Publication date: October 11, 2007Inventors: Tetsuya Hayashi, Masakatsu Hoshi, Yoshio Shimoida, Hideaki Tanaka, Shigeharu Yamagami
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Publication number: 20070221955Abstract: A trench is formed extending from a surface of a hetero semiconductor region of a polycrystal silicon to the drain region. Further, a driving point of the field effect transistor, where a gate insulating film, the hetero semiconductor region and the drain region are adjoined, is formed at a position spaced apart from a side wall of the trench.Type: ApplicationFiled: March 15, 2007Publication date: September 27, 2007Applicant: Nissan Motor Co., Ltd.Inventors: Yoshio Shimoida, Tetsuya Hayashi, Hideaki Tanaka, Shigeharu Yamagami, Masakatsu Hoshi
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Publication number: 20070210330Abstract: A semiconductor device, includes: a first conductivity type semiconductor base having a main face; a hetero semiconductor region contacting the main face of the semiconductor base and forming a hetero junction in combination with the semiconductor base, the semiconductor base and the hetero semiconductor region in combination defining a junction end part; a gate insulating film defining a junction face in contact with the semiconductor base and having a thickness; and a gate electrode disposed adjacent to the junction end part via the gate insulating film and defining a shortest point in a position away from the junction end part by a shortest interval, a line extending from the shortest point to a contact point vertically relative to the junction face, forming such a distance between the contact point and the junction end part as to be smaller than the thickness of the gate insulating film contacting the semiconductor base.Type: ApplicationFiled: March 6, 2007Publication date: September 13, 2007Inventors: Tetsuya Hayashi, Masakatsu Hoshi, Yoshio Shimoida, Hideaki Tanaka, Shigeharu Yamagami
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Publication number: 20070187682Abstract: There is provided a semiconductor device comprising an n-type and a p-type field effect transistors, meeting the conditions that in terms of a crystal orientation of the protruding semiconductor region constituting the n-type field effect transistor, its plane parallel to the substrate is substantially a {100} plane and its side surface is a {100} plane substantially orthogonal to the {100} plane, and that in terms of a crystal orientation of the protruding semiconductor region constituting the p-type field effect transistor, its plane parallel to the substrate is substantially a {100} plane and its side surface is a {110} plane substantially orthogonal to the {100} plane.Type: ApplicationFiled: August 27, 2004Publication date: August 16, 2007Inventors: Kiyoshi Takeuchi, Koji Watanabe, Koichi Terashima, Atsushi Ogura, Toru Tatsumi, Koichi Takeda, Masahiro Nomura, Masayasu Tanaka, Shigeharu Yamagami, Hitoshi Wakabayashi
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Publication number: 20070181886Abstract: A semiconductor device, includes: a first conductivity-semiconductor substrate; a hetero semiconductor region for forming a hetero junction with the first conductivity-semiconductor substrate; a gate electrode adjacent to a part of the hetero junction by way of a gate insulating film; a drain electrode connecting to the first conductivity-semiconductor substrate; a source electrode connecting to the hetero semiconductor region; and a second conductivity-semiconductor region formed on a part of a first face of the first conductivity-semiconductor substrate in such a configuration as to oppose the gate electrode via the gate insulating film, the gate insulating film, the hetero semiconductor region and the first conductivity-semiconductor substrate contacting each other to thereby form a triple contact point.Type: ApplicationFiled: February 2, 2007Publication date: August 9, 2007Inventors: Yoshio Shimoida, Masakatsu Hoshi, Tetsuya Hayashi, Hideaki Tanaka, Shigeharu Yamagami
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Publication number: 20070132009Abstract: A semiconductor device comprising: a MIS type field effect transistor which comprises a semiconductor raised portion protruding from a substrate plane, a gate electrode extending over the semiconductor raised portion from the top onto the opposite side faces of the semiconductor raised portion, a gate insulation film existing between the gate electrode and the semiconductor raised portion, and source and drain regions provided in the semiconductor raised portion; an interlayer insulating film provided on a substrate including the transistor; and a buried conductor interconnect that is formed by filling in a trench formed in the interlayer insulating film with a conductor, wherein the buried conductor interconnect connects one of the source and drain regions of the semiconductor raised portion and another conductive portion below the interlayer insulating film.Type: ApplicationFiled: September 29, 2004Publication date: June 14, 2007Inventors: Kiyoshi Takeuchi, Koichi Terashima, Hitoshi Wakabayashi, Shigeharu Yamagami, Atsushi Ogura, Masayasu Tanaka, Masahiro Nomura, Koichi Takeda, Toru Tatsumi, Koji Watanabe
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Publication number: 20070075372Abstract: There is provided a semiconductor device wherein at least the largest width of a source/drain region is larger than the width of a semiconductor region and the source/drain region has a slope having a width continuously increasing from the uppermost side to the substrate side, and a silicide film is formed in the surface of the slope.Type: ApplicationFiled: October 19, 2004Publication date: April 5, 2007Inventors: Koichi Terashima, Kiyoshi Takeuchi, shigeharu Yamagami, Hitoshi Wakabayashi, Atsushi Ogura, Koji Watanabe, Toru Tatsumi, Koichi Takeda, Masahiro Nomura, Masayasu Tanaka
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Publication number: 20060223274Abstract: In general, this disclosure describes a semiconductor device that exhibits an increased resistance and reduced leakage current in a reverse-biased state, and a method for manufacturing such a semiconductor device. For example, in one embodiment, the increased resistance in the reverse-biased state is obtained by introducing either a P+ or P? type impurity in a polycrystalline silicon layer formed on an N? type epitaxial layer. Additionally, the semiconductor device maintains a low resistance in a forward-biased state. To keep the forward-biased resistance low, the polycrystalline silicon layer in the vicinity of a gate electrode may be of an N+ type. Furthermore, an N+ type source extracting region is formed on the surface of the polycrystalline silicon layer to connect a source electrode to a drain electrode and maintain a low resistance when forward-biased.Type: ApplicationFiled: March 16, 2006Publication date: October 5, 2006Applicant: Nissan Motor Co., Ltd.Inventors: Yoshio Shimoida, Masakatsu Hoshi, Tetsuya Hayashi, Hideaki Tanaka, Shigeharu Yamagami
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Publication number: 20060118818Abstract: An aspect of the present invention provides a semiconductor device that includes, a first semiconductor body of a first conductivity type, a first switching mechanism provided on the first semiconductor body, configured and arranged to switch on/off current flowing through the semiconductor device, and a first reverse-blocking heterojunction diode provided on the semiconductor body, configured and arranged to block current reverse to the current switched on/off by the first switching mechanism.Type: ApplicationFiled: November 30, 2005Publication date: June 8, 2006Inventors: Yoshio Shimoida, Masakatsu Hoshi, Hideaki Tanaka, Tetsuya Hayashi, Toshiro Shinohara, Shigeharu Yamagami
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Patent number: 6933569Abstract: A semiconductor device includes a semiconductor layer formed on an insulator, a gate insulating film formed on the semiconductor layer, a gate electrode formed on the gate insulating film and extending in a first direction, source/drain regions formed in the semiconductor layer on both sides of the gate electrode, a body contact region in the semiconductor layer, a partial isolating region in which a field insulating film thicker than the gate insulating film intervenes between the semiconductor layer and an extending portion of the gate electrode, and a full isolating region in which the semiconductor layer on the insulator is removed. The full isolating region is formed to be in contact with at least a part of a side parallel to the first direction of the source/drain regions.Type: GrantFiled: September 24, 2003Date of Patent: August 23, 2005Assignee: NEC CorporationInventors: Risho Koh, Shigeharu Yamagami, Jong-wook Lee, Hitoshi Wakabayashi, Yukishige Saito, Atsushi Ogura, Mitsuru Narihiro, Kohichi Arai, Hisashi Takemura, Tohru Mogami, Toyoji Yamamoto, Yukinori Ochiai
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Publication number: 20040129975Abstract: A semiconductor device includes a semiconductor layer formed on an insulator, a gate insulating film formed on the semiconductor layer, a gate electrode formed on the gate insulating film and extending in a first direction, source/drain regions formed in the semiconductor layer on both sides of the gate electrode, a body contact region in the semiconductor layer, a partial isolating region in which a field insulating film thicker than the gate insulating film intervenes between the semiconductor layer and an extending portion of the gate electrode, and a full isolating region in which the semiconductor layer on the insulator is removed. The full isolating region is formed to be in contact with at least a part of a side parallel to the first direction of the source/drain regions.Type: ApplicationFiled: September 24, 2003Publication date: July 8, 2004Applicant: NEC CORPORATIONInventors: Risho Koh, Shigeharu Yamagami, Jong-wook Lee, Hitoshi Wakabayashi, Yukishige Saito, Atsushi Ogura, Mitsuru Narihiro, Kohichi Arai, Hisashi Takemura, Tohru Mogami, Toyoji Yamamoto, Yukinori Ochiai