Abstract: A rotary driving mechanism includes a rotary body that is rotated by a motor section, a balancing device including a plurality of balancing members mounted on the rotary body, and a vibration absorber that attenuates vibrations provided on the rotary body. The balancing device adjusts balance of the rotary body by changing positions of the balancing members at a predetermined rotational speed or greater, and the vibration absorber adjusts balance of the rotary body until the rotary body reaches the predetermined rotational speed.

Abstract: There is provided a heat treatment system which is not only capable of appropriately controlling the temperature in a processing vessel, but also capable of reducing space and energy, by combining a resistive heater with a thermoelectric conversion element. The heat treatment system comprises: a cylindrical processing vessel 4; a supporting table 14, raised by a support from the bottom portion of the processing vessel, for mounting thereon an object W to be processed; and a processing object heating part 16, provided in the supporting table, for heating the object to be processed, wherein a thermoelectric conversion element 38 capable of selectively heating or cooling is provided in the bottom portion of the processing vessel, a resistive heater 50 is provided in the side wall of the processing vessel, and a temperature control part 40 for controlling the operations of the thermoelectric conversion element and the resistive heater is provided.

Abstract: The present invention aims to exclude the influence of stray light dye to a heating lamp when measuring the temperature of an object to be treated, such as a wafer, with the use of a radiation thermometer. The present invention utilizes the relationship between a power W supplied from an output control section 28 to lamps 22 and optical energy radiated from the lamps 22. Influence which the light radiated from the lamps 22 exerts on the output voltage of a photodiode 18 is experimentally found beforehand as a function of the power W, and stored in a computing section 26. The computing section 26 subtracts the influence of stray light from the lamps 22, which is included in the output voltage of the photodiode 18, from the output value of the photodiode 18 on the basis of the value of the power W transmitted from the output control section 28, and calculates the temperature of a susceptor 8.

Abstract: A micro-machine switch which causes a contact electrode to make contact with or separate away from a signal line formed on a substrate, to thereby turn on or off the signal line, includes (a) first to N-th lower electrodes formed on the substrate, wherein N is an integer equal to or greater than 2, (b) first to N-th upper electrodes supported facing the first to N-th lower electrodes, respectively, and (c) an electrode supporter for vertically raising and lowering the first to N-th upper electrodes between a first position where the contact electrode makes contact with the signal line when electrostatic force is generated between the first to N-th upper electrodes and the first to N-th lower electrodes, respectively, and a second position where the contact electrode is separated away from the signal line when the electrostatic force is not generated.

Abstract: A gas processing apparatus is disclosed, that comprises a processing chamber that is airtightly structured, a gas delivery pipe connected to the processing chamber, a gas supply source for supplying gas to the processing chamber through the gas delivery pipe, a holding table for holding a workpiece loaded to the processing chamber, a shower member disposed at a gas outlet of the gas delivery pipe connected to the processing chamber, a spray plate structured as a partition wall of the shower member that faces the holding plate, the spray plate having a plurality of spray holes, and a baffle member disposed between the spray plate in the shower member and the gas outlet and having a plurality of through-holes formed perpendicular to the surface of the baffle member, wherein each of the through-holes of the baffle member has a first opening portion and a second opening portion facing the gas outlet, the second opening portion facing the spray plate, the opening area of the second opening portion being larger tha

Abstract: A micro-machine switch which causes a contact electrode to make contact with or separate away from a signal line formed on a substrate, to thereby turn on or off the signal line, includes (a) first to N-th lower electrodes formed on the substrate, wherein N is an integer equal to or greater than 2, (b) first to N-th upper electrodes supported facing the first to N-th lower electrodes, respectively, and (c) an electrode supporter for vertically raising and lowering the first to N-th upper electrodes between a first position where the contact electrode makes contact with the signal line when electrostatic force is generated between the first to N-th upper electrodes and the first to N-th lower electrodes, respectively, and a second position where the contact electrode is separated away from the signal line when the electrostatic force is not generated.

Abstract: A present vacuum treating apparatus comprises a process chamber for subjecting an object to a predetermined process in a predetermined vacuum state, a stage located in the process chamber and on which the object is placed, a lamp unit provided at the lower side of the processing chamber and having a plurality of lamps as a light source and adapted to heat the object on the stage by a heat energy of light directed from these lamps to the stage for illumination, a rotation shaft connected to the lamp unit to rotate the lamp unit, a support body rotatably supporting the rotation shaft, and a thermo-module provided at a contacting area of the support body selective to the rotation shaft and, by absorbing heat on its rotation shaft side and dissipating heat on its support body side, transferring the heat on the lamp unit to the support body through the rotation shaft.

Abstract: An automatic control system controls a controlled variable serving as an object 2 to be controlled so that the object 2 approaches a predetermined target value, by means of an optimum regulator 4. The automatic control system include: a gain setting section 48 for setting a gain; a comparing section 48 for comparing the target value with the controlled variable serving as the object; and a weight control section 50 for weighting the gain set by the gain setting section so as to increase the weight from 0 to 1 within a predetermined period of time and for deriving a corrected manipulated variable in response to the time when a difference between the target value and the controlled variable comes within a range of a predetermined percentage of the target value, so that the corrected manipulated variable is added to the manipulated variable derived by the optimum regulator.

Abstract: A driving motor comprises a rotor having a rotatably supported shaft, a rotor case rotating together with the shaft, a hub seat attached to the rotor case for mounting a disk hub and a chucking magnet for magnetically attracting the disk hub and a thrust ball bearing having a washer, a plurality s of balls and a retainer for holding the balls and supporting the load in the thrust direction of the rotor. The motor also includes a flatness control section which passes through the rotor case to contact the washer of the thrust ball bearing and controls the flatness of the washer and a position control section which passes through the rotor case to contact an inner circle surface of the washer of the thrust ball bearing and controls the washer in the thrust direction. The chucking magnet, flatness control section and position control section are integrally molded of resin.

Abstract: A control system includes a first estimation section for estimating a first state variable of a plant object such as a semiconductor wafer temperature control arrangement on the basis of a control input supplied to the plant object and an output from the plant object, a second estimation section for estimating a second state variable of the plant object on the basis of the control input alone, a switching section for selecting one of the first and second estimation sections, and a servo section for adjusting the control input by feeding back the state variable from the first or second estimation section to an input section of the plant object.

Abstract: A semiconductor processing apparatus comprises a vacuum processing chamber and a lamp house provided thereunder. A susceptor is provided in the processing chamber, and a semiconductor wafer is mounted thereon. The processing chamber and the lamp house are partitioned by a widow plate made of quartz glass in an airtight state. Eight light sources for heating are arranged in a circumferential form on a rotatable table at the portion which is in the lamp house and under the window plate. A sensor comprising a thermocouple for detecting energy of transmitted light is provided between the susceptor and the window plate. The sensor is connected to a measuring section comprising an A/D converter, and thereby detected data is converted from a digital signal to an observed value. The observed value is sent to a comparator to be compared with a predetermined reference model. A comparative result obtained by the comparator is transmitted to a controlling section.

Abstract: A rotary electric machine comprising a stator and a rotor arranged opposedly of the stator. A magnet is provided on the stator or a frame for holding the stator at a position so as to be constantly opposed during rotation to a portion of the magnetic body of the rotor. The magnet is disposed at a position other than at a portion at which the magnetic action for rotation of the rotor occurs. The rotor is therefore constantly biased so that rotor play is minimized and non-repeatable deflections of the spindle are eliminated.