Abstract: An application and development apparatus has a plurality of vertically stacked blocks directed to coating film formation on a substrate. This plurality of blocks includes first processing units, a first substrate transportation region, and a first transportation unit for transporting substrates between the first processing units within the first transportation region. A development process block also is vertically stacked with the blocks directed to coating film formation to constitute a layered block as the process block. The development process block also includes second processing units and a second transportation unit for transporting substrates between the second processing units within the second transportation region. The application and development apparatus further has a shelf-type delivery stage group, a vertical transportation unit and a substrate inspection unit such that a substrate input into the inspection unit passes through the delivery stage group from the vertical transportation unit.

Abstract: A sample observation device includes: an excitation light generation unit; an intermediate image forming unit projecting excitation light to a sample and forming an intermediate image of the sample at an intermediate image position with observing light; a confocal modulation unit modulating spatial intensity distributions of the excitation light and the intermediate image at the position; a modulation drive unit moving a pattern of the modulation unit; an image relay unit relaying on a image forming surface the intermediate image; an image pickup unit converting the distribution of relayed intermediate image into digital image data; and an image processing unit processing on the digital image data. Cutoff frequency of the relay unit and Nyquist frequency of the pickup unit exceed cutoff frequency of the forming unit, and the processing unit performs a high frequency enhancing process for enhancing the high frequency component exceeding the cutoff frequency of the forming unit.

Abstract: Disclosed is a substrate heating apparatus including a hot plate that heats a substrate, and a cooling plate that supports the substrate and moves between a first position (home position) and the second position above the hot plate to transfer wafers between the two positions. A heat-radiating fin structure is connected to the cooling plate to move together with the cooling plate. The fin structure is thermally connected to the cooling plate via heat pipes. A suction port is arranged so as to locate adjacent to the fin structure when the cooling plate is in the home position. The fin structure is cooled by a gas passing therethrough before flown into the suction port, whereby the cooling plate is cooled through heat transfer from the cooling plate to the fin structure through the heat pipes.

Abstract: In one embodiment, a coating and developing apparatus is provided with transfer units, provided between a stack of early-stage processing unit blocks and a stack of later-stage processing unit blocks to transfer a substrate between the transport mechanisms of laterally-adjacent unit blocks, and a vertically-movable auxiliary transfer mechanism for transporting a substrate between the transfer units. A stack of first developing unit blocks is stacked on the stack of early-stage processing unit blocks, and a stack of second developing unit blocks is stacked on the stack of later-stage processing unit blocks.

Abstract: A sample observation device includes: an excitation light generation unit; an intermediate image forming unit projecting excitation light to a sample and forming an intermediate image of the sample at an intermediate image position with observing light; a confocal modulation unit modulating spatial intensity distributions of the excitation light and the intermediate image at the position; a modulation drive unit moving a pattern of the modulation unit; an image relay unit relaying on a image forming surface the intermediate image; an image pickup unit converting the distribution of relayed intermediate image into digital image data; and an image processing unit processing on the digital image data. Cutoff frequency of the relay unit and Nyquist frequency of the pickup unit exceed cutoff frequency of the forming unit, and the processing unit performs a high frequency enhancing process for enhancing the high frequency component exceeding the cutoff frequency of the forming unit.

Abstract: A photographing system includes: a photographing section photographing a subject to acquire a frame image including a subject image; and a matching section repeats image search through pattern matching between a template image and a subject image while sequentially changing a size ratio of the template image to the subject image, and obtains one or more size ratios at which patterns match each other, in a certain order of image search, and holds a size ratio having a largest value among such obtained size ratios as a first size ratio, and thereafter performs image search in a manner that pattern matching is performed at a first frequency in a range of a size ratio equal to or larger than the first size ratio, and is performed at a frequency lower than the first frequency in a range of a size ratio smaller than the first size ratio.

Abstract: A coating and developing apparatus includes a processing block having at least one coating film-forming unit block stack and a vertically stacked developing unit block stack. Each unit block stack includes vertically stacked unit blocks, and each unit block includes processing modules containing liquid processing modules and heating modules. Each unit block includes a transport mechanism moveable along a transport passage from a carrier block side to an interface block side, to transport a substrate between the processing modules belonging to the unit block. Transfer units are provided on the carrier block sides of the coating film-forming unit blocks and the developing unit blocks respectively, for transferring a substrate to and from the transport mechanism of the associated coating film-forming or developing unit blocks. A first transfer mechanism transfers a substrate removed from a carrier to one of the transfer units associated with the coating film-forming unit blocks.

Abstract: A method of tier management of data comprises performing a tier migration log information setup process which includes selecting an area specified by a virtual volume address and a logical volume address; determining a destination tier for the area based on a number of accesses to the area; and updating a tier migration log information by inputting the determined destination tier and a time; and performing a process using the tier migration log information to determine whether to migrate a specific area which includes loading a tier migration log from the tier migration log information by selecting a specific time; checking if a current tier of the specific area equals a destination tier specified by the tier migration log; and if the current tier is not equal to the destination tier, migrating the specific area to the destination tier.

Abstract: A substrate holding device including: a transfer arm body having a suction path; a pad body including a suction part having a suction surface and a suction port for holding the substrate by vacuum suction, and a cylindrical attachment part in which a suction hole communicating with the suction port is formed; a pad holding member provided with an insertion hole into which the attachment part of the pad body is loosely insertable and a communication path communicating with the suction hole and the suction path, and fixed to the transfer arm body; and an elastically deformable annular airtightness maintaining member with a circular cross-section interposed between an outer peripheral groove in an arc shape formed in the attachment part of the pad body and an inner peripheral groove in an arc shape formed at the insertion hole of the pad holding member.

Abstract: In a storage system in which computers are connected via a network, in order to avoid a state where communication quality is degraded due to poor performance of an apparatus constituting the network, for a transfer data amount, an amount of data sent out from a storage apparatus is suppressed. Moreover, the storage apparatus inhibits a read-ahead process, in accordance with the suppression of the sending out of the data. Furthermore, proper load allocation is realized by migrating a logical storage unit provided by the storage, to another network interface or a second storage apparatus, without changing a configuration of the network.

Abstract: A storage system comprises a plurality of hard disk drives and a storage controller providing a plurality of virtual volumes to a server and including a processor and a memory. The storage controller allocates pages of the plurality of virtual volumes to the plurality of hard disk drives in response to write requests. The storage controller controls to allocate outer sections of the plurality of hard disks to first addresses of the virtual volume and allocates inner sections of the plurality of hard disk drives to second addresses of the virtual volume, wherein the first addresses are lower than the second addresses.

Abstract: A method of tier management of data comprises performing a tier migration log information setup process which includes selecting an area specified by a virtual volume address and a logical volume address; determining a destination tier for the area based on a number of accesses to the area; and updating a tier migration log information by inputting the determined destination tier and a time; and performing a process using the tier migration log information to determine whether to migrate a specific area which includes loading a tier migration log from the tier migration log information by selecting a specific time; checking if a current tier of the specific area equals a destination tier specified by the tier migration log; and if the current tier is not equal to the destination tier, migrating the specific area to the destination tier.

Abstract: A sample observation device includes: an excitation light generation unit; an intermediate image forming unit projecting excitation light to a sample and forming an intermediate image of the sample at an intermediate image position with observing light; a confocal modulation unit modulating spatial intensity distributions of the excitation light and the intermediate image at the position; a modulation drive unit moving a pattern of the modulation unit; an image relay unit relaying on a image forming surface the intermediate image; an image pickup unit converting the distribution of relayed intermediate image into digital image data; and an image processing unit processing on the digital image data. Cutoff frequency of the relay unit and Nyquist frequency of the pickup unit exceed cutoff frequency of the forming unit, and the processing unit performs a high frequency enhancing process for enhancing the high frequency component exceeding the cutoff frequency of the forming unit.

Abstract: A coating and developing apparatus includes a processing block having at least one coating film-forming unit block stack and a vertically stacked developing unit block stack. Each unit block stack includes vertically stacked unit blocks, and each unit block includes processing modules containing liquid processing modules and heating modules. Each unit block includes a transport mechanism moveable along a transport passage from a carrier block side to an interface block side, to transport a substrate between the processing modules belonging to the unit block. Transfer units are provided on the carrier block sides of the coating film-forming unit blocks and the developing unit blocks respectively, for transferring a substrate to and from the transport mechanism of the associated coating film-forming or developing unit blocks. A first transfer mechanism transfers a substrate removed from a carrier to one of the transfer units associated with the coating film-forming unit blocks.

Abstract: The present invention provides a computer system comprising a server and a storage system having a compression function, wherein the server includes a control unit and a cache, and the storage system has a storage area provided by a plurality of storage devices. When a designated data of a received read request is stored in the cache, the control unit of the server returns the stored data as a response to the read request, and when the designated data is not stored in the cache, the control unit acquires the designated data compressed via the compression function and stored in the storage area in the compressed state from the storage system, decompresses the acquired compression data, and returns the same as a response to the read request.

Abstract: A storage system includes plural types of storage devices that define a plurality of virtual volumes and a plurality of logical volumes. A storage controller is configured to manage the plurality of virtual volumes and the plurality of logical volumes, the plurality of virtual volumes defining first storage areas and the plurality of logical volumes defining second storage areas. A second storage area of the plurality of logical volumes is allocated to a first storage area of the plurality of virtual volumes. The storage controller is configured to determine whether data of a first storage area of a swap file is to be stored in the first tier storage device or the second tier storage device based on access information from an application server that manages a swap file information of the swap file.

Abstract: Exemplary embodiments provide a management server that controls a storage subsystem based on the cache status on a server. In accordance with one aspect, a system comprises: a storage system operable to couple to a server and to manage a plurality of storage tiers, each of the plurality of storage tiers operable to store data sent from the server; and a management computer operable to manage a storage tier of the plurality of storage tiers for storing data based on whether the data is stored in a cache memory in the server or not.

Abstract: Exemplary embodiments provide a technique to manage object based tier to improve allocation of media to unallocated area. In one embodiment, a method of allocating an area of a logical volume to an unallocated area of a virtual volume for a write command comprises: calculating an object location of an object based on the write command and an object allocation information, the write command containing a virtual volume name and a virtual volume address of a virtual volume; selecting a tier from a plurality of tiers based on the calculated object location and an object and tier definition information; selecting a media type from a plurality of media types based on the selected tier and a tier and media definition information; and selecting a logical volume from a plurality of logical volumes based on the virtual volume specified by the write command, the object allocation information, a pool information, and the selected media type.

Abstract: The disclosed access control apparatus and method controls an I/O device to perform processing of access requests in a predetermined order including inputting access requests from multiple tasks to cause the I/O device to perform file processing, storing and managing information about file priorities, obtaining a file priority corresponding to an access request, managing a queue having multiple queues for which the processing priorities corresponding to the file priorities are set and causing the access request to be stored in any of the queues corresponding to the file priority, and obtaining the access requests stored in the queues in an order based on the processing priorities set for the queues and sends the access requests to the I/O device.