Coating and developing apparatus
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Description
The broken lines illustrate portions of the coating and developing apparatus that form no part of the claimed design.
Claims
The ornamental design for a coating and developing apparatus, as shown and described.
Referenced Cited
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D667031 | September 11, 2012 | Mueller |
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Patent History
Patent number: D690330
Type: Grant
Filed: Aug 24, 2012
Date of Patent: Sep 24, 2013
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Masashi Tsuchiyama (Koshi), Tsunenaga Nakashima (Koshi), Shinichi Hayashi (Koshi)
Primary Examiner: Patricia Palasik
Application Number: 29/430,388
Type: Grant
Filed: Aug 24, 2012
Date of Patent: Sep 24, 2013
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Masashi Tsuchiyama (Koshi), Tsunenaga Nakashima (Koshi), Shinichi Hayashi (Koshi)
Primary Examiner: Patricia Palasik
Application Number: 29/430,388
Classifications
Current U.S. Class:
Material Working, Abrading, Or Founding Machinery (D15/122)