Coating and developing apparatus

- Tokyo Electron Limited
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Description

FIG. 1 is a front, left and top perspective view of the coating and developing apparatus showing the new design;

FIG. 2 is a rear, right and top perspective view thereof;

FIG. 3 is a front elevation view thereof;

FIG. 4 is a rear elevation view thereof;

FIG. 5 is a left side elevation view thereof;

FIG. 6 is a right side elevation view thereof; and,

FIG. 7 is a top plan view thereof.

The broken lines illustrate portions of the coating and developing apparatus that form no part of the claimed design.

Claims

The ornamental design for a coating and developing apparatus, as shown and described.

Referenced Cited
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D667031 September 11, 2012 Mueller
D674420 January 15, 2013 Ueberschlag et al.
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Patent History
Patent number: D690330
Type: Grant
Filed: Aug 24, 2012
Date of Patent: Sep 24, 2013
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Masashi Tsuchiyama (Koshi), Tsunenaga Nakashima (Koshi), Shinichi Hayashi (Koshi)
Primary Examiner: Patricia Palasik
Application Number: 29/430,388